2018 XV International Scientific Conference on Optoelectronic and Electronic Sensors (COE), 2018
For more than a decade we have been observing the significant growth in an electron source develo... more For more than a decade we have been observing the significant growth in an electron source development for the vacuum nanoelectronics. Here, we discuss the progress in the electron source advancement with a simplified technology, performed in our laboratory and dedicated to a miniaturized MEMS-type transmission electron microscope.
2018 31st International Vacuum Nanoelectronics Conference (IVNC), 2018
We present the planar cathode that is dedicated for the miniaturized transmission electron micros... more We present the planar cathode that is dedicated for the miniaturized transmission electron microscope, which all components are fabricated based on MEMS Si-glass technology processes. The cathode is made of a commercial CNT ink without addition of fillers, and results in the stable and long lifetime field emission of electrons.
2018 XV International Scientific Conference on Optoelectronic and Electronic Sensors (COE), 2018
This article describes one of the element of the miniature MEMS transmission electron microscope ... more This article describes one of the element of the miniature MEMS transmission electron microscope fully integrated on one chip, which is being developed at Faculty of Microsystem Electronics and Photonics, Wroclaw University of Science and Technology. This element is electron gun equipped with transparent anode thin silicon nitride membrane. The importance of this electrode is explained and examples of the use of such electrode are presented. The technology and parameters of thin silicon nitride membranes are presented. Finally, we describe future works, concerning the electron transparent anode, which is crucial in fabricating the miniature MEMS TEM.
A supercapacitor (SC) stores the energy basing on physical phenomena resulting in the formation o... more A supercapacitor (SC) stores the energy basing on physical phenomena resulting in the formation of an angstrom-thick electrical double layer between the electrode surface and liquid electrolyte. Thanks to this, the SCs offer a long lifetime (up to about 104 hours)and - regarding such parameters as energy and power densities - they are located between fast electrolytic capacitors and slow batteries [1, 2]. Therefore, the SCs are considered as a power supply for many tiny devices [3]. However, the issue is how to preserve their impressive performance as they are encapsulated. One of the potential solutions is to encapsulate the SC components in silicon-based polymer, polydimethylsiloxane (PDMS), which constitutes the substitute for glass with additional properties – flexibility and easily shaping by so-called mold technique [4–6]. So far in most of the present works gel- or solid-type electrolyte has been used. Because of their higher viscosity - compared to the liquid electrolyte – t...
In the first decade of our century, carbon nanotubes (CNTs) became a wonderful emitting material ... more In the first decade of our century, carbon nanotubes (CNTs) became a wonderful emitting material for field-emission (FE) of electrons. The carbon nanotube field-emission (CNT-FE) cathodes showed the possibility of low threshold voltage, therefore low power operation, together with a long lifetime, high brightness, and coherent beams of electrons. Thanks to this, CNT-FE cathodes have come ahead of increasing demand for novel self-sustaining and miniaturized devices performing as X-ray tubes, X-ray spectrometers, and electron microscopes, which possess low weight and might work without the need of the specialized equipped room, e.g., in a harsh environment and inaccessible-so-far areas. In this review, the author discusses the current state of CNT-FE cathode research using CNT suspensions. Included in this review are the basics of cathode operation, an evaluation, and fabrication techniques. The cathodes are compared based on performance and correlated issues. The author includes the ...
We describe the fabrication process for an anode of a miniaturized transmission electron microsco... more We describe the fabrication process for an anode of a miniaturized transmission electron microscope. The anode consists of a very thin membrane (membrane-anode) that encloses the electron optics microsystem and it is used to separate the high vacuum part from the sample chamber in the microscope. The membrane-anode is made of Si3N4 layer deposited on an oxidized silicon substrate and was fabricated in four steps: photolithography, plasma etching, wet anisotropic etching of Si, and SiO2 stripping. The membranes were characterized and their preliminary performance parameters are presented, i.e. the mechanical strength and electron transmission.
2018 XV International Scientific Conference on Optoelectronic and Electronic Sensors (COE), 2018
For more than a decade we have been observing the significant growth in an electron source develo... more For more than a decade we have been observing the significant growth in an electron source development for the vacuum nanoelectronics. Here, we discuss the progress in the electron source advancement with a simplified technology, performed in our laboratory and dedicated to a miniaturized MEMS-type transmission electron microscope.
2018 31st International Vacuum Nanoelectronics Conference (IVNC), 2018
We present the planar cathode that is dedicated for the miniaturized transmission electron micros... more We present the planar cathode that is dedicated for the miniaturized transmission electron microscope, which all components are fabricated based on MEMS Si-glass technology processes. The cathode is made of a commercial CNT ink without addition of fillers, and results in the stable and long lifetime field emission of electrons.
2018 XV International Scientific Conference on Optoelectronic and Electronic Sensors (COE), 2018
This article describes one of the element of the miniature MEMS transmission electron microscope ... more This article describes one of the element of the miniature MEMS transmission electron microscope fully integrated on one chip, which is being developed at Faculty of Microsystem Electronics and Photonics, Wroclaw University of Science and Technology. This element is electron gun equipped with transparent anode thin silicon nitride membrane. The importance of this electrode is explained and examples of the use of such electrode are presented. The technology and parameters of thin silicon nitride membranes are presented. Finally, we describe future works, concerning the electron transparent anode, which is crucial in fabricating the miniature MEMS TEM.
A supercapacitor (SC) stores the energy basing on physical phenomena resulting in the formation o... more A supercapacitor (SC) stores the energy basing on physical phenomena resulting in the formation of an angstrom-thick electrical double layer between the electrode surface and liquid electrolyte. Thanks to this, the SCs offer a long lifetime (up to about 104 hours)and - regarding such parameters as energy and power densities - they are located between fast electrolytic capacitors and slow batteries [1, 2]. Therefore, the SCs are considered as a power supply for many tiny devices [3]. However, the issue is how to preserve their impressive performance as they are encapsulated. One of the potential solutions is to encapsulate the SC components in silicon-based polymer, polydimethylsiloxane (PDMS), which constitutes the substitute for glass with additional properties – flexibility and easily shaping by so-called mold technique [4–6]. So far in most of the present works gel- or solid-type electrolyte has been used. Because of their higher viscosity - compared to the liquid electrolyte – t...
In the first decade of our century, carbon nanotubes (CNTs) became a wonderful emitting material ... more In the first decade of our century, carbon nanotubes (CNTs) became a wonderful emitting material for field-emission (FE) of electrons. The carbon nanotube field-emission (CNT-FE) cathodes showed the possibility of low threshold voltage, therefore low power operation, together with a long lifetime, high brightness, and coherent beams of electrons. Thanks to this, CNT-FE cathodes have come ahead of increasing demand for novel self-sustaining and miniaturized devices performing as X-ray tubes, X-ray spectrometers, and electron microscopes, which possess low weight and might work without the need of the specialized equipped room, e.g., in a harsh environment and inaccessible-so-far areas. In this review, the author discusses the current state of CNT-FE cathode research using CNT suspensions. Included in this review are the basics of cathode operation, an evaluation, and fabrication techniques. The cathodes are compared based on performance and correlated issues. The author includes the ...
We describe the fabrication process for an anode of a miniaturized transmission electron microsco... more We describe the fabrication process for an anode of a miniaturized transmission electron microscope. The anode consists of a very thin membrane (membrane-anode) that encloses the electron optics microsystem and it is used to separate the high vacuum part from the sample chamber in the microscope. The membrane-anode is made of Si3N4 layer deposited on an oxidized silicon substrate and was fabricated in four steps: photolithography, plasma etching, wet anisotropic etching of Si, and SiO2 stripping. The membranes were characterized and their preliminary performance parameters are presented, i.e. the mechanical strength and electron transmission.
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