ABSTRACT This paper reports a new method of amorphous layer deposition thanks traditional PECVD i... more ABSTRACT This paper reports a new method of amorphous layer deposition thanks traditional PECVD insulators equipments for seed layer performing. The main application of this method is the realisation of seed layer for EPIPOLY process without using LPCVD furnace. Amorphous layers are obtained thanks to traditional PECVD insulators equipment, AMT 5000, which allows to prevent LPCVD furnace from cross contamination. Furthermore AMT 5000 as single wafer equipment fits much better in ato research using. The major interest of the method is its compatibility with traditional microelectronic process and it involves very common PECVD equipment.
HAL (Le Centre pour la Communication Scientifique Directe), 2004
ABSTRACT This paper reports, horizontal buried channels in monocrystalline silicon. Those channel... more ABSTRACT This paper reports, horizontal buried channels in monocrystalline silicon. Those channels are few microns wide and height and several hundred microns long. The main applications for those buried channels are micro-fluidic networks for MEMS devices and cooling systems for integrated circuits. Their fabrication is based on integrated circuit standard processes such as selective monocrystalline epitaxial growth and high temperature annealing. The major interest of the method is its compatibility with integrated circuit manufacturing technology.
A fabrication method for making accurate double-height micromolds is presented. Fine features of ... more A fabrication method for making accurate double-height micromolds is presented. Fine features of the micromold are transferred to a three-dimensional poly-dimethylsiloxane (PDMS) microfluidic membrane. The accuracy of features is within 1.55% and the maximum aspect ratio is 7. In this work, the first layer of the micromolds is made directly on silicon wafers by inductively coupled plasma reactive ion etching (ICP-RIE). The second layer is added by photolithography of SU-8 negative photoresist on top of the first layer. This method allows the fabrication of micromolds having wall dimensions as small as 3 mm that was not previously achievable. Such dimensions are required in biological microfluidic systems to reduce the amount of chemicals or to confine cells to a desired position.
Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems, May 19, 2006
ABSTRACT A thick layer selective polysilicon growth technique has been developed for micro-electr... more ABSTRACT A thick layer selective polysilicon growth technique has been developed for micro-electro-mechanical systems (MEMS) fabrication. It allows fast MEMS fabrication without using silicon on insulator wafers or deep ICPRIE etching. The fabrication technique is based on two main steps: a first seed layer of polysilicon is deposited and patterned; the second step consists in the selective growth of this layer in an epitaxial reactor. The first part of this work is devoted to the optimisation of growth parameters. Afterwards, this technique is applied for fabrication of different kinds of actuators, involving films several microns thick with good mechanical properties such as a low mechanical stress and a low roughness of the polysilicon film surface. Furthermore, thermal actuator prototypes were fabricated by using this technique;showing good mechanical properties and high reliability.
HAL (Le Centre pour la Communication Scientifique Directe), 2005
ABSTRACT Times Cited: 0 Denoual, M Prioux, S Mace, Y Mognol, P LePioufle, B 8th International Con... more ABSTRACT Times Cited: 0 Denoual, M Prioux, S Mace, Y Mognol, P LePioufle, B 8th International Conference on Miniaturized Systems for Chemistry and Life Sciences Sep 26-30, 2004 Malmo, SWEDEN VINNIVA, Crafoord Fdn, Swedish Fdn Strateg Res, MCPT, Micralyne, SAMSUNG, Micro Plastab, GYROS, Lung Univ, Erysave AB, ATS Med, Silex Microsyst, Johnson &Johnson, Caliper Life Sci, MicroFluid Syst Inc, Analyt Chem, Sci AAAS, Lab Chip, Journal Separat Sci
HAL (Le Centre pour la Communication Scientifique Directe), May 1, 2006
ABSTRACT A thick layer selective polysilicon growth technique has been developed for micro-electr... more ABSTRACT A thick layer selective polysilicon growth technique has been developed for micro-electro-mechanical systems (MEMS) fabrication. It allows fast MEMS fabrication without using silicon on insulator wafers or deep ICPRIE etching. The fabrication technique is based on two main steps: a first seed layer of polysilicon is deposited and patterned; the second step consists in the selective growth of this layer in an epitaxial reactor. The first part of this work is devoted to the optimisation of growth parameters. Afterwards, this technique is applied for fabrication of different kinds of actuators, involving films several microns thick with good mechanical properties such as a low mechanical stress and a low roughness of the polysilicon film surface. Furthermore, thermal actuator prototypes were fabricated by using this technique;showing good mechanical properties and high reliability.
We introduce Si chambers that pack microfluidic droplets in a crystalline and immobile monolayer,... more We introduce Si chambers that pack microfluidic droplets in a crystalline and immobile monolayer, are immune to evaporation or sagging, boost the number of collected photons, and tightly control the temperature field sensed by droplets.
HAL (Le Centre pour la Communication Scientifique Directe), 2015
In this paper a new analog behavioral model of a negative temperature coefficient thermoresistive... more In this paper a new analog behavioral model of a negative temperature coefficient thermoresistive sensor developed using SPICE for a hot-wire Wheatstone-Bridge Constant Temperature Anemometer is proposed. The analog model was developed using a capacitor and voltage and current dependent sources. This model is suitable for transient and steady-state time domain analysis. Sensor's behavior is detailed and an example of employment in a Wheatstone-Bridge Constant Temperature Anemometer architecture is presented. The validation is made through simulation, results of which are presented and discussed.
Liquid cells for transmission electron microscopy enable the observation of liquid samples with n... more Liquid cells for transmission electron microscopy enable the observation of liquid samples with nanometer resolution, but sample activity must often be triggered via external stimuli including liquid flow and mixing. Existing devices enable flow using specialized TEM holders and external pumping setups which limits technique accessibility. Here, a liquid cell with integrated MEMS valves and pumps is demonstrated with flow capabilities using an electrical-contact holder. On-chip electrochemical pumps and capillary burst valves allow for the injection of fluid from an integrated reservoir into an observation chamber using only electrical signals from a general microchip-sized TEM holder.
HAL (Le Centre pour la Communication Scientifique Directe), 2012
ABSTRACT The method involves measuring a vacuum magnetic field in the absence of nanoparticles in... more ABSTRACT The method involves measuring a vacuum magnetic field in the absence of nanoparticles in a test space (3) and the magnetic field in the presence of the nanoparticles using a magnetic sensor (4). Measured magnetism of the nanoparticles is deducted. Optimum physical characteristics of the nanoparticles are determined to minimize discrepancies between a Fourier transform of the measured magnetism and a Fourier transform of a predetermined magnetism, where the predetermined magnetism is obtained for the nanoparticles subjected to same magnetic excitation.
We report our attempts of agile-style development of CMOS-Integrated Micro Electro Chemical Mecha... more We report our attempts of agile-style development of CMOS-Integrated Micro Electro Chemical Mechanical Systems, also known as μ-TAS. Agile development is a well known alternative concept of software development. In contrast to classical development (often referred to waterfall model), both users and developers form a team and closely collaborate, and produce many “ready-to-use (but not necessarily be perfect)” versions of “release package”s. Powered by LSI foundry and open facility are enabling factor, we are trying to apply this concept to MEMS devices research and development. Such a quick and efficient development may provide us with future applications of lab-on-chips, which is the theme of the ISESD 2018 conference. The concept and some outcomes are presented in this invited talk.
ABSTRACT This paper reports a new method of amorphous layer deposition thanks traditional PECVD i... more ABSTRACT This paper reports a new method of amorphous layer deposition thanks traditional PECVD insulators equipments for seed layer performing. The main application of this method is the realisation of seed layer for EPIPOLY process without using LPCVD furnace. Amorphous layers are obtained thanks to traditional PECVD insulators equipment, AMT 5000, which allows to prevent LPCVD furnace from cross contamination. Furthermore AMT 5000 as single wafer equipment fits much better in ato research using. The major interest of the method is its compatibility with traditional microelectronic process and it involves very common PECVD equipment.
HAL (Le Centre pour la Communication Scientifique Directe), 2004
ABSTRACT This paper reports, horizontal buried channels in monocrystalline silicon. Those channel... more ABSTRACT This paper reports, horizontal buried channels in monocrystalline silicon. Those channels are few microns wide and height and several hundred microns long. The main applications for those buried channels are micro-fluidic networks for MEMS devices and cooling systems for integrated circuits. Their fabrication is based on integrated circuit standard processes such as selective monocrystalline epitaxial growth and high temperature annealing. The major interest of the method is its compatibility with integrated circuit manufacturing technology.
A fabrication method for making accurate double-height micromolds is presented. Fine features of ... more A fabrication method for making accurate double-height micromolds is presented. Fine features of the micromold are transferred to a three-dimensional poly-dimethylsiloxane (PDMS) microfluidic membrane. The accuracy of features is within 1.55% and the maximum aspect ratio is 7. In this work, the first layer of the micromolds is made directly on silicon wafers by inductively coupled plasma reactive ion etching (ICP-RIE). The second layer is added by photolithography of SU-8 negative photoresist on top of the first layer. This method allows the fabrication of micromolds having wall dimensions as small as 3 mm that was not previously achievable. Such dimensions are required in biological microfluidic systems to reduce the amount of chemicals or to confine cells to a desired position.
Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems, May 19, 2006
ABSTRACT A thick layer selective polysilicon growth technique has been developed for micro-electr... more ABSTRACT A thick layer selective polysilicon growth technique has been developed for micro-electro-mechanical systems (MEMS) fabrication. It allows fast MEMS fabrication without using silicon on insulator wafers or deep ICPRIE etching. The fabrication technique is based on two main steps: a first seed layer of polysilicon is deposited and patterned; the second step consists in the selective growth of this layer in an epitaxial reactor. The first part of this work is devoted to the optimisation of growth parameters. Afterwards, this technique is applied for fabrication of different kinds of actuators, involving films several microns thick with good mechanical properties such as a low mechanical stress and a low roughness of the polysilicon film surface. Furthermore, thermal actuator prototypes were fabricated by using this technique;showing good mechanical properties and high reliability.
HAL (Le Centre pour la Communication Scientifique Directe), 2005
ABSTRACT Times Cited: 0 Denoual, M Prioux, S Mace, Y Mognol, P LePioufle, B 8th International Con... more ABSTRACT Times Cited: 0 Denoual, M Prioux, S Mace, Y Mognol, P LePioufle, B 8th International Conference on Miniaturized Systems for Chemistry and Life Sciences Sep 26-30, 2004 Malmo, SWEDEN VINNIVA, Crafoord Fdn, Swedish Fdn Strateg Res, MCPT, Micralyne, SAMSUNG, Micro Plastab, GYROS, Lung Univ, Erysave AB, ATS Med, Silex Microsyst, Johnson &Johnson, Caliper Life Sci, MicroFluid Syst Inc, Analyt Chem, Sci AAAS, Lab Chip, Journal Separat Sci
HAL (Le Centre pour la Communication Scientifique Directe), May 1, 2006
ABSTRACT A thick layer selective polysilicon growth technique has been developed for micro-electr... more ABSTRACT A thick layer selective polysilicon growth technique has been developed for micro-electro-mechanical systems (MEMS) fabrication. It allows fast MEMS fabrication without using silicon on insulator wafers or deep ICPRIE etching. The fabrication technique is based on two main steps: a first seed layer of polysilicon is deposited and patterned; the second step consists in the selective growth of this layer in an epitaxial reactor. The first part of this work is devoted to the optimisation of growth parameters. Afterwards, this technique is applied for fabrication of different kinds of actuators, involving films several microns thick with good mechanical properties such as a low mechanical stress and a low roughness of the polysilicon film surface. Furthermore, thermal actuator prototypes were fabricated by using this technique;showing good mechanical properties and high reliability.
We introduce Si chambers that pack microfluidic droplets in a crystalline and immobile monolayer,... more We introduce Si chambers that pack microfluidic droplets in a crystalline and immobile monolayer, are immune to evaporation or sagging, boost the number of collected photons, and tightly control the temperature field sensed by droplets.
HAL (Le Centre pour la Communication Scientifique Directe), 2015
In this paper a new analog behavioral model of a negative temperature coefficient thermoresistive... more In this paper a new analog behavioral model of a negative temperature coefficient thermoresistive sensor developed using SPICE for a hot-wire Wheatstone-Bridge Constant Temperature Anemometer is proposed. The analog model was developed using a capacitor and voltage and current dependent sources. This model is suitable for transient and steady-state time domain analysis. Sensor's behavior is detailed and an example of employment in a Wheatstone-Bridge Constant Temperature Anemometer architecture is presented. The validation is made through simulation, results of which are presented and discussed.
Liquid cells for transmission electron microscopy enable the observation of liquid samples with n... more Liquid cells for transmission electron microscopy enable the observation of liquid samples with nanometer resolution, but sample activity must often be triggered via external stimuli including liquid flow and mixing. Existing devices enable flow using specialized TEM holders and external pumping setups which limits technique accessibility. Here, a liquid cell with integrated MEMS valves and pumps is demonstrated with flow capabilities using an electrical-contact holder. On-chip electrochemical pumps and capillary burst valves allow for the injection of fluid from an integrated reservoir into an observation chamber using only electrical signals from a general microchip-sized TEM holder.
HAL (Le Centre pour la Communication Scientifique Directe), 2012
ABSTRACT The method involves measuring a vacuum magnetic field in the absence of nanoparticles in... more ABSTRACT The method involves measuring a vacuum magnetic field in the absence of nanoparticles in a test space (3) and the magnetic field in the presence of the nanoparticles using a magnetic sensor (4). Measured magnetism of the nanoparticles is deducted. Optimum physical characteristics of the nanoparticles are determined to minimize discrepancies between a Fourier transform of the measured magnetism and a Fourier transform of a predetermined magnetism, where the predetermined magnetism is obtained for the nanoparticles subjected to same magnetic excitation.
We report our attempts of agile-style development of CMOS-Integrated Micro Electro Chemical Mecha... more We report our attempts of agile-style development of CMOS-Integrated Micro Electro Chemical Mechanical Systems, also known as μ-TAS. Agile development is a well known alternative concept of software development. In contrast to classical development (often referred to waterfall model), both users and developers form a team and closely collaborate, and produce many “ready-to-use (but not necessarily be perfect)” versions of “release package”s. Powered by LSI foundry and open facility are enabling factor, we are trying to apply this concept to MEMS devices research and development. Such a quick and efficient development may provide us with future applications of lab-on-chips, which is the theme of the ISESD 2018 conference. The concept and some outcomes are presented in this invited talk.
Uploads
Papers by Matthieu Denoual