Proceedings of the 2001 American Control Conference. (Cat. No.01CH37148)
This paper discusses the modeling and analysis of Net-worked Control Systems (NCSs) where sensors... more This paper discusses the modeling and analysis of Net-worked Control Systems (NCSs) where sensors, actua-tors, and controllers are distributed and interconnected by a common communication medium. Therefore, a-tiple distributed communication delays as well as mul-tiple inputs ...
Proceedings of SEMI Advanced Semiconductor Manufacturing Conference and Workshop, 1995
Several works have described the implementation of systems for the run by run (RbR) control of se... more Several works have described the implementation of systems for the run by run (RbR) control of semiconductor fabrication processes. In this paper, we consider algorithmic issues not often discussed arising out of our experience in the RbR control of chemical mechanical polishing (CMP). These issues include, first, limits on multiple input variables (machine settings). Such constraints must be implemented efficiently,
Predictive Maintenance (PdM) systems use process and equipment state information to predict when ... more Predictive Maintenance (PdM) systems use process and equipment state information to predict when a tool or a particular component in a tool might need maintenance. PdM systems can be realized cost-effectively by leveraging Advanced Process Control (APC) technologies and infrastructure. APC data collection infrastructure can provide the state information necessary for prediction. APC fault detection systems contain necessary algorithms to
Manufacturing Science and Engineering, Parts A and B, 2006
Maintenance activities on a plant floor result in lost production and capacity, and consequently ... more Maintenance activities on a plant floor result in lost production and capacity, and consequently lost money. Unscheduled maintenance events are especially costly and can generate costly ripple effects in other parts of the factory up and down the supply chain. The University of ...
Proceedings of the 2001 American Control Conference. (Cat. No.01CH37148)
This paper discusses the modeling and analysis of Net-worked Control Systems (NCSs) where sensors... more This paper discusses the modeling and analysis of Net-worked Control Systems (NCSs) where sensors, actua-tors, and controllers are distributed and interconnected by a common communication medium. Therefore, a-tiple distributed communication delays as well as mul-tiple inputs ...
Proceedings of SEMI Advanced Semiconductor Manufacturing Conference and Workshop, 1995
Several works have described the implementation of systems for the run by run (RbR) control of se... more Several works have described the implementation of systems for the run by run (RbR) control of semiconductor fabrication processes. In this paper, we consider algorithmic issues not often discussed arising out of our experience in the RbR control of chemical mechanical polishing (CMP). These issues include, first, limits on multiple input variables (machine settings). Such constraints must be implemented efficiently,
Predictive Maintenance (PdM) systems use process and equipment state information to predict when ... more Predictive Maintenance (PdM) systems use process and equipment state information to predict when a tool or a particular component in a tool might need maintenance. PdM systems can be realized cost-effectively by leveraging Advanced Process Control (APC) technologies and infrastructure. APC data collection infrastructure can provide the state information necessary for prediction. APC fault detection systems contain necessary algorithms to
Manufacturing Science and Engineering, Parts A and B, 2006
Maintenance activities on a plant floor result in lost production and capacity, and consequently ... more Maintenance activities on a plant floor result in lost production and capacity, and consequently lost money. Unscheduled maintenance events are especially costly and can generate costly ripple effects in other parts of the factory up and down the supply chain. The University of ...
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Papers by J. Moyne