Authors
SS Teja Nibhanupudi, Anupam Roy, Sayema Chowdhury, Ryan Schalip, Matthew J Coupin, Kevin C Matthews, Md Hasibul Alam, Biswarup Satpati, Hema CP Movva, Christopher J Luth, Siyu Wu, Jamie H Warner, Sanjay K Banerjee
Publication date
2024/4/18
Journal
ACS Applied Materials & Interfaces
Volume
16
Issue
17
Pages
22326-22333
Publisher
American Chemical Society
Description
Low-temperature large-area growth of two-dimensional (2D) transition-metal dichalcogenides (TMDs) is critical for their integration with silicon chips. Especially, if the growth temperatures can be lowered below the back-end-of-line (BEOL) processing temperatures, the Si transistors can interface with 2D devices (in the back end) to enable high-density heterogeneous circuits. Such configurations are particularly useful for neuromorphic computing applications where a dense network of neurons interacts to compute the output. In this work, we present low-temperature synthesis (400 °C) of 2D tungsten diselenide (WSe2) via the selenization of the W film under ultrahigh vacuum (UHV) conditions. This simple yet effective process yields large-area, homogeneous films of 2D TMDs, as confirmed by several characterization techniques, including reflection high-energy electron diffraction, atomic force microscopy …
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