Growth of carbon nanotubes on cobalt disilicide precipitates by chemical vapor deposition
JM Mao, LF Sun, LX Qian, ZW Pan, BH Chang… - Applied physics …, 1998 - pubs.aip.org
We have successfully grown carbon nanotubes on cobalt-implanted silicon with various
doses. The morphology of such tubes has been examined by scanning electron microscopy,
transmission electron microscopy, and Raman scattering. On contrary to the commonly used
transition-metal nanoparticle catalysts, nanometer-sized CoSi2 precipitates produced in the
as-implanted substrates are believed to act as nucleation centers for the formation of carbon
nanotubes.© 1998 American Institute of Physics. S0003-6951 (98) 03625-0 Since its …
doses. The morphology of such tubes has been examined by scanning electron microscopy,
transmission electron microscopy, and Raman scattering. On contrary to the commonly used
transition-metal nanoparticle catalysts, nanometer-sized CoSi2 precipitates produced in the
as-implanted substrates are believed to act as nucleation centers for the formation of carbon
nanotubes.© 1998 American Institute of Physics. S0003-6951 (98) 03625-0 Since its …
