An analysis on voltage transfer characteristic of magnetically coupled sandwich inductor is prese... more An analysis on voltage transfer characteristic of magnetically coupled sandwich inductor is presented. The aim of the study is to determine the effects of induced voltage characteristics on the gain of the transferred magnetic energy at various coil thicknesses. The induced voltage characteristics play an important factor in determining the efficiency of the magnetic field coupling between two separated coils of MEMS planar magnetic sensors. The output voltage response of the fabricated coupled coil was measured in the frequency range from 10 kHz up to 10 MHz using LeCroy oscilloscope at four-terminal probe station, while the resistance characteristics of the coil were measured using Agilent LCR meter for a various thicknesses of the coil structure. The measured device was fabricated using an optimized surface micromachining process. A maximum voltage gain of −0.72 dB was obtained for coil with 1.4 µm thick metal operating at 3 MHz. The results showed that there is significant dependency of coil structure, operating frequency and material parameter on the gain of the energy transferred from the excitation coil to the sensing coil which affects the sensitivity of the sensor.
This paper presents a comparison of thin film materials used as movable membrane for thermal actu... more This paper presents a comparison of thin film materials used as movable membrane for thermal actuated micropump. The materials discussed are PMMA, polyimide, silicon nitride (Si3N4) and single crystal silicon. The properties of membrane material are characterized using Finite Element Analysis (FEA) to study its mechanical and physical behavior that are suitable to be used as an actuator for thermal
A single layer micro-transformer with square interwinding coil geometry has been developed. The t... more A single layer micro-transformer with square interwinding coil geometry has been developed. The transformers were fabricated on a high resistive glass substrate using MEMS surface micromachining. The fabricated micro-transformer was measured and compared with the simulation. Its characteristics are studied in wide range of operating frequency. As the results, Q-factor as high as 1.95, minimum insertion loss of -4.1 dB at 720 MHz and resonance frequency of 580 MHz were achieved which show a good prospect in various RF-ICpsilas applications.
International Conference on Enabling Science and Nanotechnology, 2010
Many biological fluids require filtration during its processing, either to separate the various c... more Many biological fluids require filtration during its processing, either to separate the various components in the fluid or to remove unwanted or harmful contaminants from the medium. Challenges arise in the filtration process as the masses to be filtered appear in various sizes. Conventional filtration method requires lengthy and timely repeated processes. A simple solution to this problem is the
2012 10th IEEE International Conference on Semiconductor Electronics (ICSE), 2012
ABSTRACT This paper reports the design study of optical transducer for bioparticles detector inte... more ABSTRACT This paper reports the design study of optical transducer for bioparticles detector integrated in Lab-on-Chip (LoC) system. Optical detector has been identified as potential device for real time detection of bioparticles because of its simple and compact structure, high sensitivity and easy of integration with microfluidic system. In this study, the absorbance detection using optical transducer is selected due to its label free nature and relatively simple implementation. The analysis work is focused on the characteristics of PIN photodetector simulated using Atlas and Athena software. It is observed that the lateral SOI based PIN photodiode exhibits the behavior of silicon PIN photodiode characteristics. The result also shows that Peak intensity at wavelength of 400nm was achieved and therefore, it is suitable to be used as bioparticles detector in UV/Vis spectrum.
IEEE International Conference on Semiconductor Electronics, 2010
... Hybrid Microgenerator Cell Azrul Azlan Hamzah, Khairul Nisha Mohd. ... REFERENCES [1] B. Tian... more ... Hybrid Microgenerator Cell Azrul Azlan Hamzah, Khairul Nisha Mohd. ... REFERENCES [1] B. Tian, X. Zheng, TJ Kempa, Y. Fang, N. Yu, G. Yu, J. Huang, and CM Lieber, "Coaxial silicon nanowires as solar cells and nanoelectronic power sources," Nature, vol. 449, pp. ...
On-chip micro-transformer with square interwinding coil has been developed. The transformer consi... more On-chip micro-transformer with square interwinding coil has been developed. The transformer consists of stacked spiral coil which is fabricated on high resistive glass substrate using MEMS technology. The device is fabricated using simple surface micromachining process including an additional bonding process for integration purpose. The performance of the micro-transformer is illustrated through low and high frequency measurements and compared with conventional Si-based micro-transformer. The results show that the RF performance of the glass-based transformer is improved compared to that of silicon-based transformer highlighting a good prospect for the future 3-dimensional RF–MEMS device application.
Interwinding planar micro-transformers are developed using micro-machining technique. The transfo... more Interwinding planar micro-transformers are developed using micro-machining technique. The transformers with a vertically stack coil structure on silicon monolithic substrate are designed to achieve high coupling and high inductance value in a relatively small coil area. In this work, various types of stack interwinding transformer are fabricated, measured and compared. The results show that the metal-to-metal effect of a multi-layer structure contributes to the significant increase of parasitic capacitances and hence limits the operating frequency. Moreover, the lumped element parameters are analyzed by extracting the measured S-parameter. This investigation can give important information for the future development of three-dimensional RF devices.
2012 10th IEEE International Conference on Semiconductor Electronics (ICSE), 2012
Abstract In bulk micromachining technology, anisotropic etching process has been one of the most ... more Abstract In bulk micromachining technology, anisotropic etching process has been one of the most popular processes in creating 3-dimensional MEMS structure, due to its simple and low cost process techniques. This paper presents the investigation of isopropyl alcohol (IPA) effect on anisotropic etched silicon surface of microheater chamber. The aim of the study is to find the optimal etch solution composition which will produce a smooth etched surface, low lateral etch (undercutting) effect and controllable etching rate. The etching process ...
An analysis on voltage transfer characteristic of magnetically coupled sandwich inductor is prese... more An analysis on voltage transfer characteristic of magnetically coupled sandwich inductor is presented. The aim of the study is to determine the effects of induced voltage characteristics on the gain of the transferred magnetic energy at various coil thicknesses. The induced voltage characteristics play an important factor in determining the efficiency of the magnetic field coupling between two separated coils of MEMS planar magnetic sensors. The output voltage response of the fabricated coupled coil was measured in the frequency range from 10 kHz up to 10 MHz using LeCroy oscilloscope at four-terminal probe station, while the resistance characteristics of the coil were measured using Agilent LCR meter for a various thicknesses of the coil structure. The measured device was fabricated using an optimized surface micromachining process. A maximum voltage gain of −0.72 dB was obtained for coil with 1.4 µm thick metal operating at 3 MHz. The results showed that there is significant dependency of coil structure, operating frequency and material parameter on the gain of the energy transferred from the excitation coil to the sensing coil which affects the sensitivity of the sensor.
This paper presents a comparison of thin film materials used as movable membrane for thermal actu... more This paper presents a comparison of thin film materials used as movable membrane for thermal actuated micropump. The materials discussed are PMMA, polyimide, silicon nitride (Si3N4) and single crystal silicon. The properties of membrane material are characterized using Finite Element Analysis (FEA) to study its mechanical and physical behavior that are suitable to be used as an actuator for thermal
A single layer micro-transformer with square interwinding coil geometry has been developed. The t... more A single layer micro-transformer with square interwinding coil geometry has been developed. The transformers were fabricated on a high resistive glass substrate using MEMS surface micromachining. The fabricated micro-transformer was measured and compared with the simulation. Its characteristics are studied in wide range of operating frequency. As the results, Q-factor as high as 1.95, minimum insertion loss of -4.1 dB at 720 MHz and resonance frequency of 580 MHz were achieved which show a good prospect in various RF-ICpsilas applications.
International Conference on Enabling Science and Nanotechnology, 2010
Many biological fluids require filtration during its processing, either to separate the various c... more Many biological fluids require filtration during its processing, either to separate the various components in the fluid or to remove unwanted or harmful contaminants from the medium. Challenges arise in the filtration process as the masses to be filtered appear in various sizes. Conventional filtration method requires lengthy and timely repeated processes. A simple solution to this problem is the
2012 10th IEEE International Conference on Semiconductor Electronics (ICSE), 2012
ABSTRACT This paper reports the design study of optical transducer for bioparticles detector inte... more ABSTRACT This paper reports the design study of optical transducer for bioparticles detector integrated in Lab-on-Chip (LoC) system. Optical detector has been identified as potential device for real time detection of bioparticles because of its simple and compact structure, high sensitivity and easy of integration with microfluidic system. In this study, the absorbance detection using optical transducer is selected due to its label free nature and relatively simple implementation. The analysis work is focused on the characteristics of PIN photodetector simulated using Atlas and Athena software. It is observed that the lateral SOI based PIN photodiode exhibits the behavior of silicon PIN photodiode characteristics. The result also shows that Peak intensity at wavelength of 400nm was achieved and therefore, it is suitable to be used as bioparticles detector in UV/Vis spectrum.
IEEE International Conference on Semiconductor Electronics, 2010
... Hybrid Microgenerator Cell Azrul Azlan Hamzah, Khairul Nisha Mohd. ... REFERENCES [1] B. Tian... more ... Hybrid Microgenerator Cell Azrul Azlan Hamzah, Khairul Nisha Mohd. ... REFERENCES [1] B. Tian, X. Zheng, TJ Kempa, Y. Fang, N. Yu, G. Yu, J. Huang, and CM Lieber, "Coaxial silicon nanowires as solar cells and nanoelectronic power sources," Nature, vol. 449, pp. ...
On-chip micro-transformer with square interwinding coil has been developed. The transformer consi... more On-chip micro-transformer with square interwinding coil has been developed. The transformer consists of stacked spiral coil which is fabricated on high resistive glass substrate using MEMS technology. The device is fabricated using simple surface micromachining process including an additional bonding process for integration purpose. The performance of the micro-transformer is illustrated through low and high frequency measurements and compared with conventional Si-based micro-transformer. The results show that the RF performance of the glass-based transformer is improved compared to that of silicon-based transformer highlighting a good prospect for the future 3-dimensional RF–MEMS device application.
Interwinding planar micro-transformers are developed using micro-machining technique. The transfo... more Interwinding planar micro-transformers are developed using micro-machining technique. The transformers with a vertically stack coil structure on silicon monolithic substrate are designed to achieve high coupling and high inductance value in a relatively small coil area. In this work, various types of stack interwinding transformer are fabricated, measured and compared. The results show that the metal-to-metal effect of a multi-layer structure contributes to the significant increase of parasitic capacitances and hence limits the operating frequency. Moreover, the lumped element parameters are analyzed by extracting the measured S-parameter. This investigation can give important information for the future development of three-dimensional RF devices.
2012 10th IEEE International Conference on Semiconductor Electronics (ICSE), 2012
Abstract In bulk micromachining technology, anisotropic etching process has been one of the most ... more Abstract In bulk micromachining technology, anisotropic etching process has been one of the most popular processes in creating 3-dimensional MEMS structure, due to its simple and low cost process techniques. This paper presents the investigation of isopropyl alcohol (IPA) effect on anisotropic etched silicon surface of microheater chamber. The aim of the study is to find the optimal etch solution composition which will produce a smooth etched surface, low lateral etch (undercutting) effect and controllable etching rate. The etching process ...
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