Ceramics International xxx (xxxx) xxx–xxx
Contents lists available at ScienceDirect
Ceramics International
journal homepage: www.elsevier.com/locate/ceramint
Laser initiated Ti3SiC2 powder and coating synthesis
Paweł Rutkowski , Jan Huebner, Dariusz Kata, Jerzy Lis, Adrian Graboś, Leszek Chlubny
⁎
AGH University of Science and Technology, Faculty of Materials Science and Ceramics, Department of Ceramics and Refractories, al. A. Mickiewicza 30, 30-059 Krakow,
Poland
A R T I C LE I N FO
A B S T R A C T
Keywords:
A. SHS
B. MAX phase
C. Titanium silicon carbide
D. Laser processing
E. Coating
In the work the SHS synthesis of MAX phases from Ti-Si-C system were carried and initiated with use of 30 W
laser beam with 40 µm spot. That kind of initiation allows locally and rapidly start the SHS synthesis and avoid
the contamination coming from heating wire present during conventional method. The reaction was monitored
by high-accuracy radiation pyrometer and high quality optical camera. The recorded data, together with reaction bed thermal conductivity measurements allowed to correlate to obtained powders composition and reaction speed. The reaction bed morphology was investigated by scanning electron microscopy with element
distribution (EDS). The second part of the paper concerns laser reactive deposition of SHS in-situ synthetized
MAX phases layer on silicon carbide substrate. The paths of deposited layer were formed under argon overpressure of 2 bar using 120 W of laser power.
1. Introduction
MAX Phases are new family of ceramic materials that recently attracted many scientists to study their unique properties. Due to properties combination of metals and ceramics, due to their specific, layered
structure and strict chemistry, MAX phases became widely examined
and large amount of new compounds were discovered [1]. Their high
usefulness derives from high electrical [2] and thermal [3] conductivity
in addition to good mechanical strength [4], corrosion resistance [5]
and machinability [6].
Stoichiometry of such materials is stated as follows: M(n+1)AX. “M”
is early transition metal, “A” is mainly 13- or 14-group element (Agroup element in older nomenclature) and “X” is either carbon or nitrogen.
MAX Phases, as Nowotny phases, crystallize in layered arrangement
of M6X tetragons and A-group element single atom layers. Such structure forms hexagonal unit cells with six-three screw axis and A-group
mirror planes resulting in P63/mmc symmetry class. Unit cells differ
between materials with different values of “n”, altering the number of
M atom layers in their structure. Number of that layers equals “n”, thus
211, 312 and 413 MAX phases groups where distinguished, with their
names referring to the numbers in stoichiometry [1].
While number of discovered and studied MAX Phases is constantly
growing, with over fifty known materials up to date, there is simultaneously a problem of their synthesis in bulk. In the history of this
carbides and nitrides, large number of new materials was only synthesized by very accurate, yet small-scale methods such as CVD [7].
⁎
Although recent studies show many attempts to involve known
methods, such as thermal explosion (TE) [8], combustion synthesis [9]
or additive manufacturing (AM) [10], in MAX phases production,
search for optimal and cost-efficient process continues.
Ti3SiC2 is the most studied and described material from the group of
MAX phases, up to date [1]. This compound is one of the first known
MAX phases [11] and got common interest as relatively soft, easily
machinable while having high fracture toughness for a carbide.
Therefore wide range of studies were performed, including: oxidation
resistance [12], thermal properties [13] and synthesis of bulk samples
[14]. With that work and later studies of similar materials by Barsoum
et al. MAX phases was described as a group of materials with shared
properties [15]. Nowadays, Ti3SiC2 serves as reference for many new
methods and approaches for the subject, as in this article. First attempts
to synthesize its bulk form were difficult and resulted in large amounts
of TiC and SiC phases within the microstructure [16]. This occurred
mainly due to the significant differences in phase transition temperatures between Si and other elements. Those differences are now crucial
in designing new, industry-oriented methods. Simultaneously, other
MAX phases should be carefully examined and correlated with best
methods to obtain.
In order to achieve highly efficient and accurate method in terms of
high purity, laser induced, self-propagating high-temperature sintering
(SHS) was proposed. Due to the relatively fast reaction (about 3 s) and
point induction of the process, creation of Ti3SiC2 phase was expected,
before it could decompose into Si-rich liquid and solid phase as shown
below:
Corresponding author.
E-mail address: pawel.rutkowski@agh.edu.pl (P. Rutkowski).
https://doi.org/10.1016/j.ceramint.2018.03.143
Received 16 February 2018; Received in revised form 13 March 2018; Accepted 15 March 2018
0272-8842/ © 2018 Elsevier Ltd and Techna Group S.r.l. All rights reserved.
Please cite this article as: Rutkowski, P., Ceramics International (2018), https://doi.org/10.1016/j.ceramint.2018.03.143
Ceramics International xxx (xxxx) xxx–xxx
P. Rutkowski et al.
Fig. 1. Initial powder morphology: a) titanium, b) silicon, c) graphite.
powders were mixed with titanium carbide one. The synthesis was
made in copper-cooled copper-mold laser melting furnace with use of
5 kW CO2 laser. The melting time was in the range 15–60 s. The authors
obtained 88% purity product bed in short – 15 s process times. For
longer process duration the MAX phase content decreased to 80%. In
case of laser melting rapid synthesis of TiC/Ti3SiC2 the same authors
synthesized Ti3SiC2 phase in quantity of 56–84 vol%, what depended on
laser power ranging 3,5–5 kW and 15–60 s melting time. The reaction
mixture was composed of titanium, silicon and titanium carbide
powder. They confirmed that it is possible to produce bulk material
with 4% porosity using laser melting process.
The laser is also used in case of MAX pulse laser deposition technique [19]. It is possible to obtain in this way the Ti/Si/C film. The film
was deposited from the pre-synthesized Ti3SiC2 target. Authors used
Nd:YAG laser with 1064 nm wavelength at 6 ns pulse duration and
frequency of 20 Hz. The laser energy did not exceeded 8 J/cm2. The
oxidized silicon crystal was used as a film substrate and was heated up
to 950 K. It was notice that too low temperatures result in lack of enough quantity of the silicon. The thickness of the obtain film was
750 nm.
In the presents work Authors show the local initiation of Ti3SiC2
MAX phase SHS synthesis by the laser beam. Laser ignition allowed to
start locally (40 µm laser spot diameter) contamination free synthesis in
vacuum atmosphere. Specially constructed reaction chamber experiment station allowed to monitor precisely the temperature revealed
during the reaction and visually record the synthesis propagation. The
influence of the before-reaction bed compaction on the synthesis behaviour was explained by bed thermal conductivity examinations. In
the second part of the paper the positive trial of MAX phase coating
reactive deposition was made.
Fig. 2. Laser apparatus set with control system for Ti3SiC2 synthesis.
2. Experimental procedure
M(n + 1) AXn → M(n + 1) Xn + A
To synthesize Ti3SiC2 the following commercially available powders
were used: 44 µm grain size 99.7% purity TI-104 titanium metal
powder of Atlantic Equipment Engineers, 1–5 µm 99 + % purity SI-100
silicon metal powder of Atlantic Equipment Engineers and < 50 µm
99.8% purity Merck no. 1.04206.9050 graphite. The morphology of
these reactants were observed by NOVA NANO SEM 200 scanning
electron microscopy of FEI EUROPE COMPANY and is illustrated in
Fig. 1.
Powders were set with an excess of silicon for following stoichiometry Ti3Si1,2C2. The reactants mixture was homogenized in isopropanol by ball mill for 2 h using cemented carbides (WC-Co) milling
media. After drying the powders were put into the isolated graphite
holder in form of: loose powder and 15, 30 MPa uniaxially pressed
green samples. The holder with the powder mixture was placed into the
Such reaction would result in high amounts of TiC and SiC inclusions in the microstructure, significantly influencing final properties of
the material.
The laser initiated self-sustaining high temperature syntheses becomes more important in case of reactive laser welding applications.
The initiation of SHS by laser beam is local and provides higher system
purity in comparison to the conventional SHS ignition by wire heating
element. Thus evaporation of heating wire and unwanted reaction between reactants and igniter is avoided.
In the literature there are negligible information concerning laser
synthesis of MAX phase. D. Chen et al. obtained Ti3AlC2 and Ti3SiC2
based composites by use of laser melting technique [17,18]. In case of
the Ti3AlC2 powder synthesis the titanium and aluminum metal
2
Ceramics International xxx (xxxx) xxx–xxx
P. Rutkowski et al.
infrared LT/2 M Optris® CSLaser pyrometer with response time of 2 ms
and within temperature range from 800 °C to 2500 °C. Additionally the
reaction course was recorded with high quality TV camera model UI1240LE-C-HQ.
MAX layer formation was proceeded differently. The prepared
powder mixture was deposited in the in the form of isopropyl alcohol
dispersion on the silicon carbide substrate (Fig. 3). It was characterized
by 98.5% dense polycrystalline material which was obtained at 2150 °C
during pressureless sintering in form of rectangular tiles. The SiC tiles
were cut into 20 × 20 mm square pieces with thickness of about 5 mm.
Next, these substrates were placed into the reaction chamber as shown
in Fig. 2. The argon was supplied into the chamber in order to obtain 2
bars of protective atmosphere overpressure. Titanium silicon carbide
layer was formed during continuous work (CW) mode during laser
scanning process of the mixture layer deposited on the SiC substrate.
The idea of the layer formation and laser scanning process is presented
in Fig. 4. Reactive formation of MAX phase layer was made at 120 W
and 40 µm spot laser beam, 0.0025 m/s process speed in 2 bar of argon
overpressure in order to prevent silicon evaporation. The “hurrySCAN
30″ head of SCANLAB with 1080 nm laser beam wavelength was used.
The laser beam source was the same as in the case of above described
SHS synthesis. In order to increase layer adhesion to the substrate, silicon carbide was etched by 80 W power laser beam. The etching process speed was 0.005 m/s.
The bed powder morphology and layer microstructural observations
were made with use of optical microscope of LEICA DM2500 M and
NOVA NANO SEM 200 scanning electron microscope of FEI EUROPE
COMPANY. The element distribution analysis were made by Energy
Dispersive X-ray Spectroscopy (EDS) of EDAX. In order to analyse the
correlation between compaction of the reaction bed and the SHS
synthesis temperature the thermal conductivity of the reaction bed was
investigated. Thermal conductivity was measured by laser flash analyser LFA 427 of Netzsch company in graphite crucible with use of
triple-layer model. The measurement temperature was 25 °C to avoid
the ignition of the powder mixture at higher temperatures. The laser
pulse of the LFA measurements was 0.8 ms and voltage of 550 V. The
thermal properties were find both for loose powder mixture and 15 and
30 MPa uniaxially pressed green bodies.
Fig. 3. SHS powder mixture placement in the reaction chamber.
Fig. 4. Ti3SiC2 layer laser formation in argon overpressure in the reaction chamber.
3. Monitoring of synthesis temperature
reaction chamber shown in Fig. 2 equipped with special sapphire
window. This allows to deliver the electromagnetic wave in form of
laser beam to selected are on the powder surface. The JK200FL fiber
laser beam source was used. The wavelength of laser beam was
1080 ± 10 nm and spot diameter on of 40 µm. The ignition line length
was 5 mm and scanning speed was set to 0.0025 m/s. with laser power
of30 W. Prior to SHS reaction the chamber was purified by air evacuation and then vacuumed in order to obtain 0.1 bar. The reaction of
loose powder bed was initiated at 2.0 bars argon overpressure. In case
of pressed green samples the SHS was initiated under vacuum.
The process temperature was measured by high frequency recording
The temperature recorded during the SHS synthesis of the loosefilled reaction mixture and uniaxial pressed green bodies is presented in
Fig. 5.
As shown in Fig. 5 the single modal temperature curve has similar
shape for each sample. At the beginning, temperature have risen
abruptly due to heat produced by reacting substrates. The maximum
temperature was achieved in 2 s. The cooling down of the reaction bed
to 800 °C took 8–10 s what allowed to freeze final product. The maximum reaction temperature reached 1700 °C in case of 30 MPa uniaxially pressed sample because of lower material porosity which
Fig. 5. Reaction temperature versus: a) mixture compaction, b) atmosphere.
3
Ceramics International xxx (xxxx) xxx–xxx
P. Rutkowski et al.
Fig. 6. Recorded laser initiated SHS reaction step on loose-fill reaction bed, vacuum condition.
Fig. 7. Recorded laser initiated SHS reaction step on 30 MPa uniaxially pressed reaction bed, vacuum condition.
Fig. 8. Recorded laser initiated SHS reaction step on loose-fill reaction bed, 2 bars argon overpressure.
4
Ceramics International xxx (xxxx) xxx–xxx
P. Rutkowski et al.
higher temperature was recorded. The maximum temperature for
15 MPa pressed sample and loose powder mixture was measured at
1600 °C and 1500°C respectively. The slope of temperature curves was
calculated and normalized to the value of loose reaction mixture. The
normalized temperature rate is as following: 1 for loose powder, 1.4 for
15 MPa pressed sample and 1.7 for 30 MPa pressed one. The change of
the atmosphere to argon resulted in an increase reaction temperature of
about 75 °C in each case.
The SHS process of loose reaction bed and 30 MPa green mixture
were recorded by TV camera presented in Fig. 6 and Fig. 7 respectively.
The largest differences in laser ignition was noticed at the beginning of
SHS synthesis. For loose mixture laser heating caused the two step SHS
reaction. First ignition took place at material surface Fig. 6. Afterwards,
the reaction proceeded rapidly while exceed exothermic heat was
transported to bulk material. Accumulated heat started heat wave
propagation steady mode in whole bed volume. In case of 30 MPa
pressed mixture sample, one-step reaction was observed (Fig. 7). The
higher compaction of the mixture caused rapid ignition on bed surface
followed by fast heat transfer. It is because of higher quantity of contacts between reacting grains. The higher reaction temperature is also
confirmed by significant visual effect in case of pressed material. The
change of the atmosphere in the reaction chamber leads to one-step SHS
ignition of loose packed mixture like in the case of pressed material –
Fig. 8.
The confirmation of the above discussion is clearly visible in
thermal conductivity results measured by LFA method – Table 1. The
reaction temperature increases with material compaction, with agreement to thermal conductivity measurements. The lowest temperature of
SHS process is 1500 °C for thermal conductivity coefficient equal to
2.5 W/mK. Sample obtained under 30 MPa of pressure decreased porosity which resulted in an increase of thermal conductivity to 3.92 W/
mK.
After the SHS synthesis the bed was macroscale photographed
showed in Fig. 10 and compared with those conventionally obtained
presented in Fig. 9. It can be noticed that laser initiated reaction allowed to produce visually denser product with much less geometrical
distortions. The conventionally initiated SHS bed showed in Fig. 9 is
less structurally uniform and possess typical reaction wave-effect on the
surface.
Table 1
Thermal conductivity of SHS reaction mixture.
Phase
Reagents mixture compaction
SHS temperature [°C]
Thermal conductivity [W/mK]
Loose-fill
15 MPa
30 MPa
≈ 1500
2.51
≈ 1600
2.83
≈ 1700
3.92
Fig. 9. Cross-section of the standard SHS reaction bed.
Fig. 10. Uniform reaction bed obtained by laser initiated SHS synthesis – fragment of the
bed.
4. Phase composition and microstructure
The obtained reaction beds after laser initiated SHS synthesis were
investigated by XRD Rietveld analysis. The qualitative and quantitative
phase composition data are collected in Table 2. The results show that
the quantity of titanium silicon carbide phase reaches maximum of
42 wt% in case of loose sample, where the reaction temperature was
lowest (≈ 1500 °C). The content of Ti3SiC2 decreased with higher
number of intergranular contacts which resulted in the elevated SHS
temperature. The amount of other phases present in samples increased
with the reaction temperature because of possible decomposition of
Ti3SiC2during reaction. The phase composition of products obtained in
argon atmosphere is similar to those in form of pressed samples.
The synthetized powders were carefully examined by scanning
electron microscopy including EDS element distribution analysis. The
morphology of SHS products are presented in Fig. 11 and in Fig. 12.
Generally there is no significant differences between those morphologies. However, it is observed that porosity decreased with higher initial
compaction level. All particles are strongly agglomerated and partially
melted with average agglomerate size of 10–20 µm. It is clearly visible
that liquid phase in form of Ti-Si eutectic was formed during the process. This confirms that moving layer model mechanism of the SHS
Table 2
Phase composition of the reaction bed versus material compaction.
Phase
SHS temperature [°C]
Ti3SiC2
TiC
Ti5Si3
TiSi2
SiO2
C
Material compaction/phase content [wt%]
2 bars Argon
Vacuum
Loose-fill
Loose-fill
15 MPa
30 MPa
≈ 1575
32
24
39
–
–
5
≈ 1500
42
20
18
20
–
–
≈ 1600
33
29
36
–
2
–
≈ 1700
27
29
44
–
–
–
resulted in higher thermal conductivity. The pressing of the reaction
mixtures allowed to increase the quantity of contacts between particles
of reagents. Better heat transport together with increased interphase
contacts caused intensification in the reaction rate in whole bed, so
5
Ceramics International xxx (xxxx) xxx–xxx
P. Rutkowski et al.
Fig. 11. The SEM grains morphology of reaction beds: a) loose-fill in 2 bars argon a) loose-fill in vacuum, b) 15 MPa pressed green body in vacuum, c) 30 MPa pressed green body in
vacuum.
Fig. 12. SEM morphology observations of titanium silicon carbide (Ti3SiC2) phase for loose fill reaction beds: a) 2 bars argon overpressure, b) vacuum.
6
Ceramics International xxx (xxxx) xxx–xxx
P. Rutkowski et al.
Fig. 13. The microstructure of silicon carbide etched by laser ablation process.
20 µm. On the image there are visible etched are as with size close to
the laser beam spot diameter (40 µm). Observed cracks were probably
generated by thermal stresses and local material shrinkage. This way
prepared surface was covered by the Ti-Si-C mixture layer. In accordance with the Fig. 4 the covering mixture was laser scanned in the
atmosphere of 2 bar argon overpressure to prevent the evaporation of
titanium and silicon. As the result of laser initiated SHS synthesis the
paths of the MAX phase coating was obtained – Fig. 14. The distances
between layers are formed due to programmed movement paths. In
order to analyse the obtained coatings the material was investigated by
scanning electron microscopy with elemental distribution analysis in
areas marked in Fig. 14. As it is shown the path width of the formed
MAX phase layers is around 330 µm. Fig. 15 presents EDS results that
confirms deposited layer is reach in Ti and Si. In case of spaces between
coating paths, silicon and carbon well detected which indicated etched
SiC. The XRD analysis confirmed existence of titanium silicon carbide in
the reactively formed layer but it was difficult to establish quantitatively the phase content.
6. Summary
Fig. 14. The scanning electron microscope image of the laser paths deposited of MAX
phase layer.
• The laser ignition system allows to begin the reaction locally, and
combustion took place [20]. However, compaction level and porosity of
products are increased due to increasing pressing values of green
samples. To additional confirmation of the existence of MAX phase, the
laminate structure of Ti3SiC2 was illustrated in Fig. 12. Those layers are
typical for hexagonal nanostructured of titanium silicon carbide.
•
•
5. Coating formation possibility
In order to prepare Ti3SiC2 reactive laser deposition the silicon
carbide surface was etched by laser beam. This allowed to increase
material roughness for better connection between SiC and formed MAX
phase. The details of SiC microstructure was presented in Fig. 13. By
this method the oxide layer usually existing on the SiC surface was
removed and additionally activity of grain boundary is improved to
attract deposited layer.
The etching process revealed elongated grains of SiC reaching
•
•
7
control precisely the energy supplied to the reaction bed and also
avoid contamination coming from the ignition source.
The configuration of reaction chamber with TV camera and pyrometer allows to control behaviour of the bed during SHS synthesis
and measure the influence of material packing on reaction speed
and reaction temperature.
The first trials allowed to obtain maximum of 42% MAX phase but
also to find the correlation between bed compaction, reactants bed
thermal conductivity and reaction temperature. It was shown that
too high material compaction lead to higher SHS synthesis temperature and lower content of Ti3SiC2 phase.
30 W laser power at 40 µm spot beam, 5 mm ignition line length
with speed of 0.0025 m/s was enough to supply enough energy to
begin SHS.
It is possible to obtain stable MAX layer of Ti-Si-C system on silicon
carbide substrate using 120 W power 40 µm spot laser beam and 2
bars argon overpressure
Ceramics International xxx (xxxx) xxx–xxx
P. Rutkowski et al.
Fig. 15. EDS element distribution made on the created layer (point 1) and substrate (point 2) marked on the Fig. 13 SEM image.
Acknowledgement
[8] L. Yi, L. Yingxin, L. Fan, C. Han, Z. Lifeng, G. Shouwu, Synthesis and microstructure
of Ti2AlN ceramic by thermal explosion, Ceram. Int. 43 (2017) 13618–13621.
[9] T. Thomas, C.R. Bowen, Thermodynamic predictions for the manufacture of Ti2AlC
MAX-phase ceramic by combustion synthesis, J. Alloy. Comp. 602 (2014) 72–77.
[10] M. Krinitcyn, Z. Fu, J. Harris, K. Kostikov, G.A. Pribytkov, P. Greil, N. Travitzky,
Laminated Object Manufacturing of in-situ synthesized MAX-phase composites,
Ceram. Int. 43 (2017) 9241–9245.
[11] W. Jeitschko, H. Nowotny, Die Kristallstructur von Ti3SiC2,
EinNeuerKomplexcarbid, Typ. Mon. Chem. 98 (1967) 329–337.
[12] T. Okano, T. Yano, T. Iseki, Synthesis and mechanical properties of Ti3SiC2, Trans.
Met. Soc. Jpn. 14A (1993).
[13] H. Nowotny, S. Windisch, High temperature compounds, Annu. Rev. Mater. Sci. 3
(1973) 171.
[14] R. Pampuch, Advanced HT ceramic materials via solid combustion, J. Eur. Ceram.
Soc. 19 (1999) 2395–2404.
[15] M.W. Barsoum, T. El-Raghy, The MAX phases: unique new carbide and nitride
materials, Am. Sci. 89 (2001) 336–345.
[16] R. Pampuch, J. Lis, L. Stobierski, M. Tymkiewicz, Solid combustion synthesis of
Ti3SiC2, J. Eur. Ceram. Soc. 5 (1989) 283.
[17] D. Chen, X. Tian, H. Wang, Z. Huang, Rapid synthesis of TiC/Ti3SiC2 composites by
laser melting, Int. J. Refract. Met. Hard Mater. 47 (2014) 102–107.
[18] D. Chen, X. Tian, H. Wang, Z. Huang, Rapid synthesis of bulk Ti3AlC2 by laser
melting, Mater. Lett. 129 (2014) 98–100.
[19] C. Lange, M.W. Barsoum, P. Schaaf, Towards the synthesis of MAX-phase functional
coatings by pulsed laser deposition, Appl. Surf. Sci. 254 (2007) 1232–1235.
[20] R. Pampuch, J. Lis, Advanced methods for SHS of powders developed in Krakow,
Int. J. Self-Propag. High.Temp. Synth. 17 (1) (2008) 85–91.
The research work was financed from the National Science Centre as
a project OPUS 6 No. UMO-2013/11/B/ST5/02275 titled „ Structure
and basic physical properties of functional layered MAX phases”.
References
[1] M.W. Barsoum, MAX phases: properties of machinable ternary carbides and nitrides, Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim, 2013, pp. 1–59.
[2] M.W. Barsoum, H.I. Yoo, T. El-Raghy, Electrical conductivity, thermopower and
hall effect of Ti3AlC2, Ti4AlN3 and Ti3SiC2, Phys. Rev. B 62 (2000).
[3] J.D. Hettinger, S.E. Lofland, P. Finkel, J. Palma, K. Harrell, S. Gupta, A. Ganguly,
T. El-Raghy, M.W. Barsoum, Electrical transport, thermal transport and elastic
properties of M2AlC (M = Ti, Cr, Nb and V) phases, Phys. Rev. B 72 (2005).
[4] T. El-Raghy, A. Zavaliangos, M.W. Barsoum, S.R. Kalidindi, Damage mechanisms
around hardness indentations in Ti3SiC2, J. Am. Ceram. Soc. 80 (1997) 513–516.
[5] J.W. Byeon, J. Liu, M. Hopkins, W. Fischer, N. Garimella, K.B. Park, M.P. Brady,
M. Radovic, T. El-Raghy, Y.H. Sohn, Microstructure and residual stress of alumina
scale formed on Ti2AlC at high temperature in air, Oxid. Met. 68 (2007) 97–111.
[6] S.S. Hwang, S.C. Lee, J.H. Han, D. Lee, S.W. Park, Machinability of Ti3SiC2 with
layered structure synthesized by hot pressing mixture of TiCx and Si powder, J. Eur.
Ceram. Soc. 32 (2012) 3493–3500.
[7] J.J. Nickl, K.K. Schweitzer, P. Luxenberg, Gasphasenabscheidung im system Ti-C-Si,
J. Less Common Met. 26 (3) (1972) 335–353.
8