Tapered LIGA HARMs

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Tapered LIGA HARMs

Journal of Micromechanics and Microengineering, 2003

Kevin Cortez

Abstract

... Microeng. 8 293300 [7] Tabata O, You H, Matsuzuka N, Yamaji T, Uemura S and Dama I 2002 Moving mask deep X-ray lithography system with multi state for 3-D microfabrication Microsystems Technologies 8 938 [8] Ryan Turner 2002 Tapered LIGA mold insert MS Thesis ...

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