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Contact type resistance measurement
– Uses a 4-point(or 2-point) probe head to contact to the sample for the measurement.
– Wide measurement range
– Suitable for a various samples.
2’ to 300mm wafer resistivity and thin film metrology
Table top, Floor standing, EFEM
performance, accuracy…
automatic wafer load systems…
…reliability, low cost of ownership
…or table top manual wafer load systems
wide selection of probes
soft touch smallest edge exclusion
total flexibility of measurement patterns
comprehensive data analysis software
Contact type resistance measurement
– Uses a 4-point(or 2-point) probe head to contact to the sample for the measurement.
– Wide measurement range
– Suitable for a various samples.