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14 pages, 4482 KiB  
Article
Classification and Recognition Method of Non-Cooperative Objects Based on Deep Learning
by Zhengjia Wang, Yi Han, Yiwei Zhang, Junhua Hao and Yong Zhang
Sensors 2024, 24(2), 583; https://doi.org/10.3390/s24020583 - 17 Jan 2024
Cited by 1 | Viewed by 705
Abstract
Accurately classifying and identifying non-cooperative targets is paramount for modern space missions. This paper proposes an efficient method for classifying and recognizing non-cooperative targets using deep learning, based on the principles of the micro-Doppler effect and laser coherence detection. The theoretical simulations and [...] Read more.
Accurately classifying and identifying non-cooperative targets is paramount for modern space missions. This paper proposes an efficient method for classifying and recognizing non-cooperative targets using deep learning, based on the principles of the micro-Doppler effect and laser coherence detection. The theoretical simulations and experimental verification demonstrate that the accuracy of target classification for different targets can reach 100% after just one round of training. Furthermore, after 10 rounds of training, the accuracy of target recognition for different attitude angles can stabilize at 100%. Full article
(This article belongs to the Section Optical Sensors)
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11 pages, 2799 KiB  
Article
X-Cut Lithium Niobate Optical Waveguide with High-Index Contrast and Low Loss Fabricated by Vapor Proton Exchange
by Shicheng Rong, Xujie Wen, Ning Ding, Jia Liao and Pingrang Hua
Photonics 2023, 10(12), 1390; https://doi.org/10.3390/photonics10121390 - 18 Dec 2023
Cited by 1 | Viewed by 1353
Abstract
Highly integrated and stable devices are appealing in optical communication and sensing. This appeal arises from the presence of high refractive index contrast and high-quality waveguides. In this study, we improved the vapor proton exchange (VPE) process, enabling large-scale waveguide fabrication and addressing [...] Read more.
Highly integrated and stable devices are appealing in optical communication and sensing. This appeal arises from the presence of high refractive index contrast and high-quality waveguides. In this study, we improved the vapor proton exchange (VPE) process, enabling large-scale waveguide fabrication and addressing the issue of liquid exchange during cooling. Additionally, we have prepared and characterized planar waveguides on X-cut lithium niobate (LN) crystals. The exchanged samples exhibit α and k1 phases, refractive index contrasts as high as 0.082, and exceptional refractive index uniformity. Furthermore, we utilized the same process to fabricate channel waveguides and Y-branch waveguides. We achieved low propagation losses in channel waveguides, accompanied by small mode sizes, and low-loss Y-branch waveguides with a highly uniform beam splitting ratio. All waveguides exhibited consistent performance across multiple preparations and tests, remaining free from aging effects for three months. Our results underscore the promising potential of VPE for creating Y-branch splitters and modulators in LN crystals. Full article
(This article belongs to the Special Issue Micro-Nano Optical Devices)
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13 pages, 14374 KiB  
Article
The Performance Characterization and Optimization of Fiber-Optic Acoustic Pressure Sensors Based on the MOEMS Sensitized Structure
by Ruling Zhou, Chenggang Guan, Hui Lv, Shasha Li, Puchu Lv, Haixin Qin, Wenxiu Chu, Yikai Zhou, Yihao Zhang and Xiaoqiang Li
Sensors 2023, 23(19), 8300; https://doi.org/10.3390/s23198300 - 7 Oct 2023
Cited by 1 | Viewed by 1035
Abstract
In order to investigate the factors affecting the acoustic performance of the extrinsic Fabry–Perot interferometer (EFPI) fiber-optic acoustic pressure sensor and to effectively improve its detection capability, this paper enhances the sensor’s detection sensitivity by adding more sensitized rings to its acoustic pressure-sensitive [...] Read more.
In order to investigate the factors affecting the acoustic performance of the extrinsic Fabry–Perot interferometer (EFPI) fiber-optic acoustic pressure sensor and to effectively improve its detection capability, this paper enhances the sensor’s detection sensitivity by adding more sensitized rings to its acoustic pressure-sensitive film. Furthermore, a novel real-time coupled acoustic test method is proposed to simultaneously monitor the changes in the spectral and acoustic metrics of the sensor to characterize its overall performance. Finally, an EFPI-type fiber-optic acoustic pressure sensor was developed based on the Micro-Optical Electro-Mechanical System (MOEMS). The acoustic tests indicate that the optimized fiber-optic acoustic pressure sensor has a sensitivity as high as 2253.2 mV/Pa, and the acoustic overload point (AOP) and signal-to-noise ratios (SNRs) can reach 108.85 dB SPL and 79.22 dB, respectively. These results show that the sensor produced through performance characterization experiments and subsequent optimization has a very high acoustic performance index, which provides a scientific theoretical basis for improving the overall performance of the sensor and will have broad application prospects in the field of acoustic detection. Full article
(This article belongs to the Special Issue Advances in the Design and Application of Optical Fiber Sensors)
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8 pages, 2920 KiB  
Communication
Design and Demonstration of an In-Plane Micro-Optical-Electro-Mechanical-System Accelerometer Based on Talbot Effect of Dual-Layer Gratings
by Wenqing Chen, Li Jin, Zhibin Wang, Haifeng Peng and Mengwei Li
Micromachines 2023, 14(7), 1301; https://doi.org/10.3390/mi14071301 - 25 Jun 2023
Cited by 1 | Viewed by 1167
Abstract
An ultrasensitive single-axis in-plane micro-optical-electro-mechanical-system (MOEMS) accelerometer based on the Talbot effect of dual-layer gratings is proposed. Based on the Talbot effect of gratings, the acceleration can be converted into the variation of diffraction intensity, thus changing the voltage signal of photodetectors. We [...] Read more.
An ultrasensitive single-axis in-plane micro-optical-electro-mechanical-system (MOEMS) accelerometer based on the Talbot effect of dual-layer gratings is proposed. Based on the Talbot effect of gratings, the acceleration can be converted into the variation of diffraction intensity, thus changing the voltage signal of photodetectors. We investigated and optimized the design of the mechanical structure; the resonant frequency of the accelerometer is 1878.9 Hz and the mechanical sensitivity is 0.14 μm/g. And the optical grating parameters have also optimized with a period of 4 μm and a grating interval of 10 μm. The experimental results demonstrated that the in-plane MOEMS accelerometer with an optimal design achieved an acceleration sensitivity of 0.74 V/g (with better than 0.4% nonlinearity), a bias stability of 75 μg and an acceleration resolution of 2.0 mg, suggesting its potential applications in smartphones, automotive electronics, and structural health detection. Full article
(This article belongs to the Special Issue Accelerometer and Magnetometer: From Fundamentals to Applications)
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13 pages, 3314 KiB  
Article
Crystalline Phase, Cross-Section, and Temporal Characteristics of Erbium-Ion in Lu3Ga5O12 Crystal
by Pei Zhang, De-Long Zhang and Yan Wang
Photonics 2023, 10(5), 586; https://doi.org/10.3390/photonics10050586 - 17 May 2023
Cited by 1 | Viewed by 1504
Abstract
An erbium-doped Lu3Ga5O12(LuGG) single crystal was grown by the Czochralski method. The crystalline phase in the grown crystal was analyzed by powder X-ray diffraction. The erbium-ion emission spectra of the crystal were acquired. The erbium-ion emission cross-section [...] Read more.
An erbium-doped Lu3Ga5O12(LuGG) single crystal was grown by the Czochralski method. The crystalline phase in the grown crystal was analyzed by powder X-ray diffraction. The erbium-ion emission spectra of the crystal were acquired. The erbium-ion emission cross-section (ECS) spectrum was computed from the acquired emission spectrum. The erbium-ion absorption cross-section (ACS) spectrum was computed using the McCumber relationship. The results are discussed in contrast to those computed from the acquired absorption spectrum, and the comparison shows that both methods give consistent results. The temporal characteristics of the emissions were also studied based on 0.98 μm pulse pumping. The study shows that the infrared emissions at 1.0, 1.5, and 2.8 μm show mono-exponentially temporal behavior. Instead, the decays of two visible emissions at 0.56 and 0.67 μm show considerable non-exponential features; each trace can be fitted double-exponentially. The non-exponential behavior is associated with those erbium ions that are present in the form of clusters, which enables non-radiative upconversion depopulation and hence additional contribution to the decay through cross relaxation between the erbium ions in clusters. The study also shows that about half of the erbium ions are present in the cluster state in the studied crystal. Full article
(This article belongs to the Section Optoelectronics and Optical Materials)
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19 pages, 5594 KiB  
Article
A Theoretical Study on Mid-Infrared Difference Frequency Generation Based on Periodically Poled Thin-Film LiNbO3
by Runze Jia, Meihong Liu, Jiamin Liu, Pingrang Hua and Delong Zhang
Photonics 2023, 10(4), 478; https://doi.org/10.3390/photonics10040478 - 21 Apr 2023
Cited by 2 | Viewed by 1659
Abstract
A mid-infrared difference frequency generator (DFG) based on a periodically poled thin-film lithium niobate rib waveguide on a sapphire substrate is theoretically studied. A mode analysis is carried out at the mid-infrared region, and the analysis focuses on the effects of waveguide geometry [...] Read more.
A mid-infrared difference frequency generator (DFG) based on a periodically poled thin-film lithium niobate rib waveguide on a sapphire substrate is theoretically studied. A mode analysis is carried out at the mid-infrared region, and the analysis focuses on the effects of waveguide geometry on effective refractive indices of a few lower-order modes. A complete theory suitable for modeling a DFG based on a waveguide structure is described. Its validity is confirmed by comparing the theoretical results with previously reported experimental data. Explicit expressions are presented for nonlinear conversion efficiency, thermal tunability and quasi-phase matching (QPM) bandwidth. The effects of waveguide geometry and mode hybridization on the effective mode field area and mode overlap factor, which are either inversely or linearly proportional to nonlinear conversion efficiency, are studied in detail. In this article, an optimized mid-infrared DFG with improved geometry that exhibits excellent performance, including a higher nonlinear conversion efficiency of 230–273% W−1cm−2 in the temperature range of 20–120 °C; a larger temperature tunability of 2.2 nm/°C; a larger QPM bandwidth of ~130 nm; and a higher idler wave output power, as much as −2 dBm when Pp = 20 dBm and Ps = 11.5 dBm, is suggested. Full article
(This article belongs to the Special Issue Integrated Waveguide-Based Photonic Devices)
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22 pages, 12055 KiB  
Article
An Optical Measuring Transducer for a Micro-Opto-Electro-Mechanical Micro-g Accelerometer Based on the Optical Tunneling Effect
by Evgenii Barbin, Tamara Nesterenko, Aleksei Koleda, Evgeniy Shesterikov, Ivan Kulinich and Andrey Kokolov
Micromachines 2023, 14(4), 802; https://doi.org/10.3390/mi14040802 - 31 Mar 2023
Cited by 4 | Viewed by 1330
Abstract
Micro-opto-electro-mechanical (MOEM) accelerometers that can measure small accelerations are attracting growing attention thanks to their considerable advantages—such as high sensitivity and immunity to electromagnetic noise—over their rivals. In this treatise, we analyze 12 schemes of MOEM-accelerometers, which include a spring mass and a [...] Read more.
Micro-opto-electro-mechanical (MOEM) accelerometers that can measure small accelerations are attracting growing attention thanks to their considerable advantages—such as high sensitivity and immunity to electromagnetic noise—over their rivals. In this treatise, we analyze 12 schemes of MOEM-accelerometers, which include a spring mass and a tunneling-effect-based optical sensing system containing an optical directional coupler consisting of a fixed and a movable waveguide separated by an air gap. The movable waveguide can perform linear and angular movement. In addition, the waveguides can lie in single or different planes. Under acceleration, the schemes feature the following changes to the optical system: gap, coupling length, overlapping area between the movable and fixed waveguides. The schemes with altering coupling lengths feature the lowest sensitivity, yet possess a virtually unlimited dynamic range, which makes them comparable to capacitive transducers. The sensitivity of the scheme depends on the coupling length and amounts to 11.25 × 103 m−1 for a coupling length of 44 μm and 30 × 103 m−1 for a coupling length of 15 μm. The schemes with changing overlapping areas possess moderate sensitivity (1.25 × 106 m−1). The highest sensitivity (above 6.25 × 106 m−1) belongs to the schemes with an altering gap between the waveguides. Full article
(This article belongs to the Special Issue Optical MEMS, Volume III)
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15 pages, 17854 KiB  
Article
Design and Development of a MOEMS Accelerometer Using SOI Technology
by José Mireles, Ángel Sauceda, Abimael Jiménez, Manuel Ramos and Rafael Gonzalez-Landaeta
Micromachines 2023, 14(1), 231; https://doi.org/10.3390/mi14010231 - 16 Jan 2023
Cited by 8 | Viewed by 3038
Abstract
The micro-electromechanical system (MEMS) sensors are suitable devices for vibrational analysis in complex systems. The Fabry–Pérot interferometer (FPI) is used due to its high sensitivity and immunity to electromagnetic interference (EMI). Here, we present the design, fabrication, and characterization of a silicon-on-insulator (SOI) [...] Read more.
The micro-electromechanical system (MEMS) sensors are suitable devices for vibrational analysis in complex systems. The Fabry–Pérot interferometer (FPI) is used due to its high sensitivity and immunity to electromagnetic interference (EMI). Here, we present the design, fabrication, and characterization of a silicon-on-insulator (SOI) MEMS device, which is embedded in a metallic package and connected to an optical fiber. This integrated micro-opto-electro-mechanical system (MOEMS) sensor contains a mass structure and handle layers coupled with four designed springs built on the device layer. An optical reading system using an FPI is used for displacement interrogation with a demodulation technique implemented in LabVIEW®. The results indicate that our designed MOEMS sensor exhibits a main resonant frequency of 1274 Hz with damping ratio of 0.0173 under running conditions up to 7 g, in agreement with the analytical model. Our experimental findings show that our designed and fabricated MOEMS sensor has the potential for engineering application to monitor vibrations under high-electromagnetic environmental conditions. Full article
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53 pages, 4210 KiB  
Review
Miniaturized NIR Spectroscopy in Food Analysis and Quality Control: Promises, Challenges, and Perspectives
by Krzysztof B. Beć, Justyna Grabska and Christian W. Huck
Foods 2022, 11(10), 1465; https://doi.org/10.3390/foods11101465 - 18 May 2022
Cited by 82 | Viewed by 10271
Abstract
The ongoing miniaturization of spectrometers creates a perfect synergy with the common advantages of near-infrared (NIR) spectroscopy, which together provide particularly significant benefits in the field of food analysis. The combination of portability and direct onsite application with high throughput and a noninvasive [...] Read more.
The ongoing miniaturization of spectrometers creates a perfect synergy with the common advantages of near-infrared (NIR) spectroscopy, which together provide particularly significant benefits in the field of food analysis. The combination of portability and direct onsite application with high throughput and a noninvasive way of analysis is a decisive advantage in the food industry, which features a diverse production and supply chain. A miniaturized NIR analytical framework is readily applicable to combat various food safety risks, where compromised quality may result from an accidental or intentional (i.e., food fraud) origin. In this review, the characteristics of miniaturized NIR sensors are discussed in comparison to benchtop laboratory spectrometers regarding their performance, applicability, and optimization of methodology. Miniaturized NIR spectrometers remarkably increase the flexibility of analysis; however, various factors affect the performance of these devices in different analytical scenarios. Currently, it is a focused research direction to perform systematic evaluation studies of the accuracy and reliability of various miniaturized spectrometers that are based on different technologies; e.g., Fourier transform (FT)-NIR, micro-optoelectro-mechanical system (MOEMS)-based Hadamard mask, or linear variable filter (LVF) coupled with an array detector, among others. Progressing technology has been accompanied by innovative data-analysis methods integrated into the package of a micro-NIR analytical framework to improve its accuracy, reliability, and applicability. Advanced calibration methods (e.g., artificial neural networks (ANN) and nonlinear regression) directly improve the performance of miniaturized instruments in challenging analyses, and balance the accuracy of these instruments toward laboratory spectrometers. The quantum-mechanical simulation of NIR spectra reveals the wavenumber regions where the best-correlated spectral information resides and unveils the interactions of the target analyte with the surrounding matrix, ultimately enhancing the information gathered from the NIR spectra. A data-fusion framework offers a combination of spectral information from sensors that operate in different wavelength regions and enables parallelization of spectral pretreatments. This set of methods enables the intelligent design of future NIR analyses using miniaturized instruments, which is critically important for samples with a complex matrix typical of food raw material and shelf products. Full article
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19 pages, 6257 KiB  
Article
Design and Modeling of Fiber-Free Optical MEMS Accelerometer Enabling 3D Measurements
by Samir Abozyd, Abdelrahman Toraya and Noha Gaber
Micromachines 2022, 13(3), 343; https://doi.org/10.3390/mi13030343 - 22 Feb 2022
Cited by 12 | Viewed by 2647
Abstract
Optical accelerometers are popular in some applications because of their better immunity to electromagnetic interference, and they are often more sensitive than other accelerometer types. Optical fibers were employed in most previous generations, making micro-fabrication problematic. The optical accelerometers that are suitable for [...] Read more.
Optical accelerometers are popular in some applications because of their better immunity to electromagnetic interference, and they are often more sensitive than other accelerometer types. Optical fibers were employed in most previous generations, making micro-fabrication problematic. The optical accelerometers that are suitable for mass manufacture and previously mentioned in the literature have various problems and are only sensitive in one direction (1D). This study presents a novel optical accelerometer that provides 3D measurements while maintaining simple hybrid fabrication compatible with mass production. The operating concept is based on a power change method that allows for measurements without the need for complex digital signal processing (DSP). Springs hold the proof mass between a light-emitting diode and a quadrant photo-detector, allowing the proof mass to move along three axes. Depending on the magnitude and direction of the acceleration affecting the system, the proof mass moves by a certain amount in the corresponding axis, causing some quadrants of the quadrant detector to receive more light than other quadrants. This article covers the design, implementation, mechanical simulation, and optical modeling of the accelerometer. Several designs have been presented and compared. The best simulated mechanical sensitivity reaches 3.7 μm/G, while the calculated overall sensitivity and resolution of the chosen accelerometer is up to 156 μA/G and 56.2 μG, respectively. Full article
(This article belongs to the Special Issue Design and Manufacture of Micro-Optical Lens)
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10 pages, 5009 KiB  
Article
Integration of Multifocal Microlens Array on Silicon Microcantilever via Femtosecond-Laser-Assisted Etching Technology
by Bao-Xu Wang, Jia-Xin Zheng, Jin-Yong Qi, Ming-Rui Guo, Bing-Rong Gao and Xue-Qing Liu
Micromachines 2022, 13(2), 218; https://doi.org/10.3390/mi13020218 - 29 Jan 2022
Cited by 8 | Viewed by 2600
Abstract
Micro-opto-electromechanical systems (MOEMSs) are a new class of integrated and miniaturized optical systems that have significant applications in modern optics. However, the integration of micro-optical elements with complex morphologies on existing micro-electromechanical systems is difficult. Herein, we propose a femtosecond-laser-assisted dry etching technology [...] Read more.
Micro-opto-electromechanical systems (MOEMSs) are a new class of integrated and miniaturized optical systems that have significant applications in modern optics. However, the integration of micro-optical elements with complex morphologies on existing micro-electromechanical systems is difficult. Herein, we propose a femtosecond-laser-assisted dry etching technology to realize the fabrication of silicon microlenses. The size of the microlens can be controlled by the femtosecond laser pulse energy and the number of pulses. To verify the applicability of this method, multifocal microlens arrays (focal lengths of 7–9 μm) were integrated into a silicon microcantilever using this method. The proposed technology would broaden the application scope of MOEMSs in three-dimensional imaging systems. Full article
(This article belongs to the Special Issue Advances in Ultra-Precision Machining Technology and Applications)
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10 pages, 1356 KiB  
Communication
Wideband MOEMS for the Calibration of Optical Readout Systems
by Petr Volkov, Andrey Lukyanov, Alexander Goryunov, Daniil Semikov, Evgeniy Vopilkin, Stanislav Kraev, Andrey Okhapkin, Anatoly Tertyshnik and Ekaterina Arkhipova
Sensors 2021, 21(21), 7343; https://doi.org/10.3390/s21217343 - 4 Nov 2021
Cited by 5 | Viewed by 1872
Abstract
The paper proposes a technology based on UV-LIGA process for microoptoelectromechanical systems (MOEMS) manufacturing. We used the original combination of materials and technological steps, in which any of the materials does not enter chemical reactions with each other, while all of them are [...] Read more.
The paper proposes a technology based on UV-LIGA process for microoptoelectromechanical systems (MOEMS) manufacturing. We used the original combination of materials and technological steps, in which any of the materials does not enter chemical reactions with each other, while all of them are weakly sensitive to the effects of oxygen plasma. This made it suitable for long-term etching in the oxygen plasma at low discharge power with the complete preservation of the original geometry, including small parts. The micromembranes were formed by thermal evaporation of Al. This simplified the technique compared to the classic UV-LIGA and guaranteed high quality and uniformity of the resulting structure. To demonstrate the complete process, a test MOEMS with electrostatic control was manufactured. On one chip, a set of micromembranes was created with different stiffness from 10 nm/V to 100 nm/V and various working ranges from 100 to 300 nm. All membranes have a flat frequency response without resonant peaks in the frequency range 0–200 kHz. The proposed technology potentially enables the manufacture of wide low-height membranes of complex geometry to create microoptic fiber sensors. Full article
(This article belongs to the Special Issue State-of-the-Art Optical Sensors Technology in Russia 2021-2022)
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14 pages, 2903 KiB  
Article
Continuous-Time Fast Motion of Explosion Fragments Estimated by Bundle Adjustment and Spline Representation Using HFR Cameras
by Yubo Ni, Feng Liu, Yi Wu and Xiangjun Wang
Appl. Sci. 2021, 11(6), 2676; https://doi.org/10.3390/app11062676 - 17 Mar 2021
Cited by 2 | Viewed by 1429
Abstract
This paper introduces a continuous-time fast motion estimation framework using high frame-rate cameras. To recover the high-speed motions trajectory, we inherent the bundle adjustment using a different frame-rate strategy. Based on the optimized trajectory, a cubic B-spline representation was proposed to parameter the [...] Read more.
This paper introduces a continuous-time fast motion estimation framework using high frame-rate cameras. To recover the high-speed motions trajectory, we inherent the bundle adjustment using a different frame-rate strategy. Based on the optimized trajectory, a cubic B-spline representation was proposed to parameter the continuous-time position, velocity and acceleration during this fast motion. We designed a high-speed visual system consisting of the high frame-rate cameras and infrared cameras, which can capture the fast scattered motion of explosion fragments and evaluate our method. The experiments show that bundle adjustment can greatly improve the accuracy and stability of the trajectory estimation, and the B-spline representation of the high frame-rate can estimate the velocity, acceleration, momentum and force of each fragments at any given time during its motion. The related estimated result can achieve under 1% error. Full article
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14 pages, 6728 KiB  
Article
Design and Modification of a High-Resolution Optical Interferometer Accelerometer
by Yuan Yao, Debin Pan, Jianbo Wang, Tingting Dong, Jie Guo, Chensheng Wang, Anbing Geng, Weidong Fang and Qianbo Lu
Sensors 2021, 21(6), 2070; https://doi.org/10.3390/s21062070 - 16 Mar 2021
Cited by 14 | Viewed by 3531
Abstract
The Micro-Opto-Electro-Mechanical Systems (MOEMS) accelerometer is a new type of accelerometer that combines the merits of optical measurement and Micro-Electro-Mechanical Systems (MEMS) to enable high precision, small volume, and anti-electromagnetism disturbance measurement of acceleration, which makes it a promising candidate for inertial navigation [...] Read more.
The Micro-Opto-Electro-Mechanical Systems (MOEMS) accelerometer is a new type of accelerometer that combines the merits of optical measurement and Micro-Electro-Mechanical Systems (MEMS) to enable high precision, small volume, and anti-electromagnetism disturbance measurement of acceleration, which makes it a promising candidate for inertial navigation and seismic monitoring. This paper proposes a modified micro-grating-based accelerometer and introduces a new design method to characterize the grating interferometer. A MEMS sensor chip with high sensitivity was designed and fabricated, and the processing circuit was modified. The micro-grating interference measurement system was modeled, and the response sensitivity was analyzed. The accelerometer was then built and benchmarked with a commercial seismometer in detail. Compared to the previous prototype in the experiment, the results indicate that the noise floor has an ultra-low self-noise of 15 ng/Hz1/2. Full article
(This article belongs to the Special Issue Advances in Inertial Sensors)
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15 pages, 7055 KiB  
Article
Microlens Array Fabrication by Using a Microshaper
by Meng-Ju Lin and Cheng Hao Wen
Micromachines 2021, 12(3), 244; https://doi.org/10.3390/mi12030244 - 28 Feb 2021
Cited by 5 | Viewed by 2312
Abstract
A simple, easy, inexpensive, and quick nonsilicon-based micromachining method was developed to manufacture a microlens array. The spherical surface of the microlens was machined using a microshaper mounted on a three-axis vertical computer numerical control (CNC) machine with cutter-path-planning. The results show the [...] Read more.
A simple, easy, inexpensive, and quick nonsilicon-based micromachining method was developed to manufacture a microlens array. The spherical surface of the microlens was machined using a microshaper mounted on a three-axis vertical computer numerical control (CNC) machine with cutter-path-planning. The results show the machined profiles of microlens agree well with designed profiles. The focus ability of the machined microlens array was verified. The designed and measured focal lengths have average 1.5% error. The results revealed that the focal lengths of micro lens agreed with the designed values. A moderate roughness of microlens surface is obtained by simply polishing. The roughness of the lens surface is 43 nm in feed direction (x-direction) and 56 nm in path interval direction (y-direction). It shows the simple, scalable, and reproducible method to manufacture microlenses by microshaper with cutter-path-planning is feasible. Full article
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