Location via proxy:   [ UP ]  
[Report a bug]   [Manage cookies]                
Skip to main content

Thank you for visiting nature.com. You are using a browser version with limited support for CSS. To obtain the best experience, we recommend you use a more up to date browser (or turn off compatibility mode in Internet Explorer). In the meantime, to ensure continued support, we are displaying the site without styles and JavaScript.

  • Article
  • Published:

An 8 × 160 Gb s−1 all-silicon avalanche photodiode chip

Abstract

In response to growing demands on data traffic, silicon (Si) photonics has emerged as a promising technology for ultra-high-speed and low-cost optical interconnects. However, achieving high-performance photodetectors with Si photonics requires integrating narrower-bandgap materials, resulting in more complex fabrication processes, higher costs and yield issues. To address this challenge, we demonstrate an all-Si receiver (RX) based on a cost-efficient, eight-channel, double-microring-resonator, avalanche photodiode. It has an aggregate data rate of 1.28 Tb s−1. All channels show excellent uniformity in their device performance with a responsivity of 0.4 A W−1, an ultra-low dark current of 1 nA, a high bandwidth of 40 GHz at −8 V and a \(k\) value of 0.28. To the best of our knowledge, this is the first demonstration of an all-Si RX supporting a record-high transmission data rate of 160 Gb s−1 per channel, along with an ultra-low electrical crosstalk of less than −50 dB. This all-Si optical RX can compete with the commercial heterojunction-based RXs and promises ~40% chip cost saving, thus paving the way to realizing >3.2 Tb s−1 interconnects for future optical networks.

This is a preview of subscription content, access via your institution

Access options

Buy this article

Prices may be subject to local taxes which are calculated during checkout

Fig. 1: Device design of an Si double-MRM APD.
Fig. 2: Simulations of Si double-MRM APDs.
Fig. 3: Spectrum and crosstalk of MRR APDs.
Fig. 4: d.c. characteristics of MRR APDs.
Fig. 5: RF response of MRR APDs.

Similar content being viewed by others

Data availability

The data that support the findings of this study are available from the corresponding author on reasonable request.

References

  1. Li, B. et al. Machine learning empowered intelligent data center networking: a survey. Preprint at http://arxiv.org/abs/2202.13549 (2022).

  2. Liao, L. et al. Silicon photonics for next-generation optical connectivity. In Proc. 2023 Optical Fiber Communications Conference and Exhibition (OFC) Th3B.1 (Optica, 2023); https://doi.org/10.1364/OFC.2023.Th3B.1

  3. Shekhar, S., Bogaerts, W. & Chrostowski, L. et al. Roadmapping the next generation of silicon photonics. Nat. Commun. 15, 751 (2024).

    Article  ADS  Google Scholar 

  4. Ghobadi, M. Emerging optical interconnects for AI systems. In Proc. 2022 Optical Fiber Communications Conference and Exhibition (OFC) Th1G.1 (IEEE, 2022).

  5. Shen, X. et al. Silicon photonic integrated circuits and its application in data center. In Proc. 7th Symposium on Novel Photoelectronic Detection Technology and Applications 2110–2123 (SPIE, 2021).

  6. Xie, C. & Zhang, B. Scaling optical interconnects for hyperscale data center networks. Proc. IEEE 110, 1699–1713 (2022).

    Article  Google Scholar 

  7. Jouppi, N. et al. Tpu v4: an optically reconfigurable supercomputer for machine learning with hardware support for embeddings. In Proc. 50th Annual International Symposium on Computer Architecture 82 (ACM, 2023).

  8. Khani, M. et al. SiP-ML: high-bandwidth optical network interconnects for machine learning training. In Proc. 2021 ACM SIGCOMM 2021 Conference 657–675 (ACM, 2021).

  9. Assefa, S., Xia, F. & Vlasov, Y. A. Reinventing germanium avalanche photodetector for nanophotonic on-chip optical interconnects. Nature 464, 80–84 (2010).

    Article  ADS  Google Scholar 

  10. Gaiarin, S. et al. High speed PAM-8 optical interconnects with digital equalization based on neural network. In Proc. 2016 Asia Communications and Photonics Conference (ACP) 1–3 (IEEE, 2016).

  11. Wang, B. & Mu, J. High-speed Si-Ge avalanche photodiodes. PhotoniX 3, 8 (2022).

    Article  Google Scholar 

  12. Huang, Z. et al. 25 Gbps low-voltage waveguide Si–Ge avalanche photodiode. Optica 3, 793–798 (2016).

    Article  ADS  Google Scholar 

  13. Yuan, Y. et al. OSNR sensitivity analysis for Si-Ge avalanche photodiodes. IEEE Photonics Technol. Lett. 34, 321–324 (2022).

    Article  ADS  Google Scholar 

  14. Yi, L. et al. Waveguide-integrated Ge/Si avalanche photodiode with vertical multiplication region for 1310 nm detection. Photonics 10, 750 (2023).

  15. Siew, S. Y. et al. Review of silicon photonics technology and platform development. J. Lightwave Technol. 39, 4374–4389 (2021).

    Article  ADS  Google Scholar 

  16. Cheng, J. et al. Comparison of coherent and IMDD transceivers for intra datacenter optical interconnects. In Proc. 2019 Optical Fiber Communications Conference and Exhibition (OFC) 1–3 (IEEE, 2019).

  17. Ackert, J. J. et al. 10 Gbps silicon waveguide-integrated infrared avalanche photodiode. Opt. Express 21, 19530–19537 (2013).

    Article  ADS  Google Scholar 

  18. Geis, M. W. et al. Silicon waveguide infrared photodiodes with >35 GHz bandwidth and phototransistors with 50 A/W response. Opt. Express 17, 5193–5204 (2009).

    Article  ADS  Google Scholar 

  19. Li, Y. et al. Sub-bandgap linear-absorption-based photodetectors in avalanche mode in PN-diode-integrated silicon microring resonators. Opt. Lett. 38, 5200–5203 (2013).

    Article  ADS  Google Scholar 

  20. Sakib, M. et al. A 112 Gb/s all-silicon micro-ring photodetector for datacom applications. In Proc. Optical Fiber Communication Conference Th4A.2 (Optica, 2020).

  21. Yuan, Y. et al. Development and modeling of Ge-free microring avalanche photodiode in optical communication band. In Proc. Optical Fiber Communication Conference W3D.4 (Optica, 2022).

  22. Peng, Y. et al. Demonstration of an ultra-high-responsivity all-silicon avalanche photodetectors. In Proc. 2023 Optical Fiber Communications Conference and Exhibition (OFC) W1A.2 (IEEE, 2023).

  23. Yuan, Y. et al. A 4× 100 Gbps DWDM receiver using all-Si microring avalanche photodiodes. In Proc. Optical Fiber Communication Conference W1A.5 (Optica, 2023).

  24. Peng, Y. et al. All-silicon microring avalanche photodiodes with a >65 A/W response. Opt. Lett. 48, 1315–1318 (2023).

    Article  ADS  Google Scholar 

  25. Suzuki, N. et al. 100 Gb/s to 1 Tb/s based coherent passive optical network technology. J. Lightwave Technol. 36, 1485–1491 (2018).

    Article  ADS  Google Scholar 

  26. Palsgaard, M. et al. Efficient first-principles calculation of phonon-assisted photocurrent in large-scale solar-cell devices. Phys. Rev. Appl. 10, 014026 (2018).

    Article  ADS  Google Scholar 

  27. Pile, B. & Taylor, G. Small-signal analysis of microring resonator modulators. Opt. Express 22, 14913–14928 (2014).

    Article  ADS  Google Scholar 

  28. Peng, Y. et al. Small-signal analysis of all-Si microring resonator photodiode. Electronics 11, 183 (2022).

    Article  Google Scholar 

  29. Van, V. Optical Microring Resonators: Theory, Techniques, and Applications (CRC Press, 2016).

  30. Wang, B. et al. A compact model for Si-Ge avalanche photodiodes over a wide range of multiplication gain. J. Lightwave Technol. 37, 3229–3235 (2019).

    Article  ADS  Google Scholar 

  31. Takahashi, K. et al. Design of CPO daughter board with FPGA and 25-Gbaud × 16-channel ultra-compact optical transceivers. In Proc. 2022 IEEE CPMT Symposium Japan (ICSJ). 13–16 (IEEE, 2022).

  32. Dadey, A. A. et al. Considerations for excess noise measurements of low-k-factor Sb-based avalanche photodiodes. J. Opt. Soc. Am. A 40, 1225–1230 (2023).

    Article  ADS  Google Scholar 

  33. McIntyre, R. J. Multiplication noise in uniform avalanche diodes. IEEE Trans. Electron Devices ED-13, 164–168 (1966); https://doi.org/10.1109/T-ED.1966.15651

  34. Tan, C. H. et al. Avalanche noise measurement in thin Si p+-i-n+ diodes. Appl. Phys. Lett. 76, 3926–3928 (2000).

    Article  ADS  Google Scholar 

  35. Hossain, M. M. et al. Low-noise speed-optimized large area CMOS avalanche photodetector for visible light communication. J. Lightwave Technol. 35, 2315–2324 (2017).

    Article  ADS  Google Scholar 

  36. Bai, X. et al. Development of low excess noise SWIR APDs. In Proc. Infrared Technology and Applications XXXVIII (Andresen, B. et al.) (SPIE, 2012).

  37. Nada, M. et al. Inverted InAlAs/InGaAs avalanche photodiode with low–high–low electric field profile. Jpn. J. Appl. Phys. 51, 02BG03 (2012).

    Article  Google Scholar 

  38. Freude, W. et al. Quality metrics for optical signals: eye diagram, Q-factor, OSNR, EVM and BER. In Proc. 2012 14th International Conference on Transparent Optical Networks (ICTON) 1–4 (IEEE, 2012).

  39. Okamoto, D. et al. 112 Gb/s PAM-4 silicon photonics receiver integrated with SiGe-BiCMOS linear TIA. IEEE Photonics Technol. Lett. 34, 189–192 (2022).

    Article  ADS  Google Scholar 

  40. Urata, R. et al. Mission Apollo: landing optical circuit switching at datacenter scale. Preprint at https://arxiv.org/abs/2208.10041 (2022).

  41. Maniotis, P. & Kuchta, D. M. Exploring the benefits of using co-packaged optics in data center and AI supercomputer networks: a simulation-based analysis. J. Opt. Commun. Netw. 16, A143–A156 (2024).

    Article  Google Scholar 

  42. Lischke, S. et al. Ultra-fast germanium photodiode with 3-dB bandwidth of 265 GHz. Nat. Photonics 15, 925–931 (2021).

    Article  ADS  Google Scholar 

  43. Eng, J. Optoelectronic components for communications and sensing. In Proc. Optical Fiber Communication Conference (Optica, 2023).

Download references

Acknowledgements

We thank Advanced Micro Foundry for fabrication.

Author information

Authors and Affiliations

Authors

Contributions

Y.P. designed and conceived the devices. Y.P., Y.Y. and S.C. conceived and conducted the experiments. Y.P. and W.S. developed the model. Z.H., D.L., M.F. and R.B. managed the project and gave important technical advice. All authors reviewed the manuscript.

Corresponding author

Correspondence to Yuan Yuan.

Ethics declarations

Competing interests

The authors declare no competing interests.

Peer review

Peer review information

Nature Photonics thanks Lin Chang, Yunhong Ding and the other, anonymous, reviewer(s) for their contribution to the peer review of this work.

Additional information

Publisher’s note Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.

Supplementary information

Supplementary Information

Supplementary text and Figs. 1–14.

Rights and permissions

Springer Nature or its licensor (e.g. a society or other partner) holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Peng, Y., Yuan, Y., Sorin, W.V. et al. An 8 × 160 Gb s−1 all-silicon avalanche photodiode chip. Nat. Photon. 18, 928–934 (2024). https://doi.org/10.1038/s41566-024-01495-y

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1038/s41566-024-01495-y

Search

Quick links

Nature Briefing

Sign up for the Nature Briefing newsletter — what matters in science, free to your inbox daily.

Get the most important science stories of the day, free in your inbox. Sign up for Nature Briefing