Mks 626a

114492-P1
Rev G, 10/01
MKS Baratron Type

622A/626A/627A/628A/629A
Absolute Pressure Transducers
ZERO
ZERO
Type 622
Pressure
Transducer
+15 VDC-35 mA
PIN SIGNAL
1
Pwr Com
2
Sig Com
3
Sig Output
4
-15 VDC
5
+15 VDC
Chassis
Type 62x
Pressure
Transducer
+ VDC 250 mA
PIN
2
5
6
7
12
15
SIGNAL
Sig Output
Pwr Com
-15 VDC
+15 VDC
Sig Com
Chassis
Copyright 2001 by MKS Instruments, Inc.

All rights reserved. No part of this work may be reproduced or transmitted in any form or by
any means, electronic or mechanical, including photocopying and recording, or by any
information storage or retrieval system, except as may be expressly permitted in writing by MKS
Instruments, Inc.
Printed in the United States of America
Swagelok, VCR, and VCO are registered trademarks of Swagelok Marketing Co., Solon OH
Baratron is a registered trademark of MKS Instruments, Inc., Andover, MA
Inconel is a registered trademark of Inc Alloys International, Huntington, WV
Table of Contents
Table of Contents
Pressure Transducer Safety Information..................................................................................... 1

Symbols Used in This Instruction Manual..................................................................... 1
Symbols Found on the Unit............................................................................................ 2
Safety Procedures and Precautions ................................................................................ 3
Sicherheitshinweise fr den Druckmeumformer ...................................................................... 5
In dieser Betriebsanleitung vorkommende Symbole ..................................................... 5
Erklrung der am Gert angebrachten Symbole ............................................................ 6
Sicherheitsvorschriften und Vorsichtsmanahmen........................................................ 7
Informations relatives la scurit pour le transducteur de pression ......................................... 9
Symboles utiliss dans ce manuel d'utilisation .............................................................. 9
Symboles apparaissant sur l'unit .................................................................................. 10
Mesures de scurit et prcautions ................................................................................ 11
Medidas de seguridad del transductor de presin ....................................................................... 13
Smbolos usados en este manual de instrucciones......................................................... 13
Smbolos hallados en la unidad...................................................................................... 14
Procedimientos y precauciones de seguridad................................................................. 15
Chapter One: General Information............................................................................................. 17
Introduction.................................................................................................................... 17
How This Manual is Organized ..................................................................................... 18
Customer Support .......................................................................................................... 18
Chapter Two: Installation........................................................................................................... 19
How To Unpack ............................................................................................................. 19
Unpacking Checklist ......................................................................................... 19
Interface Cables.............................................................................................................. 20
Generic Shielded Cable Guidelines .................................................................. 21
Product Location and Requirements .............................................................................. 23
Fittings ........................................................................................................................... 24
Setup............................................................................................................................... 25
iii
Table of Contents
Checking the Transducer Zero.......................................................................... 25

Coarse Zero Adjustment ................................................................................... 27
Dimensions........................................................................................................ 29
Electrical Information .................................................................................................... 30
Connectors ........................................................................................................ 31
Chapter Three: Overview........................................................................................................... 33
General ........................................................................................................................... 33
Sensor............................................................................................................................. 33
Signal Conditioner/Electronics ...................................................................................... 33
Differences in the Type 629 Unit................................................................................... 34
Chapter Four: Operation ............................................................................................................ 35
General ........................................................................................................................... 35
Lowest Suggested Pressure Available for Reading .......................................... 35
Lowest Suggested Pressure to Use for Control................................................. 35
How to Use the External Zero on the Type 629 Unit .................................................... 37
Adjusting the External Zero.............................................................................. 37
Rejecting Common-Mode Voltages.................................................................. 37
Chapter Five: Maintenance and Troubleshooting...................................................................... 39
General ........................................................................................................................... 39
Zero Adjustment............................................................................................................. 39
Troubleshooting Chart ................................................................................................... 40
Appendix A: Product Specifications.......................................................................................... 41
MKS Types 622 and 626 Units...................................................................................... 41
MKS Type 627 and 629 Units ....................................................................................... 42
MKS Type 627 and 629 50 mTorr Units ....................................................................... 43
MKS Type 628 Units ..................................................................................................... 44
Appendix B: Model Code Explanation...................................................................................... 45
Model Code.................................................................................................................... 45
Index............................................................................................................................................ 47
iv
List of Figures and Tables
Figures
Figure 1: Preferred Method To Connect an Overall Metal Braided Shielded Cable................. 22
Figure 2: Alternate Method To Connect an Overall Metal Braided Shielded Cable................. 22
Figure 3: Metal Single and Double Ferrule Compression-type Vacuum Fittings ..................... 24
Figure 4: Location of the Zero Pot on Transducer Endcaps ...................................................... 26
Figure 5: Location of the COARSE ZERO Adjustment Control............................................... 27
Figure 6: Dimensions of the Types 622, 626, 627, 628, and 629 Transducers.......................... 29
Figure 7: Power, Signal, and Chassis Grounding Scheme......................................................... 30
Figure 8: Using Pin 7 as an External Zero Adjustment ............................................................. 37
Figure 9: Type 629 Transducers Connected to Reject Common Mode Voltages ..................... 38
Tables
Table 1: Definition of Symbols Found on the Unit ........................................................................2
Tabelle 2: Bedeutung der am Gert angebrachten Symbole...........................................................6
Tableau 3: Dfinition des symboles apparaissant sur l'unit ........................................................10
Tabla 4: Definicin de los smbolos hallados en la unidad ...........................................................14
Table 5: Interface Cables ..............................................................................................................20
Table 6: Highest Pressure Suggested for Proper Zero Adjustment ..............................................26
Table 7: Required Inputs for Types 622, 626, 627, 628, and 629 Transducers............................30
Table 8: Pinout of Type 622 Transducer ......................................................................................31
Table 9: Pinout of Types 626, 627, and 628 Transducers ............................................................31
Table 10: Pinout of Type 629 Transducer ....................................................................................32
Table 11: Suggested Pressures for Reading and Control..............................................................36
Table 12: Troubleshooting Chart ..................................................................................................40
vi
Pressure Transducer Safety Information
Symbols Used in This Instruction Manual
Symbols Used in This Instruction Manual
Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual.
Warning
Caution
Note
The WARNING sign denotes a hazard to personnel. It calls

attention to a procedure, practice, condition, or the like,
which, if not correctly performed or adhered to, could result in
injury to personnel.
The CAUTION sign denotes a hazard to equipment. It calls

attention to an operating procedure, practice, or the like, which, if
not correctly performed or adhered to, could result in damage to or
destruction of all or part of the product.
The NOTE sign denotes important information. It calls attention to a

procedure, practice, condition, or the like, which is essential to highlight.
Symbols Found on the Unit
Symbols Found on the Unit

The following table describes symbols that may be found on the unit.
Definition of Symbols Found on the Unit
|
Earth (ground)
IEC 417, No.5017
Protective earth
(ground)
IEC 417, No.5019
Equipotentiality
IEC 417, No.5021
Direct current
IEC 417, No.5031
Alternating current
IEC 417, No.5032
Both direct and

alternating current
IEC 417, No.5033-a
Class ll equipment
IEC 417, No.5172-a
Three phase
alternating current
IEC 617-2 No.020206
Caution, refer to
accompanying
documents
ISO 3864, No.B.3.1
Caution, risk of
electric shock
ISO 3864, No.B.3.6
Caution, hot surface

IEC 417, No.5041
On (Supply)
IEC 417, No.5007
Frame or chassis
IEC 417, No.5020
Off (Supply)
IEC 417, No.5008
Table 1: Definition of Symbols Found on the Unit
Safety Procedures and Precautions

Observe the following general safety precautions during all phases of operation of this
instrument. Failure to comply with these precautions or with specific warnings elsewhere in
this manual violates safety standards of intended use of the instrument and may impair the
protection provided by the equipment. MKS Instruments, Inc. assumes no liability for the
customers failure to comply with these requirements.
DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT
Do not install substitute parts or perform any unauthorized modification to the instrument.
Return the instrument to an MKS Calibration and Service Center for service and repair to ensure
that all safety features are maintained.
SERVICE BY QUALIFIED PERSONNEL ONLY
Operating personnel must not attempt component replacement and internal adjustments. Any
service must be made by qualified service personnel only.
USE CAUTION WHEN OPERATING WITH HAZARDOUS MATERIALS
If hazardous materials are used, users must take responsibility to observe the proper safety
precautions, completely purge the instrument when necessary, and ensure that the material used
is compatible with the materials in this product, including any sealing materials.
PURGE THE INSTRUMENT
After installing the unit, or before removing it from a system, purge the unit completely with a
clean, dry gas to eliminate all traces of the previously used flow material.
USE PROPER PROCEDURES WHEN PURGING
This instrument must be purged under a ventilation hood, and gloves must be worn for
protection.
DO NOT OPERATE IN AN EXPLOSIVE ENVIRONMENT
To avoid explosion, do not operate this product in an explosive environment unless it has been
specifically certified for such operation.
USE PROPER FITTINGS AND TIGHTENING PROCEDURES
All instrument fittings must be consistent with instrument specifications, and compatible with the
intended use of the instrument. Assemble and tighten fittings according to manufacturers
directions.
CHECK FOR LEAK-TIGHT FITTINGS

Carefully check all vacuum component connections to ensure leak-tight installation.
OPERATE AT SAFE INLET PRESSURES
Never operate at pressures higher than the rated maximum pressure (refer to the product
specifications for the maximum allowable pressure).
INSTALL A SUITABLE BURST DISC
When operating from a pressurized gas source, install a suitable burst disc in the vacuum system
to prevent system explosion should the system pressure rise.
KEEP THE UNIT FREE OF CONTAMINANTS
Do not allow contaminants to enter the unit before or during use. Contamination such as dust,
dirt, lint, glass chips, and metal chips may permanently damage the unit or contaminate the
process.
ALLOW PROPER WARM UP TIME FOR TEMPERATURE-CONTROLLED UNITS
Temperature-controlled units will only meet specifications when sufficient time is allowed for
the unit to meet, and stabilize at, the designed operating temperature. Do not zero or calibrate the
unit until the warm up is complete.
Sicherheitshinweise fr den Druckmeumformer
In dieser Betriebsanleitung vorkommende Symbole
In dieser Betriebsanleitung vorkommende Symbole
Bedeutung der mit WARNUNG!, VORSICHT! und HINWEIS gekennzeichneten Abstze in

dieser Betriebsanleitung.
Warnung!
Das Symbol WARNUNG! weist auf eine Gefahr fr das

Bedienpersonal hin. Es macht auf einen Arbeitsablauf, eine
Arbeitsweise, einen Zustand oder eine sonstige Gegebenheit
aufmerksam, deren unsachgeme Ausfhrung bzw.
ungengende Bercksichtigung zu Verletzungen fhren kann.
Vorsicht!
Das Symbol VORSICHT! weist auf eine Gefahr fr das Gert hin. Es
macht auf einen Bedienungsablauf, eine Arbeitsweise oder eine
sonstige Gegebenheit aufmerksam, deren unsachgeme Ausfhrung
bzw. ungengende Bercksichtigung zu einer Beschdigung oder
Zerstrung des Gertes oder von Teilen des Gertes fhren kann.
Hinweis
Das Symbol HINWEIS macht auf wichtige Informationen bezglich eines

Arbeitsablaufs, einer Arbeitsweise, eines Zustands oder einer sonstige
Gegebenheit aufmerksam.
Erklrung der am Gert angebrachten Symbole
Erklrung der am Gert angebrachten Symbole

Nachstehender Tabelle sind die Bedeutungen der Symbole zu entnehmen, die am Gert
angebracht sein knnen.
Bedeutung der am Gert angebrachten Symbole
|
Ein (Energie)
IEC 417, No.5007
Aus (Energie)
IEC 417, No.5008
Erdanschlu
IEC 417, No.5017
Schutzleiteranschlu
IEC 417, No.5019
Masseanschlu
IEC 417, No.5020
Aquipotentialanschlu
IEC 417, No.5021
Gleichstrom
IEC 417, No.5031
Wechselstrom
IEC 417, No.5032
Gleich- oder
Wechselstrom
IEC 417, No.5033-a
Durchgngige
doppelte oder
verstrkte Isolierung
IEC 417, No.5172-a
IEC 617-2, No.020206
Warnung vor einer

Gefahrenstelle
(Achtung, Dokumentation beachten)
ISO 3864, No.B.3.1
Warnung vor
gefhrlicher
elektrischer Spannung
ISO 3864, No.B.3.6
Hhere Temperatur
an leicht
zugnglichen Teilen
IEC 417, No.5041
DreileiterWechselstrom
(Drehstrom)
Tabelle 2: Bedeutung der am Gert angebrachten Symbole
Sicherheitsvorschriften und Vorsichtsmanahmen

Folgende allgemeine Sicherheitsvorschriften sind whrend allen Betriebsphasen dieses Gertes
zu befolgen. Eine Miachtung der Sicherheitsvorschriften und sonstiger Warnhinweise in dieser
Betriebsanleitung verletzt die fr dieses Gert und seine Bedienung geltenden
Sicherheitsstandards, und kann die Schutzvorrichtungen an diesem Gert wirkungslos machen.
MKS Instruments, Inc. haftet nicht fr Miachtung dieser Sicherheitsvorschriften seitens des
Kunden.
Niemals Teile austauschen oder nderungen am Gert vornehmen!
Ersetzen Sie keine Teile mit baugleichen oder hnlichen Teilen, und nehmen Sie keine
eigenmchtigen nderungen am Gert vor. Schicken Sie das Gert zwecks Wartung und
Reparatur an den MKS-Kalibrierungs- und -Kundendienst ein. Nur so wird sichergestellt, da
alle Schutzvorrichtungen voll funktionsfhig bleiben.
Wartung nur durch qualifizierte Fachleute!
Das Auswechseln von Komponenten und das Vornehmen von internen Einstellungen darf nur
von qualifizierten Fachleuten durchgefhrt werden, niemals vom Bedienpersonal.
Vorsicht beim Arbeiten mit gefhrlichen Stoffen!
Wenn gefhrliche Stoffe verwendet werden, mu der Bediener die entsprechenden
Sicherheitsvorschriften genauestens einhalten, das Gert, falls erforderlich, vollstndig splen,
sowie sicherstellen, da der Gefahrstoff die am Gert verwendeten Materialien, insbesondere
Dichtungen, nicht angreift.
Splen des Gertes mit Gas!
Nach dem Installieren oder vor dem Ausbau aus einem System mu das Gert unter Einsatz eines
reinen Trockengases vollstndig gesplt werden, um alle Rckstnde des Vorgngermediums zu
entfernen.
Anweisungen zum Splen des Gertes
Das Gert darf nur unter einer Ablufthaube gesplt werden. Schutzhandschuhe sind zu tragen.
Gert nicht zusammen mit explosiven Stoffen, Gasen oder Dmpfen benutzen!
Um der Gefahr einer Explosion vorzubeugen, darf dieses Gert niemals zusammen mit (oder in
der Nhe von) explosiven Stoffen aller Art eingesetzt werden, sofern es nicht ausdrcklich fr
diesen Zweck zugelassen ist.
Anweisungen zum Installieren der Armaturen!

Alle Anschlustcke und Armaturenteile mssen mit der Gertespezifikation bereinstimmen,
und mit dem geplanten Einsatz des Gertes kompatibel sein. Der Einbau, insbesondere das
Anziehen und Abdichten, mu gem den Anweisungen des Herstellers vorgenommen werden.
Verbindungen auf Undichtigkeiten prfen!
berprfen Sie sorgfltig alle Verbindungen der Vakuumkomponenten auf undichte Stellen.
Gert nur unter zulssigen Anschludrcken betreiben!
Betreiben Sie das Gert niemals unter Drcken, die den maximal zulssigen Druck (siehe
Produktspezifikationen) bersteigen.
Geeignete Berstscheibe installieren!
Wenn mit einer unter Druck stehenden Gasquelle gearbeitet wird, sollte eine geeignete
Berstscheibe in das Vakuumsystem installiert werden, um eine Explosionsgefahr aufgrund von
steigendem Systemdruck zu vermeiden.
Verunreinigungen im Gert vermeiden!
Stellen Sie sicher, da Verunreinigungen jeglicher Art weder vor dem Einsatz noch whrend des
Betriebs in das Instrumenteninnere gelangen knnen. Staub- und Schmutzpartikel, Glassplitter
oder Metallspne knnen das Gert dauerhaft beschdigen oder Proze und Mewerte
verflschen.
Bei Gerten mit Temperaturkontrolle korrekte Anwrmzeit einhalten!
Temperaturkontrollierte Gerte arbeiten nur dann gem ihrer Spezifikation, wenn gengend Zeit
zum Erreichen und Stabilisieren der Betriebstemperatur eingerumt wird. Kalibrierungen und
Nulleinstellungen sollten daher nur nach Abschlu des Anwrmvorgangs durchgefhrt werden.
Informations relatives la scurit pour le

transducteur de pression
Symboles utiliss dans ce manuel d'utilisation
Informations relatives la scurit pour le transducteur

de pression
Symboles utiliss dans ce manuel d'utilisation
Dfinitions des indications AVERTISSEMENT, ATTENTION, et REMARQUE utilises dans

ce manuel.
Avertissement
Attention
Remarque
L'indication AVERTISSEMENT signale un danger pour le

personnel. Elle attire l'attention sur une procdure, une
pratique, une condition, ou toute autre situation
prsentant un risque d'accident pour le personnel, en
cas d'excution incorrecte ou de non respect des
consignes.
L'indication ATTENTION signale un danger pour l'appareil.

Elle attire l'attention sur une procdure d'exploitation, une
pratique, ou toute autre situation, prsentant un risque
d'endommagement ou de destruction d'une partie ou de la
totalit de l'appareil, en cas d'excution incorrecte ou de non
respect des consignes.
L'indication REMARQUE signale une information importante. Elle

attire l'attention sur une procdure, une pratique, une condition, ou
toute autre situation, prsentant un intrt particulier.
Symboles apparaissant sur l'unit

Symboles apparaissant sur l'unit

Le tableau suivant dcrit les symboles pouvant apparatre sur l'unit.
Dfinition des symboles apparaissant sur l'unit
|
Marche
(sous tension)
IEC 417, No.5007
Arrt (hors tension)

IEC 417, No.5008
Terre (masse)
IEC 417, No.5017
Terre de protection
(masse)
IEC 417, No.5019
Masse
IEC 417, No.5020
Equipotentialit
IEC 417, No.5021
Courant continu
IEC 417, No.5031
Courant alternatif
IEC 417, No.5032
Courant continu et
alternatif
IEC 417, No.5033-a
Matriel de classe II
IEC 417, No.5172-a
Courant alternatif
triphas
IEC 617-2, No.020206
Attention : se reporter
la documentation
ISO 3864, No.B.3.1
Attention : risque de
choc lectrique
ISO 3864, No.B.3.6
Attention : surface
brlante
IEC 417, No.5041
Tableau 3: Dfinition des symboles apparaissant sur l'unit
10

Mesures de scurit et prcautions

Prendre les prcautions gnrales de scurit suivantes pendant toutes les phases d'exploitation
de cet appareil. Le non respect des ces prcautions ou des avertissements contenus dans ce
manuel constitue une violation des normes de scurit relatives l'utilisation de l'appareil et
peut diminuer la protection fournie par l'appareil. MKS Instruments, Inc. n'assume aucune
responsabilit concernant le non respect des consignes par les clients.
PAS DE SUBSTITUTION DE PICES OU DE MODIFICATION DE L'APPAREIL
Ne pas installer des pices de substitution ou effectuer des modifications non autorises sur
l'appareil. Renvoyer l'appareil un centre de service et de calibrage MKS pour tout dpannage ou
rparation afin de garantir le l'intgrit des dispositifs de scurit.
DPANNAGE UNIQUEMENT PAR DU PERSONNEL QUALIFI
Le personnel d'exploitation ne doit pas essayer de remplacer des composants ou de faire des
rglages internes. Tout dpannage doit tre uniquement effectu par du personnel qualifi.
PRCAUTION EN CAS D'UTILISATION AVEC DES PRODUITS DANGEREUX
Si des produits dangereux sont utiliss, l'utilisateur est responsable de la prise des mesures de
prcaution appropries, de la purge complte de l'appareil quand cela est ncessaire, et de la
garantie que les produits utiliss sont compatibles avec les composants de cet appareil, y compris
les matriaux d'tanchit.
PURGE DE L'APPAREIL
Aprs l'installation de l'unit, ou avant son enlvement d'un systme, purger l'unit compltement
avec un gaz propre et sec afin d'liminer toute trace du produit de flux utilis prcdemment.
UTILISATION DES PROCDURES APPROPRIES POUR LA PURGE
Cet appareil doit tre purg sous une hotte de ventilation, et il faut porter des gants de protection.
PAS D'EXPLOITATION DANS UN ENVIRONNEMENT EXPLOSIF
Pour viter toute explosion, ne pas utiliser cet appareil dans un environnement explosif, sauf en
cas d'homologation spcifique pour une telle exploitation.
UTILISATION D'QUIPEMENTS APPROPRIS ET PROCDURES DE SERRAGE
Tous les quipements de l'appareil doivent tre cohrents avec ses spcifications, et compatibles
avec l'utilisation prvue de l'appareil. Assembler et serrer les quipements conformment aux
directives du fabricant.
11

VRIFICATION DE L'TANCHIT DES CONNEXIONS

Vrifier attentivement toutes les connexions des composants pour le vide afin de garantir
l'tanchit de l'installation.
EXPLOITATION AVEC DES PRESSIONS D'ENTRE NON DANGEREUSES
Ne jamais utiliser des pressions suprieures la pression nominale maximum (se reporter aux
spcifications de l'unit pour la pression maximum admissible).
INSTALLATION D'UN DISQUE D'CHAPPEMENT ADAPT
En cas d'exploitation avec une source de gaz pressuris, installer un disque d'chappement adapt
dans le systme vide, afin d'viter une explosion du systme en cas d'augmentation de la
pression.
MAINTIEN DE L'UNIT L'ABRI DES CONTAMINATIONS
Ne pas laisser des produits contaminants pntrer dans l'unit avant ou pendant l'utilisation. Des
produits contaminants tels que des poussires et des fragments de tissu, de glace et de mtal
peuvent endommager l'unit d'une manire permanente ou contaminer le processus.
RESPECT DU TEMPS D'CHAUFFEMENT APPROPRI POUR LES UNITS
TEMPRATURE CONTRLE
Les units temprature contrle atteignent leurs spcifications uniquement quand on leur
laisse un temps suffisant pour atteindre d'une manire stable la temprature d'exploitation. Ne pas
remettre zro ou calibrer l'unit tant que l'chauffement n'est pas termin.
12
Medidas de seguridad del transductor de presin
Smbolos usados en este manual de instrucciones
Smbolos usados en este manual de instrucciones
Definiciones de los mensajes de advertencia, precaucin y de las notas usados en el manual.
Advertencia
El smbolo de advertencia indica la posibilidad de que se

produzcan daos personales. Pone de relieve un
procedimiento, prctica, estado, etc. que en caso de no
realizarse u observarse correctamente puede causar daos
personales.
Precaucin
El smbolo de precaucin indica la posibilidad de producir daos

al equipo. Pone de relieve un procedimiento operativo, prctica,
estado, etc. que en caso de no realizarse u observarse
correctamente puede causar daos o la destruccin total o parcial
del equipo.
Nota
El smbolo de notas indica informacin de importancia. Este smbolo

pone de relieve un procedimiento, prctica o condicin cuyo
conocimiento es esencial destacar.
13
Smbolos hallados en la unidad
Smbolos hallados en la unidad

La tabla siguiente contiene los smbolos que puede hallar en la unidad.
Definicin de los smbolos hallados en la unidad
|
Encendido
(alimentacin elctrica)
IEC 417, N 5007
Apagado
(alimentacin elctrica)
IEC 417, N 5008
Puesta a tierra
IEC 417, N 5017
Proteccin a tierra
IEC 417, N 5019
Caja o chasis
IEC 417, N 5020
Equipotencialidad
IEC 417, N 5021
Corriente continua
IEC 417, N 5031
Corriente alterna
IEC 417, N 5032
Corriente continua y
alterna
IEC 417, N 5033-a
Equipo de clase II
IEC 417, N 5172-a
Corriente alterna
trifsica
IEC 617-2, N 020206
Precaucin. Consulte
los documentos
adjuntos
ISO 3864, N B.3.1
Precaucin. Riesgo
de descarga elctrica
ISO 3864, N B.3.6
Precaucin. Superficie
caliente
IEC 417, N 5041
Tabla 4: Definicin de los smbolos hallados en la unidad
14
Procedimientos y precauciones de seguridad

Las precauciones generales de seguridad descritas a continuacin deben observarse durante
todas las etapas de funcionamiento del instrumento. La falta de cumplimiento de dichas
precauciones o de las advertencias especficas a las que se hace referencia en el manual,
constituye una violacin de las normas de seguridad establecidas para el uso previsto del
instrumento y podra anular la proteccin proporcionada por el equipo. Si el cliente no cumple
dichas precauciones y advertencias, MKS Instruments, Inc. no asume responsabilidad legal
alguna.
NO UTILICE PIEZAS NO ORIGINALES O MODIFIQUE EL INSTRUMENTO
No instale piezas que no sean originales ni modifique el instrumento sin autorizacin. Para
asegurar el correcto funcionamiento de todos los dispositivos de seguridad, enve el instrumento
al Centro de servicio y calibracin de MKS toda vez que sea necesario repararlo o efectuar tareas
de mantenimiento.
LAS REPARACIONES DEBEN SER EFECTUADAS NICAMENTE POR TCNICOS
AUTORIZADOS
Los operarios no deben intentar reemplazar los componentes o realizar tareas de ajuste en el
interior del instrumento. Las tareas de mantenimiento o reparacin deben ser realizadas
nicamente por personal autorizado.
TENGA CUIDADO CUANDO TRABAJE CON MATERIALES TXICOS
Cuando se utilicen materiales txicos, es responsabilidad de los operarios tomar las medidas de
seguridad correspondientes, purgar totalmente el instrumento cuando sea necesario y comprobar
que el material utilizado sea compatible con los materiales del instrumento e inclusive, con todos
los materiales de sellado.
PURGUE EL INSTRUMENTO
Una vez instalada la unidad o antes de retirarla del sistema, purgue completamente la unidad con
gas limpio y seco para eliminar todo resto de la sustancia lquida empleada anteriormente.
USE PROCEDIMIENTOS ADECUADOS PARA REALIZAR LA PURGA
El instrumento debe purgarse debajo de una campana de ventilacin y deben utilizarse guantes
protectores.
NO HAGA FUNCIONAR EL INSTRUMENTO EN AMBIENTES CON RIESGO DE
EXPLOSIN
Para evitar que se produzcan explosiones, no haga funcionar este instrumento en un ambiente con
riesgo de explosiones, excepto cuando el mismo haya sido certificado especficamente para tal
uso.
15
USE ACCESORIOS ADECUADOS Y REALICE CORRECTAMENTE LOS

PROCEDIMIENTOS DE AJUSTE
Todos los accesorios del instrumento deben cumplir las especificaciones del mismo y ser
compatibles con el uso que se debe dar al instrumento. Arme y ajuste los accesorios de acuerdo
con las instrucciones del fabricante.
COMPRUEBE QUE LAS CONEXIONES SEAN A PRUEBA DE FUGAS
Inspeccione cuidadosamente las conexiones de los componentes de vaco para comprobar que
hayan sido instalados a prueba de fugas.
HAGA FUNCIONAR EL INSTRUMENTO CON PRESIONES DE ENTRADA SEGURAS
No haga funcionar nunca el instrumento con presiones superiores a la mxima presin nominal
(en las especificaciones del instrumento hallar la presin mxima permitida).
INSTALE UNA CPSULA DE SEGURIDAD ADECUADA
Cuando el instrumento funcione con una fuente de gas presurizado, instale una cpsula de
seguridad adecuada en el sistema de vaco para evitar que se produzcan explosiones cuando suba
la presin del sistema.
MANTENGA LA UNIDAD LIBRE DE CONTAMINANTES
No permita el ingreso de contaminantes en la unidad antes o durante su uso. Los productos
contaminantes tales como polvo, suciedad, pelusa, lascas de vidrio o virutas de metal pueden
daar irreparablemente la unidad o contaminar el proceso.
CALIENTE ADECUADAMENTE LAS UNIDADES CONTROLADAS POR MEDIO DE
TEMPERATURA
Las unidades controladas por medio de temperatura funcionarn de acuerdo con las
especificaciones slo cuando se las caliente durante el tiempo suficiente para permitir que
lleguen y se estabilicen a la temperatura de operacin indicada. No calibre la unidad y no la
ponga en cero hasta que finalice el procedimiento de calentamiento.
16
Chapter One: General Information
Introduction
Introduction
The MKS Baratron Type 622A, 626A, 627A, 628A, and 629A Absolute Pressure Transducers
are part of the MKS family of general purpose pressure transducers designed to provide accurate,
reliable, and repeatable pressure measurements in the range from 1K Torr to as low as 0.05 Torr
F.S. (627 and 629). These instruments operate with 15 VDC (5%) input @ 35 mA, 250 mA,
or 500 mA, depending upon the unit, and provide 0 to 10 VDC output linear with pressure. All
instruments expose only Inconel to the process permitting use with corrosive or dirty gases and
eliminating contamination of the process with transducer materials. Measurements are
independent of gas composition and all of the units have a minimum measuring range of four
decades.
Using the latest single-sided, dual-electrode Inconel transducer design, coupled with a low
impedance, fixed-frequency bridge signal conditioner, these instruments are capable of
withstanding high overpressure conditions (45 psia) with minimal or no shifts in output over their
range. The advanced bridge signal conditioning technology provides high accuracy and
operation which is extremely temperature-stable at operating pressure.
Protection from RF interference and noisy electrical environments is increased by the use of a
metal case, by internal design elements, and by the use of surge and ESD suppression networks
and RFI filtering on all inputs and outputs.
The Types 622 and 626 transducers have an accuracy of 0.25% of reading, with the exception of
the 626A 0.10T which has an accuracy of 0.50% of reading (optional 0.15% of reading, 10Torr
to 1000 Torr only). The units are identical except for their connectors; the 622 unit has a 5-pin
terminal block connector and the 626 unit has a 15-pin Type D connector. These instruments
have been developed for applications requiring a small, economical transducer, which delivers
accurate and repeatable measurements with a resolution of 1 x 10-4 F.S.
The Types 627, 628, and 629 instruments are designed specifically to meet the needs of vacuum
process systems where environmental and process conditions are particularly demanding.
Temperature control of the transducer minimizes the effects of ambient or process temperature
variations typically encountered in process line environments. The 627 and 629 transducers
control the transducer temperature at 45 C and the 628 unit controls the transducer temperature
at 100 C, thereby minimizing contamination from the process. The Type 627 and 629
transducers have an accuracy of 0.12% of reading (0.1 and 0.05 Torr units have an accuracy of
0.15% of reading), and the Type 628 transducer has an accuracy of 0.25% of reading.
17
How This Manual is Organized
How This Manual is Organized

This manual is designed to provide information and instructions in the proper installation,
operation, and maintenance of the MKS Types 622, 626, 627, 628, and 629 Absolute Pressure
Transducers. Product specifications are provided at the end of the manual.
Before installing your absolute pressure transducer in a system and/or operating it,
carefully read and familiarize yourself with all precautionary notes in the Safety Messages
and Procedures section at the front of this manual. In addition, observe and obey all
WARNING and CAUTION notes provided throughout the manual.
Chapter One, General Information, (this chapter) introduces the product and describes the
organization of the manual.
Chapter Two, Installation, explains the environmental requirements and describes how to mount
the instrument in your system.
Chapter Three, Overview, gives a brief description of the instrument and its functionality.
Chapter Four, Operation, describes how to use the instrument and explains all the functions and
features.
Chapter Five, Maintenance and Troubleshooting, provides maintenance and troubleshooting
information.
Appendix A, Product Specifications, lists the specifications of the instrument.
Appendix B, Model Code Explanation, describes the model code used to order the instrument.
Customer Support
Standard maintenance and repair services are available at all of our regional MKS Calibration
and Service Centers, listed on the back cover. In addition, MKS accepts the instruments of other
manufacturers for recalibration using the Primary and Transfer Standard calibration equipment
located at all of our regional service centers. Should any difficulties arise in the use of your
Type 622, 626, 627, 628, or 629 instrument, or to obtain information about companion products
MKS offers, contact any authorized MKS Calibration and Service Center. If it is necessary to
return the instrument to MKS, please obtain an ERA Number (Equipment Return Authorization
Number) from the MKS Calibration and Service Center before shipping. The ERA Number
expedites handling and ensures proper servicing of your instrument.
Please refer to the inside of the back cover of this manual for a list of MKS Calibration and
Service Centers.
Warning
All returns to MKS Instruments must be free of harmful,

corrosive, radioactive, or toxic materials.
18
Chapter Two: Installation
How To Unpack
How To Unpack
MKS has carefully packed the Type 622/626/627/628/629 unit so that it will reach you in perfect
operating order. Upon receiving the unit, however, you should check for defects, cracks, broken
connectors, etc., to be certain that damage has not occurred during shipment.
Note
Do not discard any packing materials until you have completed your
inspection and are sure the unit arrived safely.
If you find any damage, notify your carrier and MKS immediately. If it is necessary to return the
unit to MKS, obtain an ERA Number (Equipment Return Authorization Number) from the MKS
Service Center before shipping. Please refer to the inside of the back cover of this manual for a
list of MKS Calibration and Service Centers.
Unpacking Checklist
Standard Equipment:
The Type 622, 626, 627, 628, or 629 Absolute Pressure Transducer (specified at time of
order).
The Type 622 transducer comes with a mating connector for the transducers 5-pin terminal
block.
Optional Equipment:
The Types 622, 626, 627, 628, and 629 transducers are compatible with:
Most MKS Pressure, Flow, Flow Ratio, and Throttling Valve Controllers
Most MKS Power Supply/Readouts
Optional RM.-6 rack mount kit permits mounting one or two Readouts and/or Controllers in
a 19 rack
Appropriate cables (Refer to Interface Cables, page 20, for information.)
Electrical Connector Accessories Kit, 62XA-K1 (where 62X is either 626, 627, 628, or
629)includes a mate for the electrical connector
19
Interface Cables
Interface Cables
As of January 1, 1996, most products shipped to the European Community must comply with the
EMC Directive 89/336/EEC, which covers radio frequency emissions and immunity tests. In
addition, as of January 1, 1997, some products shipped to the European Community must also
comply with the Product Safety Directive 92/59/EEC and Low Voltage Directive 73/23/EEC,
which cover general safety practices for design and workmanship. MKS products that meet
these requirements are identified by application of the CE Mark.
To ensure compliance with EMC Directive 89/336/EEC, an overall metal braided shielded cable,
properly grounded at both ends, is required during use. No additional installation requirements
are necessary to ensure compliance with Directives 92/59/EEC and 73/23/EEC.
Note
1. An overall metal braided, shielded cable, properly grounded at both

ends, is required during use to meet CE specifications.
2. To order an overall metal braided shielded cable, add an S after the
cable type designation. For example, to order a cable to connect a
627 unit to a 146 unit, use part number CB259-5-XX, where XX
designates the cable length; for a braided, shielded cable use part
number CB259S-5-XX.
Interface Cables
Product
PDR-C-1C/2C, PDR-5B, PDR-D-1
146, 186, 651, 652, 660
622
CB473-1-10
CB112-2-10
626
CB127-1-10
CB259-5-10
627
CB127-1-10
CB259-5-10
628
CB127-1-10
CB259-5-10
629
* Not supported by MKS power supply/readout and controllers

Table 5: Interface Cables
For cables connecting to non-MKS products, MKS can provide normal shielding or braided
shielded cable assemblies in a nominal 10 (3m) length, terminating in flying leads (pigtail)
fashion at both ends. Braided shielded cable assemblies are recommended if the environment
contains high EMI/RFI noise.
The connector pinout is listed on the transducer endcaps and in Table 8 and Table 9, page 31,
and Table 10, page 32.
20
Interface Cables
Generic Shielded Cable Guidelines

Should you choose to manufacture your own cables, follow the guidelines listed below:
1. The cable must have an overall metal braided shield, covering all wires. Neither aluminum
foil nor spiral shielding will be as effective; using either may nullify regulatory compliance.
2. The connectors must have a metal case which has direct contact to the cables shield on the
whole circumference of the cable. The inductance of a flying lead or wire from the shield to
the connector will seriously degrade the shields effectiveness. The shield should be
grounded to the connector before its internal wires exit.
3. With very few exceptions, the connector(s) must make good contact to the devices case
(ground). Good contact is about 0.01 ohms; and the ground should surround all wires.
Contact to ground at just one point may not suffice.
4. For shielded cables with flying leads at one or both ends; it is important at each such end, to
ground the shield before the wires exit. Make this ground with absolute minimum length.
Refer to Figures 1 and 2, page 22. (A inch piece of #22 wire may be undesirably long
since it has approximately 5 nH of inductance, equivalent to 31 ohms at 1000 MHz). After
picking up the braids ground, keep wires and braid flat against the case. With very few
exceptions, grounded metal covers are not required over terminal strips. If one is required, it
will be stated in the Declaration of Conformity or in the instruction manual.
5. In selecting the appropriate type and wire size for cables, consider:
A. The voltage ratings.
B. The cumulative I2R heating of all the conductors (keep them safely cool).
C. The IR drop of the conductors, so that adequate power or signal voltage gets to the device.
D. The capacitance and inductance of cables which are handling fast signals, (such as data
lines or stepper motor drive cables).
E. That some cables may need internal shielding from specific wires to others; please see the
instruction manual for details regarding this matter.
21
Interface Cables
Example 1: Preferred Method To Connect Cable

(shown on a transducer)
Metal Cable Clamp
Screw
Transducer
Split Lock Washer

Overall Insulation
(if present)
External Tooth Lock Washer
Bare Metal Cable Clamp

Making Firm Contact To Braid
Transducer Housing
Braid Here Is Desirable

(but not usually necessary)
Optional Plastic or Metal Cable

Clamp (For Physical Strain Relief)
Keep Wires and Braid

Flat Against Case
Figure 1: Preferred Method To Connect an Overall Metal Braided Shielded Cable

Example 2: Alternate Method To Connect Cable
(shown on a transducer)
Transducer
Braid Strands Twisted Screw

Split Lock Washer
Under Washer
Flat Washers
External Tooth Lock Washer
Overall Insulation
(if present)
Transducer Housing
Optional Plastic or Metal Cable

Clamp (For Physical Strain Relief)
Keep Wires Flat
Against Case
Figure 2: Alternate Method To Connect an Overall Metal Braided Shielded Cable

Use this method when cable clamp is not available
22
Product Location and Requirements
Product Location and Requirements

Types 622 and 626:
Ambient operating temperature should remain between 0 C and 50 C (32 F and 122 F)
626 0.01 Torr ambient operating temperature should remain between 15C and 40C (59F
and 104F)
Input required is 15 VDC (5%) @ 35 mA (maximum) with <20 mV p-p noise and ripple
Type 627 and 629:
Type 628:
For additional product requirements refer to Appendix A: Product Specifications, page 41.
23
Fittings
Fittings
The transducer port will easily carry the weight of the transducer. The following is a list of
available fittings:
diameter (12.7 mm) tubulation
NW-16-KF
Swagelok 8-VCR (female)
Swagelok 8-VCO (female)
Mini-CF
Caution
MKS does not warranty the 622, 626, 627, 628, or 629 transducer
when single or double metal ferrule compression-type vacuum
fittings (shown in Figure 3, page 24) are used because damage will
occur to the transducer when improper tightening procedures are
followed.
Double Ferrule
Single Ferrule
Figure 3: Metal Single and Double Ferrule Compression-type Vacuum Fittings
24
Setup
Setup
Mount the transducer with the inlet port pointing (vertically) downward. Although the unit can
be mounted in any orientation, mounting it as suggested allows any foreign matter entering the
pressure port to fall away from the diaphragm.
Isolate the unit from vibration as much as possible. When not subject to gas damping at low
pressure, the diaphragm may become susceptible to resonance. The 0.05, 0.1 and 1 Torr F.S.
units are most sensitive and you should isolate these units from any vibration that exists.
Remember to isolate the vibration through the cable as well as through the port.
Checking the Transducer Zero
Check the transducer zero prior to the initial operation and then periodically as required. The
zero can be set (or reset) by adjusting the zero potentiometer located on the top cover of the
transducer or at the front panel of any MKS Power Supply/Readout which is being used. The
unit must be fully stabilized before you change the zero adjustment. Stabilization is
accomplished by allowing the unit to warm up for approximately:
15 minutes for Types 622 and 626 instruments
2 to 4 hours for the Types 627, 628, and 629 instruments ( 1 Torr)
8 hours for the 0.05 Torr (627 and 629) and 0.1 Torr (627, 628, 629)
Pump the unit, with the power on, down to a pressure less than the transducers resolution
(0.01% of Full Scale).
Note
Once the unit is properly warmed up and stabilized, the zero adjustment
must be made at a pressure less than the transducers resolution (0.01%
of F.S.). Low range transducers (0.1 and 0.05 Torr) should be pumped
for at least one hour after exposure to air to remove any moisture and to
allow the pressure to stabilize.
Zeroing a transducer above its stated minimum resolution creates a zero offset relative (or
unique) to the system in which the transducer is located. All subsequent readings are then linear
and accurate relative to the offset value.
Refer to Figure 4, page 26, for the location of the zero potentiometer on the Types 622, 626, 627,
628, and 629 transducers.
Note
If available pressures are not sufficiently low to set the transducer zero,
you may use a vacuum leak detector with sufficient vacuum pumping (to
achieve proper zeroing pressures). In this case, mount the transducer on
the leak detector in the same plane of orientation as it will be during
actual use.
25
Setup
ZERO Potentiometer
ZERO
ZERO
Type 622
Pressure
Transducer
+15 VDC-35 mA
PIN SIGNAL
1
Pwr Com
2
Sig Com
3
Sig Output
4
-15 VDC
5
+15 VDC
Chassis
Type 626
Pressure
Transducer
+15 VDC-35 mA
ZERO
PIN
2
5
6
7
12
15
SIGNAL
Sig Output
Pwr Com
-15 VDC
+15 VDC
Sig Com
Chassis
Type 62X
Pressure
Transducer
+15 VDC-250 mA
PIN
2
5
6
7
12
15
SIGNAL
Sig Output
Pwr Com
-15 VDC
+15 VDC
Sig Com
Chassis
BARATRON
BARATRON
Type 622
Type 626
Type 627, 628, and 629

(Type 629 has a 9-pin connector)
Figure 4: Location of the Zero Pot on Transducer Endcaps

To properly zero a transducer, follow this procedure:
1. Install the transducer a system with a power supply/readout.
2. Power the transducer and allow it to warm up. Warm up time is:
15 minutes for Types 622 and 626 transducers
2 - 4 hours for Types 627, 628, and 629 transducers ( 1 Torr)
8 hours for the 0.05 and 0.1 Torr range units
3. Pump the unit down to a pressure below its resolution (refer to Table 6 for recommended
pressure levels).
4. Using a small screwdriver, adjust the ZERO pot until the readout displays zero (0000).
Highest Pressure Suggested for Proper Zero Adjustment
Full Scale Range (Torr)
Highest Pressure for Zero Adjustment (Torr)
0.05*
< 2.5 x 10-6
0.1**
< 5 x 10-6
< 5 x 10-5
< 1 x 10-4
10
< 5 x 10-4
100
< 5 x 10-3
1K
< 5 x 10-2
* Only available with the Type 627 and 629 transducers

** Only available with Types 626, 627, 628, and 629 transducers
Table 6: Highest Pressure Suggested for Proper Zero Adjustment
26
Setup
Coarse Zero Adjustment

Some ranges of the 600 Series transducers provide additional zero range capability through the
coarse zero adjustment feature. Please contact MKS applications for specific ranges and help on
making this adjustment. The zero potentiometer provides ample control under normal
conditions.
Note
Use the coarse zero adjustment only if the zero potentiometer fails to
provide sufficient adjustment.
The COARSE ZERO control is accessible through the side of the instrument, as shown in
Figure 5.
ZERO
Potentiometer
COARSE ZERO
Adjustment
ZERO
Type 62X
Pressure
Transducer
+15 VDC-250 mA
PIN
2
5
6
7
12
15
SIGNAL
Sig Output
Pwr Com
-15 VDC
+15 VDC
Sig Com
Chassis
Figure 5: Location of the COARSE ZERO Adjustment Control
27
Setup
Follow the steps below to adjust the coarse zero:

1. Install the transducer in a system with a power supply/readout.
2. Turn the transducer on.
3. Be sure the transducer is properly warmed up (refer to page 25 for warm up times) and
pumped down below its resolution (refer to Table 6, page 26, for recommended pressure
levels).
For best results, pump the transducer while it is warming up.
4. Center the ZERO pot located at the top of the transducer (adjust the screw to leave an
equal amount of adjustment both clockwise and counterclockwise).
5. Remove the top plastic outer ring by rotating 45 CCW for 626 0.10 Torr only.
6. Turn the COARSE ZEROs multi-position switch (located on the side of the unit) to a
position that produces the output signal closest to zero Volts.
7. Re-install the plastic ring.
8. Adjust the ZERO pot (located on the top of the unit) to bring the output to exactly zero
Volts.
28
Setup
Dimensions
Note
All dimensions are listed in inches with millimeters referenced in

parentheses.
2.56 DIA
(65.0)
2.56 DIA
(65.0)
0.31
(7.9)
0.13
(3.30)
Manufactured by MKS Instruments, Inc.
3.17
(80.52)
3.17
(80.52)
4.75
(120.65)
4.93
(125.22)
1.45
(36.83)
1.45
(36.83)
0.500 DIA
(12.70)
0.500 DIA
(12.70)
Type 622A
Type 626A
3.00 DIA
(76.2)
0.13
(3.30)
5.19
(131.8)
3.76
(95.50)
Type 627A and 628A Units
1.30
(33.02)
0.500 DIA
(12.7)
Figure 6: Dimensions of the Types 622, 626, 627, 628, and 629 Transducers
29
Electrical Information
The Types 622, 626, 627, 628, and 629 transducers require an external power source capable of
supplying the voltages stated in Table 7. Noise and ripple should be less than 20 mV p-p. You
may use any readout device which has input capabilities of less than 0 to greater than 10 VDC,
and impedance greater than 10K ohms.
Note
The ground of any external power supply and readout should be the same
as the transducer ground (chassis ground) to minimize any possible
ground loops which can affect the performance and stability of the
system.
Required Inputs for Types 622, 626, 627, 628, and 629 Transducers
Input Required
Types 622 & 626
Type 627 & 629
Type 628
At Startup
15 VDC (5%) @
35 mA
15 VDC (5%) @
250 mA
15 VDC (5%) @
500 mA
After 1 hour of
operation at 25 C
15 VDC (5%) @
35 mA
15 VDC (5%) @
150 mA
15 VDC (5%) @
350 mA
Table 7: Required Inputs for Types 622, 626, 627, 628, and 629 Transducers
Multiple Ground
Tie-Point
0 - 10 V Pressure Output
Signal Common
+
-
Readout
+ 15 V
- 15 V
+ 15V
10K
1 F
Power
Supply
Power Common
NOTE: For best results, use a readout with fully

differential inputs.
Chassis
Ground
Sensor
Port
The absolute value of the potential difference between

the chassis ground and signal common/power ground
should not exceed 14 Volts.
Figure 7: Power, Signal, and Chassis Grounding Scheme
30
Connectors
The 622 unit has a 5-pin terminal block connector, whose pinout is listed in Table 8. The 626,
627, and 628 units use a common 15-pin Type D connector, refer to Table 9 for the pinout.
The 629 transducer uses a 9-pin Type D whose pinout is listed in Table 10, page 32.
Pinout of Type 622 Transducer

Pin Number
Assignment
Power Common
Signal Common
Signal Output
- 15 VDC
+ 15 VDC
Chassis Ground is made by using the screw labeled CHASSIS on the endcap
Table 8: Pinout of Type 622 Transducer
Pinout of Types 626, 627, and 628 Transducers
Pin Number
Assignment
Signal Output
Power Common
- 15 VDC
+ 15 VDC
12
Signal Common
15
Chassis Ground
Table 9: Pinout of Types 626, 627, and 628 Transducers
31
Pinout of Type 629 Transducer

Pin Number
Assignment
Signal Output
+ 15 VDC
- 15 VDC
External Zero
Signal Common
Power Common
Table 10: Pinout of Type 629 Transducer
32
Chapter Three: Overview
General
General
A complete pressure transducer system requires three components to convert pressure to a linear
DC voltage output: a sensor, signal conditioner, and power supply. An analog or digital meter is
required to display the DC output in pressure units.
MKS Types 622, 626, 627, 628, and 629 transducers contain two of the above components: the
sensor and signal conditioner. An MKS or MKS-compatible power supply is required to
complete the pressure to DC voltage output conversion, and an MKS or MKS-compatible display
unit is required for direct pressure readout.
Sensor
The variable capacitance sensor consists of a pressure inlet tube (port) connected to a small
chamber in the transducer body. One wall of this chamber is an elastic metal diaphragm. The
front side of the diaphragm is exposed to the gas whose pressure is to be measured. The back, or
reference side of the diaphragm faces a rigidly mounted ceramic disc containing two electrodes.
The reference side is permanently evacuated (10-7 Torr) and its vacuum is maintained with a
chemical getter system.
The diaphragm deflects with changing absolute pressure (force per unit area) independently of
the gas type or composition of the measured gas. This deflection causes an imbalance of the
sensor electrode capacitances since the distance to the diaphragm is now different for each
electrode. The imbalance of capacitances is converted to a DC voltage in the bridge. This bridge
is excited by a precision constant frequency oscillator. The resultant signal is then linearized,
zeroed, and amplified via the signal conditioner electronics, to produce a precise 0 to 10 VDC
signal scaled to the range of the transducer.
In the heated models (Types 627, 628, and 629 instruments), zero and span stability is further
increased because the sensor and bridge electronics are temperature controlled. This thermal
enclosure reduces the effects of ambient temperature changes by a factor of at least 35 (that is
35 C change in ambient will produce less than 1 C change inside the thermal housing).
Signal Conditioner/Electronics
The signal conditioner contains state-of-the-art, low impedance balanced bridge circuitry, selfcompensated for thermal stability with ambient temperature changes. Output is a DC voltage
which is linear with pressure. The transducer is then calibrated against a pressure standard to
provide a 0 to 10 Volt DC output over the range of the transducer.
33
Differences in the Type 629 Unit
Differences in the Type 629 Unit

The Type 629 transducer performs identically to the Type 627 transducer, with the following
exceptions:
The Type 629 transducer has a unique connector and pinout

Refer to Table 10, page 32 for the pinout description.
The Type 629 transducer output is fully differential with respect to the voltage input to
the external zero (pin 7)
For details, refer to Chapter Four, Operation, page 17.
34
Chapter Four: Operation
General

General
After installation and during periodic maintenance, check the transducer zero to verify proper
output. If the output is incorrect, set the output by adjusting the zero potentiometer (refer to
Checking the Transducer Zero, page 25, for zeroing instructions).
The transducer should be powered and allowed to warm up before use. Warm up time is:
15 minutes for Types 622 and 626 transducers
2 to 4 hours for Types 627, 628, and 629 transducers ( 1 Torr)
8 hours for the 0.05 and 0.1 Torr range units
Lowest Suggested Pressure Available for Reading

The pressures listed in the middle column of Table 11, page 36, reflect reliable and practical
pressures for different range transducers. Lower readings may be obtained in environments
which have stable temperature and air flow.
As noted in Table 11, page 36, temperature controlled transducers can obtain repeatable pressure
measurements down to 1 x 10-5 Torr, and unheated transducers can obtain these measurements
down to 1 x 10-4 Torr.
Lowest Suggested Pressure to Use for Control
The pressures listed in the last column of Table 11, page 36, are for reference, and represent the
pressure reading of the transducer at 50 mV signal output. A DC signal of at least 50 mV is the
recommended minimum signal level to use when integrating any transducer into complex
processing systems.
35
General
Suggested Pressures for Reading and Control

Full Scale Range
(Torr)
Lowest Suggested Pressure

for Reading (Torr)
Lowest Suggested Pressure

for Control (Torr)
0.05*
2.5 x 10-5
2.5 x 10-4
0.1 **
5 x 10-5
5 x 10-4
5 x 10-4
5 x 10-3
10
5 x 10-3
5 x 10-2
100
5 x 10-2
5 x 10-1
1K
5 x 10-1
* Only available with Types 627 and 629 transducers

** Only available with Types 626, 627, 628, and 629 transducers
Table 11: Suggested Pressures for Reading and Control
36
How to Use the External Zero on the Type 629 Unit

The Type 629 transducer output is fully differential with respect to the voltage input to the
external zero (pin 7). Pin 7 allows you to connect the unit to reject common-mode voltages
between a power supply and a readout, and/or add an external zero adjustment.
Adjusting the External Zero
The external zero pin (pin 7) may be used as an external zero adjustment by summing in a
correction voltage that is equal in magnitude and opposite in polarity to the transducers zero
offset, at a pressure below the resolution of the Type 629 transducer. Table 6, page 26, lists the
correct pressure for each range. Use a cold cathode gauge or other high vacuum gauge capable
of reading pressures below the transducers resolution, to verify the pressure before adjusting the
zero.
+
Type 629
V1
Voltage at
zero pressure
0V
+
V
- V1
out
Figure 8: Using Pin 7 as an External Zero Adjustment
Note
If the external zero pin is not being used, connect it to Signal Common
(Pin 8).
Rejecting Common-Mode Voltages

The 629 transducer can be connected to reject common-mode voltages between the power supply
and readout. This arrangement minimizes the ground loops that sometimes occur when using
remote data acquisition systems and bussed power. Figure 9, page 38, shows several Type 629
transducers connected to a data acquisition system.
37
1 Signal Output
629 Transducer
(top view)
+ 15V
7 External Zero
1
2
8 Signal Common
3 MUX
9 Power Common
10K
1 F
Data
Acquisition
System
4 + 15V
- 15V
5
D/A Ground
Chassis
Ground
Vcm
=+1V
max
629 Transducer
(top view)
1 Signal Output
7 External Zero
8 Signal Common
+ 15V
9 Power Common
10K
1 F
4
5
+ 15V
- 15V
Chassis
Ground
629 Transducer
(top view)
1 Signal Output
7 External Zero
8 Signal Common
+ 15V
9 Power Common
10K
1 F
+ 15V
+ 15V
Power
Supply
P/S Ground
- 15V
5 - 15V
Chassis
Ground
Figure 9: Type 629 Transducers Connected to Reject Common Mode Voltages
38
Chapter Five: Maintenance and Troubleshooting
General
General
In general, no maintenance is required other than proper installation and operation, and an
occasional zero adjustment. If a transducer fails to operate properly upon receipt, check for
shipping damage, and check the power/signal cable for correct continuity. Any damage should
be reported to the carrier and MKS Instruments immediately. If there is no obvious damage and
the continuity is correct, obtain an ERA Number (Equipment Return Authorization Number)
before returning the unit to MKS Instruments for service.
In production operations such as semiconductor manufacturing, verify the transducer zero (and
adjust if necessary) each time the equipment is shut down for routine maintenance.
Note
The ZERO adjustment is the only adjustment that can be made in the field.
Return the transducer to MKS Instruments for other adjustments,
calibration, or servicing.
Periodically check for wear on the cables and inspect the enclosure for visible signs of damage.
Zero Adjustment
All pressure transducers require initial and periodic zero adjustments. Make these adjustments at
a pressure lower than the transducers minimum resolution to achieve the full dynamic range
specified for the transducer. Refer to Chapter Two: Installation, page 19, for instructions on
adjusting the zero setting.
39
Troubleshooting Chart
Troubleshooting Chart
Symptom
Possible Cause
Solution
Overrange positive or
negative signal
A shorted transducer or a
damaged interconnect cable
(transducer to electronics
module).
Measure supply voltages at

the terminal block.
Measurement slowly goes

positive over time
Overpressure and/or a buildup of contamination in the Px

cavity.
Return to MKS for servicing

or transducer replacement.
Unstable zero output
The ambient temperature may

be too high.
or
Refer to Appendix A:
Product Specifications, page
41, and be sure the ambient
temperature is within product
requirements.
The ambient temperature is

varying over a wide range.
Inspect cable and transducer.

Replace if necessary.
Table 12: Troubleshooting Chart
40
Appendix A: Product Specifications
MKS Types 622 and 626 Units

MKS Types 622 and 626 Units
Type 622 and 626 (Unheated)
Accuracy (non-linearity, hysteresis and
non-repeatability)
0.25% of Reading (0.5% of Reading 626 0.10 T only)

Optional: 0.15%1
Ambient operating temperature range2
0 to 50 C (32 to 122 F)
CE Compliance
Electromagnetic Compatibility3
EMC Directive 89/336/EEC
Connector
622
626
5-position terminal block

15-pin Type D
Fittings
Standard
Optional
inch (12.7 mm) tubulation

NW-16-KF, mini-CF, Swagelok 8-VCR, 8-VCO female
0.10 (626 only), 1, 2, 10, 100, 1K
Input required
15 VDC (5%) @ 35 mA
Materials exposed to gases
Inconel
Output
0 to +10 VDC into 10K ohm load
Overpressure limit without damage
45 psia (310 kPa)
Temperature coefficients
Zero
Span
0.005% F.S./C4
0.04% Reading/C
Time constant
< 20 msec
Usable measurement range
1 x 10-4 F.S.
Volume (Px side)
6.3 cc
Due to continuing research and development activities, these specifications are subject to change without notice.
1Available only on 10, 100, and 1K Torr ranges.

2Some specifications may vary outside this temperature range - consult factory for further information.
operating temperature range 15C to 40C (59F to 104F)
3 An overall metal braided shielded cable, properly grounded at both ends, is required during use.
4For Types 622/626 2 Torr transducers, the zero temp. coef. is 0.010% F.S./C.
For Types 622/626 1 Torr transducers, the zero temp. coef. is 0.015% F.S./C.
For Type 626 0.10 Torr transducers, the zero temp. coef. is 0.02% F.S./C.
41
626 0.10 T ambient
MKS Type 627 and 629 Units
MKS Type 627 and 629 Units

Type 627 and 629 (Temperature Controlled at 45C)
Accuracy (non-linearity, hysteresis and
non-repeatability)
0.12% of Reading
0.15% for 0.1 Torr units
15 to 40 C (59 to 104 F)
CE Compliance
Connector
627
629
15-pin Type D
9-pin Type D
Fittings
Standard
Optional

NW-16-KF, mini-CF, Swagelok 8-VCR, 8-VCO
female
Full Scale Ranges (Torr)
0.1, 1, 2, 10, 100, 1K
Input required
15 VDC (5%) @ 250 mA (max)
Inconel
Output
45 psia (310 kPa)
Zero
Span
0.002% F.S./C7
0.02% Reading/C
Time constant
< 20 msec
1 x 10-4 F.S.
Volume (Px side)
6.3 cc
5Do
6
not operate the Type 627 and 629 transducers outside this temperature range.
An overall metal braided shielded cable, properly grounded at both ends, is required during use.
Type 627 and 629 0.1 Torr transducers, the zero temp. coef. is 0.005% F.S./C.
7For
42
MKS Type 627 and 629 50 mTorr Units
MKS Type 627 and 629 50 mTorr Units

MKS Type 627 and 629 50 mTorr (Temperature Controlled at 45C)
Accuracy (non-linearity, hysteresis and nonrepeatability)
0.15% of Reading
Ambient operating temperature range
15 to 40 C (59 to 104 F)
CE Compliance
Connector
627
15-pin Type D
629
9-pin Type D
Fittings
Standard
Optional

NW-16-KF, mini-CF, Swagelok 8-VCR or
8-VCO female
Input required
15 VDC (5%) @ 250 mA (max)
Inconel
Output
45 psia (310 kPa)
Pressure ranges (Torr F.S.)
0.05
Zero
Span
0.015% F.S./C
0.02% Reading/C
Time constant
< 20 msec
2 x 10-4 F.S.
Volume (Px side)
6.3 cc
43
Type MKS 628 Units
Type MKS 628 Units

MKS Type 628 (Temperature Controlled at 100C)
Accuracy (non-linearity, hysteresis and nonrepeatability)
0.25% of Reading
20 to 70 C (68 to 158 F)
0.5% of Reading for 0.1 Torr units
CE Compliance
Connector

15-pin Type D
Fittings
Standard
Optional

NW-16-KF, mini-CF, Swagelok 8-VCR or
8-VCO female
0.1, 1, 2, 10, 100, 1K
Input required
15 VDC (5%) @ 500 mA (max)
Inconel
Output
45 psia (310 kPa)
Zero
Span
0.002% F.S./C11
0.02% Reading/C
Time constant
< 20 msec
1 x 10-4 F.S.
Volume (Px side)
6.3 cc
9Do not operate the Type 628 transducer outside this temperature range.
11For Type 628 0.1 Torr transducers, the zero temp. coef. is 0.005% F.S./C.
44
Appendix B: Model Code Explanation
Model Code
Model Code
The options of your unit are identified in the model code. The model code is identified
as follows:
62XAXXXYYZ
where:
Type 62XA
XXX
Type Number
Full Scale Range
Fittings
Accuracy
Type Number (62XA)

This designates the model number of the instrument; 622A, 626A, 627A, 628A or 629A.
45
Model Code
Full Scale Range (XXX)

The full scale range is indicated by a three character code.
Full Scale Range
Ordering Code
0.05*
0.1**
1
2
10
100
1000
U5T
.1T
01T
02T
11T
12T
13T
*Available on 627 and 629 units only
** Available on 626, 627, 628, and 629 units only
Fittings (Y)
The choice of fittings is designated by a single letter code.
Fittings
Ordering Code

Swagelok 8-VCR, female
Mini-CF, rotatable
NW-16-KF
Swagelok 8-VCO, female
A
B
C
D
E
Accuracy (Z)
The accuracy is designated by a single number code.
Accuracy
Ordering Code
0.12% of Reading, standard for Type 627, 628 and 629

(1, 2, 10, 100, 1000 Torr ranges only)
0.15% of Reading,
optional for Type 622 and 626 (10, 100 and 1000 Torr only)
standard for Type 627 and 629 (0.05 and 0.1 Torr only)
0.25% of Reading, standard for Type 622 and 626
0.5% of Reading, standard for Types 626 and 628 (0.1 Torr
only)
46
Index
Index
50m Torr transducers, 25
Signal Conditioner/Electronics, 15
Specifications, 6, 23-26
C
Coarse Zero adjustment, 9-10
Companion products, 5
Troubleshooting, 22
Customer support, 4
Type 622 transducer, 23

Type 627 transducer, 16, 24
Dimensions, 11
50m Torr, 25
Electrical installation, 12
Type 629 transducer, 16, 24

50m Torr, 25
external zero, 18-19
Fittings, 6
U
I
Unpacking the unit, 5
Interface cables, 13-14

Z
M
Zero adjustment, 7-9, 21
Manual organization, 4
Messages, definitions of, 2
P
Pressure
lowest for control, 17
lowest for reading, 17
R
Returning the product, 4, 5, 21
S
Safety procedures and precautions, 1-2
Sensor, 15
Setup, 7
47

Mks 626a

Uploaded by

Copyright:

Available Formats

Mks 626a

Uploaded by

Document Information

Original Title

Copyright

Available Formats

Share this document

Share or Embed Document

Sharing Options

Did you find this document useful?

Is this content inappropriate?

Copyright:

Available Formats

Mks 626a

Uploaded by

Copyright:

Available Formats

114492-P1

MKS Baratron Type

Copyright 2001 by MKS Instruments, Inc.

Pressure Transducer Safety Information..................................................................................... 1

Checking the Transducer Zero.......................................................................... 25

List of Figures and Tables

List of Figures and Tables

List of Figures and Tables

Pressure Transducer Safety Information

Symbols Used in This Instruction Manual

Pressure Transducer Safety Information

Symbols Used in This Instruction Manual

The WARNING sign denotes a hazard to personnel. It calls

The CAUTION sign denotes a hazard to equipment. It calls

The NOTE sign denotes important information. It calls attention to a

Symbols Found on the Unit

Pressure Transducer Safety Information

Symbols Found on the Unit

Both direct and

Caution, hot surface

Table 1: Definition of Symbols Found on the Unit

Pressure Transducer Safety Information

Safety Procedures and Precautions

Safety Procedures and Precautions

Safety Procedures and Precautions

Pressure Transducer Safety Information

CHECK FOR LEAK-TIGHT FITTINGS

Sicherheitshinweise fr den Druckmeumformer

In dieser Betriebsanleitung vorkommende Symbole

Sicherheitshinweise fr den Druckmeumformer

In dieser Betriebsanleitung vorkommende Symbole

Bedeutung der mit WARNUNG!, VORSICHT! und HINWEIS gekennzeichneten Abstze in

Das Symbol WARNUNG! weist auf eine Gefahr fr das

Das Symbol HINWEIS macht auf wichtige Informationen bezglich eines

Erklrung der am Gert angebrachten Symbole

Sicherheitshinweise fr den Druckmeumformer

Erklrung der am Gert angebrachten Symbole

IEC 617-2, No.020206

Warnung vor einer

Tabelle 2: Bedeutung der am Gert angebrachten Symbole

Sicherheitshinweise fr den Druckmeumformer

Sicherheitsvorschriften und Vorsichtsmanahmen

Sicherheitsvorschriften und Vorsichtsmanahmen

Sicherheitsvorschriften und Vorsichtsmanahmen

Sicherheitshinweise fr den Druckmeumformer

Anweisungen zum Installieren der Armaturen!

Informations relatives la scurit pour le

Symboles utiliss dans ce manuel d'utilisation

Informations relatives la scurit pour le transducteur

Symboles utiliss dans ce manuel d'utilisation

Dfinitions des indications AVERTISSEMENT, ATTENTION, et REMARQUE utilises dans

L'indication AVERTISSEMENT signale un danger pour le

L'indication ATTENTION signale un danger pour l'appareil.

L'indication REMARQUE signale une information importante. Elle

Symboles apparaissant sur l'unit

Informations relatives la scurit pour le

Symboles apparaissant sur l'unit

Arrt (hors tension)

Tableau 3: Dfinition des symboles apparaissant sur l'unit