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Vacuum Ejector
With Valve and Switch

Series ZM
How to Order

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With
Supply valve ZM 07 1 S A H K 5 LZ E15 L
valve,
Release
Without
valve
valve ZM 07 2 H E15 L
Nozzle diameter Vacuum switch electrical entry
05 0.5 mm Nil Grommet type, with 0.6 m lead wire
07 0.7 mm L Grommet type, with 3 m lead wire Solid
10 1.0 mm C Connector type, with 0.6 m lead wire state:
13 1.3 mm CL Connector type, with 3 m lead wire ZSE1
Body style CN Connector type, without connector
Nil Grommet type, with 0.5 m lead wire Diaphragm:
Valve Symbol Application L Grommet type, with 3 m lead wire ZSM1

1 For single unit

With Vacuum switch model
3 For manifold, common SUP
valve
5 For manifold, individual SUP Nil Without switch
2 For single unit E14 1 point setting/without analog output/3 rotation setting
Without
4 For manifold, common SUP E15 1 point setting/without analog output/200 degrees setting
valve Solid
6 For manifold, individual SUP E16 2 point setting/without analog output/3 rotation setting
state
E17 2 point setting/without analog output /200 degrees setting (12 to 24 VDC)
Silencer∗ E18 1 point setting/analog output/3 rotation setting
Nil Standard type E19 1 point setting/analog output/200 degrees setting
S High noise reduction type M15 1 point setting/without analog output/Diaphragm (18 rotation setting)/Solid state(10 to 26 VDC)
∗ Silencer is applicable to single M21 1 point setting/without analog output/Diaphragm (18 rotation setting)/Reed (100 VAC)
unit style.
Manual override
Nil Non-locking push type
Vacuum port location B Locking slotted type
Nil Side/Bottom entry
Side entry
Electrical entry
A
G Grommet type, with 0.3 m lead wire (applicable to DC)
L L plug connector, with 0.3 m lead wire
Standard supply pressure
LZ L plug connector, with 0.3 m lead wire, with light/surge voltage suppressor
H 0.5 MPa
LN L plug connector, without lead wire (applicable to DC)
M 0.35 MPa (Except nozzle diameter “05” type)
LO L plug connector, without connector
Thread type
Nil Rc Rated voltage
T NPTF 1∗ 100 VAC 50/60 Hz
F G 3∗ 110 VAC 50/60 Hz
5 24 VDC
Supply valve/Release valve combination Pilot valve 6 12 VDC
J Supply valve DC: 1 W V 6 VDC
K Supply valve and release valve Nil (With indicator light: 1.5 W) S 5 VDC
A Supply valve (N.O.) AC R 3 VDC
B Supply valve (N.O.) and release valve DC: 0.45 W ∗ Applicable to plug
Y∗ connector. (Connector
(With indicator light: 0.5 W)
assembly with rectifier
∗ 24 VDC and 12 VDC are is attached.)
applicable to 0.45 W.
∗ Refer to page 13-4-4
for air operated style.

13-4-2
 2
Vacuum Ejector:
With Valve and Switch Series ZM

ZX
Table (1) How to Order Connector for Solid State Switch
ZR
• Without lead wire (A connector and 4 sockets)
ZS 20 AA ZM
• With lead wire
ZS 20 5A ZH
Note) If ordering switch with 5 m lead wire, specify both switch Lead wire length
and lead wire with connector part numbers. Nil 0.6 m ZU
Ex.) ZM쏔쏔쏔-E15CN .............................. 1 pc. 30 3m
ZS-20-5A-50 ..................................... 1 pc. 50 5m ZL
ZY
Table (2) How to Order Connector for Supply Valve and Vacuum Release Valve
ZQ
VJ10 36 1A (Applicable to 100 VAC only) Caution
When using AC, the DC solenoids are ZF
operated via a rectifier. Therefore, when
using this type, make sure to combine the
VJ10 36 3A (Applicable to 110 VAC only) connector assembly equipped with a rectifier
with the exclusive solenoids. Using other
ZP
combinations could lead to bumed coils or
other types of malfunctions.
ZCU
VJ10 20 4A (Applicable to DC only)

Lead wire length

AMJ
Note) If ordering a valve with 600 mm or longer
Nil 300 mm lead wire, indicate the valve without
6 600 mm connector and connector assembly. Misc.
10 1000 mm Ex.) Lead wire length: 1000 mm
15 1500 mm ZM쏔쏔쏔-K1LO ............................... 1 pc.
∗ VJ10-36-1A-10 .............................. 2 pcs.
20 2000 mm
25 2500 mm
30 3000 mm

How to Order
ZM Nozzle diameter Body style Standard supply pressure
05 0.5 mm ø <Without valve> H 0.5 MPa
07 0.7 mm ø 2 For single unit M 0.35 MPa
10 1.0 mm ø 4 For manifold, common SUP (Except nozzle diameter “05” type)
13 1.3 mm ø 6 For Manifold, individual SUP
<With valve>
1 For single unit
3 For manifold, common SUP
5 For manifold, individual SUP

Quick Delivery/Model
<Without valve/Single unit> <With valve/Single unit>
• ZM052H • ZM051H-K5LZ • ZM131H-K5LZ
• ZM072H • ZM051H-K5LZ-E15 • ZM131H-K5LZ-E15
• ZM102H • ZM071H-K5LZ • ZM131M-K5LZ
• ZM132H • ZM071H-K5LZ-E15 • ZM131M-K5LZ-E15
• ZM101H-K5LZ
• ZM101H-K5LZ-E15

13-4-3
 3

Series ZM
All in One! Model
• Built-in suction filter and silencer Nozzle dia. Standard supply pressure Maximum suction flow rate Air consumption
Model
• Air supply valve for generating a ø(mm) H M (l /min (ANR)) (l /min (ANR))
vacuum 0.5 ZM05쏔H 18 12
• Vacuum release valve (equipped with 0.7 ZM07쏔H 24 23
0.5 MPa —
a flow volume adjustment valve) 1.0 ZM10쏔H 36 46
• Vacuum pressure switch (solid state, 1.3 ZM13쏔H 40 95
diaphragm) 0.7 ZM07쏔M 20 16
1.0 ZM10쏔M — 0.35 MPa 26 32
Adaptable for a manifold 1.3 ZM13쏔M 36 70
application
All tubing, wiring, indicators, and Vacuum Ejector Specifications
adjustment functions have been Fluid Air
eliminated from the side surface, thus Maximum operating pressure 0.7 MPa
enabling assembly and maintenance Maximum vacuum pressure – 84 kPa
while linked in a manifold. Without valve 0.2 to 0.55 MPa
Supply pressure range
• EXH system —— Common With valve 0.25 to 0.55 MPa
• SUP system —— Common, Individual Without valve 5 to 60 °C
Operating temperature range
With valve 5 to 50 °C
Maximum air suction Air supply valve Main valve Poppet
volume increased by 40% Vacuum release valve Pilot valve VJ114, VJ324M
Electronic ZSE1-00-
Maximum vacuum pressure Vacuum pressure switch
Diaphragm ZSM1-0
–84 kPa (–630 mmHg) Suction filter 30 µm PE (Polyethylene)
The suction volume has been increased
by 40% through the adoption of a two-
stage nozzle construction. Valve Specifications
How to operate Pilot type
Compact and lightweight Main valve NBR poppet
15.5 mm width, 400 g (full system) Effective area 3 mm2
Cv factor 0.17
Operating pressure range 0.25 to 0.7 MPa
Electrical entry Plug connector, Grommet (available on DC)
Max. operating frequency 5Hz
Voltage 24/12/6/5/3 VDC, 100/110 VAC (50/60 Hz)
Power consumption DC: 1 W (With light: 1.2 W), 100 VAC: 1.4 W (1.45 W), 110 VAC: 1.45 W (1.5 W)

Air Operated Valve Specifications Refer to page 13-4-11 for dimensions.

JIS Symbol 1
ZM 05 35 H Q
Air supply Exhaust port Port size
port Nozzle diameter
Vacuum port connection
05 0.5 mm
3 M3 x 0.5
07 0.7 mm
5 M5 x 0.8
Ejector System Circuit Specifications 10 1.0 mm
Applicable nozzle size (mm) ø0.5, ø0.7, ø1.0, ø1.3 13 1.3 mm
P Supply valve Supply pressure Air operated
Components
Q Supply valve and release valve valve
H 0.5 MPa
Port size
M3 x 0.5 M∗ 0.35 MPa P Supply valve
M5 x 0.8 Q Supply valve and release valve
∗ Except nozzle
Main valve N.C.
diameter “05” type

Note) Switch mounted style is

also available.

P. 13-4-17 to 13-4-19

13-4-4
 4
Vacuum Ejector:
With Valve and Switch Series ZM
Construction: LZM쏔1쏔-K쏔L-E쏔
Precautions
Be sure to read before handling.
Vacuum release valve Air supply pilot valve Refer to pages 13-15-3 to 13-15-4
for Safety Instructions and
Common Precautions on the
products mentioned in this
catalog, and refer to page 13-1-5
for Precautions on every series.
ZX
Caution
Operation of an ejector equipped ZR
with a valve
Air supply port When the air supply pilot valve is turned ZM
ON, air flows to the diffuser assembly, and
a vacuum is created.
When the pilot valve for releasing the ZH
vacuum is turned ON, air flows to the
vacuum port side, immediately causing a ZU
release in the vacuum. The release speed
can be adjusted by regulating the flow ZL
volume adjustment screw.
When the supply valve is turned OFF, the ZY
Vacuum port atmospheric pressure causes the air to
flow back from the silencer, thus releasing
the vacuum. However, in order to properly ZQ
release a vacuum, a vacuum release valve
must be used. ZF
Operating environment ZP
Because the filter cover is made of
Component Parts polycarbonate, do not use it with or expose
No. Description Material Note it to following chemicals: paint thinner,
ZCU
q Body Aluminum die-casted carbon tetrachloride, chlorofrom, acetic
w Valve cover Zinc die-casted ester, aniline, cyclohexane, trichlo- AMJ
e Adapter plate Zinc die-casted roethylene, sulfuric acid, lactic acid, water-
r Cover Zinc die-casted
Without switch: ZM-HCA,
With switch: ZM-HCB
soluble cutting oil (alkalinic), etc. Also, do Misc.
not expose it to direct sunlight.
t Tension bolt Stainless steel/Polyacetal Furthermore, avoid use in direct sunlight.
y Flow adjustment screw Brass Electroless nickel plated
Matching of the ejector to the
Replacement Parts vacuum circuit
No. Description Material Part no. For precautions associated with matching
u Filter cover assembly — ZM-FCB-0 of the ejector to the vacuum circuit, refer to
i Diffuser assembly — ZM쏔쏔0쏔-0 the technical data on page 13-1-10 to 13-
o Suction filter Polyethylene ZM-SF 1-19.
!0 Silencer assembly — ZM-SA
!1 Pilot valve — VJ114-쏔쏔쏔쏔
!2 Poppet valve assembly — ZM-PV-0
ZSE1-00-쏔쏔
!3 Vacuum pressure switch — ZSM1-015
ZSM1-021
!4 Check valve NBR ZM-CV

13-4-5
 5

Series ZM
Exhaust Characteristics/Flow Characteristics, Standard Supply Pressure: H···0.5 MPa
ZM05쏔H ZM07쏔H
Exhaust Characteristics Flow Characteristics Exhaust Characteristics Flow Characteristics

Max. suction flow rate (l /min (ANR)) Air consumption (l /min (ANR))

Max. suction flow rate (l /min (ANR)) Air consumption (l /min (ANR))
Vacuum pressure (kPa)

Vacuum pressure (kPa)

Vacuum pressure (kPa)

Vacuum pressure (kPa)

e
re

sur
ssu

res
pre

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um

cuu
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rate

Va
Va

n flow
rate Suc
tio
n
n flow ptio
tio sum
Suc co n
Air
ption
c on sum
Air

Supply pressure (MPa) Flow rate (l /min (ANR)) Supply pressure (MPa) Flow rate (l /min (ANR))

ZM10쏔H ZM13쏔H
Exhaust Characteristics Flow Characteristics Exhaust Characteristics Flow Characteristics
Max. suction flow rate (l /min (ANR)) Air consumption (l /min (ANR))

Max. suction flow rate (l /min (ANR)) Air consumption (l /min (ANR))
re
ssu
Vacuum pressure (kPa)

Vacuum pressure (kPa)

Vacuum pressure (kPa)

Vacuum pressure (kPa)

re

n
io
ssu

pt
pre

m
pre

su
m

on
cuu

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Ai
pt
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Va

m
Va

su
on

Suction flow rate

rc
Ai

Suction flow rate

Supply pressure (MPa) Flow rate (l /min (ANR)) Supply pressure (MPa) Flow rate (l /min (ANR))

13-4-6
 6
Vacuum Ejector:
With Valve and Switch Series ZM
Exhaust Characteristics/Flow Characteristics, Standard Supply Pressure: M···0.35 MPa
ZM07쏔M ZM10쏔M
Exhaust Characteristics Flow Characteristics Exhaust Characteristics Flow Characteristics

Max. suction flow rate (l /min (ANR)) Air consumption (l /min (ANR))

Max. suction flow rate (l /min (ANR)) Air consumption (l /min (ANR))
Vacuum pressure (kPa)

Vacuum pressure (kPa)

Vacuum pressure (kPa)

Vacuum pressure (kPa)

ZX
sure

re
io
pt

ssu
m
pres

su ZR

pre
con
uum

r
Ai

uum
ZM
Vac

Vac
rate Suction flow rate
n flow
tio n ZH
Suc um
ptio
ns
co
Air
ZU
ZL
Supply pressure (MPa) Flow rate (l /min (ANR)) Supply pressure (MPa) Flow rate (l /min (ANR))
ZY
ZQ
ZM13쏔M How to Read Flow Characteristics Graph
ZF
Exhaust Characteristics Flow Characteristics
ZP
Max. suction flow rate (l /min (ANR)) Air consumption (l /min (ANR))

ZCU
Vacuum pressure
on
pti

AMJ
Vacuum pressure (kPa)

Vacuum pressure (kPa)

um
sure

ns
co

Misc.
pres

Air
uum

Suction flow rate

Vac

Suction flow rate

Flow characteristics are expressed in ejector
vacuum pressure and suction flow. If suction flow
rate changes, a change in vacuum pressure will also
be expressed. Normally this relationship is
expressed in ejector standard use.
Supply pressure (MPa) Flow rate (l /min (ANR)) In graph, Pmax is max. vacuum pressure and Qmax
is max. suction flow. The valves are specified
according to catalog use. Changes in vacuum
pressure are expressed in the below order.
Changes in vacuum pressure are expressed in
the order below.
1. When ejector suction port is covered and made
airtight, suction flow is 0 and vacuum pressure
is at maximum value (Pmax).
2. When suction port is opened gradually, air can
flow through, (air leakage), suction flow
increases, but vacuum pressure decreases.
(condition P1 and Q1)
3. When suction port is opened further, suction
flow moves to maximum value (Qmax), but
vacuum pressure is near 0. (atmospheric
pressure).
When vacuum port (vacuum piping) has no
leakage, vacuum pressure becomes maximum,
and vacuum pressure decreases as leakage
increases. When leakage value is the same as
max. suction flow, vacuum pressure is near 0.
When ventirative or leaky work must be ad-
sorbed, please note that vacuum pressure will
not be high.

13-4-7
 7

Series ZM
Vacuum Pressure Switch/Solid State Switch (ZSE), Diaphragm Switch (ZSM)
Vacuum Switch
Model ZSE1-00-14 ZSE1-00-15 ZSE1-00-16 ZSE1-00-17 ZSE1-00-18 ZSE1-00-19 ZSM1-015 ZSM1-021
Sensor type Solid state Diaphragm
Switch Electronic circuit Solid state Reed
Set pressure range 0 to 101 kPa –26.6 to –79.8 kPa
Hysteresis 1 to 10% of the set pressure (Changeable) 3% full span or less (Fixed) 1 to 10% of the set pressure (Changeable) 17% full span 23% full span
Repeatability ±1% full span or less
Temperature characteristics ±3% full span or less ±5% full span
Operating voltage 12 to 24 VDC (Ripple ±10% or less ) DC10 to 26V AC100V
Open collector
ON-OFF output Open collector 30 V Max. 80 mA —
30 V, Max. 100 mA
Setting points 1 point 2 points 1 point 1 point
Operation indicator light Lights up when ON Lights ON (Output1: Red, Output2: Green) Lights up when ON Lights ON
Setting trimmer 3 rotations 200 degrees 3 rotations 200 degrees 3 rotations 200 degrees 18 rotations
Current consumption 17 mA or less (When 24 VDC is ON) 25 mA or less (When 24 VDC is ON) 17 mA or less (When 24 VDC is ON) 16 mA —
Max. current — — 5 to 20 mA
Max. operating pressure 0.2 MPa 0.5 MPa
∗ When using ejector system, instantaneous pressure up to 0.5 MPa will not damage the switch.

Solid State Switch (ZSE)

Circuit/Connection Connection with PLC
ZSE1-00-14, -15 Negative COM
Brown lead wire: connect to power supply terminal (+) to operate the switch main Switch
circuit Brown
Main circuit

Main circuit
of switch

Black

of switch
Output (1) Black lead wire: connect to the load (PLC input or relay)
Blue Input
Blue lead wire: connect to power supply GND terminal.
In the case of connector type, do not connect the green lead wire.
ZSE1-00-16, -17
Brown lead wire: connect to power supply terminal (+) to operate the switch
maincircuit.
Main circuit

Output 1 (1) Black lead wire: connect to load (PLC input or relay)
of switch

Positive COM
Output 2 (2) Gray lead wire: connect to the load (PLC input or relay)
Switch
Brown
Blue lead wire: connect to power supply GND terminal.
Main circuit

Black
of switch

ZSE1-00-18, -19 Blue Input

Brown lead wire: connect to power supply terminal (+) to operate the switch main
circuit.
Main circuit

Output 1 (1) Black lead wire: connect to load (PLC input or relay)
of switch

Analog output (2) Gray lead wire: connect to analog load.

Blue lead wire: connect to power supply GND terminal.

Diaphragm Switch (ZSM)

Solid State Switch: ZSM1-015 Reed Switch: ZSM1-021 Contact protection box
Brown
The switch does not have a built-in
Light emitting diode
contact protection circuit. Use this box if
Reed switch

Brown
an induction load is applied or if the lead
Main circuit
of switch

Black
wire is longer than 5 meters.
Polarity protection diode
Blue Black

Red lead wire: Connect the + power supply

to operate the main switch
circuit (to the + terminal of
the power source).
White lead wire: Connect the load (to the
input or output relay of the Internal Circuit of Contact
PLC). Protection Box
Black lead wire: Connect the – power supply
(to the GND terminal of the Contact protection box
power supply).
Brown lead wire
Choke coil
Surge
absorber
Black lead wire

13-4-8
 8
Vacuum Ejector:
With Valve and Switch Series ZM
Hysteresis
Hysteresis is the difference in pressure when the How to Use Connector
output signal is ON and OFF. The pressure to be
1. Attaching and detaching connectors
Precautions
set is the ON pressure.
It turns ON at the set pressure. • When assembling the connector to the Be sure to read before handling.
High
switch housing, push the connector straight Refer to pages 13-15-3 to 13-15-4
vacuum onto the pins until the level locks into the for Safety Instructions and
pressure housing slot. Common Precautions on the
Setting pressure • When removing the connector from the products mentioned in this
Hysteresis

switch housing, push the lever down to

unlock it from the slot and then withdraw the
catalog, and refer to page 13-1-5
connector straight off of the pins. for Precautions on every series. ZX
Lead wire (0.2 to 0.33 mm2 Mounting
Max. cover diameter) ZR
Atmospheric pressure
Socket
ø1.7 mm Warning
Hook 1. Do not drop or bump. ZM
Number of Rotations/Pressure When handling the switch, do not apply an
Connector excessive impact (1000 m/s2) by dropping or
Adjustment Screw striking the switch. Even if the switch case ZH
DC polarity indication
itself does not become damaged, it could
Number of rotations damage the internal switch and cause it to
Lever
malfunction. ZU
Pin 2. Hold the product from the body side
Adjustable range
when handling. ZL
Groove To handle the product, hold it by its body. The
Mulfunction tensile strength of the power supply cord is
(–26.6 to –79.8 kPa) range
49 N (5 kgf). If the cord is pulled with a ZY
greater force, it could lead to a malfunction.
Housing When handling the product, make sure to
Set the pressure adjustment screw to be within 18
turns from its minimum setting. hold it by its body. ZQ
3. Never move the switch assembly or loosen
the switch assembly mounting screws. ZF
Silencer Wiring
A hole is provided in one side of the window of
Warning ZP
the silencer’s exhaust port. Therefore, if the
silencer is to be attached against a wall or a 1. Do not repeatedly bend or pull the lead wires.
board, make sure that the window of the exhaust If the lead wires are routed in such a way that
ZCU
port is not covered by the wall or the board. repetitive bending stress or tensile strength is
To reverse the position, apply your finger to the
side without a hole to forcefully push and
2. Crimping of lead wires and sockets applied, it could cause broken wires. If the lead AMJ
Strip 3.2 to 3.7 mm of the lead wire ends, wires become damaged, the product must be
remove the silencer. Then, turn the silencer replaced (the lead wires cannot be replaced
insert each stripped wire into a socket and
around and push it into place.
crimp contact it using special crimping tool.
due to the grommet type wiring.). Misc.
At this time, make sure that the window of the
silencer is located away from the diffuser. Be careful that the outer insulation of the lead Power Supply
wires does not interfere wth the socket
contact part. Warning
(Crimping tool: DXT170-75-1) 1. Vacuum pressure switch:
Mounting Direction of Silencer
The performance is not affected even if a
앪 앪
Core wire Covering Core wire
crimping area retainer momentary pressure of approximately 0.5
Socket MPa is applied (during a vacuum break).
Noise reduction

Lead wire
However, make sure that a constant
pressure that is higher than 0.2 MPa is not
Hook
Covering applied.
Operating Environment
The window of silencer 3. Attaching and detaching of socket to
connector with lead wire
Warning
• Attaching 1. It cannot be used in a magnetic region.
쎹 쎹
Noise reduction impossible

Insert the sockets into the square holes of In the case of ZSM1-021
the connector (with +, 1, 2, – indication), and Warning
continue to push the sockets all the way in • Operate the product within the specified
until they lock by hooking into the seats in operating amperage range. If the product is
the connector. (When they are pushed in used below the specified operating
their hooks open and they are locked amperage, the indicator light will not turn
automatically.) Then confirm that they are ON. If the product is used above the
locked by pulling lightly on the lead wires. specified operating amperage, the indicator
• Detaching light will become damaged.
To detach a socket from a connector, pull • A parallel connection of the switches does
out the lead wire while pressing the socket’s not cause any problem. However, be
hook with a stick having a thin tip (about 1 carefull with a series connection because
the voltage drop will incerease due to the
mm). If the socket will be used again, first internal resistance of the light-emitting
spread the hook outward. diodes (approximately 2 V per switch).
Connector
In the case of ZSM1-015
Lead wire Warning
• Make sure to connect the 3 lead wires
Socket correctly. If they are interchanged, they
Hook could lead to a malfunction or damage.
• Although an output signal is emitted
immediately after the power is turned ON,
this is not a malfunction.
13-4-9
 9

Series ZM
For Single Unit/Without Valve Basic Type
ZM쏔2 M
H

3-ø4.5
SUP. port Mounting hole

Silencer assembly
Dimensions of model
with high noise
VAC. port reduction silencer
assembly is the same
as standard.

VAC. port

(Side entry style is equipped with plugs.)

<Components>
For Single Unit/Without Valve Basic Type with Switch
H-
ZM쏔2 M 쏔쏔

3-ø4.5
Mounting hole

SUP. port

Silencer assembly
Dimensions of model
VAC. port with high noise
reduction silencer
assembly is the same
as standard.

VAC. port

(Side entry style is equipped with plugs.)

13-4-10
 10
Vacuum Ejector:
With Valve and Switch Series ZM
Air Operated Type
H Q
ZM쏔1M - P 쏔

ZX
ZR
Pilot port for release valve Pilot port for supply valve
M3 x 0.5 (M5 x 0.8) M3 x 0.5 (M5 x 0.8)
ZM
ZH
ZU
ZL
ZY

Flow adjustment
ZQ
screw
ZF
SUP. port ZP
ZCU
AMJ

(Mounting hole) Misc.

VAC. port Silencer assembly

Dimensions of model
with high noise reduction
silencer assembly is the
same as standard.

VAC. port

(Side entry style is equipped with plugs.)

This dimension shows Q3 (M3 x 0.5). Dimension in parentheses shows Q5 (M5 x 0.8).

13-4-11
 11

Series ZM
<Components>
For Single Unit/With Valve Basic Type with Switch and Valve
H
ZM쏔1M -K쏔쏔쏔-E쏔

Release flow 2-ø4.5 Supply

adjusting needle Mounting valve
Release hole
valve
Pilot valve

Pilot exhaust Vacuum

M5 x 0.8 through pressure
SUP. port switch

VAC. port

Silencer assembly
Dimensions of model
with high noise reduction
silencer assembly is the
same as standard.

VAC. port (Side entry style is equipped with plugs.)

13-4-12
 12
Vacuum Ejector:
With Valve and Switch Series ZM
<Components>
Single/With Air Supply Valve (N.O.) and Vacuum Release Valve Basic Type with Valve
H
ZM쏔1M -B쏔쏔

ZX
ZR

≅300 ZM
ZH
ZU
ZL
Pilot valve for vacuum
release Pilot valve for air supply
ZY
M5 x 0.8 through
(P.E port)
ZQ
ZF
ZP
(Mounting hole) ZCU
SUP. port
AMJ
Misc.

Silencer assembly
Dimensions of model
with high noise reduction
silencer assembly is the
VAC. port same as standard.

(Side entry style is equipped with plugs.)

VAC. port

13-4-13
 13

Series ZM
Manifold Specifications: Series ZZM

Manifold Specifications
Manifold style Stacking
Common SUP port∗ Rc 1 4
Individual SUP port∗ Rc 1 8
Common EXH port Rc 1 2 , 3 4
EXH port location Right side/Left side/Both sides ∗∗
Max. number of stations Max.10 stations
Silencer ZZM-SA (With bolts)
∗ Mixed mounting of common SUP and individual SUP types possible.
∗∗ Right or left to the VAC port.

Maximum Ejector Stations (Max. operable nos. simultaneously)

Ejector model ZM053 ZM073 ZM103 ZM133
Manifold model ZM054 ZM074 ZM104 ZM134

ZZM Stations — 06 R 10 8 5 4
L

ZZM Stations — 06B 10 10 8 6

R 10 8 5 4
ZZM Stations — 04
L

ZZM Stations — 04B 10 10 8 6

∗ Effective area of external silencer is 160 mm2.

Manifold Specification Sheet

How to Order Ejector Manifold
Fill in the manifold specification sheet on page
13-14-20 when specifying the manifold style. ZZM 06 06 R R
Multi-ejecter Common SUP port
Series ZM Port and silencer location∗∗
Manifold location∗∗ Nil Both sides
R Right side R Right side
Number of stations
L Left side L Left side
01 1 station B Both sides ∗∗ Right or left to the
···

···

∗∗ Right or left to the VAC port

05 5 stations VAC port
···

···

Common EXH port size

10 10 stations (Max.) 12
04
06 34
Thread type
Silencer for ZZM
Nil Rc S
(ZZM-SA)
T NPTF
F G
∗ Indicate the ejector model no. below
the manifold base no.
Example)
Manifold: ZZM06-06R (1 pc.)

Ejector: ZM103H-J5LZ (3 pcs.)

ZM133H-J5LZ (3 pcs.)

13-4-14
 14
Vacuum Ejector:
With Valve and Switch Series ZM
Manifold

ZZM Number of ejectors Common EXH port Port location

Mounting hole
ZX
ZR
ZM
ZH
ZU
Pitch
P = 16
ZL
ZY
ZQ
ZF
Common SUP port ZP
2-M5 x 0.8
Common pilot EXH port ZCU
Individual
SUP port AMJ
Left Right Misc.

VAC. port

2-Rc 1/2, 3/4

Common EXH port

(mm)
L Stations 1 2 3 4 5 6 7 8 9 10
L1 28 ± 1.5 44 ± 1.5 60 ± 1.5 76 ± 1.5 92 ± 1.5 108 ± 2.0 124 ± 2.0 140 ± 2.0 156 ± 2.0 172 ± 2.0
L2 40 ± 1.5 56 ± 1.5 72 ± 1.5 88 ± 1.5 104 ± 1.5 120 ± 2.0 136 ± 2.0 152 ± 2.0 168 ± 2.0 184 ± 2.0
L3 56 ± 1.5 72 ± 1.5 88 ± 1.5 104 ± 1.5 120 ± 1.5 136 ± 2.0 152 ± 2.0 168 ± 2.0 184 ± 2.0 200 ± 2.0

13-4-15
 15

Series ZM
<Components>
Manifold/With Silencer Manifold with Silencer Dedicated for Manifold

ZZM Number of ejectors S Silencer location

Mounting hole

Pitch
P = 16

Common SUP. port

Individual 2-M5 x 0.8

SUP. port Common pilot EXH. port

VAC port

Silencer dedicated for manifold

VAC. port electrical entry (In the case of side entry/With plug at the bottom)

Rc 1/8 Hexagon socket head cap plug

(mm)
L Stations 1 2 3 4 5 6 7 8 9 10
L1 28 ± 1.5 44 ± 1.5 60 ± 1.5 76 ± 1.5 92 ± 1.5 108 ± 2.0 124 ± 2.0 140 ± 2.0 156 ± 2.0 172 ± 2.0
L2 40 ± 1.5 56 ± 1.5 72 ± 1.5 88 ± 1.5 104 ± 1.5 120 ± 2.0 136 ± 2.0 152 ± 2.0 168 ± 2.0 184 ± 2.0
L3 72 ± 1.5 88 ± 1.5 104 ± 1.5 120 ± 1.5 136 ± 1.5 152 ± 2.0 168 ± 2.0 184 ± 2.0 200 ± 2.0 216 ± 2.0

13-4-16
 16
Series ZM
Made to Order Specifications:
Please consult with SMC for detailed specifications, dimensions, and delivery.

1. Double Check Valve/For Manifold

Single: ZM Nozzle diameter Body Supply pressure Valve Voltage Electrical entry X107
Double check valve
ZX
When a manifold is used, the exhaust that is discharged to the
silencer could flow out to the vacuum port side. To prevent this Warning ZR
from occurring, a check valve is used. 1. It cannot be used for maintaining a vacuum.
2. Use a vacuum release valve (the workpiece cannot be released ZM
without a vacuum release valve.)
ZH
ZU
ZL
ZY
ZQ
ZF
ZP
ZCU
Construction
AMJ
Misc.

Check
valve

13-4-17
 17
Series ZM
Made to Order Specifications:
Please consult with SMC for detailed specifications, dimensions, and delivery.

2. With Individual Exhaust Spacer

Single: ZM Nozzle diameter Body Supply pressure X111
Individual exhaust spacer

When using an individual ejector in a clean room, the exhaust can

be discharged outside of the clean room by attaching an Warning
individual exhaust spacer. (The spacer can also be installed when To connect a pipe to the exhaust port, do not use an elbow joint
using a manifold. Please contact SMC for mounting dimensions.) because it creates resistance and prevents the system from
∗ It is possible to manufacture it with a switch. attaining a sufficient vacuum.

Construction

Individual exhaust spacer

Gasket Spacer E

M2.5 x 36 (2 pcs.)
Round head combination screw

Standard model + 14.5

Individual exhaust port
Rc 1/8

13-4-18
 18

Series ZM
Made to Order Specifications:
Please consult with SMC for detailed specifications, dimensions, and delivery.

3. Double Solenoid Supply Valve

Single: ZM Nozzle diameter Body Supply pressure Valve Voltage Electrical entry X126
Double solenoid valve
-X126 With release valve ZX
-X135 Without release valve

Note) The -X126 model cannot be manufactured with an L plug connector for
ZR
This is an air supply pilot valve that is made with double solenoids.
∗ It is possible to manufacture it with a switch. electrical entry. Therefore, use a grommet type or an M plug connector.
ZM
ZH
ZU
ZL
ZY
ZQ
ZF
ZP
ZCU
Construction AMJ
Solenoid for
vacuum supply Pilot valve for air supply
Solenoid for stopping Misc.
vacuum supply

Pilot valve for

vacuum release

13-4-19