Mini Project Report Design of Modified CPW switch using Coventorware

Design of Modified CPW switch using Coventorware

MINI PROJECT REPORT

Submitted as part of the coursework
of
Master of Technology
In
COMMUNICATION SYSTEMS
Of
NATIONAL INSTITUTE OF TECHNOLOGY, TIRUCHIRAPPALLI
By
SUJAY PUJARI (208109013)

Department Of Electronics and Communication Engineering

National Institute of Technology
Tiruchirappalli - 620 015

2010

Dept. of ECE, NIT Trichy 1

 Mini Project Report Design of Modified CPW switch using Coventorware

NATIONAL INSTITUTE OF TECHNOLOGY

TIRUCHIRAPPALLI, TAMIL NADU – 620 015

DEPARTMENT OF ELECTRONICS AND COMMUNICATION ENGINEERING

CERTIFICATE

Certified that the mini project work titled “Cesign of

modified CPW switch using Coventorware is a
bonafide report of the mini project done by Srijith K
(208109015) of second semester M.Tech in
Communication Systems of the National Institute of
Technology, Tiruchirappalli during the academic year
2010.

Dr.S.Raghavan
Project Guide

Place : Tiruchirappalli

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Mini Project Report Design of Modified CPW switch using Coventorware

Date :

ACKNOWLEDGEMENT

First of all I would like to thank God almighty for his divine grace and blessings
throughout this project.

I wish to thank my Project Guide, Dr.S.Raghavan for his guidance he showed us right
through every stage of the project, from the initial conception to final design and
simulation.

I would also like to extend my sincere thanks to my classmates, friends and family for
their whole-hearted support and encouragement.

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Mini Project Report Design of Modified CPW switch using Coventorware

ABSTRACT

The project aims to design and compare the pull-in voltages of different
flexures. Flexures are structures used to reduce the spring constant of beams.
Different flexures were designed for a fixed-fixed beam using CoventorWare. These
flexures were analyzed using the Analyzer tools of CoventorWare namely
MemElectro, MemMech and CoSolve EM. Pull in voltage analysis was also
performed and the pull in voltage of different flexure designs were compared.
The report will reflect on the principles and procedures of CoventorWare,
design details of flexures and the results and conclusions.

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Mini Project Report Design of Modified CPW switch using Coventorware

CONTENTS

1. INTRODUCTION.........................................................................................01

2. COVENTORWARE......................................................................................02
2.1 INTRODUCTION..................................................................................02
2.2 MPD EDITOR........................................................................................04
2.3 PROCESS EDITOR...............................................................................05
2.4 LAYOUT EDITOR................................................................................07
2.5 MEM ELECTRO....................................................................................10
2.6 MEM MECH..........................................................................................11
2.7 COSOLVE EM.......................................................................................12

3. DESIGN OF CPW SWITCH USING TWO CANTILIVERS......................13

4. RESULTS & CONCLUSIONS.....................................................................14

4.1 RESULTS..............................................................................................14
4.2 CONCLUSIONS....................................................................................15

5. REFERENCES..............................................................................................16

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Mini Project Report Design of Modified CPW switch using Coventorware

1. INTRODUCTION
Switches play a main role in MEMS. These are the basic structures which
are used to implement any RF modules in RF MEMS. There are two type of switches
1. Series switch,
2. Shunt switch
For CPW switch usually fixed fixed beam shunt switch is preferred. In this
project we have designed a CPW switch with two cantilever switches using
COVENTORWARE software.

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Mini Project Report Design of Modified CPW switch using Coventorware

2. COVENTOR

2.1 INTRODUCTION

CoventorWare is an integrated suite of software tools for designing and simulating

MicroElectroMechanical Systems(MEMS).
CoventorWare supports two distinct design flows illustrated in fig 2.1. They are
i) ARCHITECT.
ii) DESIGNER and ANALYZER.
The ARCHITECT module provides a unique system-level approach to MEMS design.
The user assembles a schematic of the MEMS device by selecting and connecting
components from a library of parameterized, MEMS-specific behavioral models.
Upon completing a schematic, the user can simulate various aspects of its physical
behavior. The advantages of this system-level modeling approach include full
parameterization of the design and very fast simulations

Fig 2.1 : Design flow in Coventor

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Mini Project Report Design of Modified CPW switch using Coventorware

The DESIGNER and ANALYZER modules support a physical design flow. The user
starts in DESIGNER by creating a 2-D layout in the Layout Editor. The Solid
Modeler uses the layout, in conjunction with the layer stack information provided in
the Process Editor, to automatically build a 3-D solid model. The user then works in a
3-D view in the Preprocessor to prepare the 3-D model for automatic mesh
generation. After a mesh has been generated, the user can select from a
comprehensive suite of field solvers that simulate the physical behavior of MEMS.

Both design flows require information about the fabrication process as a starting
point, and this information is provided via a Process Editor and the Material
Properties Database. The INTEGRATOR module provides a bridge from detailed 3-D
physical simulations in ANALYZER to the ARCHITECT system-level modeling
environment

Fig 2.2 : Function Manager window

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Mini Project Report Design of Modified CPW switch using Coventorware

The Function Manager window shown in Fig 2.2 is the first to appear. All
CoventorWare functionality is accessed from the Function Manager. It consists of the
following:
 Material Properties Database: The first step in creating a design is to enter
the material properties associated with your fabrication process in the Material
Properties Database (MPD). Only the materials that are in the MPD are
accessible in the Process Editor and available for simulations.
 Process Editor: The second step in creating a design is to enter a description
of the sequence of steps involved in the fabrication process in the Process
Editor.
 Analyzer 3-D Field Solvers: Analyzer provides a comprehensive suite of
3-D solver. With these solvers, you can perform analyses.

2.2 MATERIALS EDITOR

 Material Properties Database (MPD) file

 Contains commonly used materials for MEMS processing
 Includes mechanical, electrical, thermal, fluidic, and other generic material
property values.

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Mini Project Report Design of Modified CPW switch using Coventorware

2.3 PROCESS EDITOR

 Coventor uses Surface micromachining

 Surface micromachining – addition and removal of sequence of thin film
layers to/from the wafer surface
 Sacrificial & structural layers
 Depends on the ability to release/dissolve the sacrificial layers while
preserving the integrity of structural layers
 build or edit a simulated process flow that models the fabrication process to be
used
 The 2-D mask definitions in the layout are combined with the depth
information in the process to create a model.

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Mini Project Report Design of Modified CPW switch using Coventorware

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Mini Project Report Design of Modified CPW switch using Coventorware

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Mini Project Report Design of Modified CPW switch using Coventorware

2.4 LAYOUT EDITOR

 Purpose: Generate 2-D masks
 Tasks performed by icons, point-and-click mouse functionality, the menu bar
and drop-down menus, and Terminal Window commands.
 Graphic tool
 User interface dialogs
 Drawing area
 Terminal window
 Icons
 Menu selections

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Mini Project Report Design of Modified CPW switch using Coventorware

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Mini Project Report Design of Modified CPW switch using Coventorware

3D MODEL GENERATION:

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Mini Project Report Design of Modified CPW switch using Coventorware

2.5 MEM ELECTRO

With the CoventorWare solvers, the user can run various

simulations on a model created and meshed in the Preprocessor or
on a model imported and converted to the CoventorWare file
format. CoventorWare’s electrostatic solver, MemElectro, can
compute a matrix of capacitance and conductance values or can
compute forces on conductors and dielectrics for MEMS designs.
MemElectro applies selected solver settings and boundary
conditions and computes the appropriate results. The output may be
viewed in a tabular form or rendered in three dimensions over the
structure’s domain in the Visualizer.
The flow chart in Fig 2.11 provides an overview of the MemElectro
functions.

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Mini Project Report Design of Modified CPW switch using Coventorware

Fig 2.11 : Functions of MemElectro

2.6 MEM MECH

MemMech is CoventorWare’s mechanical solver, which computes

displacement and stress results. The user applies the boundary
conditions set in solver dialog, and the solver generates output that
may be viewed in a tabular form or rendered in three dimensions
over the structure’s domain in the Visualizer. The flow chart in Fig
2.12 provides an overview of the MemMech functions:

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Mini Project Report Design of Modified CPW switch using Coventorware

Fig 2.12 : Functions of MemMech

2.7 COSOLVE EM

CoSolveEM provides the capability of coupled quasi-steady

electromechanical analysis. A typical application is the analysis of
the electrostatic actuation of restrained mechanical structures.
MemElectro provides the electrostatic analysis, and MemMech
provides the mechanical analysis. CoSolve uses an iterative

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Mini Project Report Design of Modified CPW switch using Coventorware

procedure to maintain consistency between the two solutions, that

is, the mechanical deformation is correct for the applied
electrostatic forcing. The most common application is determination
of the so-called "pull-in" voltage, but other applications are useful as
well, including investigation of contact and lift-off behavior and
electrostatic spring softening. Typically, simulations are conducted
in the form of a traversal of a trajectory of actuation voltages (or
charges), but a single excitation condition can also be investigated.
The setup of a CoSolve simulation requires that MemMech be set up
for the mechanical analysis parameters and boundary conditions
and that MemElectro be set up for the electrostatic analysis
parameters and boundary conditions.The user should set
parameters for these solvers before setting CoSolve parameters.

3. DESIGN OF CPW SWITCH WITH TWO CANTILEVERS

Layout:

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Mini Project Report Design of Modified CPW switch using Coventorware

3D model:

4. RESULTS & CONCLUSION

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Mini Project Report Design of Modified CPW switch using Coventorware

MemMech analysis:

Pullin Voltage Analysis: Pull in voltage=13.2v

CONCLUSION:

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Mini Project Report Design of Modified CPW switch using Coventorware

The original CPW switch was modified with two cantilevers and its
pullin voltage was obtained.

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Mini Project Report Design of Modified CPW switch using Coventorware

5. REFERENCES

1. MEMS Design and Analysis Tutorials, Vol. 1, Physical and System Level
Design, CoventorWareTM 2008; www.coventor.com
2. CoventorWare DesignerTM Version 2008; Reference: MEMS and
Microsystems Physical Design; www.coventor.com

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