EELS Paper Notes
EELS Paper Notes
- DESIGN FUNDAMENTALS OF
ALGORITHMS FOR PHOTON-
COUNTING SYSTEMS
James Dick, Charles Jenkins and Jacek
View the article online for updates and enhancements. Ziabicki
Recent citations
- Optimization of monochromated TEM for
ultimate resolution imaging and ultrahigh
resolution electron energy loss
spectroscopy
Sergei Lopatin et al
E-mail: ferdinand.hofer@tugraz.at
1. Introduction
The need to understand atomic processes in solids has led to an increasing demand for new imaging,
diffraction and spectroscopy methods with high spatial resolution. This need has been reinforced by
the growing interest in nanoscience and nanotechnology. Particularly, transmission electron
microscopy (TEM) is of unrivalled value, because it can provide structural information with excellent
spatial resolution (down to atomic dimensions) via high resolution TEM imaging and electron
diffraction. These structural data can be supplemented by chemical information from the same
specimen region, obtained using analytical techniques, such as energy-dispersive X-ray spectroscopy
(EDS) and electron energy-loss spectroscopy (EELS) [1].
Due to the broad range of inelastic interactions of the high energy electrons with the specimen
atoms, ranging from phonon interactions to ionisation processes, electron energy-loss spectroscopy
offers unique possibilities for advanced materials analysis. It can be used to map the elemental
composition of a specimen, but also for studying the physical and chemical properties of a wide range
of materials and biological matter.
Beginning with the increasing use of EEL spectrometers during the eighties of the last century [1],
the energy-filtering technique was a major step forward for two-dimensional mapping of the spectral
features visible in an EEL spectrum [2, 3]. The wide distribution of energy-filtering TEMs (EFTEM)
led to numerous practical applications both in the materials and biological sciences [4]. In the
meanwhile, EFTEM is a widely used method for both overview and nanoscale characterisation of thin
samples, applicable to most chemical elements and especially sensitive to light elements.
With the introduction of high brightness electron sources and spherical aberration correctors, the
image resolution of the TEM reaches now the 50 picometre level [5]. Especially scanning
transmission electron microscopy (STEM) equipped with a Cs-probe corrector is extremely useful for
high resolution imaging [6] and the parallel chemical analysis by EELS and EDS because of the much
increased probe current in the corrected beam.
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EMAS 2015 Workshop IOP Publishing
IOP Conf. Series: Materials Science and Engineering 109 (2016) 012007 doi:10.1088/1757-899X/109/1/012007
Before discussing how these various methods and their recent developments provide us with
information about the specimen, we will briefly examine the principles and instrumentation involved
in recording energy-loss spectra in the TEM.
The low-loss or valence region of an EEL spectrum (< 50 eV) provides similar information to that
provided by optical spectroscopy, containing valuable information about the band structure and in
particular about the dielectric properties of a material (e.g., band gap, surface plasmons). The most
prominent peak, centred at 24 eV, comes from a plasma resonance of the valence atoms. Signal
intensities in the low-loss region are larger than in the high-loss region of the spectrum.
At higher energy losses (> 50 eV), where the number of inelastically scattered electrons is much
lower, the spectrum shows characteristic features called “ionisation edges” (due to their typical shape,
a rapid rise followed by a more gradual fall). These edges are the exact equivalent of an absorption
edge in XAS and arise from the same process. The edges are formed when an inner-shell electron
absorbs enough energy from a beam electron to be excited to a state above the Fermi level. Not all
ionisation edges are saw-toothed like the carbon K-edge in figure 1, but exhibit more complex edge
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EMAS 2015 Workshop IOP Publishing
IOP Conf. Series: Materials Science and Engineering 109 (2016) 012007 doi:10.1088/1757-899X/109/1/012007
shapes such as the L2,3-edge of titanium in figure 1. This L2,3-edge includes sharp excitations at the
onset of the ionisation edge, called white-lines, which are typical for elements in the first row of
transition elements and for the rare earth elements. The ionisation edges can be used for the analysis
of almost all chemical elements in particular for the lighter elements, the edge onset gives the
ionisation energy and allows the qualitative analysis and in case of very thin samples the edge
intensities are proportional to the concentration of the corresponding elements.
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EMAS 2015 Workshop IOP Publishing
IOP Conf. Series: Materials Science and Engineering 109 (2016) 012007 doi:10.1088/1757-899X/109/1/012007
Figure 2. MgO/Ni core shell nanoparticles investigated with a CS-corrected STEM and
EELS spectrum imaging revealing the Ni core and the MgO shell, the inset shows the
Z-contrast image of the Ni core (specimen courtesy: Gopi Krishnan, University of
Groningen, The Netherlands).
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EMAS 2015 Workshop IOP Publishing
IOP Conf. Series: Materials Science and Engineering 109 (2016) 012007 doi:10.1088/1757-899X/109/1/012007
Although EFTEM elemental mapping is now widely used for nanoscale analysis, it cannot deliver
atomic resolution information even in aberration-corrected TEMs. Since the CS-image corrector
affects only spherical aberrations, but not chromatic aberrations (CC), EFTEM mapping at atomic
resolution is only possible by incorporating a chromatic aberration corrector. This so far is only
realized at the NCEM in Berkeley (USA) and the Ernst-Ruska Center in Jülich (Germany) [20].
Elemental mapping at atomic resolution can be easier achieved via the scanning transmission
electron microscope (STEM) which is now in wide general use, harnessing Z-contrast imaging and
EELS [21]. The first elemental maps at atomic resolution have been recorded by using the
STEM-EELS technique by Kimoto et al. [22] and they have been able to visualize the atomic columns
of La, Mn and O in the layered manganite La1.2Sr1.8Mn2O7. In the meanwhile Allen and co-workers
[23] have shown that it is also possible to record atomically resolved elemental maps by using X-ray
spectroscopy in the STEM.
Two important developments enhanced the potential for successful elemental mapping at atomic
resolution: Firstly, the introduction of collection-efficient solid state X-ray detectors (SDD) [12] and
secondly, the simultaneous acquisition of EELS and EDS spectrum images with fast scanning rates
[13]. Since then many examples of atomically resolved elemental maps have been published, but it
has to be realized that coloured elemental maps only yield qualitative information. However, it is
extremely important to provide quantification data in terms of volumetric densities (i.e., number of
atoms per unit volume), as it allows correlating structural and chemical information with each other
(“unit cell atom counting”). Using a SrTiO3 crystal of known thickness and density Kothleitner et al.
[24] could show how EELS and EDS elemental maps (figure 3) can be quantified by combining both
spectroscopies and including the zeta factor method for X-ray quantification. The results show that it
is possible to obtain quantitative numbers of Sr, Ti and O atoms in the individual atom columns,
however elastic and thermal scattering effects can severely influence accuracy at atomic resolution
[25].
Figure 3. Experimental atomic resolution EELS elemental maps for the {001} direction in SrTiO3 for
the Sr L2,3-edge, the Ti L2,3- and the O K-edge with the simultaneously acquired HAADF image and
the RGB composite of the elemental maps; quantum mechanical simulations, assuming a Gaussian
incoherent source size of 0.08 nm, are inset in each figure; from [25].
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EMAS 2015 Workshop IOP Publishing
IOP Conf. Series: Materials Science and Engineering 109 (2016) 012007 doi:10.1088/1757-899X/109/1/012007
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EMAS 2015 Workshop IOP Publishing
IOP Conf. Series: Materials Science and Engineering 109 (2016) 012007 doi:10.1088/1757-899X/109/1/012007
electrons on a metallic/dielectric interface, i.e., surface plasmons, are increasingly studied in the
(S)TEM, taking advantage of its unbeaten high spatial resolution (compared to the scanning optical
near-field microscope). Here the introduction of monochromators, providing an energy resolution of
100 meV or even less [33], was mainly responsible for the big success of the technique [34].
Since the early seventies of the last century EELS has been used for studying surface plasmons
[31, 35], but it was only in 2007 when two independent groups showed how fast electrons can be used
to map localized surface plasmons of single noble metal nanoparticles [36, 37]. In these pioneering
works STEM-EELS was used, but later it was also shown that a monochromated EFTEM can yield
comparable results [38, 39]. It is now widely accepted that EELS or EFTEM are the most advanced
methods to probe plasmonic modes and they are increasingly used to study nanostructures of
increasing complexity. For example STEM-EELS was used for studying dark plasmonic breathing
modes in silver nanodisks [40], for morphing a plasmonic nanodisk into a nanotriangle [41], for
revealing universal dispersions of surface plasmons in flat nanostructures [42], for studying the
3D distribution of surface plasmons around a metal nanoparticle [43] and for exotic nanostructures as
shown in figure 5.
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EMAS 2015 Workshop IOP Publishing
IOP Conf. Series: Materials Science and Engineering 109 (2016) 012007 doi:10.1088/1757-899X/109/1/012007
Recent progress in the development of monochromators with improved energy resolution in the
range of 10 meV has shown that it is now possible to reveal vibrational modes (phonons) in
EEL spectra recorded in a STEM [44]. This new technique allows to study the spatial variation of
vibrational modes in nanostructures and nanoparticles.
7. Conclusions
Overall, inelastic excitations, probed by electron microscopy, have been a continuous source of
information on composition, chemical and physical properties of nanostructured materials over the last
decades. In this review we briefly describe the physical basis of electron energy-loss spectroscopy and
recent developments in EELS instrumentation. We show how STEM-EELS can be used for elemental
mapping of heterogeneous nanoparticles and discuss the prospects for quantitative elemental analysis
at atomic resolution. We describe the advantages of monochromated STEMs for obtaining chemical
bonding information from the EELS near-edge fine structures. Furthermore, we explain how the
low-loss region of the EEL spectrum can be used for physical property mapping. Here we concentrate
on surface plasmon imaging of noble metal nanoparticles. In summary, EELS imaging and
spectroscopy with aberration corrected STEMs offer many new opportunities to study fundamental
questions in physics, chemistry and materials science at atomic resolution.
Acknowledgements
This work has received funding from the European Union within the 7th Framework Programme under
Grant Agreement no. 312483 (ESTEEM2). This work was financially supported by the FFG in
Vienna, Austria (COIN-project ASTEM).
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EMAS 2015 Workshop IOP Publishing
IOP Conf. Series: Materials Science and Engineering 109 (2016) 012007 doi:10.1088/1757-899X/109/1/012007