SC7620 Mini Sputter Coater Operating Manual: For Technical and Applications Advice Plus Our On-Line Shop For Spares and

SC7620 Mini Sputter Coater
Operating Manual
Document Number OM-SC7620
Issue 5 (05/11)
For technical and applications advice plus our on-line shop for spares and
consumable parts visit www.quorumtech.com
Quorum Technologies Ltd is the owner and manufacturer of the range of EM
preparation equipment.
QUORUM TECHNOLOGIES LTD

1 & 3 Eden Business Centre
South Stour Avenue
ASHFORD
Kent, UK
TN23 7RS
Tel: +44(0) 1233 646332

Fax: +44(0) 1233 640744
Email: sales@quorumtech.com
Web : http:///www.quorumtech.com
For technical and applications advice plus our on-line shop for spares and
consumable parts visit www.quorumtech.com
Issue Date Details Revised By

1 12/01/2001 Initial Issue, based on document HA900011 JLS
2 17/08/2005 Manual layout updated JLS
3 01/09/2007 Current Limit indicator added to front panel JLS
4 14/01/2010 Glow discharge function added to Machine and introduction of new case JRM
5 12/05/2011 Platinum and Nickel Targets removed JLS
Disclaimer
The components and packages described in this document are mutually compatible and guaranteed to
meet or exceed the published performance specifications. No performance guarantees, however, can
be given in circumstances where these component packages are used in conjunction with equipment
supplied by companies other than Quorum Technologies.
Quorum Technologies Ltd. Company No. 4273003.

Registered offices Unit 19 Charlwoods Road, East Grinstead, West Sussex. RH19 2HL.
.
SC7620 Sputter Coater: Contents
1 Contents
1.1 Manual Layout
This Operating Manual is divided up into the following major sections, each section
dealing with specific topics, as follows:
Section 1 - Contents
Section 2 - Health and Safety

General section which applies to all Quorum Technologies Polaron products
detailing the very important issues of Health and Safety applicable when using
sample preparation equipment.
Section 3 - Introduction
Introduces this manual.
Section 4 - General Description

Identifies each of the equipment items and provides an overview of their functions
and how they work.
Section 5 - Installation
Instructions on how this instrument should be installed and the connections which
should be made between the equipment items.
Section 6 - Operation
Instructions on how to start-up and run the instrument.
Section 7 - Maintenance
Instructions on how to check the system is functioning correctly, and how to
change consumable items. Details of appropriate spare parts.
Section 8 - Fault Finding

Information on how to identify faults in the system and how to rectify these faults.
Section 9 - Agents
List of main agents supporting Quorum Technologies product range
Section 10 - Index
OM-SC7620 - Operating Manual 3 Issue 4

SC7620 Mini Sputter Coater: Contents
1.2 Section Contents

1 Contents .......................................................................................................... 3
1.1 Manual Layout ...................................................................................................... 3
1.2 Section Contents .................................................................................................. 4
1.3 List of Figures ....................................................................................................... 5
1.4 List of Tables ........................................................................................................ 5
2 Health and Safety ........................................................................................... 6
2.1 Control of Substances Hazardous to Health (COSHH) ........................................ 6
2.2 Safety Policy......................................................................................................... 6
2.3 Conformity ............................................................................................................ 6
2.4 Servicing............................................................................................................... 7
2.4.1 Disclaimer ................................................................................................................. 7
2.4.2 Operators and Service Engineers............................................................................. 7
2.5 Hazard Signals and Signs .................................................................................... 7
2.5.1 Hazard Signal Words................................................................................................ 7
2.5.2 Hazard Labels used on Equipment........................................................................... 7
2.5.3 Hazard Warning Labels used in Equipment Manuals............................................... 8
2.5.4 Instrument Functionality Signs.................................................................................. 8
2.5.5 Serious Damage to Instruments ............................................................................... 8
2.5.6 Hazard to Operator ................................................................................................... 8
2.6 Risk Analysis ........................................................................................................ 9
2.6.1 Personal Operational Risks ...................................................................................... 9
2.6.2 Hazard Materials....................................................................................................... 9
2.7 Good Working Practices..................................................................................... 10
2.8 SC7620 Specific Safety Hazards........................................................................ 10
2.8.1 Contamination......................................................................................................... 10
3 Introduction................................................................................................... 11
3.1 Return of Goods ................................................................................................. 11
3.2 Returns Procedure ............................................................................................. 11
4 Description .................................................................................................... 12
4.1 Equipment .......................................................................................................... 12
4.1.1 Optional Items......................................................................................................... 12
4.1.2 Accessories ............................................................................................................ 12
4.2 Overview............................................................................................................. 13
4.2.1 Hydrophilisation ...................................................................................................... 13
4.3 Technical Specification....................................................................................... 14
4.3.1 SC7620 Mini Sputter Coater Specification ............................................................. 14
4.4 Physical Description ........................................................................................... 15
4.4.1 Operational Description .......................................................................................... 16
4.4.2 Pumping Requirements .......................................................................................... 16
4.5 Interlocks ............................................................................................................ 16
4.6 SC7620 Panel Details ........................................................................................ 17
4.6.1 SC7620 Front Panel Controls................................................................................. 17
4.6.2 SC7620 Rear Panel Connections........................................................................... 18
5 Installation..................................................................................................... 19
5.1 Unpacking Checklist ........................................................................................... 19
5.1.1 Preparation ............................................................................................................. 19
5.2 SC7620 Installation ............................................................................................ 20
5.2.1 Connections............................................................................................................ 20
6 Operation....................................................................................................... 22
6.1 Test Procedure ................................................................................................... 22
6.2 Coating Process ................................................................................................. 23
6.3 Coating Specimens ............................................................................................ 23
6.4 Sputtering Rates................................................................................................. 25
6.5 Glow Discharge Process .................................................................................... 25
7 Maintenance .................................................................................................. 27
7.1 Maintenance – General ...................................................................................... 27
7.2 Cleaning ............................................................................................................. 27
7.2.1 Vacuum Chamber Cleaning.................................................................................... 27
7.3 Target Replacement ........................................................................................... 28
7.3.1 Target Removal ...................................................................................................... 28
7.3.2 Refit New Target ..................................................................................................... 28
7.4 No Discharge Current......................................................................................... 29
7.5 Spare Parts ........................................................................................................ 29
8 Fault Finding ................................................................................................. 30
8.1 Trouble Shooting / Fault Finding......................................................................... 30
Issue 5 4 OM-SC7620 - Operating Manual

SC7620 Mini Sputter Coater: Contents
8.2 Fault Prevention ................................................................................................. 30

9 Agents............................................................................................................ 31
10 Index .............................................................................................................. 32
1.3 List of Figures

Figure 2-1: Hazard Warning Symbols ...................................................................................................... 7
Figure 2-2: International Warning Symbols .............................................................................................. 8
Figure 2-3: Typical Warning sign as shown in this Manual ...................................................................... 8
Figure 2-4: Typical Warning sign as shown in this Manual ..................................................................... 8
Figure 2-5: Typical Warning as shown in this Manual ............................................................................. 8
Figure 4-1: SC7620 Mini Sputter Coater ................................................................................................ 15
Figure 4-2: Sputter Coater Operation ..................................................................................................... 16
Figure 4-3: SC7620 Mini Sputter Coater, Front Panel Controls ............................................................. 17
Figure 4-4: SC7620 Sputter Coater, Rear Panel Connections............................................................... 18
Figure 5-1: SC7620 Connections ........................................................................................................... 21
Figure 6-1: SC7620 Sputter Rates ......................................................................................................... 25
Figure 7-1: Target Replacement............................................................................................................. 28
1.4 List of Tables

Table 1: Personal Operational Risks ........................................................................................................ 9
Table 2: SC7620 Front Panel Control Descriptions ............................................................................... 17
Table 3: SC7620 Rear Panel Components ............................................................................................ 18
Table 4: Spare Parts for the SC7620 ..................................................................................................... 29
Table 5: Trouble Shooting ...................................................................................................................... 30
Table 6: Fault Prevention ....................................................................................................................... 30

SC7620 Mini Sputter Coater: Health and Safety
2 Health and Safety

Safety is very important when using any instrumentation and this section should be read by
all users of our equipment.
This section of the Manual applies to all surface analysis and surface preparation
equipment supplied by Quorum Technologies Polaron range of products, not just the
particular instrument for which the manual refers.
Included in this section are details on warning notations, good working practices and
information on European Community (EC) legislation regarding “Control Of
Substances Hazardous to Health” (COSHH) and risk analysis.
2.1 Control of Substances Hazardous to Health (COSHH)

The E.C. legislation regarding the “Control of Substances Hazardous to Health” requires
Quorum Technologies to monitor and assess every substance entering or leaving their
premises. Consequently any returned goods of whatever nature must be accompanied by
a declaration form available from Quorum Technologies, reference number SP-100.
Without this declaration Quorum Technologies reserves the right not to handle the
substance/item. Also in accordance with E.C. regulations we will supply on request hazard
data sheets for substances used in our instruments.
2.2 Safety Policy

This section contains important information relating to all health and safety aspects of the
equipment. As such it should be read, and understood, by all personnel using the
instrument whether as an operator or in a service capacity.
Quorum Technologies is committed to providing a safe working environment for its
employees and those that use it's equipment and conducts its business responsibly, and in
a manner designed to protect the health and safety of its customers, employees and the
public at large. It also seeks to minimise any adverse effects that its activities may have on
the environment.
Quorum Technologies regularly reviews its operations to make environmental, health and
safety improvements in line with UK and European Community legislation.
The equipment has been designed as free-standing bench mounted instruments. Quorum
Technologies cannot be held responsible for any damage, injury or consequential loss
arising from the use of its equipment for any other purposes, or any unauthorised
modifications made to the equipment.
All service work carried out on the equipment should only be undertaken by suitably
qualified personnel. Quorum Technologies is not liable for any damage, injury or
consequential loss resulting from servicing by unqualified personnel. Quorum
Technologies will also not be liable for damage, injury or consequential loss resulting from
incorrect operation of the instrument or modification of the instrument.
2.3 Conformity
This instrument is supplied in a form that complies with the protection requirements of the
EC Electromagnetic Compatibility Directive 89/336/EEC and the essential health and
safety requirements of the low voltage directive 72/23/EEC both as amended by
92/31/EEC. Any modifications to the equipment, including electronics or cable layout may
affect the compliance with these directives.

2.4 Servicing
2.4.1 Disclaimer
All service work on the equipment should be carried out by qualified personnel. Quorum
Technologies cannot be liable for damage, injury or consequential loss resulting from
servicing from unqualified personnel. Quorum Technologies will also not be liable for
damage, injury or consequential loss resulting from incorrect operation of the instrument
or modification of the instrument.
2.4.2 Operators and Service Engineers

A normal operator of the equipment will not be trained in or qualified for service work on
the equipment and may cause a hazard to himself/herself or others if such work is
attempted. Operators should therefore restrict themselves to the normal operation of the
equipment and not by removing covers from the electronic equipment or dismantling of
the instruments.
Service Engineers who are suitably trained to assess and isolate electrical, mechanical
and vacuum hazards should be the only personnel who access the equipment.
2.5 Hazard Signals and Signs

2.5.1 Hazard Signal Words
The standard three hazard signal words are defined as follows:
• DANGER - imminently hazardous situation or unsafe practice that, if not
avoided, will result in death or severe injury.
• WARNING - potentially hazardous situation or unsafe practice that, if not
avoided, could result in death or severe injury.
• CAUTION - potentially hazardous situation or unsafe practice that, if not
avoided, may result in minor or moderate injury or damage to equipment.
2.5.2 Hazard Labels used on Equipment

Several hazard symbols may be found on the equipment, they are shown below with
their meaning:
Caution (refer to accompanying documents)

Caution, risk of electric shock
Easily touched higher temperature Warning, risk of electric shock

parts
Figure 2-1: Hazard Warning Symbols

2.5.3 Hazard Warning Labels used in Equipment Manuals

The international warning signs used in equipment manuals as shown in Figure 2-2.
Figure 2-2: International Warning Symbols

Where appropriate these are used when a specific identifiable risk is involved in either
using or maintaining the instrument. These take the form of warning triangles or signs
with a graphical description of the hazard.
2.5.4 Instrument Functionality Signs
CAUTION
Do NOT depress button “P” as this will change the program
Figure 2-3: Typical Warning sign as shown in this Manual
This typical sign applies to cautions where there is a risk to the functionality of equipment
due to incorrect operation. These cautions or warnings will be contained in a box and be
accompanied by a circular warning symbol as shown in Figure 2-3.
2.5.5 Serious Damage to Instruments
WARNING
Do NOT operate without first filling the reservoir with water as
this will damage both the pump and the heater.
Figure 2-4: Typical Warning sign as shown in this Manual

This typical caution sign is used where serious damage will be caused by incorrect
operation of instrumentation. They will follow the same form as functionality warnings but
with a triangular warning symbol as shown in Figure 2-4.
2.5.6 Hazard to Operator
WARNING
HAZARD TO HEALTH!
Potentially lethal voltages are used in this equipment.
Before making / breaking connections to the equipment,
ensure power is off and that it is safe to proceed.
Figure 2-5: Typical Warning as shown in this Manual
These warnings will generally occur in relevant installation and maintaining sections
where there exists a potential hazard to the engineer working on the instrument. They will
take the form of the triangular warning symbol accompanied by an international warning
sign and bold type lettering beginning with “WARNING-HAZARD TO HEALTH!” as
shown in Figure 2-5.

2.6 Risk Analysis

2.6.1 Personal Operational Risks
The following is a list of tasks carried out by both the operator and service engineer
where recognised risks have been observed, listed is the personnel protection
equipment (PPE) which is suggested for use for various tasks on any surface analysis
equipment and systems:
Task Carried out by Nature of Hazard Recommended PPE

Cleaning of parts / Operator / Service Splash hazard to Protective goggles,
samples with engineer eyes, drying of skin protective gloves.
isopropanol (IPA)
Use of Liquid Operator / Service Burn risk Thermally protective
Nitrogen in sample engineer gloves and goggles
cooling etc. should be worn.
Lifting of Heavy Service engineer Dropping on foot. Protective footware.
Items
Table 1: Personal Operational Risks
2.6.2 Hazard Materials

• Isopropanol (IPA)
For certain service tasks isopropanol is suggested for cleaning components before
use in the vacuum system. It should be noted that isopropanol is a flammable liquid
and as such should not be used on hot surfaces. In addition it is recommended
that protective gloves are worn when using isopropanol.
• Compressed Air
Compressed air can be a potential hazard if handled inappropriately. A
compressed air line may be fed from some instruments to the customers supply,
and the customer should ensure that this and any other service pipes and cables
are maintained in good condition.
• Nitrogen, Argon and Helium Gas Supplies
Instruments may use nitrogen, argon or helium gas supplies for their operation, the
customer is responsible for maintaining the supply to the instrument. This supply
should be regulated and kept to the lowest pressure and flow rate as is practical to
minimise the effects of any leaks.
• Hazardous Gases
Quorum Technologies has no control over the gases used within the system. It is
therefore viewed as the customers responsibility to assess the hazards involved
and take appropriate precautions when using explosive, toxic or corrosive gases or
gases which may result in hazardous products as a result of a chemical reaction.

2.7 Good Working Practices

It is essential that good hygienic working practices are adopted at all times especially in
an ultra high vacuum or clean room environment and are generally of the “Common
sense” type. Some simple good practice rules are:
• If in doubt don't.
• If in doubt ask.
• When handling solvents wear face mask, gloves, apron and work only in a well
ventilated area.
• Mop up any spillages immediately.
• When handling or decanting mineral oils wear protective clothing.
• Aerosols of mineral oils, such as that produced by gas ballasting, can prove to
be hazardous and an exhaust is recommended.
• Before attempting to service electrical apparatus, isolate from the mains.
• Treat all unknown substances as hazardous.
• Dispose of substances in an appropriate manner.
• Use the correct tool for the job.
• Keep a straight back and bend from the knees when lifting heavy objects.
• Wear protective clothing when using liquid nitrogen.
• Affix pressurised gas cylinders firmly to walls or racks. Use the correct
regulating valves on gas cylinders and always transport cylinders using the
appropriate specialist trolley.
• Obey safety regulations regarding lifts, hoists and machine tools.
• Always make sure you understand a procedure well before attempting it for the
first time.
2.8 SC7620 Specific Safety Hazards

The following Safety Hazards are specific to the SC7620 Mini Sputter Coater.
WARNING
HAZARD TO HEALTH!
The Power Supply used in the Model SC7620 unit can
operate at up to 1200V D.C
HAZARDOUS VOLTAGE OUTPUTS of up to 1200V. D.C.
2.8.1 Contamination
Contamination can seriously affect the sputtering process. To reduce the possibility of
contamination by airborne particles, minimise the time the vacuum chamber is open to
the atmosphere.

SC7620 Mini Sputter Coater: Introduction
3 Introduction
This manual is intended for all users of the SC7620 Mini Sputter Coater manufactured by
Quorum Technologies from the POLARON range and provides information on the installation,
operation and maintenance of the instrument.
Please note that the servicing and maintenance procedures should only be carried out by
qualified service personnel and it is essential that all users should read the Health and Safety
section of this manual.
3.1 Return of Goods

If goods are to be returned to Quorum Technologies for repair or servicing the customer
should contact their local distributor or the factory direct before shipment. A "Returns
Authorisation Number" should be obtained in advance of any shipment. This number is to be
clearly marked on the outside of the shipment. Complete the returned equipment report form,
number SP106 with as much detail as possible and return with the goods.
All returned goods are to be accompanied by a completed "Returned Goods Health and
Safety Clearance" form SP-100 attached to the outside of the package (to be accessible
without opening the package) and a copy of the forms should be faxed in advance to the
factory.
When goods are to be returned under warranty refer to the “Warranty Claim, Repair and
Returns Procedure” form number SP-105
Copies of all these forms can be found in the documentation pack supplied with the instrument
or direct from Quorum Technologies, the details can be found on page two of this document.
3.2 Returns Procedure

Warranty Claim
Electronic and basic servicing capabilities exist at most in-country appointed agents,
however all components are sold with a return to factory warranty (unless otherwise
stated) which covers failure during the first 12 months after delivery.
Returns must be sent carriage paid, Quorum Technologies will cover the return carriage
costs. This covers defects which arise as a result of a failure in design or manufacturing. It is
a condition of warranty that equipment must be used in accordance with the manufacturers
instructions and not have been subjected to misuse. This warranty does not cover
consumable items such as sputter coating targets and carbon evaporation material. To
make a claim under the terms of this warranty provision contact the Customer Service
Department at your local Quorum Technologies Representative in the first instance.
Chargeable Repairs
Always contact your in-country Quorum Technologies Representative in the first instance.
They will be pleased to assist you and will be able to provide an estimate of repair costs,
many offer local repair facilities.
For routine repairs where down-time is not critical. The target standard return time at
Quorum Technologies is 20 working days.
Returns
All returns to Quorum Technologies require the following procedure to be followed:
1. Contact the local Quorum Technologies Representative and request a Returns
Authorisation Number.
2. Complete a Returned Goods Health and Safety form and returned equipment fault report
form.
3. Attach a copy of the completed form to the outside of the package with the usual
shipping documents.
Packaging and Carriage
All goods shipped to the factory must be sealed inside a clean plastic bag and packed in a
suitable carton. If the original packaging is not available Quorum Technologies should be
contacted for advice. Quorum Technologies will not be responsible for damage resulting
from inadequate returns packaging or contamination of delicate structures by stray particles
under any circumstances. All non-warranty goods returned to the factory must be sent
carriage pre-paid, (Free Domicile). They will be returned carriage forward (Ex-Works).

SC7620 Mini Sputter Coater: Description
4 Description
4.1 Equipment
Each SC7620 Sputter Coater when supplied as a complete package, includes the basic
unit, a Gold Palladium target, a start up kit and operation manual. Items can be ordered
as a full package or separately against the following numbers:
SC7620 “Mini” Sputter Coater 220-240V complete, consisting of the following:
LA762001D “Mini” Sputter Coater 220-240V. With Gold/Palladium target
SC7620-STARTUP Start up Kit
OM-SC7620 Operation Manual
SC7620/110V “Mini” Sputter Coater 110-120V complete, consisting of the following:
LA762002D “Mini” Sputter Coater 110-120V. With Gold/Palladium target
SC7620-STARTUP Start up Kit
OM-SC7620 Operation Manual
.
4.1.1 Optional Items

The following optional items are available from Quorum Technologies:
SC502-314A Gold Target
SC502-314B Gold/Palladium Target (1 off supplied with Sputter Coater)
SC502-314E Silver Target
SC502-314G Palladium Target
4.1.2 Accessories
The following accessories are available from Quorum Technologies:
E5005G Rotary Pump, 90 1/m, 110/240 Volt, 50/60Hz, fitted with E5004 rotary pump
exhaust filter.
CA7625 A Carbon Coating Accessory which can be associated with either of the
following sputter coaters manufactured by Quorum Technologies is
available:
SC7620 or SC7640.
This accessory which makes use of the vacuum pump and vacuum control
facilities of the associated sputter coaters, utilises either carbon fibre or
carbon rods in the evaporation process.
A 110 volt version is available as part number CA7625/110V
CA076F Carbon Fibre Head for use with the CA7625.
For further information about the CA7625 Carbon Coating Accessory refer to operating
manual
OM-CA7625.

4.2 Overview
The SC7620 Mini Sputter Coater is a compact magnetron sputter and glow discharge
coater, primarily designed for depositing thin conductive metal coatings on to Scanning
Electron Microscopy (SEM) samples and surface cleaning, allowing high efficiency ion
etching of the specimen surface to remove, for example, oxide or resist layers. Thickness
of metal deposition will be determined by the operator, but will typically be in the region of
1 - 20 nanometers.
The SC7620 uses a basic magnetron sputter head with a simple to replace disc target
(gold/palladium is supplied as standard, but others metals are available as options). The
head is hinged for easy operation and fitted with electrical safety interlocks. The plasma
current is variable by adjustment of the vacuum level using an Argon leak valve; the
plasma voltage is pre-set.
The 100mm (4") diameter Pyrex cylinder is mounted on an aluminium collar and sealed
with 'O' rings. The small vacuum chamber means pump down times and cycle times are
fast; it also allows a small economical rotary to be used. The sample stage is height
adjustable over a large range and can easily be removed to accommodate large
samples.
For SEM X-ray microanalysis applications the SC7620 can be simply converted to
deposit carbon by the addition of an optional carbon evaporation attachment, consisting
of a switchable Voltage Carbon Coating Accessory (CA7625) and a Carbon fibre head
(CA762F).
The SC7620 comes complete with a one metre of 12mm bore vacuum hose and fittings
and requires only the addition of a rotary pump with a capacity of 25 litres / minute or
greater (see "options and accessories”).
The SC7620 can also be used in a glow discharge mode to produce a Hydrophilic and
Negatively charged surface as described below.
4.2.1 Hydrophilisation
Freshly made Carbon support films tend to have a hydrophobic surface which inhibits the
spreading of suspensions of particles in Negative staining solutions. However, after
Glow Discharge treatment with air, the Carbon Film is made Hydrophilic and Negatively
charged, thus allowing easy spreading of aqueous suspensions. With subsequent
Magnesium Acetate treatment the surface is made Hydrophilic and Positively charged.
In addition to Glow Discharge treatment using air, other process gases may be used to
modify surface properties. For example, if Alkylamine is used as a process gas, the
Carbon Film surface will become Hydrophobic and Positively charged. On the other
hand, using Methanol as a process gas results in the surface becoming Hydrophobic and
Negatively charged.
Such treatments can facilitate the optional absorption of selected biomolecules.

4.3 Technical Specification

4.3.1 SC7620 Mini Sputter Coater Specification
Unit dimensions: 340mm wide x 270mm deep x 340mm high (including vacuum
chamber).
Vacuum chamber: 100mm internal diameter x 100mm high.
Weight: 20 kg (44lbs).
Power requirement: Available for either 230V (13 amp) or 110V (15 amp) operation
at 50/60Hz.
Target distance: Normally 45mm (adjustable).
Sputter output: Normal operation is up to 800V D.C. at 20mA. Maximum output
1200V D.C.
Glow discharge output: 0mA to 50mA adjustable discharge with safety cut-out.
System control: Manually by a 180 second timer with 15 second resolution.
Pumping requirements: Pump to evacuate >10-2 mbar, capacity of 25 litres/minute.
Sputtering rates: Refer to Table 6.1, example with a gold/palladium target and
current of 25mA a rate of 6nm per minute is achieved.
Coating thickness: Dependant on time and current, normally between 50 and 300
Angstrom (∑) units for SEM investigations, but will typically be
in the region of 1 - 20 nanometers.
Coating uniformity: Better than 10%.
Gas medium: Argon.

4.4 Physical Description

The SC7620 Mini Sputter Coater is a simple to operate compact magnetron sputtering
system designed to be used for coating Scanning Electron Microscopy (SEM) specimens
and cleaning undesirable residues. The system can only be operated in manual mode.
The SC7620 Mini Sputter Coater (see Figure 4-1) is comprised of three main parts:
The Cabinet assembly
The Vacuum chamber
The Sputter head
The cabinet assembly, which supports the vacuum chamber, contains a high voltage
power supply, a high voltage safety switch with electronic operating logic PCB. Mounted
on the front panel of the cabinet are switches and meters which provide the operator
interface to the system. All service connections to the system are made via the rear
panel. The cabinet is constructed in a manner so as to comply with the European EMC
regulations.
The vacuum chamber is formed by the sputter head top plate assembly, the glass work
chamber and the baseplate assembly mounted on the top panel of the cabinet. A safety
interlock, conforming to IEC 947-5-1, is also incorporated. The integrity of the vacuum is
maintained by circular "O" ring gaskets either end of the vacuum chamber. Rotary pump
connection is via a KF10 flange fitting at the rear of the chamber.
The top plate supports the cathode (target) and magnetic deflection system incorporating
a dark space shield and a radially magnetised 6 pole magnet which confines the plasma
within the target area.
The SC7620 Sputter Coater produces uniform fine grain coating for SEM applications.
The sputter head operates at a fixed voltage of 800V DC (variable with plasma current).
Coating time is controlled by a 180 second solid state timer with 15 second resolution.
The vacuum level and plasma current are monitored by analogue meters.
The standard adjustable height specimen stage is operated by a thumbscrew and may
be easily removed to accommodate large samples.
The vacuum work chamber is 100 mm internal diameter x 100 mm high. The target to
sample distance is nominally 45 mm (adjustable). The sample holder will locate 6
specimen stubs of the 1/8" pin type or several loosely mounted samples.
The unit is supplied with 1 metre x 1/2" bore vacuum hose (351220430) together with an
"O" ring (354371520) and carrier (250102910) and clamp (356801000) and hose adaptor
(BE740096A) for connection to the vacuum chamber. Connections are also included for
the rotary pump. Argon gas hose 2 metres x 3mm bore (351270380) is also supplied.
Figure 4-1: SC7620 Mini Sputter Coater

4.4.1 Operational Description

The SC7620 Mini Sputter Coater operates at a fixed potential of between 800 and 1200
volts DC dependent on plasma current.
An HV voltage is applied between the Target (cathode) and Baseplate (anode) which is
at earth potential. A pressure interlock ensures that the HV supply cannot be activated
until vacuum chamber pressure is reduced to 10-1 mbar or better. Low pressure gas
(argon) is leaked into the vacuum chamber to provide a medium for ionisation. Figure 4-2
shows the principles of the sputtering operation of the SC7620.
Electrons emitted by the cathode, concentrated in the vicinity of the target by the
magnetic field, collide with the gas molecules, producing positive ions (due to secondary
electron emission). Positive ions attracted by the negative potential of the cathode,
bombard the target, causing erosion of the target material. The dislodged target atoms
falling toward the sample follow multiple paths due to collisions with the ionized gas,
coating the sample on all exposed faces.
A gas discharge glow centred about the cathode is visible.
Figure 4-2: Sputter Coater Operation
4.4.2 Pumping Requirements

The work chamber has to be evacuated to <10-2 mbar. This can be achieved in a
reasonable time (depending on the cleanliness of the chamber) using a floor mounted 50
l/m or 90 l/m two stage rotary pump, alternatively a 30 l/m desk top mounted two stage
rotary pump. Preferably incorporating an anti-suck back device and fitted with an oil mist
filter on the exhaust port.
4.5 Interlocks
Safety interlocks are incorporated in the SC7620 Mini Sputter Coater to prevent power
being switched on with the chamber top plate not in the closed position. Also to cut
power to the instrument if vacuum pressure is lost.
WARNING
HAZARD TO HEALTH!
Under no circumstances should interlock connections be over-
ridden.

4.6 SC7620 Panel Details

The SC7620 Mini Sputter Coater is designed to be bench mounted, it provides 0 - 1.2 kV
D.C. output. Process current of up to 0 - 50 mA is available with a 180 second timer to
control the process.
4.6.1 SC7620 Front Panel Controls
The controls and indicators mounted on the SC7620 Mini Sputter Coater front panel are
described below and identified in Figure 4-3 and described in Table 2.
Figure 4-3: SC7620 Mini Sputter Coater, Front Panel Controls
CONTROL or DESCRIPTION
INDICATOR
TIME-SECONDS A twelve position rotary switch sets the required process time, between 15
and 180 seconds, in 15 second steps.
CURRENT LIMIT This LED indicates a fault condition. It Illuminates if the Current flow from the
HT transformer becomes excessive this shows the plasma has been
inhibited.
The system must powered off to reset and the cause removed. See 8 Fault
Finding
CHAMBER This meter provides an indication of pressure within the chamber. The
PRESSURE mbar normal readings are:
Pressure with leak valve closed 0.04 mbar or better.
Pressure with leak valve adjusted 0.06 mbar (approx at 18mA).
PROCESS This meter provides an indication of plasma current flow.
CURRENT mA
START PUMP A press to operate / press to release switch sets the vacuum pump to ON.
After 10-15 seconds a fall in pressure within the chamber will be indicated on
the CHAMBER PRESSURE meter.
SET PLASMA This non-latching switch (hold to operate) is used during the setting of the
LEAK valve, which is adjusted to set the correct plasma current.
START PROCESS Operation of this non-latching switch initiates the sputtering process, the HV
supply is activated, until terminated by the timer.
LEAK This valve leaks gas into the vacuum chamber to control the plasma current.
Used in conjunction with the SET PLASMA switch to adjust the correct
operating conditions.
SPUTTER / Switches between normal sputtering and glow discharge. Despite being able
to change the switch during operation, the polarity of the current will not
GLOW DISCHARGE change once the pump is started.
VENT This valve is opened to admit gas into the system after a sputtering process
has been completed and the vacuum pump has been turned OFF. During the
sputtering process the valve must be SHUT (fully clockwise).
Table 2: SC7620 Front Panel Control Descriptions

4.6.2 SC7620 Rear Panel Connections

The connection points and other components mounted on the rear panel of the SC7620
Mini Sputter Coater are described below and identified in Figure 4-4 and described in
Table 3.
Figure 4-4: SC7620 Sputter Coater, Rear Panel Connections.
CONNECTION DESCRIPTION
GAS IN A 3mm nipple provides the gas (argon) input connection point.
ROTARY PUMP A three-pole mains socket provides power to the rotary pump.
F3 (internal) The 630mA –A/S HT fuse, Type T
Only accessible when the rear panel is removed.
F1 Power supply PCB fuse, Type T 2 Amp.
F2 Main supply fuse, Type T (240 Volt, 10 Amp, A/S), (110 Volt, 15
Amp, A/S)
POWER ON/OFF A vertically operated paddle switch acts as a mains isolator.
POWER IN A flying lead provides the connection of power to the system.
Table 3: SC7620 Rear Panel Components
An additional connection point on the top of the unit for VACUUM is provided for a 12mm
vacuum hose that connects to the vacuum pump.

SC7620 Mini Sputter Coater: Installation
5 Installation
Quorum Technologies has carefully packed the SC7620 Mini Sputter Coater instrument
so that it will reach its destination in perfect operating order. Do NOT discard any packing
materials until the unit has been inspected for any transit damage and the instrument has
been used to the customers satisfaction.
If any damage is found, notify the carrier and Quorum Technologies (or local agent)
immediately. If it is necessary to return the shipment, use the packaging as supplied and
follow the instructions in this manual for return of goods section 3.1.
5.1 Unpacking Checklist

The Equipment package will normally be despatched from the factory in one box. Inside
the box the following will be found, refer and check each item off against the supplied
packing list.
• SC7620 Mini Sputter Coater - packed in its own internal packaging (Target
fitted in Top Plate).
• SC7620 Glass Cylinder - packed separately.
• SC7620 START-UP kit - packed in a polythene bag.
• Optional Spares - packed individually.
• Documentation - Inserted in a folder, containing the operating manual and a
standard forms pack.
5.1.1 Preparation
(a) Ensure that a suitable mains electricity supply (110 Vac - 20amps or 240 Vac -
13amps, frequency 50/60 Hz) is available. Check that the voltage label attached to
the side of the cabinet is suitable for the local voltage and frequency.
The units are supplied for either 230V or 110V operation at 50/60Hz. The power
rating is 250VA excluding the rotary pump. The rotary pump outlet is rated at 230V
10A or 110V at 16A. The 240V pump outlet uses a 3-pin plug (404440310) which
is supplied or 110V standard US plug (not supplied).
(b) Ensure that a suitable gas supply is available.
Typically: A commercial cylinder of Argon Gas (Zero Grade), fitted with a two stage
regulator, in order to deliver gas at a pressure around 5-10 psi (0.5bar).
(c) Ensure that a suitable vacuum pump is available.
Where a rotary pump is used, ensure that the rotary pump has been filled with oil,
in accordance with the manufacturers instructions. The exhaust should be filtered
or expelled to a safe area. All pumps supplied by Quorum Technologies are fitted
with an exhaust filter

5.2 SC7620 Installation

WARNING
HAZARD TO HEALTH!
Before making / breaking connections to the equipment, ensure power is
switched off and that it is safe to proceed.
WARNING
HAZARD TO HEALTH!
Precautions to be taken when lifting this equipment.
Weight of unit is 20 Kilograms (44lbs)
(a) Position the Sputter Coater Cabinet on a suitable level working surface, Access to
both front and rear of the cabinet are required.
(b) Clean the ‘O’ ring gaskets using a cloth moistened with isopropanol.
(c) Position the top plate assembly on the glass cylinder.
(d) Position the vacuum pump as close as possible to the Sputter Coater.
5.2.1 Connections
The connections to be made are described below and illustrated in Figure 5-1.
(a) Make the following hose connections to the rear panel of the cabinet.
(i) Connect 3mm bore gas tubing (supplied) from argon cylinder regulator to
(GAS IN) hose nipple.
(ii) Connect 12mm bore vacuum tubing (supplied) from the rotary pump to the
(VACUUM) connector. Ensure the minimum length of hose is used.
(b) Make the following electrical connections to the rear panel of the cabinet:
(i) Connect between the sputter coater power outlet (ROTARY PUMP) socket
and the vacuum pump.
If the rotary pump is supplied with the Sputter Coater a suitable connecting
cable is supplied with the pump, otherwise a suitable 3-way plug (which can
be wired by the user) is supplied.
(ii) Connect the mains (POWER IN) cable via a suitable plug to the local supply,
in accordance with the cable colour coding:
Brown - Live
Blue - Neutral
Green/Yellow - Earth

Figure 5-1: SC7620 Connections

SC7620 Mini Sputter Coater: Operation
6 Operation
The SC7620 Mini Sputter Coater is designed to be durable and has a long lifetime. The
Instrument does contain items, primarily the Target that has finite lifetimes, in order to
sustain optimum performance it will need replacing periodically. The lifespan of the
Target is dependant on a number of factors, including operating in good vacuum levels,
contamination and the purity of the gas being used. The Target should be replaced when
it starts to become perforated.
6.1 Test Procedure
CAUTION
Contamination can seriously affect the sputtering process
To reduce the possibility of contamination by airborne particles,
minimise the time the vacuum chamber is open to the atmosphere.
This test procedure, which checks the system is operating correctly, should be performed
at the following times:
After the installation process has been completed.
After any operation that could lead to contamination of the vacuum chamber.
(a) Preparation
(i) Check that LEAK and VENT valves are closed, (fully clockwise).
(ii) Check the argon cylinder regulator is open. Set pressure to 0.5 bar (5-
10psi).
(iii) Set TIME control to 15 seconds.
(iv) Check that mains power is available, set the rear panel mounted POWER
ON/OFF switch to the down position. (ON).
(v) Check sputter option is selected.
(b) Set vacuum pressure.

(i) Operate START PUMP switch, the integeral indicator will illuminate and the
rotary pump will start.
(ii) After 10-15 seconds (dependant on the size of rotary pump), the vacuum
gauge will register a fall in pressure within the chamber. Continue pumping
until the chamber pressure reaches 3 x 10-2 mbar or better, (indicating there
are no major leaks in the system).
(iii) Open the LEAK valve (turn knob counter-clockwise, three to four turns) until
the vacuum chamber pressure increases to approximately 6 x 10-2 mbar.
(c) Set process current

Whilst continuing to adjust the LEAK valve, intermittently operate the SET
PLASMA button, the PROCESS CURRENT meter will register the current flow and
sputtering will occur. Open or close the LEAK valve to adjust the current to 18mA.
Release the SET PLASMA button.
(d) Adjust discharge current

(i) Operate the START PROCESS button, the sputtering process will
commence. The current will rise to about 18 mA and a blue or purple
discharge glow will be visible, gold-palladium (or other target material) will
be sputtered onto the base plate. After 15 seconds, the timer will terminate
the process, the discharge will cease and the indicator extinguish.

(ii) Whilst the sputtering process is in progress, outgassing of the system can
alter the process current. Use the LEAK valve to correct these changes.
(e) Close down the system, as follows:
(i) Close the LEAK valve (turn fully clockwise).

(ii) Operate the START PUMP button, the indicator will extinguish and the
rotary pump will be turned OFF.
(iii) Open VENT valve to admit gas to the vacuum chamber. When sufficient gas
has entered the chamber, positive pressure will ‘pop’ the top plate open
(iv) Close the VENT valve.
6.2 Coating Process

A metal film of uniform thickness between 50 and 300 Å is generally used for SEM
investigations.
Care must be taken to ensure the vacuum chamber is kept clean and free from
contamination. Contamination which can arise from the out-gassing of specimens,
adhesives (especially Chlorohydrocarbon based solvents) and rubber gaskets will
adversely affect the quality and rate of sputtering.
A measure of thickness can be obtained using the following equation: d = KIVt
d The coating thickness in Angstrom units.
K An experimentally determined constant based on:
The metal being sputtered,
The gas being used,
45 mm (approx.) target to sample distance.
For gold used with argon, K = 0.17 approx.
For gold used with air, K = 0.07 approx.
I is plasma current, in mA.
V is the applied voltage, in kV, (1 kV).
t is the sputtering time, in seconds.
For a typical sputtering, using gold in argon with a plasma current of 18 mA for 120
seconds:
d = KIVt = 0.17 x 18 x 1 x 120
= 367 Å (approx. 3 Å / second)
The uniformity of the coating thickness within the area of the specimen holder is better
than 10%.
6.3 Coating Specimens

(a) Mount specimens
(i) Prepare specimens on stubs, using an approved method.
(ii) Hinge the top plate back and remove the glass chamber.
(iii) Adjust the height of the sample stage. Whilst the most suitable height for a
particular application can best be established empirically, 35mm between
top of the sample and the target provides a satisfactory general purpose
setting.
(iv) Mount the stubs (with attached samples) on the sample stage.
(v) Replace the glass chamber and close the top plate, to enclose the sample.
Care to be taken when closing the Top Plate onto the glass cylinder as the
glass can easily chip if hit by the Top Plate.
NOTE: Take care to align the glass chamber as the top plate is closed to avoid
chipping the glass sealing surface.

(b) Preparation
10psi).
(iii) Set TIME control to required setting, say 120 seconds (the time required is
process dependent).
ON/OFF switch to the down position (ON).
(v) Check sputter option is selected.
(c) Set vacuum pressure

(i) Operate the START PUMP button, the rotary pump will start and the
reducing pressure will be indicated on the CHAMBER PRESSURE meter.
(ii) When the pressure reaches 0.1 mbar, partially open the LEAK valve to flush
the vacuum system with Argon. During flushing, allow the pressure to rise to
between 0.5 and 1 mbar for 10-15 seconds. Close the LEAK valve and allow
vacuum chamber pressure to recover to better than 4 x 10-2 mbar.
(d) Set process current

Open the LEAK valve and monitor the vacuum pressure. When the pressure
begins to rise, intermittently operate the SET PLASMA button continuing to adjust
the LEAK valve. The PROCESS CURRENT meter will register the current flow.
Open or close the LEAK valve to adjust the current to 18mA. Release the SET
PLASMA button.
(e) Sputter processing

(i) Operate the START PROCESS button, the sputtering process will
commence and a blue coloured discharge glow will be visible in chamber.
Gold-palladium or other target material will be sputtered onto the samples
for the set time period, then the discharge will cease.
(ii) For a thicker coating, repeat (e (i) above).
(f) Remove Specimens

(i) Close the LEAK valve to shut off the flow of argon to the chamber.
(iii) Open the VENT valve to admit gas to the chamber.
(iv) When the chamber pressure returns to atmosphere, close the VENT valve,
lift the top plate clear of the glass chamber.
(v) Remove the specimens.
(vi) If further specimens are not to be coated immediately, close the top plate to
seal the chamber. (See section 6.3(a)-(v))
NOTE: Take care to align the glass chamber as the top plate is closed to avoid chipping
the glass sealing surface.

6.4 Sputtering Rates

The following sputtering rates have been measured using the FT7690 Film Thickness
monitor with a 45mm gap between the targets and the stage crystal holder. The plasma
was established using "zero" grade argon gas at the vacuum level required to achieve
plasma current. Evacuation of the work chamber was achieved with a 50 l/min two stage
rotary pump. Each target was cleaned by sputtering at 25mA for three minutes prior to
coating for the measurements.
The graphs show typical sputter rates achieved on a standard instrument under the
conditions as specified and are intended only as a guide to coating thickness.
.
Figure 6-1: SC7620 Sputter Rates
6.5 Glow Discharge Process

(a) Mount specimens
(i) Hinge the top plate back and remove the glass chamber.
(ii) Adjust the height of the sample stage. Whilst the most suitable height for a
particular application can best be established empirically, 35mm between
top of the sample and the target provides a satisfactory general purpose
setting.
(iii) Mount the samples on the sample stage, using approved method.
(iv) Replace the glass chamber and close the top plate, to enclose the sample.
Care to be taken when closing the Top Plate onto the glass cylinder as the
glass can easily chip if hit by the Top Plate.
NOTE: Take care to align the glass chamber as the top plate is closed to avoid
chipping the glass sealing surface.

(b) Preparation
(*) When used in glow discharge mode either for surface treatment or etching of
surfaces, if a target was previously fitted for sputter coating, this should be
removed. See section 7.3.1 Target Removal on page 28.
(*) Glow discharge is normally in air, so a process gas is not required.
10psi).
(iii) Set TIME control to required setting, say 120 seconds (the time required is
process dependent).
ON/OFF switch to the down position (ON).
(v) Check glow discharge option is selected.
(c) Set vacuum pressure

(i) Operate the START PUMP button, the rotary pump will start and the
reducing pressure will be indicated on the CHAMBER PRESSURE meter.
(iii) Allow vacuum chamber pressure to recover to better than 4 x 10-2 mbar.
(d) Set process current

Open the LEAK valve and monitor the vacuum pressure. When the pressure
begins to rise, intermittently operate the SET PLASMA button continuing to adjust
the LEAK valve. The PROCESS CURRENT meter will register the current flow.
Open or close the LEAK valve to adjust the current meter to required current.
Release the SET PLASMA button.
(e) Glow Discharge process

(i) Operate the START PROCESS button, the glow discharge process will
commence for the set time period, then the discharge will cease.
(f) Remove Specimens

(i) Close the LEAK valve to shut off the flow of air to the chamber.
(iii) Open the VENT valve to admit gas to the chamber.
(iv) When the chamber pressure returns to atmosphere, close the VENT valve,
lift the top plate clear of the glass chamber.
(v) Remove the samples.
(vi) If further samples are not to be cleaned immediately, close the top plate to
seal the chamber. (See section 6.3(a)-(v))
NOTE: Take care to align the glass chamber as the top plate is closed to avoid chipping
the glass sealing surface.

SC7620 Mini Sputter Coater: Maintenance
7 Maintenance
For technical and applications advice plus our on-line shop for spares
and consumable parts visit www.quorumtech.com
7.1 Maintenance – General

WARNING
HAZARD TO HEALTH!
Before making / breaking connections to the equipment, ensure
power is switched off on the the Electronics unit.
(a) The procedures listed in this section should only be done by persons who have had
training and who have achieved a satisfactory knowledge of the necessary skills
and techniques.
(b) If repairs entail the dismantling of any part of the vacuum system, care must be
taken to ensure that it is not contaminated (by dust or fingerprints).
(i) Always wear disposable plastic gloves.
(ii) Do NOT handle internal surfaces.
(iii) Whenever possible, cover to protect against dust.
7.2 Cleaning
Use a damp cloth or proprietary equipment cleaner to remove surface grime from the outer
surfaces of the cabinet and vacuum chamber. Finish with a dry lint free cloth to remove
smearing.
7.2.1 Vacuum Chamber Cleaning

Cleaning of the vacuum chamber is required if the interior of the chamber becomes
contaminated, cleaning on a regular basis is unnecessary. The fact that the glass walls of
the chamber becomes coated with target material and the sample cannot be seen, should
not normally be considered reason to clean the system.
If the system is contaminated by handling or air-bourne pollution, carry out the following
procedure.
For cleaning use a nylon abrasive pad (Scotchbrite or similar) and Cleaning fluid
(Isopropanol).
(a) Ensure power and gas supplies to the sputter coater are set to OFF.
(b) Remove all electrical, gas and vacuum connections from the rear of the instrument.
Move the sputter coater to a clean working area.
(c) Lift the Top Plate assembly clear of the vacuum chamber and remove the glass
chamber. Unscrew and remove the stage assembly.
(d) Lightly abrade all the accessible interior surfaces of the vacuum chamber to remove
any deposits (not the target). Rinse with cleaning fluid. Cover cleaned components
to prevent further contamination.
(e) The target is self cleaning in use and should not require attention. If the target is
damaged, replace the target, see section 7.3.
(f) The vacuum and gas tubing cannot be readily cleaned, if these items are suspect or
showing signs of ageing they should be replaced.
(g) Reassemble the vacuum chamber components.
(h) Reconnect the electrical and gas tubing connections for the Top Plate assembly.
(i) Return the sputter coater to its working position. Reconnect the electrical, vacuum
and gas connectors to the cabinet rear panel.
(j) When taking the system back into service carry out the Test Procedure (see section
6.1), this will ensure the system is thoroughly dried out.

7.3 Target Replacement

In normal use, erosion of the target will occur. Initially this will be seen as triangular
patterns on the surface of the target. With further use, holes in the target (generally in a
triangular pattern) will become apparent. To prevent this occurring prematurely and to
maximise the target usage, occasionally rotate the target approximately 15 degrees to
even out the wear pattern. When the holes finally appear in the target then the target
should be replaced.
7.3.1 Target Removal
Figure 7-1: Target Replacement
Note: Target removal is required when using the Glow Discharge Mode
(a) Ensure power supplies to the Sputter Coater are all set to OFF.
(b) Hinge the top plate back, to expose the target assembly.
(c) To release the Shroud, remove 2 x M3 socket screws. Remove the Shroud.
(d) Unscrew and remove the Target Clamp (if the Target Clamp will not unscrew,
lubricate lightly with isopropanol). Remove and discard the old target. If necessary
clean the Magnet Holder and Target Clamp, using a gentle abrasive material
(Scotchbrite), rinse with isopropanol and dry thoroughly.
7.3.2 Refit New Target

For replacement Target type and number, refer to Spares list section 7.5
(a) Position the new target in the Target Clamp Ring, ensure target is lying flat.
(b) Carefully fit the Clamp over the Magnet Holder, tighten until the target is securely
clamped.
(c) Re-fit the Shroud and secure using the 2 x M3 socket screws.
(d) Position the Top Plate assembly on the vacuum chamber and reconnect the
services previously removed. Care to be taken when lowering the Top Plate onto
the Glass Chamber.
(e) When taking the system back into service carry out the Test Procedure (see chapter
6.1), this will ensure the system is thoroughly dried out.
.

7.4 No Discharge Current

If after switching power on, SET PLASMA is operated and the Sputter Coater does not
respond, check the following:
(a) If SET PLASMA indicator is illuminated, ensure the vacuum pressure is 10-1 mbar
or better, if pressure is above this level check for leaks (check VENT is closed).
(b) If SET PLASMA indicator is not illuminated check fuse F3 (fitted within the sputter
coater).If fuse is blown replace with the correct fuse F3, 630mA anti-surge as
follows:
(i) Ensure power supplies to the Sputter Coater are set to OFF.
(ii) Remove all electrical and gas connections to the rear panel.
(iii) Remove 10 screws to release the rear panel, retain the screws for future use.
(iv) Ease the rear panel away from the main assembly.
(v) F3 fuse holder is mounted in the bottom left corner of the PCB assembly.
(vi) Remove the fuse, test and if necessary replace. Discard the blown fuse.
(vii) Reassemble the Sputter Coater.
(c) If Current limit interlock LED is illuminated the unit remains interlocked until the
power to the instrument is turned off then on again. Please allow between 3 and 5
seconds powered off.
The Current limit interlock LED will remain illuminated if there are short circuits to
the target see Section 7.3 and Section 8
7.5 Spare Parts

Those parts, which due to wear and tear are more commonly required, are listed in the
table as follows.
PART NUMBER DESCRIPTION QTY

E5004 Oil Mist Filter 1
SC502-314A Gold Target 1
SC502-314B Gold/Palladium Target 1
SC502-314E Silver Target 1
SC502-314G Palladium Target 1
351270380A Argon Gas Tubing 2 metres
351220430 Vacuum Tubing 1metre
405030310 Fuse – 3A Type T 11/4” (F1- 110V) 1
1
405020310 Fuse – 2A Type T 1 /4” (F1- 240V) 1
1
405150310 Fuse – 15A Type T 1 /4” (F2- 110V) 1
1
405100310 Fuse – 10A Type T 1 /4” (F2- 240V) 1
405006210 Fuse – 630mA Type T 20mm (F3) 1
Table 4: Spare Parts for the SC7620

SC7620 Mini Sputter Coater: Fault Finding
8 Fault Finding
We hope that you experience the minimum of problems throughout the lifespan of the
instrument but inevitably problems may occur. Any known problems associated with this
type of instrument have been listed below with the possible cause and suggestions to what
to do. If problems continue to occur, for example the fuse blows immediately when a new
one is fitted, contact the Sales Department at Quorum Technologies or your local agent,
see Section 9 for list of agents.
8.1 Trouble Shooting / Fault Finding

OBSERVATION POSSIBLE CAUSE REMEDY Section
Unit appears dead - Cable connections not made - Check all cable connections 5.2.1
- Fuse blown - Replace fuse (F1) on back panel 4.6.2

1
2A 1 /4 “ Anti-surge. - 240V supply
or
1
-
- Interlock not activating - Check interlock is operating
Rotary Pump not - Unit not switched on - Check switch on Rotary Pump -
Working
- Cable connections not made - Check all cable connections 5.2.1
- Fuse blown - Replace fuse (F2) on back panel 4.6.2

1
or
1
Triangular patterns or Target at end of life - Replace Target 7.3
holes on Target
No Discharge Current - Low or No Vacuum Pressure - Leaks in System or Pipe work 6.3
- Target short circuit causing - Clean target and shroud or power 8.2
current limit or vacuum level the unit off and on
dropped quickly during operation
- Vent is Open 4.6.1
- Fuse blown - Replace fuse (F3) inside unit 7.4

630mA 20mm Anti-surge.
Table 5: Trouble Shooting
8.2 Fault Prevention

It is assumed that with a system in regular use and that the system was installed in a
suitable environment and in regular use, faults will be repaired as they occur. To maintain
the equipment to the best operating conditions a maintenance schedule is suggested as
part of a fault prevention programme, the following items are suggested to be included in
such a programme. The frequency of checking will depend on the usage of the equipment.
ITEM REGULARLY OCCASIONALLY

Inspect all connections (vacuum, gas and electric) for signs of X
wear and that they are securely retained in position.
Check all control knobs are secure and operate correctly X
Check that the lid interlock is operating correctly X
Check all earthing cables and connections are secure X
Cleaning particularly inside shroud X
Table 6: Fault Prevention

SC7620 Mini Sputter Coater: Agents
9 Agents
List of Agents Supporting Quorum Technologies products.
Oxford Instruments Pty. Ltd Goffin Meyvis Hi-Tech Instruments Sdn Bhd Monocomp Instrumentacion S.A.
P O Box 7 P O Box 251, 60 Jalan Ind. PBP 3 C/Virgen de la Fuencisla 25
Pennant Hills NSW 1715 NI-4870 AG ETTEN LEUR Taman Ind Pusat, Bandar, 28027 Madrid
AUSTRALIA THE NETHERLANDS Puchong SPAIN
Tel: 61 2 9484 6108 (Also covers, BELGIUM & 47100 PUCHONG, Selangor. Tel: 34 91 326 74 97
Fax: 61 2 9484 1667 LUXEMBOURG) MALAYSIA Fax: 34 91 326 76 08
Email: keith.murray@oxinst.com.au Tel: 31 (0)76 508 6000 Tel: 60 3589 11638 Email: Mi@monocomp.jazztel.es
Fax: 31 (0)76 508 6086 Fax: 60 3589 11639
www.goffinmeyvis.com
Labco GmbH OED Technology Limited Ellipsiz Malaysia SDN BHD Leica Microsistemas SA
Dr - Tritemmel - Gasse 8 15F Beltrade Commercial Building No.15B/15C Jalan Kenari 8 Nicaragua 46
A3013 PRESSBAUM 3 Burrows Street Puchong Jaya BARCELONA 08029
AUSTRIA WANCHAI Selangor Darul Ehsan SPAIN
Tel: 43 2233 53838 HONG KONG, CHINA PUCHONG 47100 Tel: 34 93 49 49530
Fax: 43 2233 53176 Tel: 852 2838 2377 MALAYSIA Fax: 34 93 49 49532
www.jeoleuro.com Fax: 852 2838 0091 Tel: 60 3807 52035 Email: ana.alrcon@leica-
Email:pjcoomb@HK.Super.NET Fax: 60 3807 53104 microsystems.com
Altmann S/A Auro-Science Consulting KFT Global Science & Technology Ltd Aname
Importação.e Comércio.Av H-1031 Budapest Varosfal Kos 5 PO Box 101253 C/Jose Fernandex Cuevas
Nacoes Unidas 13771 Mail:H1300 Budapest PF 234 North Shore Mail Centre 14-B-282244 Pozvelo de Alarcon
Bl.1-7°andar 04794-000 HUNGARY Auckland MADRID
Sao Paulo -SP Tel: 361 242 1390 NEW ZEALAND SPAIN
BRAZIL Fax: 361 242 1391 Tel: 0800 734 100 Tel: 34 91 352 3084
Tel: 55 11 550 73302 Email dobak@auroscience.hu Fax: 0800 999 002 Fax: 34 91 352 3322
Fax: 55 11 550 74196 Email: jsmall@globalscience.co.nz www.aname.org
www.altmann.com.br www.globalscience.co.nz
Soquelec Limited Harley Instruments Nerliens Meszansky AS Atema Instrument
5757 Cavendish Building Plot No. 4, Survey No. 47 Kampengaten 18 PO Box 7075
Suite 101 MONTREAL Poona Satara Road PO Box 2955 Toyen Gillbostraket 8
QUEBEC H4W 2W8 POONA 411009 N-0608 OSLO S-19207 SOLLENTUNA
CANADA INDIA NORWAY SWEDEN
Tel: 1 514 482 6427 Tel: 91 2042 20602 Tel: 47 2268 5070 Tel : 46 8626 8365
Fax: 1 514 482 1929 Fax: 91 2042 20843 Fax: 47 2267 6506 Fax : 46 8626 8355
www.soquelec.com Email: harleyinstruments@vsnt.net www.nerliens.no Email : berndt.holm@atema.se
Edlin s.r.o AVBA ELO SERWIS HO-CHAN Technologies Ltd
Kon vova 141 P.O Box 690, Grazyna B. Dudzinksa N° 19, Lane 43 His-Tsun Road
130 83 PRAHA 3 Ramat Gabriel Industrial Park, Ul.Sotta K. “Sokola” 7/2A Dai-Li City
CZECH REPUBLIC Migdal Haemek, 10500 Pl-02-796 Warszawa TAICHUNG
Tel: 42 2671 08255 ISRAEL POLAND TAIWAN, ROC
Fax: 42 2671 08335 Tel: 972 (0) 4 644 2575 ext.240 Tel: 48 004822 649 8690 Tel: 886 4393 2897
Email:zemek@edlin.cz Fax: 972 (0) 4 644 2577 Fax: 48 (22) 649 11 85 Fax: 886 4393 2401
Email: S.Dudzinkski@medianet.pl Email: zenyan@giga.net.tw
Ax Lab A/S Eisenberg Brothers Labometer Lda Pondpol HTI Co Ltd
Srandboulavarden 64 13 Gush Etzion St Rue Duque de Palmela 82/32 Kanchanapisek Road
DK-2100 COPENHAGEN GIVAT SHUMEL 54030 No. 30-1° Talingchan District
DENMARK ISRAEL 1200 LISBOA Bankok 10170
Tel: 45 3543 1881 Tel: 972 3 532 1715 PORTUGAL THAILAND
Fax: 45 3543 0073 Fax: 972 3 532 5696 Tel: 351 1353 7284 Tel : 66 (2) 887 8883
Email:bodil@ax-lab.dk www.eisenbros.co.il Fax: 351 1332 4304 Fax : 66 (2) 887 6330
Email : Email : polsin@pondpol.com
Labometeri@mail.telepac.pt
Elexience Jeol (Italia) S.p.A. Ellipsiz Singapore Becthai Bangkok Equip. Co Ltd.
9 Rue Des Petits-Ruisseaux Centro Direzionale Ripamonti 29 Woodlands Industrial Park E1 300 Phaholyothin Road
91371 VERRIERS-le-BUISSON Via Dei Tulipani 1 #04-01/06 Northtech Lobby 1 Phayathai
FRANCE PIEVE EMANUELE (MI) 20090 SINGAPORE 757716 BANGKOK 10400
Tel: 33 1695 38000 ITALY Tel: 65 6311 8500 THAILAND
Fax: 33 1601 19809 Tel: 39 02904 1431 Fax: 65 6269 2628 Tel: 66 2615 2929
www.elexience.fr Fax: 39 02904 14303 www.ellipsiz.com Fax: 66 2615 2350/2351
Email: quill@jeol.it www.becthai.th.com
GaLa Instrumente GmbH Nanovision s.r.l Set-Point Instruments Tekser Koll Sti
An der Schalmuch 42 Via Santa Margherita, 115 PO Box 11400, Acibadem Ca. Erdem Sok
BAD SCHWALBACH D-65307 20047 BRUGHERIO VORNA VALLEY Baver Apr. No 6/1
GERMANY ITALY Gauteng Uskudar
Tel: 49 6124 77952 Tel: 039 287 8358 SOUTH AFRICA 1686 ISTANBUL 81010
Fax: 49 6124 60274 Fax: 039 287 2197 Tel: 27 11540 6000 TURKEY
www.gala-instrumente.de Email : nanovision@mclink.it Fax: 27 11466 1315 Tel: 90 216 327 4041
www.nanovision.it www.setpoint.co.za Fax: 90 216 327 4046
Asteriadis S.A Topcon Electron Beam Services Corp DAE IL Commerce Energy Beam Sciences
56 - 58 Spirou Trikoupi 75 - 1 Hasunuma - Cho 2F Jinsung B/D PO Box 468
PO Box 26140 Itabashi - KU 326-34 Magoek-dong 11 Bowles Road
GR-100 22 TOKYO 174 Kangseo-gu AGAWAM
ATHENS JAPAN SEOUL MA01001
GREECE Tel: 813 3558 2588 SOUTH KOREA UNITED STATES OF AMERICA
Tel: 30 1 823 5383 Fax: 813 5392 4992 Tel: 82 2366 58056 Tel: 1 413 786 9322
Fax: 30 1 823 9567 www.topcon-ebs.co.jp Fax: 82 2366 58059 Fax: 1 413 789 2786
www.asteriadis.com www.daeilcm.co.kr www.ebsciences.com
UNITED KINGDOM
Quorum Technologies Ltd, Units 1 & 2South Stour Avenue, ASHFORD, Kent, TN23 7RS.
Tel: (0) 01233 646332. Fax: (0) 1233 640744 Email: Sales@quorumtech.com

SC7620 Mini Sputter Coater: Index
10 Index
A M
Agents ...........................................................31 Maintenance ................................................. 27
C Maintenance – General ................................ 27
C.O.S.H.H. ......................................................6 Manual Layout ................................................ 3
Cleaning ........................................................27 N
Coating Process............................................23 No Discharge Current ................................... 29
Coating Specimens .......................................23 O
Compressed Air ..............................................9 Operation ...................................................... 22
Conformity.......................................................6
Connections ..................................................20 P
Contamination ...............................................10 Preparation ................................................... 19
Contents ..........................................................3 Pumping Requirements ................................ 16
D R
Description ....................................................12 Return of Goods ........................................... 11
Returning components
E Health and safety requirements.......................... 6
Equipment .....................................................12 Returns Procedure........................................ 11
Accessories...................................................... 12 Risk Analysis................................................... 9
Optional Items .................................................. 12 Hazardous Materials........................................... 9
F Personal Operational Risks ................................ 9
Fault Finding .................................................30 S
Fault Prevention ............................................30 Safety Policy ................................................... 6
G SC7620 Front Panel Controls....................... 17
Gas Cell And Options Using Gases – Safety SC7620 Installation....................................... 20
Issues ..........................................................9 SC7620 Mini Sputter Coater Specification ... 14
Gas Supply......................................................9 SC7620 Operational Description .................. 16
Glow Discharge Process...............................25 SC7620 Overview......................................... 13
Good Working Practices ...............................10 SC7620 Panel Details................................... 17
H SC7620 Physical Description ....................... 15
SC7620 Rear Panel Connections................. 18
Hazard Signals and Signs...............................7
Hazard Labels used on Equipment .................... 7 SC7620 Specific Safety Hazards ................. 10
Hazard Signal Words ......................................... 7 Section Contents ............................................ 4
Hazard to Operator ............................................ 8 Servicing ......................................................... 7
Hazard Warning Labels used in Equipment Disclaimer........................................................... 7
Manuals.......................................................... 8 Operators and Service Engineers....................... 7
Instrument Functionality Warnings ..................... 8 Spare Parts ................................................... 29
Serious Damage to Instrument........................... 8 Sputtering Rates ........................................... 25
Health and Safety............................................6 T
Hydrophilisation.............................................13 Target Replacement ..................................... 28
I Refit New Target............................................... 28
Index..............................................................32 Target Removal................................................ 28
Installation .....................................................19 Technical Specification ................................. 14
Interlocks.......................................................16 Test Procedure ............................................. 22
Introduction ...................................................11 Trouble Shooting / Fault Finding .................. 30
Isopropanol (IPA) ............................................9 U
L Unpacking Checklist ..................................... 19
List of Figures..................................................5 V
List of Tables...................................................5 Vacuum Chamber Cleaning ......................... 27

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SC7620 Mini Sputter Coater

Document Number OM-SC7620

QUORUM TECHNOLOGIES LTD

Tel: +44(0) 1233 646332

Issue Date Details Revised By

Quorum Technologies Ltd. Company No. 4273003.

Section 2 - Health and Safety

Section 4 - General Description

Section 8 - Fault Finding

OM-SC7620 - Operating Manual 3 Issue 4

1.2 Section Contents

Issue 5 4 OM-SC7620 - Operating Manual

8.2 Fault Prevention ................................................................................................. 30

1.3 List of Figures

1.4 List of Tables

OM-SC7620 - Operating Manual 5 Issue 5

2 Health and Safety

2.1 Control of Substances Hazardous to Health (COSHH)

2.2 Safety Policy

Issue 5 6 OM-SC7620 - Operating Manual

2.4.2 Operators and Service Engineers

2.5 Hazard Signals and Signs

2.5.2 Hazard Labels used on Equipment

Caution (refer to accompanying documents)

Easily touched higher temperature Warning, risk of electric shock

Figure 2-1: Hazard Warning Symbols

OM-SC7620 - Operating Manual 7 Issue 5

2.5.3 Hazard Warning Labels used in Equipment Manuals

Figure 2-2: International Warning Symbols

2.5.4 Instrument Functionality Signs

Figure 2-3: Typical Warning sign as shown in this Manual

2.5.5 Serious Damage to Instruments

Figure 2-4: Typical Warning sign as shown in this Manual

2.5.6 Hazard to Operator

Issue 5 8 OM-SC7620 - Operating Manual

2.6 Risk Analysis

Task Carried out by Nature of Hazard Recommended PPE

Table 1: Personal Operational Risks

2.6.2 Hazard Materials

OM-SC7620 - Operating Manual 9 Issue 5

2.7 Good Working Practices

2.8 SC7620 Specific Safety Hazards

Issue 5 10 OM-SC7620 - Operating Manual

3.1 Return of Goods

3.2 Returns Procedure

OM-SC7620 - Operating Manual 11 Issue 5

4.1.1 Optional Items

Issue 5 12 OM-SC7620 - Operating Manual

OM-SC7620 - Operating Manual 13 Issue 5

4.3 Technical Specification

Issue 5 14 OM-SC7620 - Operating Manual

4.4 Physical Description

Figure 4-1: SC7620 Mini Sputter Coater

OM-SC7620 - Operating Manual 15 Issue 5

4.4.1 Operational Description

Figure 4-2: Sputter Coater Operation

4.4.2 Pumping Requirements

Issue 5 16 OM-SC7620 - Operating Manual

4.6 SC7620 Panel Details