Clean Rooms Accessories
Clean Rooms Accessories
Clean Rooms Accessories
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CLEANROOMS Terra Universal,Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
Modular Cleanrooms
Manufactured by Terra Universal
Facility Optimization—Create the
production environment you require
without the expense or disruption of a 20
major fab upgrade! Expand or reconfigure
as your requirements change. 24 18
Unsurpassed Cleanliness—
Filtration and ventilation efficiency required 15 28
to meet the most rigorous cleanliness
standards. Independently certified Class 1. 19
Hardwall and Softwall Designs— 26
A style for every requirement, schedule,
and budget!
Comprehensive Environmental
Controls—over particulates, humidity,
temperature, and ESD (electro-static
discharge)
Industry-leading Quality—Over 20 21 29
years of engineering and manufacturing
experience and latest-generation CNC 23
equipment provide standardized
quality you can count on.
Certified Designs
and Fabrication
Techniques—Terra 22 30
has received independent
certification as a Cleanroom
1
Manufacturing Specialist.
Delivered to Your Production
Schedule—Terra understands the
critical importance of timely delivery and
works closely with you to accommodate Cleanroom
tight schedules. Expanded QuickShip 14
Chairs
configurations provide a wide variety of - begin on page 352
“need it now!” cleanrooms.
13
1. Frame Structure; see pg. 200 (hardwall) or 202 7. Strip Curtain Access Door; see pg. 205
(softwall) 8. Hand Washer & Dryer; see pg. 296
2. Shoe Cleaner; see pg. 290 9. W all-Mount Dispensers for gloves, face masks, etc.; se
3. Sole Cleaner; see pg. 288 299
4. Control Panel; see pg. 201 10. Cleanroom Waste Receptacle; see pg. 226
5. Access Door; see pg. 201 11. Garment Cabinets and Racks; see pg. 309
6. Air Lock; see pg. 207, 221 for other 12. Gowning Bench; see pg. 314
antechambers & air showers 13. Gowning Platform with Lean Rail; see pg. 315
196 To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com
Terra Universal,Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
CLEANROOMS
TerraUniversal.com • info@TerraUniversal.com
Tel: (714) 526-0100 • Fax: (714) 992-2179 & ACCESSORIES
16 Turnkey Purchasing:
Terra’s Value Advantage!
No one shopping for a car would think of sourcing
31 the thousands of automobile components separately.
17 Why should it be any different with a Modular
Cleanroom?
Application-Appropriate
Environment—
9 Over 20 years of design and
manufacturing experience
8
in all areas of
25 environmental control:
10 particles, humidity, static,
temperature.
11 7 Work Stations—
ergonomic, space-saving,
ultra-clean designs,
5 including laminar flow
and exhaust purification
4 systems.
6
12
Storage Solutions—
from wall-mount and benchtop dry
boxes to high-volume automated stockers
14. Bootie/Shoe Cabinets; see pg. 316 22. Cleanroom Transport Carts; see pg. 524
15. UltraClean Work Stations; see pg. 214, 322 23. Hardwall & Softwall Panels; see pg. 200 and 204
16. Filter/Fan Units; see pg. 208 24. WIP (Work-in-Progress) Racks; see pg. 232
17. Light Modules; see pg. 209 25. Gas, Vacuum & Power Services; see pg. 210
18. Ionization Modules; see pg. 209 26. UltraClean Step Stools & Ladders; see pg. 230
19. Blank Panels; see pg. 209 27. Fire Suppression System; see pg. 211
20. Air Conditioning Unit; see pg. 210 28. Particle Counters; see pg. 578
21. Air Vents; see pg. 203 29. Cleanroom Pass-Through; see pg. 215
To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com 197
CLEANROOMS Terra Universal,Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
Application Guidelines
Terra Universal will certify its cleanrooms Typical Multi-Zone
to guarantee “as built” compliance with Configurations
cleanliness standards. What matters, Using Partitions
though, is how the cleanroom performs in
real world applications—in your
application, with your personnel and
processing equipment.
Careful consideration of
these operating
conditions will help
you select the
configuration that
meets your
requirements and
fits your budget!
Zone 1
• Most Particle Sensitive
• Class 1 (ULPA) or 10 (HEPA)
• 100% Filter Coverage
Zone 2
• Packaging Area
• Class 100
• 50% Filter Coverage
Note: These are typical, not guaranteed,
contamination levels for each of the filter configurations
depicted. Actual values are related to such variables as Zone 3
the number of garbed personnel present, their activity • Staging Area
level, the cleanliness of outside air, and contaminants • Class 1,000
emanating from process equipment. • 30% Coverage
Cost vs. Coverage: Evaluating FFU Placement (measured 12" below the filter face). This design ensures a positive pressure
The cleanest modular cleanroom incorporates filter/fan units (FFUs) in every 2' x inside the cleanroom, which blocks the influx of contaminants through leaks in
4' ceiling bay. This near-100% ceiling coverage provides a laminar flow of filtered the cleanroom wall or curtain, and guarantees swift removal of particles generated
air to quickly remove contaminants from the cleanroom, meeting Federal by people or process equipment inside the enclosure.
Standard 209(E) for Class 10 or Class 1 environments (depending on the filter Ventilation Efficiency: For less critical contamination requirements,
types selected, HEPA or ULPA). experts correlate ventilation efficiency (i.e., the ability to remove contaminants
and meet a cleanliness standard) with both the velocity of filtered air passing
Of course, 100% ceiling coverage requires substantial investment in FFUs,
through the room and also the number of air changes completed in a given time.
especially if the cleanroom is very large. In most applications, adequate
The air-change figures are usually expressed as a range (see Table 1).
cleanliness can be achieved with substantially less filter coverage. How many
modules you need depends on several operational variables.
Table 1: Table 2:
Recommended Ceiling Filter Coverage
Recommended Air Velocity Rates
Class Ceiling Coverage
Class Average Airflow Velocity Air Changes M 7 & M 6.5 (Class 100,000) 5 - 15%
(per Federal Standard 209E) Per Hour M 6 & M 5.5 (Class 10,000) 15 - 20% Note: Actual average
M 7 and M 6.5 (Class 100,000) 0.005 - 0.041 m/sec (1 - 8 ft/min) 5 - 48 M 5 & M 4.5 (Class 1,000) 25 - 40% velocity and air changes
M 6 and M 5.5 (Class 10,000) 0.051 - 0.076 m/sec (10 - 15 ft/min) 60 - 90 M 4 & M 3.5 (Class 100) 35 - 70% required may vary
M 5 and M 4.5 (Class 1,000) 0.127 - 0.203 m/sec (25 - 40 ft/min) 150 - 240 M 3 & M 2.5 (Class 10) 50 - 90% depending on the
M 4 and M 3.5 (Class 100) 0.203 - 0.406 m/sec (40 - 80 ft/min) 240 - 480 M 2 & M 1.5 (Class 1) 60 - 100%* application and floor plan.
M 3 and M 2.5 (Class 10) 0.254 - 0.457 m/sec (50 - 90 ft/min) 300 - 540 M 1 & Cleaner 80 - 100%*
M 2 and M1.5 (Class 1) 0.305 - 0.457 m/sec (60 - 90 ft/min) 360 - 540
* ULPA filters required in Class 1/10 applications. HEPA filters required
M 1 and cleaner 0.305 - 0.508 m/sec (60 - 100 ft/min) 360 - 600 for all others.
Note: Actual average velocity and air changes required may vary
depending on the application and floor plan. Source: Institute of
Environmental Sciences The breadth of these ranges reflects how dramatically people and processes affect
cleanliness. Low-end figures within each contamination class generally indicate
air velocity and air change requirements for an “as built” or “at rest” facility—one
Cleanliness Rating: Most cleanroom facility engineers agree that Class 1 in which no people are present and no contaminating processes are under way.
and Class 10 applications require near-100% ceiling coverage, producing a In the presence of higher degrees of contamination (resulting from many
laminar flow of clean air traveling downward at a velocity of about 90 feet/minute cleanroom workers or contaminating manufacturing processes), more air
198 To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com
Terra Universal,Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
CLEANROOMS
TerraUniversal.com • info@TerraUniversal.com
Tel: (714) 526-0100 • Fax: (714) 992-2179 & ACCESSORIES
Static-Dissipative PVC
Eliminates
Contamination
Magnets
• Surface resistivity between
106 and 108 ohms/square
• Resists a wide range of acids
and corrosive chemicals
Cleanroom Clean
or Picture Perfect? • Eliminates particle attraction and build-up
• Renders nonconductive plastics obsolete in
Terra appreciates the many comments we have received cleanroom applications
from cleanroom professionals regarding our catalog
photos. • See page 596 for full specifications and
ordering information
True, our cleanroom “workers” take liberties in their dress
that yours cannot. Whether to demonstrate a product
feature or simply to produce a more attractive image, our
models occasionally forego their masks or hoods.
Rest assured: we wouldn't think of letting them in a
cleanroom until they followed proper gowning protocol!
See page 286 for recommended gowning procedures
To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com 199
CLEANROOMS Terra Universal,Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
& ACCESSORIES
▼ TerraUniversal.com • info@TerraUniversal.com
Tel: (714) 526-0100 • Fax: (714) 992-2179
Hardwall Cleanrooms
Terra’s Hardwall Modular Cleanrooms provide the
rigidity and durability of a freestanding room. All
components are factory-assembled and tested
before shipping, and on-site installation is
usually completed in less than a day. Most
standard models ship within 2 - 3 weeks.
Standard Fast-Track Sizes: Call for current delivery times Hardwall Cleanrooms—order Filter/Fan units separately
Nominal* No. of No. of Filter Modules to meet Fed Std 209 With Acrylic Static-Dissipative
Dimensions Ceiling Class Standards (see pg. 12) Panels PVC Panels
Bays 1 10 100 1,000 10,000 100,000 Cat. # Cat. #
200 To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com
Terra Universal,Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
CLEANROOMS
TerraUniversal.com • info@TerraUniversal.com
Tel: (714) 526-0100 • Fax: (714) 992-2179 & ACCESSORIES
To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com 201
CLEANROOMS Terra Universal,Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
& ACCESSORIES
▼ TerraUniversal.com • info@TerraUniversal.com
Tel: (714) 526-0100 • Fax: (714) 992-2179
Softwall Cleanrooms
Terra’s Softwall Modular Cleanrooms provide an
economical, versatile solution to clean manufacturing
requirements in semiconductor, medical device, and
many other industries. Portable, expandable, and easy
to assemble/disassemble, these cleanrooms are also
available on an accelerated delivery program to meet
your tight production schedule!
Softwall Support Frame
The support frame is fabricated of interlocking 21/2"
powder-coated or epoxy-finished square steel
uprights, cross sections, and ceiling
members. Ceiling members are welded
to steel T-bars, forming the 2' x 4'
bays that support filters and
lights. Corner reinforcement
gussets ensure a rigid
structure. Optional heavy-
duty casters allow easy
repositioning after
installation. Standard
height is 7' measured from
filter face to floor (8' 3"
overall), allowing
installation below a
standard 9' ceiling.
Softwall Curtains & Strip Shields
Softwall panels are fabricated of heavy-duty, blur-free 40 mil
material—double the industry standard—ensuring enhanced tear
Note: Walls over 8'
resistance and eliminating the need for unsightly sewn sash weights. Curtains
long require an are RF welded, rather than sewn, for improved cleanliness and durability. Vinyl
additional vertical strip shields, made of 60-mil material, come standard in 8" widths, with 2"
support member. Spans overlap, for easy entrance or exiting. Polysim shields are 12" wide, 40 mil thick.
over 12' require
a center support post. Curtains and strips are available in three materials, in either clear or frosted
appearance. See pg. 204 for ordering information.
Cleanroom-Grade Vinyl is fire retardant and low outgassing.
Static-Dissipative Vinyl is manufactured with permanent built-in static
Call for up-to-the-minute Fast-Track delivery times! inhibitors that, unlike topical treatments, will not wear off.
Fast-Track Sizes: Softwall Modular Cleanrooms Frame Only Softwall Panel Kits*
Nominal** No. of No. of Filter Modules to meet Fed Std 209 Order Panel Kit Standard Vinyl Anti-Static Vinyl Polysim
Dimensions Ceiling Class Standards (see pg. 198) at right (or see pg. 204) (non outgassing)
Bays 1 10 100 1,000 10,000 100,000 Cat. # Cat. # Cat. # Cat. #
8' x 8' 8 5-8 4-8 3-6 2-3 1-2 1 6703-42 6703-49 6703-56 6703-63
8' x 12' 12 7 - 12 6 - 12 4 - 8 3 - 5 2-3 1-2 6703-43 6703-50 6703-57 6703-64
8' x 16' 16 10 - 16 8 - 16 6 - 11 4 - 6 2-4 1-3 6703-44 6703-51 6703-58 6703-65
12' x 12' 18 11 - 18 9 - 18 6 - 13 5 - 7 3-5 1-3 6703-45 6703-52 6703-59 6703-66
12' x 16' 24 14 - 24 12 - 24 8 - 17 6 - 10 4 - 6 2-4 6703-46 6703-53 6703-60 6703-67
16' x 16' 32 19 - 32 16 - 32 11 - 22 8 - 13 5 - 8 2-5 6703-47 6703-54 6703-61 6703-68
20' x 20' 50 30 - 50 25 - 50 18 - 35 13 - 20 8 - 13 3-8 6703-48 6703-55 6703-62 6703-69
** Order frame separately. Kits include 6'6"-H 40 mil clear curtains of material indicated and 4'-wide 60 mil strip door with alternating clear/frosted
8"-W strips. (Polysim strips are 40 mil, 12"W).
** The inside and outside room dimensions are within an inch of the nominal sizes shown. Additional packaging and crating charges apply.
Other Dimensions
Terra offers the engineering and fabrication expertise to meet your requirements for
customized hardwall or softwall cleanrooms. Call to discuss your application!
Cat. #
Operating/Installation Manual 6710-30
202 To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com
Terra Universal,Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
CLEANROOMS
TerraUniversal.com • info@TerraUniversal.com
Tel: (714) 526-0100 • Fax: (714) 992-2179 & ACCESSORIES
Snap-Tite™ Clips
Ideal for securing two curtains together. Each two-piece plastic clip snaps together through a hole
in the curtains.
Cat. #
6704-07
See following pages for other closures and fastening options!
To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com 203
CLEANROOMS Terra Universal,Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
& ACCESSORIES
▼ TerraUniversal.com • info@TerraUniversal.com
Tel: (714) 526-0100 • Fax: (714) 992-2179
Softwall Curtains and These softwall curtains and strip shields are ideal for use with Terra’s free-standing
Softwall Cleanrooms on the previous pages. They can also be installed directly
Strip Shields onto existing walls or ceilings using the versatile Flex Track mounting system.
• Industry-leading fabrication and mounting technology gives Either way, you receive the cleanest, most durable panels available. Standard
you the cleanest, most durable curtains and strip panels softwall curtains are fabricated of heavy-duty, blur-free 40 mil material—double the
available industry standard—ensuring enhanced tear resistance and eliminating the need for
unsightly sewn sash weights. Curtains are RF welded, rather than sewn, for
• Ideal for creating partitions inside a hardwall or softwall improved cleanliness and durability. Strip shields, made of 60 mil material, come
enclosure standard in 8" widths, with 2" overlap, to form parting doors or reach-throughs.
• Suitable for all classes of cleanrooms and all levels of Polysim shields are 40 mil x 12"W.
process isolation Select the panel material to meet your application requirements. Cleanroom-Grade
• Available in three materials, including nonoutgassing, static- Vinyl is fire retardant and low-outgassing. Static-Dissipative Vinyl adds permanent
safe Polysim X1200 built-in static inhibitors that, unlike topical treatments, will not wear off. Tests
performed per ASTM D257 show surface resistivity of 1.8 x 1010 ohms/sq.
• Standard one-piece Flex Track mounting system is easy to
clean, eliminates exterior crevices where contaminants can Non-outgassing Polysim X1200 is made from an inherently static-dissipative
collect polyurethane that provides permanent, humidity-independent ESD protection from
sensitive manufacturing conditions. Polysim contains no plasticizer, making it
• Heavy-gauge materials hang straight, without the need for virtually non-outgassing. All materials meet California Fire Marshall Code, passing
sewn hems or cumbersome sash weights UL 94V-0 flame test criteria.
• Unique T-Bar Mounting System allows suspension of
curtains or strip shields from existing cleanroom T-grids
• Many additional configurations available, including other
colors, thicknesses and strip shield widths—call Terra with
your requirements!
Ordering Guide Clear Panels—Flex Track mounting system included in all softwall cleanrooms.
Select the height and material desired for flexible curtain panels. Pricing is per linear
foot. Use quantity to indicate the length in feet of the curtain or strip panel (e.g.,
quantity 8 = an eight-foot run of material of the specified height). Flex Track mounting
is standard; specify any other desired mounting system (see top of facing page).
When ordering with Terra's Softwall Cleanroom, provide a drawing
that shows the nominal dimensions and floorplan of your cleanroom. If you select
curtain panels, indicate the location and width of any desired access door.
Based on your drawing, Terra will configure the optimal curtain placement. On a
standard basis, an access door, made of alternating clear/frosted strip shields of the
curtain panel material specified, will be installed at the location you indicate.
In the example below, an order for 80' of panel would be processed according to the
drawing to include four corners and four feet of alternating clear and frosted strip
shields positioned in the center of one side.
Please note these construction details: Other Colors (including
• Maximum curtain length is 16 feet (to facilitate installation). black and amber),
• Corners are notched and heat-formed to ensure a snug fit against frame corners. thicknesses and heights
available. Call with your
• Adjacent panels overlap by 6", which generally provides an adequate air barrier. requirements!
• To prevent personnel from using these overlaps as entries, select Snap-Tite™
clips, Dual-Lock Velcro®, or magnetic closures from page 203.
4' strip shield door
40 mil Clear Softwall Curtain Panels
20' 10' curtain Vinyl Anti-Static PVC Vinyl Polysim (non outgassing)
10' curtain
with corner with corner Height Cat. # Cat. #/Linear ft. Cat. #/Linear ft.
notch notch 4' 1320-00 1320-12 1320-24
5' 1320-01 1320-13 1320-25
6' 1320-02 1320-14 1320-26
Bead 16' curtain 6' 6" 1320-03 1320-15 1320-27
16' curtain 20' 7' 1320-04 1320-16 1320-28
7' 6" 1320-05 1320-17 1320-29
8' 1320-06 1320-18 1320-30
8' 6" 1320-07 1320-19 1320-31
Curtain 9' 1320-08 1320-20 1320-32
overlap 9' 6" 1320-09 1320-21 1320-33
4' curtain 4' curtain 10' 1320-10 1320-22 1320-34
with corner with corner
notch notch
204 To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com
Terra Universal,Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
CLEANROOMS
TerraUniversal.com • info@TerraUniversal.com
Tel: (714) 526-0100 • Fax: (714) 992-2179 & ACCESSORIES
FlexTrack shown
with T-Bar Mount
Smooth profile in
closed position won't
harbor contaminants
Perfect for
Access Doors!
Clear Strip Shields (2" overlap) Alternating Clear/Frosted Strip Shields (2" overlap)
Vinyl Anti-Static Vinyl Polysim (non outgassing) Vinyl Anti-Static Vinyl Polysim (non outgassing)
60 mil x 8" w 60 mil x 8" w 40 mil x 12" w 60 mil x 8" w 60 mil x 8" w 40 mil x 12" w
Height Cat. #/Linear ft. Cat. #/Linear ft. Cat. #/Linear ft. Cat. #/Linear ft. Cat. #/Linear ft. Cat. #/Linear ft.
4' 1320-36 1320-48 1320-61 1320-73 1320-85 1320-97
5' 1320-37 1320-49 1320-62 1320-74 1320-86 1320-98
6' 1320-38 1320-50 1320-63 1320-75 1320-87 1320-99
6' 6" 1320-39 1320-51 1320-64 1320-76 1320-88 1321-00
7' 1320-40 1320-52 1320-65 1320-77 1320-89 1321-01
7' 6" 1320-41 1320-53 1320-66 1320-78 1320-90 1321-02
8' 1320-42 1320-54 1320-67 1320-79 1320-91 1321-03
8' 6" 1320-43 1320-55 1320-68 1320-80 1320-92 1321-04
9' 1320-44 1320-56 1320-69 1320-81 1320-93 1321-05
9' 6" 1320-45 1320-57 1320-70 1320-82 1320-94 1321-06
10' 1320-46 1320-58 1320-71 1320-83 1320-95 1321-07
To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com 205
CLEANROOMS Terra Universal,Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
206 To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com
Terra Universal,Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
FAX-BACK CLEANROOM
TerraUniversal.com • info@TerraUniversal.com
Tel: (714) 526-0100 • Fax: (714) 992-2179 CHECK LIST
FAX-BACK Cleanroom Check List: I want ❑ Hardwall (pg. 200) ❑ Softwall (pg. 202)
____________________________________________________________________________________________________________________
Client Contact Function
____________________________________________________________________________________________________________________
End User Job Title Phone Fax
____________________________________________________________________________________________________________________
City/State Terra Install? Voltage e-mail
____________________________________________________________________________________________________________________
Main Room Ante-Chamber
1 Size of the room in feet (length x width)
____________________________________________________________________________________________________________________
2 Class (10, 100, 1,000, 10,000, 100,000)
____________________________________________________________________________________________________________________
3 Cleanroom height—floor to filter face (Standard is 7' without casters)
____________________________________________________________________________________________________________________
4 a Hardwall Material: Acrylic or static dissipative PVC
4 b Softwall Material: Vinyl or static-dissipative vinyl
____________________________________________________________________________________________________________________
5 Light intensity needed (low, medium [general work], high [small parts])
____________________________________________________________________________________________________________________
6a Hardwall Doors—Specify type (hinge or slide) and wall position.
Specify swing—standard is out of cleanroom.
6 b Softwall Doors—Specify Clear or Clear/Frost, lengths and wall positions
____________________________________________________________________________________________________________________
7 Electrical outlets—specify number, voltage & locations
____________________________________________________________________________________________________________________
8 Vacuum connections—specify number and locations
____________________________________________________________________________________________________________________
9 Gas connections—specify number and locations
____________________________________________________________________________________________________________________
10 Ionizing equipment needed (Y/N)?
____________________________________________________________________________________________________________________
Material Size Locations
11 Pass throughs – specify material, size & locations (hardwall only)
____________________________________________________________________________________________________________________
Type Length of Partition Location
12 Room partitions – Strip or solid, partition length & location?
____________________________________________________________________________________________________________________
13 Height of the room into which the cleanroom will be built, in feet.
____________________________________________________________________________________________________________________
If air conditioning is needed, please supply the following information (hardwall designs only):
____________________________________________________________________________________________________________________
Fahrenheit RH
14 a Temperature and RH of the room into which the cleanroom will go.
____________________________________________________________________________________________________________________
14 b What heat sources (people, machinery) will be in room?
____________________________________________________________________________________________________________________
Fahrenheit RH
14 c What temperature and RH are to be maintained inside the cleanroom?
____________________________________________________________________________________________________________________
Magnehelic® (airflow monitor) RH Controls (hardwall only) Removable Service Panel (hardwall only)
15 Accessories to consider:
____________________________________________________________________________________________________________________
Casters (Y/N) - softwall only Wall Mount Shelves (#, size, Hardwall only) Wall Mount Tables (#, size, hardwall only) EP Work stations
____________________________________________________________________________________________________________________
Garment Racks Garment / Storage Cabinets Gowning Bench / Bootie Racks Cleanroom Chairs
____________________________________________________________________________________________________________________
Air Guard Velocity Meter EnviroWatch Monitor Particle Counters Step Ladders / WIP Racks
____________________________________________________________________________________________________________________
Sticky Mats Shoe Cleaner / Vacuum Cleaner Waste Receptacles (#, size) Hand Washer/Dryer
To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com 207
CLEANROOMS Terra Universal,Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
These reliable, self-powered Filter/Fan Units provide a reliable flow of microfiltered air
to meet any cleanliness standard down to Class 1 (per FED-STD-209).
Patented baffling technology ensures uniform airflow across the filter face and
attenuates sound for the lowest noise level in the industry: approximately 53 dBA
(measured no more than 30" from the filter face) with ambient sound level less than 45
dBA. Select HEPA (High-Efficiency Particulate Air) filter, rated 99.99% efficient @
removal of particles 0.3µm and larger, or ULPA (Ultra-Low Penetration Air) filter, rated
99.9995% efficient @ removal of particles 0.128µm and larger.
The durable aluminum lid and body enclose a forward-inclined centrifugal-type
fan/motor with permanently lubricated bearings. Exceeds IES RP-2 recommendations.
2 x 4 models are UL listed; 220V models are CE marked. Fan/motor: Direct drive, forward curve, centrifugal type with sealed
bearings; rated for continuous duty; furnished with
Specifications overload protection and a two-speed switch. Rated 1⁄4
Average airflow velocity: 90 (±10) FPM (.45 m/sec) at low speed, measured 6" below HP @ low speed (1⁄3 HP at high speed).
filter face Air flow (2 x 4): 650 CFM (.329 m/s) of air at filter pressure drop from
Sound level: 50 dBA (with optional speed control), measured no more 0.35 to 0.795 inches W.G. (87 Pa to 198 Pa), at 90 FPM
than 30" from filter face @ 90 FPM Prefilter: 16" x 23.25" x .5" Polyurethane foam (washable)
Vibration level: 0.09 MILS
Housing: 0.63-inch thick aluminum with mill finish; includes integral Ordering information includes turnkey installation at specified location(s) and
air baffle system to ensure even air distribution includes wiring and panel-mount on/off control. Gel-sealed and DOP-tested and
Power Requirements: 115/230VAC, 50/60Hz (see chart below). certified units available; call Terra for pricing.
See page 198 for filter application guidelines!
208 To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com
Terra Universal,Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
CLEANROOMS
TerraUniversal.com • info@TerraUniversal.com
Tel: (714) 526-0100 • Fax: (714) 992-2179 & ACCESSORIES
Modular
ModularCleanrooms
▼
Ionizing AeroBar®
• Provides a continuous stream of static-neutralizing ions
to protect sensitive materials against ESD
Cleanrooms Cleanroom
• Attaches to ceiling T-grid without disrupting the laminar
flow in the cleanroom
• Patented IsoStat technology guarantees intrinsically
balanced ionization without complicated feedback circuits
• Requires no calibration—automatically maintains ion
balance of ± 50 volts
Pass-Throughs
The Ionizing AeroBar® generates a balanced stream of positive and negative ions to
neutralize surface static charges, safeguarding ESD-sensitive materials. Specifications
Patented IsoStat technology makes it one of the most reliable ionizers available. It Input 24 VAC, from wall transformer (included)
emits equal numbers of positive and negative ions and requires no calibration or Power Indicator Green LED
adjustments. Steady-state DC ion emission provides effective discharge, and Ion Emission Steady-state DC, 15 micro-amps maximum output current
Accessories
mounting beneath ceiling filter/fan units ensures even distribution throughout the Emitter Points Replaceable machines titanium, 3-year estimated life (field
area below. replaceable)
Air flow 60 fpm (.045 m/s) minimum required at bar for proper
Discharge times directly under the AeroBar average 28 seconds (from ± 1,000 volts operation
Cleanroom
to 100 volts, measured in a 4-foot laminar flow hood in accordance with Ionization Dimensions 2.1"H x 1.2"W x 44" (5.3 x 3.0 x 111.8 cm)
Standard ANSI ESO/ESD S3.1-1991 of the ESD Association). Weight 35.2 oz. (1 kg)
Price includes installation (specify desired location). Warranty 2-year limited warranty
Cat. #
Pass-Throughs
110VAC, 50/60Hz 6704-17
220VAC, 50/60Hz 6704-18
Accessories Cleanroom
▼
CleanroomCleanroom
2' x 4' Ceiling Module
• Flow-Through units are ideal with dense FFU ceiling This 2' x 4' aluminum housing includes four fluorescent light tubes, providing 4,560
coverage foot candles. Price includes installation (specify desired location when ordering).
Flow-Through Module
Low-profile, fluorescent-tube module stacks beneath a 2' x 4' FFU. Adds 43⁄4" to
Disposables
ceiling height. Intensity: 3,150 foot candles.
Ordering Information Fluorescent Illuminators
Module Type Intensity 115VAC, 277VAC,
60Hz 60Hz
(Foot candles) Cat. # Cat. #
2' x 4' Ceiling Module 4,560 3800-80 3800-80
Disposables
2' x 4' Replacement Ballast — 6704-12 6704-12
Teardrop Light (48"L) 1,260 6704-15 6704-15
Teardrop Light Ballast — 6704-75 6704-75
2' x 4' Flow-Through Module 3,150 6704-77 6704-77-277
2' x 4' Flow-Through Ballast — 6704-78 6704-78-277
Includes installation at specified locations.
Yellow filters available; call for pricing.
▼
Ceiling Panels
• Cover unused 2' x 4' bays in the ceiling grid
• Select transparent material (acrylic or static-dissipative PVC)
to allow light transmission
• Each panel seals against gaskets in the grid frame
Cat. #
Clear Acrylic 6704-19
Clear Static-Dissipative PVC 6704-21
White Polypropylene 6704-20
To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com 209
CLEANROOMS Terra Universal,Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
Cleanroom Air Conditioning Note: In these applications, heat removed from the cleanroom is vented into
the room outside. In the case of large cleanrooms and/or significant heat-
Terra recommends three options for air conditioning in hardwall cleanrooms. generating equipment, this vented heat will raise the ambient temperature and
1. Use of Existing HVAC System place greater load on the A/C modules and well as any existing HVAC system.
An existing high-volume air conditioning (HVAC) system provides the most For most efficient operation, exhaust ducts and ventilation fans should be
effective and economical means to cool your modular cleanroom. installed to vent heat outside the facility.
Because filter/fan units (FFUs) draw air from the surrounding room, they pass 3. Auxiliary Central Air System
cooled air directly into the cleanroom without the need for ducting or special In large modular cleanrooms, an external central A/C system is preferable to the
exhaust systems. The additional load on an existing HVAC system can be A/C modules. In such applications, Terra will provide a ducting and
calculated by adding the heat dissipated by the specified number of FFUs (@ recirculation system that routes exhaust air to the A/C system and delivers
approximately 1,000 BTU/hour/unit) and by equipment and personnel inside cooled feed air to the ceiling FFUs in ample volume to maintain the desired air
the cleanroom. velocity inside the enclosure. In addition, Terra will work with a local A/C
2. Air Conditioning Modules contractor to connect this recirculation system to a central air unit that meets
The modules below provide economical cooling in facilities without adequate cooling requirements and local codes.
HVAC. Based on the cleanroom size, desired temperature, and heat dissipated Call Terra to discuss the most economical, efficient
inside the cleanroom, Terra will configure the appropriate number of units. air conditioning solution for your application.
▼
210 To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com
Terra Universal,Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
CLEANROOMS
TerraUniversal.com • info@TerraUniversal.com
Tel: (714) 526-0100 • Fax: (714) 992-2179 & ACCESSORIES
Modular
ModularCleanrooms
Fire Safety Solutions In other cleanroom applications, however, CO2 suppression systems could be
hazardous to personnel, and a water-based fire suppression system is therefore
Effective fire detection requires careful placement of sensors capable of preferable. Such a water sprinkler system is activated directly by heat sensors
detecting all kinds of fires, large and small, often in the presence of chemical located at each water nozzle. In such applications, the FS System 7 can be used
CleanroomsCleanroom
vapors that restrict visibility. This is exactly the capability provided by the FS as an alarm/documentation system, alerting personnel of fires too small to be
System 7 Fire Detection System listed below. sensed by overhead sprinklers.
CO2 or Water Suppression? Whatever your applications, Terra engineers will work with you to determine the
The FS System 7 is ideal for semiconductor wet bench applications, as well as fire suppression system most appropriate to your requirements, as well as to
pharmaceutical or chemical mixing operations involving flammable materials. local fire codes.\
In these applications, a CO2-based fire suppression system can be integrated Cat. #
with FS System 7 to ensure that any fire that exceeds the critical 14 kW energy Fire Suppression Water Sprinkler 6704-66
Pass-Throughs
level is promptly extinguished. The dual-level response of this system provides Installed at user-selected overhead locations.
an opportunity for very small (4kW - 13kW) fires to self-extinguish before a fire Includes heat sensor and all necessary plumbing and operation controls.
suppression system is activated. In wet benches and mixing stations, CO2
nozzles can be installed so that their discharge affects only fire-likely locations.
Accessories
▼
FS System 7
Cleanroom
Fire Detection System
• The ideal monitoring system for wet benches, exhaust PLC Logic RS232
fume lines, and other potentially hazardous cleanroom 120° 1 Controller
Cat# 6704-25 Uninterrupted
Pass-Throughs
equipment involving volatile chemicals
Power Supply
• Multi-spectral IR flame detector senses all types of fires, Action (Order Separately)
Accessories Cleanroom
even through gases and vapors Outputs
120° 2 ALERT (3kw)
• Electro-optical sensor design meets Factory Mutual (FM) First Stage
requirements • Flashing Light
History
• Sensor range of 120° within 8 feet allows a pair of sensors Outputs • Audible Alarm
to monitor most cleanroom processes thoroughly 120° 3
ALARM (13kw)
• PLC module includes warning light and alarm, fire siren, Second Stage
CleanroomCleanroom
and low-voltage output to activate fire suppression • Fire Alarm
system (order separately) IR Sensors • Auto shutdown of
Cat# 6704-26 wet bench power
• Unique FirePic™ software stores the pre-fire and actual • Fire suppression
fire detector-sensor spectral data from the last six fire activated
events in non-volatile memory for subsequent analysis
• Time/Date -Stamped Alert,
Disposables
The FS System 7 electro-optical fire detectors provide an intelligent, two-stage Alarm and Fault histories
response to fires. This allows time for the fire to self-extinguish, thereby averting • Spectral Data (last 8 sec.)
equipment shutdown and the costly destruction of work in process. This two-stage
response alerts that a fire exists, provides fast detection response should the fire not Fire Detection System Function
self-extinguish, and initiates suppression, if necessary.
hydrocarbon fires, even through the gases and vapors found in chemical wet
Disposables
Unique Two-Stage Fire Response benches. Detectors are housed in a heat-sealed, Clean Room Class-1 rated
ALERT-1™: This first-stage response triggers external audible and visual signals polypropylene material to protect against acids or caustics. It requires no field
when a fire with a heat energy output of 3 kW (the equivalent of a 4-inch diameter calibration or other maintenance. Sensor Dimensions: 4.7" x 3.2" x 1.7"
polypropylene pool fire) is exceeded. These alarms alert the operator that a fire
FirePic™ software provides digital spectral data that enables analysis of the
exists before suppression begins, but gives non-hazardous fires time to self-
probable cause of a fire. It will store 6 fire events in non-volatile digital memory, 8
extinguish before invasive fire suppression is activated. The FS System 7 fire
seconds of pre-fire, actual detector sensor spectral data, and time and date for each
detector will record a time- and date-stamped FirePic™ digital fire signature. This
event. The stored data include a graphical display of the relative spectral intensities
numerical spectral evidence enables analysis of the probable cause of the fire event
versus time preceding and during the fire. All data can be downloaded to PC via RS-
for use in preventing a subsequent, damaging fire.
232 serial port.
ALARM-2™: If the fire does not self-extinguish, and grows to the second-level heat
All part numbers below include installation. Call Terra for assistance in configuring
energy threshold of 13 kW (the equivalent of an 8-inch diameter polypropylene pool
the F7 Fire Detection System.
fire), this second-stage response signals suppression release. In applications with
Cat. #
wet benches, electrical power is shut down. In systems that incorporate electronic
Dual-Spectrum IR Sensor 6704-26
CO2 extinguishers, a low-voltage signal activates fire suppression. A FirePic™ is
Several typically required, depending on application
again recorded to provide information for use in analyzing the cause of the fire.
PLC Controller 6704-25
The fire detectors are digital, 100% solid-state with quantum electro-optical multi-
Includes warning light/alarm and fire siren.
spectral Wide Band IR (1.2—3.5 micron band width), Near Band IR (.7—1.1
micron band width), and Visible Band sensor array, (0.4 – 3.5 micron band width). Uninterrupted Power Supply 6705-05
This broad bandwidth sensitivity allows it to detect all hydrocarbon and non- Ensures system operation in the event of power failure.
To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com 211
CLEANROOMS Terra Universal,Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
& ACCESSORIES
▼ TerraUniversal.com • info@TerraUniversal.com
Tel: (714) 526-0100 • Fax: (714) 992-2179
EnviroWatch™
ThermoHygrometer
• Allows convenient temperature and humidity
monitoring
• Price includes control panel mounting on Terra’s
Modular Cleanroom
• Large-format LCD display is easy to read
Terra’s EnviroWatch™ provides a convenient, inexpensive solution to
temperature and humidity monitoring inside a modular cleanroom.
Designed for easy mounting on Terra cleanroom control panels, the
EnviroWatch™ includes separate LCD dual readouts for temperature (°C or °F)
and % relative humidity. The 3" x 3" LCD display is easy to read.
Dimensions: 4"W x 4.25"H (overall)
3.5"W x 3.25"H (panel cut-out)
Cat. #
Power: Single “AAA” battery (included)
EnviroWatch™ ThermoHygrometer 5401-30
▼
212 To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com
Terra Universal,Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
CLEANROOMS
TerraUniversal.com • info@TerraUniversal.com
Tel: (714) 526-0100 • Fax: (714) 992-2179 & ACCESSORIES
To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com 213
CLEANROOMS Terra Universal, Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
Perforated Shelf
No. 6704-47
Perforated Work
Versatile shelf can be Bench No. 6704-51
mounted at sitting height
to serve as a gowning bench
(Model shown: 6704-39)
▼
214 To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com
Terra Universal, Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
CLEANROOMS
TerraUniversal.com • info@TerraUniversal.com
Tel: (714) 526-0100 • Fax: (714) 992-2179 & ACCESSORIES
Standard Pass-Throughs Slide-Up Door Pass-Throughs Roll-Up Door Pass-Throughs Fire-Rated Pass-Throughs
In six materials and many sizes. See Counterbalanced sliding doors eliminate PLC keypad opens door with the press of Independently certified fire-safe! See
page 216. clearance requirements. See page 219. a button. See page 220. page 220.
To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com 215
CLEANROOMS Terra Universal, Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
& ACCESSORIES
▼ TerraUniversal.com • info@TerraUniversal.com
Tel: (714) 526-0100 • Fax: (714) 992-2179
Pass-Through Chamber Even when they take the trouble to change into cleanroom garb (a time-
consuming and thus expensive operation), they inevitably track in
• Contamination-free transfer of materials in and out of contaminants. The problem is even more acute in cleanrooms that lack air
the cleanroom showers. Each entry creates air turbulence that dislodges contaminants already
in the lab and increases particle counts tremendously.
• Eliminates unnecessary personnel entry
Shutting the Door on Contamination
• Full range of sizes meets any application These Pass-Through Chambers cut down significantly on traffic and
• Stainless steel doors extend service life of plastic and contamination by providing a better, safer way to transfer equipment and
laminate chamber—a must in a production paperwork.
environment! Terra’s comprehensive line includes a size, material, and configuration for
• Foolproof interlock mechanism prevents cross- nearly any application requirement. Our most economical models are
contamination, is reliable and maintenance-free constructed of a fiber core with a white nonconductive laminate fused and
sealed to all exposed sides. Stainless steel models ensure clean operation. For
• Material options accommodate many application especially stringent particle requirements, select an UltraClean™
requirements, from chemical resistance to static electropolished stainless steel pass-through.
control to fire safety
Polypropylene and PVC models are suitable for chemical pass-through
• Accessories include LockLatch™, safety sprinkler, air applications, and Static-Dissipative PVC models combine excellent chemical
shower, and Class 10 HEPA filter/blower module resistance with a surface resistivity of about 107 ohms/square for enhanced
static and particle control. Each model features viewing windows of a
• Easy to install compatible material (indicated on the ordering chart on page 218).
The best way to minimize particle counts is to keep people out of the controlled Doors on either side can be outfitted with an interlocking device that keeps
environment. Unfortunately, day-to-day processing routines often work against personnel from passing particles through the chamber. This device allows only
that goal. one door at a time to open, and thus the amount of air that can enter the
All too often, support personnel are required to enter a cleanroom each time a cleanroom is restricted to a very small volume. The no-maintenance interlock
piece of equipment must be delivered or removed or a form must be signed. mechanism has no power, gas, or other facility requirement, so it continues to
operate when other systems shut down.
216 To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com
Terra Universal, Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
CLEANROOMS
TerraUniversal.com • info@TerraUniversal.com
Tel: (714) 526-0100 • Fax: (714) 992-2179 & ACCESSORIES
Ordering Guide
The following pages list all of Terra’s standard Pass-Through Chambers.
Consider the following options in making your selection:
To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com 217
CLEANROOMS Terra Universal, Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
Removable Shelves
Can be adjusted on electropolished stainless Fluorescent Illuminator
steel wire racks. Stainless steel shields, Provides easy viewing of the chamber. The lighting fixture, mounted to the top of
mounted to the bottom of the chamber, prevent the chamber, features a static-dissipative PVC seal to ensure clean, static-safe
scratching of plastic pass-throughs. conditions.
Cat. #
See ordering table below. For models up to 18" wide 1993-33
For models over 18" wide 1993-34
Double-Door Pass-Throughs
Grounding Terminals Available for 36"W models, double door models minimize door clearance to
Recommended on stainless steel and static- preserve valuable cleanroom space. Practical design requires no center post.
dissipative PVC pass-throughs. Price includes Call for a quotation
installation on cleanroom side (see illustration
Sprinkler Module Cat. #
on page 217 for location).
Is installed in the pass-through 1993-30
Cat. #
for safe operation with flammable materials.
1686-12
Grounded Door Latch Stainless Steel Support Bracket Cat. #
Specify affected door latch(es). 1600-59A Pair recommended for chambers 36"D 1993-60
(see page 217 for illustration).
Price includes installation.
218 To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com
Terra Universal, Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
CLEANROOMS
TerraUniversal.com • info@TerraUniversal.com
Tel: (714) 526-0100 • Fax: (714) 992-2179 & ACCESSORIES
Pass-Through Interlock
Ensures that one door of the pass-through always remains closed,
thereby minimizing the risk of cleanroom contamination (see ordering
chart below).
Note: Interlocks must be ordered together with the pass-through (they
cannot be retrofitted).
Corresponding Accessories
Sliding Doors (2) Mounting Brackets (3) Mechanical Interlocks (4) Cannot be retrofitted Stainless Stainless Stainless
(See description above) For Standard For Pass-Throughs For Standard For Pass-Throughs Steel Steel Steel
Pass-Throughs With Sliding Door Pass-Throughs With Sliding Door Shield (5) Shelf (5) Racks (5)
(one pair)
Cat. # Cat. # Cat. # Cat. # Cat. # Cat. # Cat. # Cat. #
To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com 219
CLEANROOMS Terra Universal, Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
& ACCESSORIES
▼ TerraUniversal.com • info@TerraUniversal.com
Tel: (714) 526-0100 • Fax: (714) 992-2179
Fire-Rated Cleanroom
Pass-Throughs
• Independently certified to meet fire safety requirements
• Optional 10" x 10" clear, polished fire-rated ceramic glass
viewing windows afford full visibility of materials
• Double-wall stainless steel construction is clean and
durable (electropolished models available)
• Mechanical interlock prevents cross contamination
(electronic security interlock also available)
These stainless steel pass-throughs carry an independent fire-safety rating.
Their Warnock Hersey certification meets the requirements of UBC STD 7-2 (1997),
NFPA 252 (1999) and UL 10C (1998), which calls for 90 minute fire exposure
followed by a 20 second hose stream test. In addition, such components as the self-
closing doors and optional polished fire-rated glass are independently fire rated.
Double-wall stainless steel construction ensures durability and cleanliness. Their
smooth design eliminates lips that can collect particles or impede transfer of
materials in and out of the cleanroom. Models are available with electropolished
surfaces to meet the most stringent cleanroom requirements.
Redundant Interlocks Ensure Cleanroom Integrity Select among three standard sizes, or let Terra
All models come with mechanical interlocks on a standard basis. These no- customize a pass-through to your specifications
maintenance devices require no power or other service lines and are highly reliable.
As soon as the handle on either of the doors is opened, the facing door becomes In addition, electronic interlocks are available. Pass-throughs equipped with this
inoperable, preventing the possibility of cross-contamination. feature incorporate a keypad that requires entry of a security code.
Roll-Up Pass-Throughs
• Hands-free automatic door enables an operator to open
the pass-through while holding delicate objects
• Roll-up door design requires no clearance, optimizes
valuable cleanroom floorspace
• Transparent static-dissipative PVC access doors
eliminate static charges and the particles they attract
• Security pass codes can be established to prevent
unauthorized operation
• IR safety beams stop door motion
This unique, space-saving pass-through features dual-side segmented access doors PLC control system
that automatically roll up and down at the push of a PLC control pad. This design includes electronic
interlocks to prevent
eliminates door clearance requirements and makes it easy for gloved personnel to the possibility of cross
open and close doors while holding parts. contamination. Iris
reader and security
Clean, Secure, Static-Safe card system also
Motorized lifters are sealed inside a noncontaminating available.
housing, and doors slide up and down in ultra-smooth
polyethylene tracks. The segmented access doors are Dimensions Roll-Up Pass-Throughs
made of static-dissipative PVC, which helps control Outside Inside Wall Mount Floor Mount (Includes Ramps)
particles by eliminating the charges that attract them. The Stainless Steel Electropolished Stainless Steel Electropolished
door rolls into a stainless steel housing located at the top Stainless Steel Stainless Steel
of the unit. IR safety beams stop door motion if a hand or (W" x D" x H") (W" x D" x H") Cat. # Cat. # Cat. # Cat. #
other object protrudes into the door track. 38 x 30 x 62.5 29 x 27 x 48.75 6704-38 6704-68 6704-37 6704-69
220 To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com
Terra Universal,Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
CLEANROOMS
TerraUniversal.com • info@TerraUniversal.com
Tel: (714) 526-0100 • Fax: (714) 992-2179 & ACCESSORIES
To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com 221
CLEANROOMS Terra Universal,Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
Cleanroom Air Showers are available from 52" to 90" wide and up to 96" long. HEPA Filtered Ceiling Air Shower: This option adds filter/blower
Air Tunnels, available in 52" and 58" widths, extend from 96" to 240" long and modules mounted in the ceiling for enhanced particle control (functions
include all the standard features of the Air Showers. All models are 90" high most effectively with 6" raised floor; see description below). Typical air flow
(add 6" to height for HEPA filter ceiling models; see ordering tables below). The is 90 FPM (can be configured to meet individual specifications).
double-door models listed below are specially designed to allow carts and large
equipment to be passed into the cleanroom; these models do not feature floors. Custom Floor Configurations: Any unit may be ordered either
with no floor (for placement directly on existing floor), or with 6" raised
Customized Systems—on a Standard Basis aluminum floor grates (for improved air circulation, especially with the HEPA
The tables below provide ordering information on standard configurations of filter ceiling option).
Air Showers and Air Tunnels. In addition to these, many other configurations
are available to suit your application requirements. These include: Side Mount: Used where space restrictions do not allow use of standard
10-foot high unit. In this configuration, the blower is mounted to the side of
Custom Door Configurations: You may specify doors at many the shower chamber.
positions along an Air Shower or Tunnel, including a third door. Refer to
the floor plans below. (Note: Three-door designs are not available for Knock Down: When adding a shower to an existing cleanroom, the
Air Showers less than 60" in length.) shower is broken down to wall and ceiling sections for field assembly.
Safety Plate-Glass Doors: replace the standard plexiglass ones.
Explosion-Proof Design: for safe operation with explosive or
flammable materials.
Static Ionized Grid: for safe, effective neutralization of static charges
on personnel or equipment in the Air Shower/Tunnel.
Bumpers: for protecting nozzles along the interior wall from carts.
Air Showers
Dimensions (inches; see diagram above) Blower/ No. of No. of Shipping Stainless Steel Epoxy-Finished CR Laminated Fiber
Filter Filter/ Nozzles Weight Steel Core
A B C D E F G Type* Blowers (lbs.) Cat. # Cat. # Cat. #
90 52 44 26 32 351/2 35 1 1 20 1600 6010-00 6010-14 6010-28
90 52 56 26 32 351/2 47 1 1 20 1800 6010-01 6010-15 6010-29
90 52 60 30 32 351/2 51 2 1 32 1900 6010-02 6010-16 6010-30
90 52 72 30 32 351/2 63 2 1 36 2100 6010-03 6010-17 6010-31
90 52 84 30 32 351/2 75 2 1 40 3500 6010-04 6010-18 6010-32
90 58 44 26 36 391/2 35 1 1 20 2200 6010-05 6010-19 6010-33
90 58 56 30 36 411/2 47 2 1 32 1800 6010-06 6010-20 6010-34
90 58 60 30 36 411/2 51 2 1 32 2000 6010-07 6010-21 6010-35
90 58 72 30 36 411/2 63 2 1 36 2200 6010-08 6010-22 6010-36
90 58 84 30 36 391/2 75 2 1 40 3800 6010-09 6010-23 6010-37
90 64 60 30 42 471/2 51 2 1 32 2000 6010-10 6010-24 6010-38
90 64 72 30 42 471/2 63 2 1 36 2200 6010-11 6010-25 6010-39
90 70 72 30 48 531/2 63 2 1 40 2400 6010-12 6010-26 6010-40
90 90 96 30 72** 751/2 87 2 2 64 5100 6010-13** 6010-27** 6010-41**
** See specifications above for complete information.
** This extra-wide unit features double doors (3'0" x 6'8" each) at each end. It is ideal for passing
large equipment into the cleanroom (features no floor so that carts can roll smoothly.
222
Terra Universal,Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
CLEANROOMS
TerraUniversal.com • info@TerraUniversal.com
Tel: (714) 526-0100 • Fax: (714) 992-2179 & ACCESSORIES
Air Tunnels:
When ordering...
Please specify the desired floor plan, door mounting (left or right opening),
and voltage (208, 230, or 460VAC).
223
CLEANROOMS Terra Universal,Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
& ACCESSORIES
▼ TerraUniversal.com • info@TerraUniversal.com
Tel: (714) 526-0100 • Fax: (714) 992-2179
Clean Phone™
Cleanroom Telephone
• Completely smooth polyester front panel will not trap
particulate matter
• Auto-answer setting allows personnel to answer calls,
in a normal speaking voice, without leaving stations
• Volume and microphone sensitivity are easy to adjust
with just a small standard screwdriver
• Two autodial numbers can be programmed for one-
touch dialing of often-called or emergency numbers
• Oversized buttons are easy for gloved hands to use
• “Flash” button allows phone to use all features of a
PBX system
• Phone can be programmed locally or remotely
• Available in flush-mounted or wall-mounted design
The Clean Phone’s hands-free answering is ideal for cleanroom environments,
and its surface is designed so that it will not trap or shed particulates when you
initiate outgoing calls.
Hands-Free Auto-Answer Capability
When you activate its auto-answer feature, the Clean Phone will go off-hook
automatically, after ringing the number of times that you select, and broadcast
the incoming call through the speaker. A light goes on under the ON/OFF
button to indicate when the phone is off-hook. The technician called can
respond, in a normal speaking voice, without leaving the work station. When phone to use all features of a PBX system. All of the programmable options
the auto-answer feature is deactivated, the phone will not go off-hook until have factory-set default settings, which will remain in effect until you change
someone actually touches the ON/OFF button them by following the simple, step-by-step programming instructions
provided in the Operating Manual.
Ambient Noise Level
The maximum ambient noise level limit for the Clean Phone is 75dBA (similar The Clean Phone is available in either a flush-mount or wall-mount style (each
to the sound of a freight train at 100 feet). Higher noise levels will interfere with comes with mounting bracket). Accessories available are a Maintenance Cover
the hands-free switching of the microphone and speaker. Speaker volume and and a Plug-In Transformer.
microphone sensitivity are factory set to a nominal background noise value.
Specifications
Adjustments to different values can be made with a standard screwdriver.
Construction: 8 mil tactile polyester membrane panel
What’s So Clean About It over 16 gauge stainless steel, 12" x 12"
The Clean Phone is constructed of 16-gauge stainless steel, with a completely (30.5 x 30.5 mm)
smooth 12" x 12" (30.5 x 30.5 mm) polyester front panel that won’t trap FCC Registration No.: ADCUSA-60747-MT-E
particulates, sealed with an overlay that keeps the phone particulate-free and Ringer Equivalence: 0.4B
makes cleaning quick and easy. The ink labeling the buttons is printed on the Autodial Capacity: Two 16-digit numbers
reverse side of the overlay, further guarding against shedding, at the same time Call Initiation: Push-activated
that it ensures a long life for the legibility of the markings. The oversized Call Termination: Push-activated loop current disconnect
buttons are easy to operate, so callers have no reason to expose the pressure- Programming: Remote DTMF
sensitive surface to ungloved hands. The graphic overlay is designed to Signaling: DTMF or Pulse
withstand exposure to a great many chemicals (list available upon request), and Max. Speaker Output: 85 dBA spl @ 1 M
can thus clean up easily after contact with gloves bearing chemical residues. Ambient Noise Level Limit: 75 dBA
Operating Temperature: -4°F to +140°F
The Choice is Yours
Besides programming the Clean Phone to activate or deactivate the auto- Cat #
answer feature, and selecting the number of rings before it activates, you have Flush-Mount Clean Phone™ 2121-20
the option of programming one or two emergency or frequently-called Wall-Mount Clean Phone™ 2121-21
numbers, and using the one-touch Autodial method of originating a call. You Maintenance Cover 2121-22
can also use standard dialing procedure on the fully functional keypad. You Plugs into enclosure when phone
operate the phone with either DTMF or Pulse dialing, and using either long is removed for maintenance.
(350 ms) or short (50 ms) called-party loop current disconnect mode.
Plug-In Power Supply 2121-23
Any of the programmable features can be programmed either locally, on the 120VAC to 48VDC
phone’s own keypad, or remotely, through any DTMF telephone, and the
password used to initiate remote programming can be left at its factory setting Note: The clean phone is compatible with analog phone systems
only. Call Terra for assistance in evaluating your application.
or changed to any four-digit number. In addition, a “Flash” button allows the
224 To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com
Terra Universal, Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
CLEANROOMS
TerraUniversal.com • info@TerraUniversal.com
Tel: (714) 526-0100 • Fax: (714) 992-2179 & ACCESSORIES
Ideal for
finger
cots
J K L
▼
To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com 225
CLEANROOMS Terra Universal,Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
Light-Gauge
▼
Cleanroom Waste
Receptacles
• Mirror-finish stainless steel surfaces wipe down clean,
won’t shed particles
• Contoured, tight-fitting lid safely contains cleanroom
waste
• Foot pedal and self-closing lid keep operator’s hands
free
• Rigid plastic liners are easy to remove and empty, with
minimal disruption to cleanroom environment
These foot-pedal operated receptacles
provide the perfect solution to cleanroom
waste disposal problems.
Hands-free pedal-
activated lid for clean,
easy operation
(Model shown: 1456-22)
A B C
▼
226 To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com
Terra Universal,Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
CLEANROOMS
TerraUniversal.com • info@TerraUniversal.com
Tel: (714) 526-0100 • Fax: (714) 992-2179 & ACCESSORIES
Heavy-Gauge
▼
Cleanroom Waste Receptacles steel and available with electropolishing, they are designed to provide years of
constant service in the cleanroom without contamination. Their no-spring foot pedal
• Contoured tight-fitting lid ensures safe, clean disposal lets an operator dispose of waste without the need to touch the receptacle, and the
of cleanroom waste tight-fitting, gasketed lid forms a nearly air-tight seal to contain waste safely.
• Select electropolished stainless steel for optimal They also feature rigid, reusable plastic liners that allow easy removal of waste.
cleanliness Liners are treated with an EPA-registered anti-microbial compound for additional
• Easy-open foot-pedal design and self-closing lid keep protection. Legs raise the receptacles 3⁄4" to provide air circulation and minimize
operator’s hands free particle accumulation.
• Gasketed seal eliminates particle outflow Note: These receptacles are not intended for containment of radioactive waste.
Order receptacles and corresponding liners from the ordering table. Each receptacle
• Rigid, durable plastic liner allows easy cleaning comes with a rigid plastic liner; replacement liners are packaged one per carton.
• All models comply with Cleanroom Waste Receptacles Corresponding Rigid Liner
OSHA requirements; all Type Capacity Dimensions Ship. Stainless Electropolished Ship.
except #1456-00 are WxDxH Wt. Steel Stainless Steel Wt.
Factory Mutual Systems (Gallons) (in.) (lbs.) (lbs.)
approved and UL listed Cat. # Cat. # Cat. #
MicroVac™ Portable
Cleanroom Vacuum
Ideal for removing microcontaminants from hard-to-reach places! The MicroVac™
incorporates a four-stage filtering system to trap particles as small as 0.12 microns. Made
of stainless steel, it includes a mini-tool kit for use in drawers, computer keyboards, and
other hard-to-clean surfaces.
Cat. #
110VAC/60Hz 5100-00
220VAC/50Hz 5100-00-220
See page 281
To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com 227
CLEANROOMS Terra Universal, Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
Sneeze Guard™
• Fits onto most microscopic eyepieces
• Shields work stage against contaminants
• Acrylic model acts as a contamination magnet,
keeping workplace clean
• Static-Dissipative PVC model eliminates
electrostatic charges and the particles they
attract
• Available in five sizes; custom models
available
• Eliminates bothersome face masks
228 To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com
Terra Universal, Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
CLEANROOMS
TerraUniversal.com • info@TerraUniversal.com
Tel: (714) 526-0100 • Fax: (714) 992-2179 & ACCESSORIES
SNEEZE GUARD™
Cat. No. 1602-80
To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com 229
CLEANROOMS Terra Universal, Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
& ACCESSORIES
▼ TerraUniversal.com • info@TerraUniversal.com
Tel: (714) 526-0100 • Fax: (714) 992-2179
Electropolished Stainless
Steel Step Stools and Step
Ladders
• A step up in cleanliness and safety!
• Spring-loaded casters retract when weight is applied
• 3
⁄4"-diameter perforations accommodate vertical
laminar air-flow and minimize particle accumulation
• Custom sizes and configurations available—call with
your specifications!
These step stools and ladders are ideal for performing maintenance tasks
(like replacing filters) in a cleanroom environment.
Their spring-loaded casters ensure that they won’t roll during use, and safety
rails on larger models further enhance personnel safety. Standard models
include perforations; other designs are available on a custom basis.
30 x 20 x 24 2 2805-50
30 x 24 x 34 3 2805-51
30 x 24 x 60 3* 2805-53
30 x 30 x 70 4* 2805-52
30 x 40 x 80 5* 2805-54
* Includes hand safety rail extending 29" above top step
(No. 2805-52 is not pictured).
No. 2805-54
Step heights: 11", 21", 31", 41", 51"
230 To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com
TerraUniversal, Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
CLEANROOMS
TerraUniversal.com • info@TerraUniversal.com
Tel: (714) 526-0100 • Fax: (714) 992-2179 & ACCESSORIES
Monitor Cabinet
• Fabricated of electropolished stainless steel for
optimal cleanliness
• Includes two storage shelves for CPU and other
materials
• Cam style locking LiftLatch™ secures contents
Terra Universal’s Monitor Cabinet is fabricated of ultra-clean electropolished
stainless steel that is easy to clean.
It positions the monitor at a convenient viewing height, and it provides a
locking cabinet with two adjustable stainless steel shelves for housing the
CPU, storage media, and other items. Comes standard with Teflon® leveling
feet; casters are also available for easy relocation throughout your facility.
Overall dimensions: 21"W x 21"D x 39"H.
Cat.#
Monitor Cabinet 9602-60
Stainless Steel Stand 2450-00
(Raises cabinet 4", including leveling feet)
Casters (set of four, two with locking brakes) 1700-44
▼
To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com 231
CLEANROOMS Terra Universal, Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
& ACCESSORIES
▼ TerraUniversal.com • info@TerraUniversal.com
Tel: (714) 526-0100 • Fax: (714) 992-2179
Electropolished Stainless
Steel Work-In-Process
(WIP) Racks
• Clean, secure enclosure protects WIP materials from
breakage or contamination during processing
• Ergonomic design increases productivity
• 17° shelf slope ensures safe product
positioning against rear retaining bar
• All-electropolished stainless steel construction
won't particulate, wipes down without snags
• Wafer WIP box sizing conserves valuable cleanroom
floor space by optimizing shelf capacities
• Custom dimensions and enclosure panels available -
just give us your specs!
These WIP racks safeguard delicate products while making optimal use of
valuable cleanroom space.
Certified Class 1-Compatible
Fabricated of 1"-square stainless steel tubes, these racks feature continuous
seam welds and extensive surface finishing to prevents snags or crevices. The
all-electropolished stainless steel surfaces won't shed particles or outgas
chemicals. They have been independently certified compatible for use in
Class 1 cleanrooms (see page 3 for more information).
Their shelves optimize the vertical laminar airflow inside a cleanroom and
minimize the possibility of particle accumulation. Choose between rod
shelves, made of 1⁄4"-diameter rods on 2" centers, or shelves with 3⁄4"-diameter
perforations, which provide approximately 40% open space. Both shelf types
are mounted at a 17° angle to position WIP boxes securely against a rear
retaining rod. Side flanges keep materials from slipping off the side edges.
Shelves are designed for optimal storage densities of common wafer transport
cassettes and WIP boxes (see ordering chart for capacities).
All models feature polypropylene leveling feet. Stainless steel mounting plates
are also available (see below). Racks can also be customized to accommodate Rod Shelf WIP Rack
special parts or capacity requirements; just let send us your specifications.
232 To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com
Terra Universal, Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
CLEANROOMS
TerraUniversal.com • info@TerraUniversal.com
Tel: (714) 526-0100 • Fax: (714) 992-2179 & ACCESSORIES
WIP Racks—12" Shelf Clearance (for 150mm and 200mm wafers) WIP Racks—14" Shelf Clearance (for 300mm wafers)
Dimensions No. of Capacity Rod Perforated Dimensions No. of Capacity Rod Perforated
Shelves 150mm 200mm Shelves* Shelves Shelves 150mm Shelves* Shelves
W x D x H, in. Cat. # Cat. # W x D x H, in. Cat. # Cat. #
38 x 12 x 36 2 6-10 ●
6 9611-00* 9611-24* 38 x 12 x 38 2 4 9611-48* 9611-60*
38 x 12 x 48 3 9-15 ●
9 9611-01* 9611-25* 38 x 12 x 52 3 6 9611-49* 9611-61*
38 x 12 x 60 4 12-20 ●
12 9611-02* 9611-26* 38 x 12 x 66 4 8 9611-50* 9611-62*
38 x 12 x 72 5 15-25 ●
15 9611-03* 9611-27* 38 x 18 x 38 2 6** 9611-51 9611-63
38 x 18 x 36 2 12-20 ●●
6 9611-04 9611-28 38 x 18 x 52 3 9** 9611-52 9611-64
38 x 18 x 48 3 18-30 ●●
9 9611-05 9611-29 38 x 18 x 66 4 12** 9611-53 9611-65
38 x 18 x 60 4 24-40 ●●
12 9611-06 9611-30 55 x 12 x 38 2 6 9611-54* 9611-66*
38 x 18 x 72 5 30-50 ●●
15 9611-07 9611-31 55 x 12 x 52 3 9 9611-55* 9611-67*
38 x 28 x 36 2 18-40 ●●●
12 9611-08 9611-32 55 x 12 x 66 4 12 9611-56* 9611-68*
38 x 28 x 48 3 27-60 ●●●
18 9611-09 9611-33 55 x 18 x 38 2 8** 9611-57 9611-69
38 x 28 x 60 4 36-80 ●●●
24 9611-10 9611-34 55 x 18 x 52 3 12** 9611-58 9611-70
38 x 28 x 72 5 45-100 ●●●
30 9611-11 9611-35 55 x 18 x 66 4 16** 9611-59 9611-71
48 x 12 x 36 2 8-12 ●
6 9611-12* 9611-36* ** Require 21⁄2" Diameter Mounting Feet Cat# 1540-04-2
** Based on cassettes loaded with wafers facing to the side.
48 x 12 x 48 3 2-18 ●
9 9611-13* 9611-37* Models without asterisks load with cassettes facing front.
48 x 12 x 60 4 16-24 ●
12 9611-14* 9611-38*
48 x 12 x 72 5 20-30 ●
15 9611-15* 9611-39*
48 x 18 x 36 2 16-24 ●●
6 9611-16 9611-40 Mounting Feet
48 x 18 x 48 3 24-36 ●●
9 9611-17 9611-41 Electropolished stainless steel
48 x 18 x 60 4 32-48 ●●
12 9611-18 9611-42 leveling feet feature cut-outs to allow
48 x 18 x 72 5 40-60 ●●
15 9611-19 9611-43 bench to be bolted to the floor.
48 x 28 x 36 2 24-36 ●●●
12 9611-20 9611-44 Cat. #
48 x 28 x 48 3 36-54 ●●●
18 9611-21 9611-45
48 x 28 x 60 4 48-72 ●●●
24 9611-22 9611-46 2 ⁄2" Diameter
1
1540-04-2
31⁄2" Diameter 1540-05-2
48 x 28 x 72 5 60-90 ●●●
30 9611-23 9611-47
* Require 21⁄2" Diameter Mounting Feet, Cat. # 1540-04-2
●●●
Cassettes are loaded one row across per shelf
●●●
Cassettes are loaded two rows across per shelf
●●●
Cassettes are loaded three rows across per shelf
See next page for more WIP solutions!
To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com 233
CLEANROOMS Terra Universal, Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
234 To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com
Terra Universal, Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
CLEANROOMS
TerraUniversal.com • info@TerraUniversal.com
Tel: (714) 526-0100 • Fax: (714) 992-2179 & ACCESSORIES
To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com 235
CLEANROOMS Terra Universal, Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
From InterMetro
▼
Super Adjustable™ Wire Shelves
• Easy-adjust corner release system saves time
and space
• Lets you raise and lower any shelf without tools and
without disturbing other shelves
• Optimizes your storage area in seconds!
This revolutionary adjustable system means you'll never
have to make do with anything less than the optimal
storage solution!
Just lift the release on each corner, and adjust your shelf
at precise 1" increments, and clamp the release lever
shut. In seconds, you can optimize your storage system
to changing load requirements, with no tools, no wasted
time, and no wasted space.
SiteSelect™ Posts Make It Easy!
SiteSelect™ posts are grooved every inch and
numbered every 2" to simplify shelf positioning.
Double-groove indicators every 8" provide a convenient
visual height reference.
See ordering
information on
page 187.
▼ From InterMetro
Cleanroom Shelving
and Accessories
• Many designs and materials, including
chrome plated and electropolished
stainless steel wire shelves
• Select dividers, ledges, undershelf slides
and other optional features
• Specialized storage solutions include
reticle shelves, component reel shelving,
and security trucks
236 To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com
Terra Universal, Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
CLEANROOMS
TerraUniversal.com • info@TerraUniversal.com
Tel: (714) 526-0100 • Fax: (714) 992-2179 & ACCESSORIES
Durx® 770, Page 241 MicroSeal® 3000, Page 238 Berkshire® Bond, Page 246 BCR® Swabs, Page 247
To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com 237
CLEANROOMS Terra Universal, Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
▼
MicroSeal® 3000 ValuSeal™ 1000/1500 Ultra-Seal® 3000
Polyester Sealed-Edge Economical Laser-Cut, Highly Absorbent Wiper for
Wipers Sealed-Edge Wipers Class 1 and 10 Cleanrooms
• Sealed-edge process minimizes • Extremely low particles, fibers, ions • Sealed-edge design reduces
particle contamination and residues contamination
• Tear resistant for tough cleaning • Unique double-knit construction is • Enhanced surface features entrap
strong, tear and abrasion resistant contaminants
This 100% continuous-filament double-knit polyester
cleanroom wiper is ideal for critical applications. It features Combines quality, performance and low cost. These Engineered specifically for the most critical applications,
an absorbent tubular (two-ply) knit, sealed-edge design 100% double-knit polyester, laser-cut and sealed wipers Ultra-Seal® 3000 is made from the highest quality,
ultrasonically sealed and cut on two sides. Laundered and are cleanroom laundered and packaged. Highly continuous-filament polyester yarn and knitted in a tube
packaged in an ISO4 (Class 10) cleanroom, each pack adsorbent, they hold more liquid than other polyester to reduce exposed edges and the potential for abrasion
features its own traceable lot number. The microdenier knits and pick up more contamination, so you'll use and contamination. This durable, two-ply material has
material is designed for soft, dry wiping. fewer wipers. Available in two weights. two to three times the absorbency of single-ply materials.
Extractables with
Extractables with
(No. ≥ 0.5 µm/cu. ft.
Absorbency
Magnesium
Absorbency
of air sampled)
Particles—
Potassium
(cc H2O/m2)
Particles
Class 1/10
Calcium
Sodium
(cc H2O/g)
(Seconds)
Specific
Caliper
(g/m2)
(PPM)
(PPM)
(PPM)
(PPM)
(µm)
MicroSeal® 3000 131 443 120 1.5 492 3.8 1 0.089 0.14 0.096 0.016 0.027 0.093
0.033 0.12
ValuSeal™ 1000 91.6 423 26 0.82 438 4.8 2 0.094 0.049 0.25 0.064 0.020 0.073
0.018 0.067
0.023 0.074
ValuSeal™ 1500 117 440 23 0.87 453 3.9 1 0.096 0.038 0.31 0.049
0.026 0.085
0.027 0.098
Ultra-Seal 3000 134 440 76 1.2 494 3.7 2 0.078 0.14 0.12 0.018
0.036 0.013
0.026 0.094
Super Polx 1200 142 508 73 1.4 458 3.2 1 0.12 0.11 0.13 0.023 0.037 0.13
0.028 0.094
Super Polx 1500 114 443 76 1.4 424 3.7 1 0.15 0.088 0.12 0.16
0.032 0.11
0.079 0.037
MicroFirst® 56.3 258 330 20 284 5.0 3 13 2.9 270 37
0.044 0.021
238 To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com
Terra Universal, Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
CLEANROOMS
TerraUniversal.com • info@TerraUniversal.com
Tel: (714) 526-0100 • Fax: (714) 992-2179 & ACCESSORIES
▼
Super Polx®1200 Super Polx®1500 MicroFirst®
Most Popular Cleanroom Highly Absorbent Wiper Non-Woven Cleanroom
Wiper • Knitted construction makes for Wiper
• Made of 100% knitted polyester excellent specific absorbency • First-of-its-kind wiper engineered
• “Non-run” construction and superior • Made of continuous-filament, non-run specifically for microcontamination
100% polyester control
strength make this wiper ideal for
coarse surfaces • Extremely low particle generation, • Combines high absorbency, strength
extractables and metallic ion content and cleanliness
• Highly absorbent
Economical Super Polx® 1500 is a continuous filament, MicroFirst® is the first non-woven wiper engineered
This popular wiper is suitable for use in the most critical
non-run, 100% polyester wiper. While typical polyester and manufactured specifically for cleanroom
cleanroom applications. It is extremely low in particle
wipers tend to be low in absorbency, and in some cases applications. Unlike other cleanroom wipers, which
generation, ion content and extractable residue. Knitted
even hydrophobic, a unique knit construction and use materials designed originally for non-cleanroom
with the highest-quality, continuous-filament polyester,
finishing process give Super Polx® 1500 one and one- uses, these wipers rely on a spun-lace
it features a non-run construction that will not tear or
half times the specific absorbency of other polyester process developed specifically for controlling
abrade even under the most rigorous applications. Super
wipers. microcontamination. No binders or chemical
Polx® 1200 is ideal for equipment cleaning, spill control
treatments are used, and fiber blend of the highest
and general maintenance where cleanliness and strength
quality cellulose and polyester, with its unique surface
are a must.
pattern, yields absorbency and strength superior to that
Wipers Ordering Information
of other non-woven materials.
Class 1/10 Size Sheets/ Pkgs./
(in.) Pkg. Case Cat. #/Case
®
MicroSeal 3000 9x9 100 8 5604-41
To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com 239
CLEANROOMS Terra Universal, Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
▼
Polx® 1200 Surex® 805
Strong, Economical Wiper Cleanest Nonwoven Wiper Available
• 100% double-knit polyester for very low particle • Polyester-cellulose material with low particle
generation generation
• Will not abrade or shed • Specially designed for use in critical areas
• Soft for sensitive surfaces • Unique texture helps to lift and trap dried-on spills
Made of 100% double-knit polyester, Polx® 1200 is an economical wiper Featuring the lowest particle generation of any non-woven wiper in the industry,
choice—stronger than nonwoven materials and more economical than high- Surex® 805 has an embossed surface pattern that makes it ideal for trapping
end synthetic wipers. Its extreme softness makes it ideal for cleaning optical and contaminates in various types of cleaning applications. It is recommended for
other sensitive surfaces or surfaces that would normally shed or abrade a spill control, general lab maintenance, equipment cleaning, work mats and
nonwoven material. It has low extractable characteristics and can be used for a parts cleaning.
variety of general cleanroom applications.
Extractables with
Extractables with
(No. ≥ 0.5 µm/cu. ft.
Time to Half-
Absorbency
Absorbency
Magnesium
of air sampled)
Particles—
Potassium
(cc H2O/m2)
Particles
Sorption
Calcium
Specific
Sodium
(cc H2O/g)
(Seconds)
Caliper
(g/m2)
(PPM)
(PPM)
(PPM)
(PPM)
Class 100
(µm)
0.023 0.082
Polx 1200 107 417 180 12 405 3.8 2 1.7 0.34 0.50 0.14
0.025 0.088
0.11 0.025
Durx 670 68.8 259 680 24 294 4.3 2 1.5 3.6 270 42
0.016 0.017
0.32 0.44
Durx 770 65.7 250 160 8.7 258 3.9 3 53 5.6 260 40
0.21 0.29
Surex 805 39.8 166 170 8.2 170 4.2 10 110 14 240 31 0.91 1.4
0.36 0.56
240 To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com
Terra Universal, Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
CLEANROOMS
TerraUniversal.com • info@TerraUniversal.com
Tel: (714) 526-0100 • Fax: (714) 992-2179 & ACCESSORIES
▼
Durx® 670 Durx® 770
General Cleaning and Absorption Wiper Low-Particle, Highly Absorbent Wiper
• Low-particle, polyester-cellulose wiper for general • Specially treated for extremely low particle
applications generation
• High wet and dry strength with excellent instant • Maintains high strength and absorption with low
absorption extractables
• Also available in disk form as a wafer interleaver Like the DURX® 670, this wiper combines the strength of polyester with the
absorbency of cellulose to make a highly absorbent wiper with excellent wet
This popular, general-purpose, non-woven wiper is made from a combination
strength. It is manufactured without the use of surfactants to ensure a clean,
of polyester and cellulose. Superior strength and absorbency, combined with
pure material. In order to enhance product cleanliness, it is treated in a
low levels of ions and organic extractables, make it the ideal wiper for
finishing process with a proprietary formula that dramatically improves particle
absorbing spills of solvents and DI water. A mechanical hydroentanglement
generation while keeping other critical attributes in balance. Its extremely low
manufacturing process gives DURX® 670 its strength and sorptive properties
particle generation makes it ideal for more stringent cleanroom requirements.
without the use of binders or surfactants which are often accessible to water and
organic solvents. Other applications include general surface and equipment
cleaning; it can be used as a wafer separator, as a laboratory workmat, or as a More Class 100 Wipes on pages 242-243.
blotter for drying wet components.
To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com 241
CLEANROOMS Terra Universal, Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
Exsorbx® 400
▼ Fastsorb® 820
Supersoft Wiper for Optics Highly Absorbent, Non-Abrasive Wiper
and Other Delicate Parts • Rayon-polyester material is both soft and absorbent
• Made of soft, smooth 100% polyester—an ideal • Special fiber entanglement permits stretching without
protective cushioning for packing delicate parts tearing
• Good absorbency with low dry-particle generation • Clean, economical alternative to cotton twill
Made from 100% non-woven polyester, Exsorbex® 400 is an extremely soft, Made of a rayon-polyester blend, Fastsorb® 820 possesses excellent strength and
pliable wiper ideal for all types of sensitive surfaces. It also exhibits extremely softness, combined with tremendous absorbency. It is manufactured using a
low particle generation and excellent absorbency, making it suitable for mechanical entanglement process without the use of binders or surfactants. The
picking up solvent with DI water spills. Other applications include general result is a material with very low particle generation, minimal extractable matter,
cleanroom maintenance, as well as wrapping sensitive parts for protection and low ion content. Fastsorb® 820 is recommended for spill control and wiping
during shipping. delicate, abrasion-sensitive surfaces.
Extractables with
Extractables with
(No. ≥ 0.5 µm/cu. ft.
Time to Half-
Absorbency
Absorbency
Magnesium
of air sampled)
Particles—
Potassium
(cc H2O/m2)
Particles
Sorption
Calcium
Sodium
(cc H2O/g)
(Seconds)
Caliper
(g/m2)
(PPM)
(PPM)
(PPM)
(PPM)
(µm)
0.1076 0.22
Exsorbx 400 38.1 187 1,400 34 219 5.7 2 24 4.5 16 3.9
0.028 0.084
0.13 0.034
Fastsorb 820 79.3 364 1,100 2.8 580 7.3 2 19 4.7 360 45
0.10 0.027
0.080 0.016
Sunsorb 300 28.5 238 12,000 56 356 12 2 120 6.5 0.76 0.26
0.025 0.0046
0.17 0.039
Bluesorb 750 67.3 253 970 26 298 4.4 2 26 3.3 310 34
0.11 0.026
SatPax™ 52.1 214 — 21 257 4.9 3 11 2.8 290 43 0.086 0.029
242 To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com
Terra Universal, Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
CLEANROOMS
TerraUniversal.com • info@TerraUniversal.com
Tel: (714) 526-0100 • Fax: (714) 992-2179 & ACCESSORIES
▼
Sunsorb® 300 Bluesorb® 750 SatPax™ 1000
Ultra-Absorbent Wiper Visual Absorption Presaturated Nonwoven
• Thermally bonded rayon wiper is Indicator Polyester/Cellulose Wiper
extremely absorbent • Blue color provides instant • Resolves safety issues associated
• Low in extractables and ions absorption indicator with storing, mixing, and dispensing
solvents
• Ideal for cleaning diffusion furnaces • Ideal as a work mat/surface for visual
inspection • Semiconductor grade 2-Propanol is
This wiper is made of 100% spunbonded rayon and, metered for consistency
with an absorbency capacity of 13 times its own weight, • Low particle generation and low
is the most absorbent nonwoven cleanroom wiper extractables • Reverse osmosis/deionized water
available. It is also an excellent performer where filtered to 0.1 µm
The Bluesorb 750 is an extremely pure, strong,
®
extractables and ions are a concern. A unique nonwoven blend of polyester and cellulose. The blue SatPax™ wipers are presaturated with 2-propanol and
manufacturing process, which excludes the addition of color makes this wiper ideal for use as an inspection DI Water for convenient, safe general-purpose
any binders or surfactants, ensures a pure and background or workmat. It is also ideal for use as an cleaning. A lot number on each resealable pouch
consistent product time after time. The Sunsorb® 300 is immediate absorption indicator, as well as for equipment ensures traceability. Each pouch contains 100 sheets.
quarter-folded into a 4-ply 5" x 5" pad for easy use and cleaning or general maintenance. Two 2-Propanol/DI water solutions are available.
quick absorbency.
Class 100 Wipers More Class 100 Wipes on pages 240-241.
Size Sheets/ Pkgs./
(in.) Pkg. Case Cat. #/Case
5604-44*
SatPax™ 1000 9x9 75 12
5604-45** Cleanroom Wiper Dispenser
* 70% 2-Propanol/30% DI H20 ** 10% 2-Propanol/90% DI H20 Simplifies single-sheet dispensing of 9" x 9" wipers.
Also available for other sizes.
Cat.
Acrylic Dispenser 4950-93
Static-Dissipative PVC Dispenser 4950-94
To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com 243
CLEANROOMS Terra Universal, Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
▼
▼
produce the most durable, highest quality all-purpose cotton wiper. It is cut on • SAL = 10-6 (Sterility Assurance Level of 10-6)
a bias to eliminate the chance of loose fibers or unraveling edges. The
aggressive weave pattern makes Twillx®1622 ideal for applications in which Made from a blend of polyester and cellulose, Gamma Wipe® 67 is sterilized by
durability, absorbency and cleanliness are critical. gamma radiation to meet sterility requirements according to AAMI guidelines.
The Certificates of Sterility included with each case of Gamma Wipe® 67 are a
guarantee that each lot of material has been processed to meet a Sterility
Assurance Level of 10.6 and meets stringent aseptic cleanroom requirements.
Gamma Wipes are packaged in small quantities (of 20 per pack) to minimize
exposure when each package is opened. Suitable for Class 100 applications.
Extractables with
Extractables with
(No. ≥ 0.5 µm/cu. ft.
Time to Half-
Absorbency
Absorbency
Magnesium
of air sampled)
Particles—
Potassium
(cc H2O/m2)
Particles
Sorption
Calcium
Specific
Sodium
(cc H2O/g)
(Seconds)
Caliper
(g/m2)
(PPM)
(PPM)
(PPM)
(PPM)
(µm)
0.11 0.15
Twillx® 1622 144 343 54,000 51 354 2.5 3 82 2.8 150 60
0.16 0.22
0.048 0.031
Gamma Wipe® 67 69.6 253 1,400 22 263 3.8 2 15 3.8 260 45 0.033 0.022
244 To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com
Terra Universal, Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
CLEANROOMS
TerraUniversal.com • info@TerraUniversal.com
Tel: (714) 526-0100 • Fax: (714) 992-2179 & ACCESSORIES
To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com 245
CLEANROOMS Terra Universal, Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
▼
Berkshire® BOND
• Minimizes particle contamination
• Runs through any copier or printer, laser, or impact
• Bound by synthetic latex for optimal smoothness and cleanliness
• High tear resistance to withstand long periods in use
BERKSHIRE® BOND is available in several weights, sizes, and colors to allow you to
accommodate all your cleanroom documentation needs .
Color Size (in.) Weight Sheets/Pk. Pks./Case Cat. #/Case
BCR® CleaNotes®
• A convenient way to leave messages without sacrificing
cleanliness
• Adhesive backing will not shed
CleaNotes® provide the easiest way to leave a quick message behind. Made from Berkshire®
BOND, they are treated with a special adhesive-backing that will not leave contaminants in
the cleanroom.
Size (in.) Sheets/Pad Pks./Case Cat. # / Case
2 x 11⁄2 100 72 5604-10
3x3 100 24 5604-11
▼
246 To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com
Terra Universal, Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
CLEANROOMS
TerraUniversal.com • info@TerraUniversal.com
Tel: (714) 526-0100 • Fax: (714) 992-2179 & ACCESSORIES
College Rule 5 ⁄2 x 8 ⁄2
1 1
1 20 5604-16
1
⁄4" Grid 51⁄2 x 81⁄2 1 20 5604-17
College Rule 811⁄2x 11 1 10 5604-18
1
⁄4" Grid 81⁄2x 11 1 10 5604-19
▼
PF 3/16 ;6 50 10 5604-27
To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com 247
CLEANROOMS Terra Universal,Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
Safeskin
▼
Hypoclean Critical™ Cleanroom Latex Gloves
• Suitable for Class 10 or Class 100 (ISO 4 or 5) Critical Cleanroom Environments
• Specially formulated latex minimizes rubber proteins to reduce allergic reaction
• Oxyglazed powder-free surface eases donning, reduces extractables, enhances liquid
permeation resistance
• Tapered beaded cuff and textured non-slip grip for improved performance
• Exceeds ASTM D3578 glove standards for tensile strength and barrier defects
These powder-free HypoClean gloves are the ideal cleanroom latex gloves. Their “oxyglazed” surfaces reduce particle shedding
and extractables while leaving them easier to don, even when double-gloving, than other powder-free gloves. The specially
formulated latex reduces allergens and chemicals that can irritate skin or affect delicate samples. The tapered, beaded cuff
allows easier donning and holds securely on the sleeve.
Select Appropriate Cleanroom Grade*
The standard powder-free models below are rated Class 100 (ISO 5) compatible. For optimal cleanliness, select the Class 10
(ISO 4) models, which receive multiple deionized water rinses to reduce particles and extractables. These gloves are also
packaged in a critical cleanroom environment using cleanroom-compatible packaging and labeling materials.
All models feature an
ambidextrous design and are Class 10 Class 100
available in a double-poly Size Bag of 100 Case of 1,000 Bag of 100 Case of 1,000
bag of 100, or 10 double- Cat.#/Bag Cat.#/Case Cat.#/Bag Cat.#/Case
poly bags per poly-lined Small 1674-60 1674-64 1674-76 1674-80
case (1,000 total). Length: Medium 1674-61 1674-65 1674-77 1674-81
11.8". Thickness (nominal):
Large 1674-62 1674-66 1674-78 1674-82
6 mil.
X-Large 1674-63 1674-67 1674-79 1674-83
* Gloves are tested to IES-
RP-CC005.2.
Safeskin
▼
248 To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com
Terra Universal,Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
CLEANROOMS
TerraUniversal.com • info@TerraUniversal.com
Tel: (714) 526-0100 • Fax: (714) 992-2179 & ACCESSORIES
Oak Technology
▼
Powder-Free Disposable
Vinyl Gloves
• Ultra thin for touch sensitivity
• Priced low for disposability; durable for prolonged or
repeated use
• Permanently “velvetized” inside… easy to put on and
take off without talc powder
• Fit either hand for additional economy
• Excellent fit without the constriction of latex
This high-quality vinyl glove is designed to provide the user with the ideal
combination of economy and toughness. Unit cost is low, so it is practical for
disposable uses. In most applications, one can use it over and over. It tolerates
exposure to lubricants, oils and most chemicals without deterioration. It is ultra-
thin (about half the thickness of surgeon’s gloves) for optimal comfort and touch Powder-Free Disposable Vinyl Gloves
sensitivity. Rolled cuff provides tear resistance and easy gripping when putting Glove Size Cat. #/100 Pieces Cat. #/1,000 Pieces
on or taking off. Small 1697-04 1689-12
These vinyl gloves are ideal for protecting delicate or precision parts from Medium 1697-05 1689-13
perspiration, body salts or hand creams that might cause microscopic Large 1697-06 1689-14
corrosion or deface delicate surfaces. All gloves are white, 11" long, .005" thick,
and available in small, medium, and large sizes to fit any hand.
Quantity Discounts Available on All Gloves–
Packaged 100 pieces to a poly bag. 10 bags to a case. Weight per case is Call Terra for a quotation!
25 lbs.
To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com 249
CLEANROOMS Terra Universal,Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
Oak Technology
▼
Long-Length Powder-Free
Vinyl Gloves
• All the advantages of powder-free vinyl gloves with
long-length wrist/forearm protection
• Minimize particulate contamination
• Feature textured finish for improved grip
These powder-free vinyl gloves provide 20% longer length than standard
gloves for complete hand/wrist/forearm protection—and minimal chance of
contamination. The additional length eliminates unprotected gaps between
garment and glove. The powder-free manufacturing technique helps maintain
low particulate conditions but allows optimal dexterity and comfort.
These gloves also offer excellent protection from a variety of industrial irritants,
and their tough construction resists tears and abrasion. Rolled cuffs allow easy
donning and removal, and ambidextrous design lets them be worn comfortably
on either hand.
Elongation: 230% minimum
Packaged 100 pieces to a “zip-lock” poly bag; 1,000/case.
Liquidproof: Prevents sodium migration
Specifications Packaging: Long-Length (powder-free): 100 gloves to a poly bag,
Sizes: Small – Medium – Large 1,000 per case. Same as our regular powder-free
Weight: 7.0, 9.0, 10.0 ± 1 gram gloves, but with a 20% larger cuff length to meet the
Wall Thickness: demands for a glove to cover the critical wrist and
Fingertip: .0035" ± .001" forearm area.
Body: (1" from finger).006" ± .001"
Long-Length Powder-Free Vinyl Gloves
Cuff: (1" from bead) .004" ± .001"
Glove Size Cat. #/100 Pieces Cat. #/1,000 Pieces
Ringroll Bead: .085" ± .010"
Small 1697-07 1689-17
Physical Properties:
Medium 1697-08 1689-18
Tensile Strength: 1300 PSI minimum
Large 1697-09 1689-19
Oak Technology
▼
250 To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com
Terra Universal,Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
CLEANROOMS
TerraUniversal.com • info@TerraUniversal.com
Tel: (714) 526-0100 • Fax: (714) 992-2179 & ACCESSORIES
QRP, Inc.
▼
silicone or powders.
To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com 251
CLEANROOMS Terra Universal,Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
QRP, Inc.
▼
Static-Dissipative No Sweat®
Gloves
• Special formulation provides average surface resistivity of
107 ohms/square for use with static-sensitive materials
I
• Non-woven, absorptive material eliminates lint and fibers for TM
• Paired gloves are available in Small, Medium, and Large SUGGESTED FOR
CLASS II (2000-3999V)
STATIC SENSITIVE DEVICE
• Reusable/FREON® cleanable
These gloves are specifically designed for use in semiconductor manufacturing and
testing, as a replacement for woven/knit “dry handling” gloves.
Their unique formulation absorbs perspiration during wear, providing increased user
comfort and productivity. The seamless non-woven construction prevents lint and fiber
contamination. The extremely tough, but ultra-sheer proprietary polyurethane formulation
provides unsurpassed sensitivity.
Size Cat. #
They are also ideal for use with static-sensitive components. Tested in accordance with Small 1690-37
Fed. Test Std. 101C, Test Method 4046.1, and MIL STD B-81705B for Surface Resistance Medium 1690-38
and Rate of Decay, they demonstrated an average surface resistivity of 3 x 107 Large 1690-39
ohms/square. Package of 5 pair
QRP, Inc.
▼
• Conductive material provides surface resistivity less than 105 SUGGESTED FOR
• Paired right and left hands, choice of three sizes, for better fit SUGGESTED FOR
•
CLASS I (0-1.999V)
Available in ultra-sheer weight (1.5 mil) and medium weight STATIC SENSITIVE DEVICE
(5 mil) thicknesses
These cleanroom-compatible, reusable gloves are designed specifically for ESD-sensitive
applications in which standard disposable gloves (PVC or polyethylene) are unacceptable.
A proprietary polyurethane formulation provides an extremely tough, snag-resistant, ultra-
sheer film, with an average surface resistivity of 5 x 105 ohms/square (tested in accordance
with Fed. Test Std. 101C, Test Method 4046.1, and MIL STD B-81705B for Surface
Resistance and Rate of Decay; test results available upon request). They also resist a wide Size 1.5 Mil Thick 5 Mil Thick
Cat. #/Bag(5 pair) Cat. #/Bag(5 pair)
range of solvents, including aliphatic hydrocarbon solvents. Their black color makes them
easy to recognize on the bench top, and a selection of sizes (Small, Medium, and Large) Small 1690-40 1690-43
and thicknesses (1.5 mil or 5 mil) ensures a glove that’s just right for your application. Medium 1690-41 1690-44
Gloves come in a bag of five pair. Large 1690-42 1690-45
Static-Control Ranges
10 0
10 5
109 1014 Insulative 10∞
Conductive Static Dissipative Anti-Static
Class 0
Class I Class 0 = 0-200V (proposed);
Class I = 0-1000V;
Class II Class II = 4000V
® Registered trademark of QRP, Inc.
252 To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com
Terra Universal,Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
CLEANROOMS
TerraUniversal.com • info@TerraUniversal.com
Tel: (714) 526-0100 • Fax: (714) 992-2179 & ACCESSORIES
QRP, Inc.
▼
QRP, Inc.
▼
To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com 253
CLEANROOMS Terra Universal,Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
QRP, Inc.
▼
Ultimate Acid/ALKALI™ Gloves
• Specifically designed to withstand most commonly used
cleanroom and laboratory process acids and caustics
• Hypalon® provides maximum sensitivity and comfort along
with minimal contamination
• Cleanroom processed for cleanroom use (Class 100)
• Maximum snag, puncture, and abrasion resistance
These tough 12-mil-thick gloves are especially designed to withstand most commonly
used cleanroom process acids and caustics in industries such as semiconductors and
electronics.
Ultimate Acid/Alkali™ gloves were shown suitable for cleanroom use, in
performance testing that measured particle count per ASTM F-24 and ASTM F-312 and
permeation per ASTM F-739. Measurement of extractables found no ionic contamination,
and less than 1 percent nonvolatile residue. However, because of the wide divergence in
testing practices and applications in the semiconductor industry, the user must conduct
specific tests as needed to determine the glove’s suitability for his intended use. Gloves are
packaged one pair/poly bag; 5 pairs/case.
Specifications
Length: 14" Cat #
Thickness: 12 mil Ultimate Acid/Alkali™ Gloves 1690-52
Size: Large only
QRP, Inc.
▼
254 To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com
Terra Universal,Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
CLEANROOMS
TerraUniversal.com • info@TerraUniversal.com
Tel: (714) 526-0100 • Fax: (714) 992-2179 & ACCESSORIES
QRP, Inc.
▼
These static-dissipative powder-free finger cots are designed for use with static-sensitive materials in a
cleanroom environment.
They feature a surface resistivity in the “dissipative” range
(average value: 5 x 107 ohms/square) and can be donned Size Tray Pack 100 Gross Case
and removed without powder. For added contamination (5 gross bag pieces) (14,400 pieces)
control, they are packed in a Class 100 cleanroom, Cat. #/Bag Cat. #/Case
immobilized in a static shielding bag, and sealed in an inert contains 20 shielded, sealed polymer Tray
Small 1690-77 1690-81
gas atmosphere to prevent triboelectric charge. They also Packs™, each containing 750 cots (=
Medium 1690-78 1690-82
have ultra-low levels of residual/extractable ions. 14,400 pieces total).
Large 1690-79 1690-83
X-Large 1690-80 1690-84
Each cot is 3 mils thick and 70-75mm in length. Each case
QRP, Inc.
▼
Qualatrile® 9C Nitrile
Anti-Static Finger Cots
• 100% acrylonitrile butadiene, a dermatologist-recommended latex-free
formulation
• Suitable for Class 100 (ISO 5) critical environments
II TM
•
SUGGESTED FOR
To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com 255
CLEANROOMS Terra Universal, Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
Re-Usable Cleanroom methodical French silk weave process, the ChemStat dyeing process uses no
chemical carriers or catalysts that might cause microcontamination and a
Garments degradation of yarn strength. This more expensive dyeing process results in a
much higher quality fabric with fewer particulates, greater durability, and greater
• Lightweight contamination-control garments provide
depth of color. Our ChemStat garments come in two colors: linen white and
comfort and durability
light blue.
• Re-usable fabrics reduce costs We also use ChemStat 929 face mask material in our Eyes-Only Hood (see
• Available in designs to meet most cleanroom page 258) and the ChemStat 939 ESD sole in our 18" High ESD Boot (see
applications, including static safety and Class 10 page 260).
particle requirements Specifications: ChemStat 909A
• Choose among many styles of gloves, boots, shoe Construction: 2/1 twill
coverings, and hoods, plus a knee-length frock or Weight: 3 oz./yd.
full-length coverall Yarn content: 100% multifilament polyester, <1%
carbon by weight
• Electrostatic dissipative ChemStat® 909A protects Voltage decay
against ESD (Fed Std 101 Method 4046): % voltage remaining:
These re-usable cleanroom garments maximize the comfort and convenience 10 washings 0% @ 0.5 secs.
of cleanroom personnel while minimizing garment costs. 150 washings 0% @ 0.5 secs.
Surface resistivity
Disposable garments might seem convenient at first, but their use creates an (AATCC 76-1969):
endlessly expensive and wasteful cycle of purchase-dispose-purchase. Our 10 washings 1.3 x 108 ohms/sq.
re-usable garments will free you and your workers from this costly cycle. 150 washings 3.6 x 108 ohms/sq.
You can choose from two different fabrics to suit your particular cleanroom NASA triboelectric
needs. Dacron polyester taffeta is a dependable fabric ideal for general use. voltage decay: 41.5 V @ 0.35 secs.
For reliable ESD protection we also offer more sophisticated material, Chemical compatibility: Ref: Dupont Bulletin D-235
ChemStat® 909A. Acids Good/excellent
Alcohols Excellent
ChemStat® 909A Organic compounds Excellent
ChemStat 909A is an antistatic cleanroom fabric developed by Stern and Stern Oxidizing agents Excellent
Industries, Inc. as a result of years of research requested by NASA for the Reducing agents Excellent
Space Shuttle program. This fabric offers state-of-the-art solutions to the three Alkalis and bases Poor
most typical problems associated with synthetic multifilament cleanroom Laundry compatibility: Deionized water perchlorethylene Freon TF
apparel: electrostatic interference, worker discomfort, and environmental Sterilization compatibility: Steam autoclave gamma radiation (250
degradation. Mrad) ETO
ChemStat 909A is designed for use in Class 10 cleanrooms. It is a 100% Flame retardance: Meets NFPA 702-1975*
polyester high performance fabric employing a patented raised grid of Durability (ASTM D-4157): 15,000 cycles: no noticeable wear
conductive carbon/polyester yarns. The raised grid rises slightly above the Fabric cooling rating
plane of the fabric, acting as a wick to draw static electricity out of the fabric (ASTM E96 Method B, uprt.): Very high (52 g/m2/hr)
and then to dissipate it harmlessly into the surrounding humidified air. Permeability
(Fed Std 101, Method 5450): <1 cfm
ChemStat 909A is an uncommonly durable antistatic fabric. Unlike Tear strength
conventional antistatic fabrics, the ChemStat conductive yarn is an extruded (Fed Std 191, Method 5134):
copolymer of polyester and carbon impervious to over 300 industrial Warp: 9 lbs.
launderings. The basic fabric is composed of 100% industrial tenacity Dacron Fill 5 lbs.
polyester fibers. The 2/1 twill weave provides over 3 times the tear strength of
conventional plain weave fabrics for incredible durability and seam strength. * Note: Polyester melts at 380°F (193°C).
ChemStat 909A is exceptionally light and cool; it features a high moisture See page 261 for reusable cleanroom gloves.
vapor transmission rate, a result of its silk-like design. Derived from a
▼
256 To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com
Terra Universal, Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
CLEANROOMS
TerraUniversal.com • info@TerraUniversal.com
Tel: (714) 526-0100 • Fax: (714) 992-2179 & ACCESSORIES
Cleanroom Coveralls
See page 259
To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com 257
CLEANROOMS Terra Universal, Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
& ACCESSORIES
▼ TerraUniversal.com • info@TerraUniversal.com
Tel: (714) 526-0100 • Fax: (714) 992-2179
Knee-Length Cleanroom
Frock
• Completely washable and reusable
• Comfort features include stainless steel post and
socket 6-snap front, military collar with 1 snap at
neck, raglan sleeves with wrist adjustment snaps
• Durable merrowed fabric edges, double folded
seams,
and double needle containment stitching throughout
• Unisex style available in a full line of sizes—from XS
through XXL
• Available in a Dacron taffeta and advanced antistatic
ChemStat® 909A
Our knee-length frock offers the latest in cleanroom comfort and
contamination control.
258 To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com
Terra Universal, Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
CLEANROOMS
TerraUniversal.com • info@TerraUniversal.com
Tel: (714) 526-0100 • Fax: (714) 992-2179 & ACCESSORIES
To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com 259
CLEANROOMS Terra Universal, Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
& ACCESSORIES
▼ TerraUniversal.com • info@TerraUniversal.com
Tel: (714) 526-0100 • Fax: (714) 992-2179
Cleanroom Boot Cleanroom Boot Shoe Cover with Shoe Cover with
with Facile Sole with ChemStat 939 Sole One-Piece Vinyl Sole Two-Piece Vinyl Sole
260 To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com
Terra Universal, Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
CLEANROOMS
TerraUniversal.com • info@TerraUniversal.com
Tel: (714) 526-0100 • Fax: (714) 992-2179 & ACCESSORIES
To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com 261
CLEANROOMS Terra Universal, Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
Pro/Shield ® 2 Specifications • Uncleaned garments come in bulk packs and allow you
U.S. Testing European Testing the choice of laundering or not laundering to suit your specific
Physical Property Test Method Results Results Test Method Results needs.
Imperial Metric • Cleaned garments have been thoroughly processed in a
Basis Weight ASTM D751 1.7 oz/yd2 58g/m2 BS2471 61 g/m2 Class 10 cleanroom laundry facility to confine particle
Grab Tensile Strength ASTM D751 MD 30 lbs MD 133 N ISO 5081 MD 98 contamination to the appropriate levels: serged seam garments
XD 26 lbs XD 115 N XD 80 recommended for Class 10,000 cleanroom environments, bound
Puncture Propagation Tear ASTM D2582 MD 6.4 lbs 29 N EN 863 7.8 N seam garments for Class 100.
XD 9.3 lbs 41 N
Ball Burst ASTM D3787 26 lbs 115 N • Sterile garments have been thoroughly irradiated to remove
Burst Resistance ISO 2960 61 Kpa organic contamination, ensuring sterility levels of 10-6.
Hydrostatic Water Resistance ASTM D751 17.7psi 122 cm ASTM D751 169 cm (IsoClean® only)
Moisture Vapor Transmission ASTM E-96 1481.5 1481.5 ASTM E-96 1481.5 • Cleaned and sterile garments have been thoroughly
Rate (g/m2/24 hrs) Procedure D Procedure D processed to prevent both particle and organic contamination.
MD = Machine Direction; XD = Cross Direction. The test data presented here (IsoClean® only)
represent typical physical properties. Sources for all test data are from
independent laboratories. All tests were performed under laboratory conditions Please note that our Accessory Shoe Cover, Accessory Beard Cover, and
and not under actual use conditions. Tests were performed on material samples, Accessory Bouffant Hair Cover come unprocessed.
not actual garments.
262 To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com
Terra Universal, Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
CLEANROOMS
TerraUniversal.com • info@TerraUniversal.com
Tel: (714) 526-0100 • Fax: (714) 992-2179 & ACCESSORIES
The Pro/Clean® disposable garments are fabricated of Pro/Shield® fabric, a microporous polypropylene film
laminated to a polypropylene non-woven substrate.
These disposable garments protect the worker from particles and biological materials, while providing a barrier
against powders and other substances in dust particulate form from .2 µm in size or larger and light splash from
liquids or chemicals.
Ideal for the Cleanroom
The Pro/Clean® disposable garments are three times cleaner yet cost less than traditional disposables. They shed few
if any particulates. These garments are light-weight and soft, yet strong, whether wet or dry. The serged seams offer the
same low particle counts as those of more expensive garments with bound seams.
Other features include tunnelized elastic at wrists and ankles which further enhance particle containment and tunnelized
back waist elastic for ease of movement and better comfort. They are resistant to abrasion, puncturing or tearing, and
are anti-static treated.
Pro/Clean ® Coveralls
Processing Description Case Size
Style Qty Cat. #
S 1350-50
Tunnel elastic in M 1350-51
Bulk wrist, ankle, waist. 25
L 1350-52
Bound neck XL 1350-53
All coveralls S 1350-69
have serged Tunnel elastic in
seams.
M 1350-70
Clean wrist, ankle, waist. 25
L 1350-71
Bound neck XL 1350-72
S 1350-83
Tunnel elastic in M 1350-84
Clean & Sterile wrist, ankle, waist. 25
L 1350-85
Bound neck XL 1350-86
To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com 263
CLEANROOMS Terra Universal, Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
XS 1850-01 1850-21
S 1850-02 1850-22
Bulk 25 M 1850-03 1850-23
Pack L 1850-04 1850-24
XL 1850-05 1850-25
XS 1850-06 1850-26
S 1850-07 1850-27
Clean 25 M 1850-08 1850-28
L 1850-09 1850-29
XL 1850-10 1850-30
XS — 1850-31
S — 1850-32
Hoods and Sterile 25 M — 1850-33
boots not L — 1850-34
included
XL — 1850-35
The Tyvek® coverall has a collar, zip front, and tunnelized elastic at wrist and ankles. A XS — 1850-36
tapered torso reduces unnecessary fabric bulk. Lengthened legs and arms and a Clean S — 1850-37
modified neckline optimize particle containment. Modified shoulder openings and a and 25 M — 1850-38
lengthened back accommodate common cleanroom work positions. Sizes XS to XL; Sterile L — 1850-39
X-Smalls and Smalls with customized shortened torsos for women. XL — 1850-40
▼
264 To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com
Terra Universal, Inc.
700 N. Harbor Blvd., Anaheim, CA 92805 USA
CLEANROOMS
TerraUniversal.com • info@TerraUniversal.com
Tel: (714) 526-0100 • Fax: (714) 992-2179 & ACCESSORIES
▼
Cleanroom Accessory IsoClean®
Shoe Covers Cleanroom Boots
White Tyvek® shoe
covers are 5
inches high, with
low top, PVC
soles. Sizes S-XL.
To Order, Call—(714) 526-0100 or Fax (714) 992-2179 • For Current Pricing—www.TerraUniversal.com 265