Xds35i Isue e Manual

A730-01-880
Issue E Original
Instruction Manual
XDS Dry Pump
Description Electrical Supply Item Number

XDS35i Scroll Pump 100-120 V, 200-230 V, 50/60 Hz, Single Phase A730-01-983
A730-01-880 Issue E
Contents
Contents
Section Page
1 Introduction ....................................................................................... 1
1.1 Scope of this manual .................................................................................................... 1
1.2 ATEX directive implication ............................................................................................. 2
1.3 Description ................................................................................................................ 3
1.4 Gas ballast control ....................................................................................................... 4
1.5 Construction .............................................................................................................. 4
2 Technical Data .................................................................................... 5

2.1 Operating and storage conditions ..................................................................................... 5
2.2 Performance .............................................................................................................. 5
2.2.1 General .................................................................................................................... 5
2.2.2 Performance characteristics ........................................................................................... 5
2.3 Mechanical data .......................................................................................................... 6
2.3.1 General .................................................................................................................... 6
2.3.2 Vibration data ............................................................................................................ 6
2.3.3 CSA approval environmental conditions .............................................................................. 7
2.4 Electrical data ............................................................................................................ 7
3 Installation ......................................................................................... 9
3.1 Safety ...................................................................................................................... 9
3.2 System design considerations .........................................................................................10
3.3 Unpack and inspect .....................................................................................................12
3.4 Locate the pump ........................................................................................................ 12
3.4.1 Mechanical fixing ....................................................................................................... 12
3.5 Electrical installation ..................................................................................................12
3.5.1 Check and configure the pump ....................................................................................... 12
3.5.2 Connect the pump to your electrical supply .......................................................................13
3.6 Inlet and outlet connections ..........................................................................................13
3.7 Leak test the system ................................................................................................... 14
4 Operation ........................................................................................ 15
4.1 Use of gas ballast control ..............................................................................................15
4.1.1 Gas ballast control ...................................................................................................... 15
4.2 Start up procedure .....................................................................................................15
4.3 To achieve ultimate vacuum ..........................................................................................16
4.4 To pump condensable vapours ........................................................................................ 16
4.5 Implication of ATEX directive .........................................................................................16
4.5.1 Introduction ............................................................................................................. 16
4.5.2 Flammable/pyrophoric materials .................................................................................... 16
4.5.3 Gas purges ............................................................................................................... 16
4.6 Remote operation using 15 way D connector .......................................................................17
4.7 Shut down ................................................................................................................17
5 Maintenance ..................................................................................... 19
5.1 Safety information ......................................................................................................19
5.2 Maintenance plan ....................................................................................................... 19
5.3 Inspect and clean the inlet strainer .................................................................................20
5.4 Inspect and clean the gas ballast control ...........................................................................21
5.5 Clean the external fan cover .........................................................................................22
APT 11/07
5.6 Replace the tip seals ................................................................................................... 22
© Edwards Limited 2007. All rights reserved. Page i

Edwards and the Edwards logo are trademarks of Edwards Limited.
A730-01-880 Issue E
Contents
5.7 Test the motor condition ..............................................................................................22

5.8 Fault-finding .............................................................................................................22
5.8.1 The pump has failed to start or has stopped .......................................................................22
5.8.2 The pump has failed to achieve the required performance ......................................................22
5.8.3 The pump is noisy ....................................................................................................... 23
5.8.4 The pump surface temperature is high ..............................................................................23
5.8.5 The pumping speed is poor or if pump down time is too long ...................................................23
6 Storage and Disposal ........................................................................... 25

6.1 Storage ................................................................................................................... 25
6.2 Disposal ................................................................................................................... 25
7 Service, Spares and Accessories .............................................................. 27

7.1 Introduction .............................................................................................................27
7.2 Service .................................................................................................................... 27
7.3 Accessories ............................................................................................................... 27
7.3.1 Electrical cables ........................................................................................................ 27
7.3.2 Silencer ................................................................................................................... 27
7.3.3 Gas ballast adaptor .....................................................................................................27
7.3.4 Solenoid operated pipeline valves ................................................................................... 28
7.3.5 Tip seal and exhaust valve service kit ............................................................................... 28
Index .............................................................................................. 29
Illustrations
Figure Page
1 XDS35i scroll pump ...................................................................................................... 3
2 Performance characteristics ........................................................................................... 6
3 Installation drawing .................................................................................................... 11
4 Logic interface schematic .............................................................................................18
5 Inlet strainer assembly .................................................................................................20
6 Gas ballast control assembly ..........................................................................................21
Page ii © Edwards Limited 2007. All rights reserved.

A730-01-880 Issue E
Contents
Tables
Table Page
1 Operating and storage conditions ..................................................................................... 5
2 General characteristics ................................................................................................. 5
3 Performance characteristics ........................................................................................... 5
4 General mechanical data ............................................................................................... 6
5 Vibration data ............................................................................................................ 6
6 Electrical data ............................................................................................................ 7
7 Recommended fuses .................................................................................................... 13
8 Pin status on the logic interface connector ........................................................................ 18
9 Maintenance plan ....................................................................................................... 20
10 Electrical cables ........................................................................................................ 27
11 Solenoid operated pipeline valves ................................................................................... 28
Associated publications
Publication title Publication number
Vacuum Pump and Vacuum System Safety P300-20-000
© Edwards Limited 2007. All rights reserved. Page iii

A730-01-880 Issue E
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Page iv © Edwards Limited 2007. All rights reserved.

A730-01-880 Issue E
Introduction
1 Introduction
1.1 Scope of this manual
This manual provides installation, operation and maintenance instructions for the Edwards XDS35i Scroll pump. You
must use your pump as specified in this manual. Read this manual before you attempt to install and operate your
pump.
Important safety information is highlighted as WARNING and CAUTION instructions; you must obey these instructions.
The use of WARNINGS and CAUTIONS is defined below.
WARNING
Warnings are given where failure to observe the instruction could result in injury or death to
people.
CAUTION
Cautions are given where failure to observe the instruction could result in damage to the equipment, associated
equipment and process.
The units used throughout this manual conform to the SI international system of units of measurement.
Pressures are stated as absolute pressures throughout this manual.
The following IEC warning labels appear on the pump:
Warning – refer to accompanying documentation.
Warning – risk of electric shock.
Warning – hot surfaces.
© Edwards Limited 2007. All rights reserved. Page 1

A730-01-880 Issue E
Introduction
1.2 ATEX directive implication
This equipment is designed to meet the requirements of Group II Category 3 equipment in accordance with Directive
94/9/EC of the European Parliament and the Council of 23rd March 1994 on the approximation of the laws of the
Member States concerning equipment and protective systems intended for use in potentially explosive atmospheres.
(The ATEX Directive).
The ATEX Category 3 applies in respect of potential ignition sources internal to the equipment. An ATEX Category has
not been assigned in respect of potential ignition sources on the outside of the equipment as the equipment has not
been designed for use where there is an external potentially explosive atmosphere.
There is no potential source of ignition within the pump during normal operation but there may be potential sources
of ignition under conditions of foreseeable and rare malfunction as defined in the Directive. Accordingly, although
the pump is designed to pump flammable materials and mixtures, operating procedures should ensure that under all
normal and reasonably foreseeable conditions, these materials and mixtures are not within explosive limits. Category
3 is considered appropriate for the avoidance of ignition in the case of a rare malfunction which allows flammable
materials or mixtures to pass through the pump whilst within their explosive limits.
When flammable materials are present within the equipment you must:
z Not allow air to enter the equipment.
z Ensure the system is leak tight.
Further details can be obtained by contacting Edwards UK on +44 1293 528844.
Page 2 © Edwards Limited 2007. All rights reserved.

A730-01-880 Issue E
Introduction
Figure 1 - XDS35i scroll pump
1. NW40 inlet port 7. Electrical connector

2. Gas ballast control 8. Voltage changeover switch cover
3. Cooling fan 9. On/Off switch
4. NW25 exhaust port 10. 15 way connector
5. Fan connector 11. Hour counter
6. Rubber feet
1.3 Description
The XDS35i pump is shown in Figure 1. Refer to Figure 1 for item numbers in brackets in the following descriptions.
The XDS pump is a compact, reliable vacuum pump which is suitable for use on vapour handling processes. The XDS
pump may be used for some pumping applications involving corrosive substances and particulates; for information on
pumping flammable gases, please refer to Section 4.5 and contact Edwards for any further assistance.
The body of the pump includes a fixed scroll and an orbiting scroll. The orbiting scroll is controlled by the electric
motor through an eccentric cam on the motor drive shaft. The movement of the orbiting scroll, meshed with the
fixed scroll, forms successive crescent shaped volumes in the pump. Gas that enters the pump through the inlet is
compressed by the movement of the orbiting scroll and swept towards the centre of the fixed scroll. The compressed
gas enters the exhaust port near the centre of the stationary scroll and is exhausted from the pump through the
outlet.
The XDS is a truly dry vacuum pump, as all the bearings, with their hydrocarbon lubricant, are isolated from the
vacuum space.
The inlet of the pump has a NW40 (1) inlet and inlet strainer.

A730-01-880 Issue E
Introduction
The pump mechanism is driven directly by a three phase electric motor. The motor is controlled by an inverter, which
manages the supply of current to the motor in accordance with operating conditions, and allows the pump to be
connected to a single phase supply. The voltage changeover switch (beneath the voltage changeover switch cover,
refer to Figure 1, item 8) must be set to the correct position in accordance with the power supply being used, refer
to Section 3.5.2.
The XDS35i is designed to run from atmospheric pressure however, if the inlet pressure exceeds 100 mbar for an
extended period, the inverter may reduce the motor speed. The pump will speed up again after the pressure is
reduced.
The pump is air-cooled by a fan (3) mounted at the opposite end to the motor. The fan will run on for one minute
after the pump is switched off. The XDS35i incorporates a thermal protection device that will stop the motor in the
event of thermal overload e.g. high ambient temperature. The pump will restart after it has cooled down.
The pump is mounted on rubber feet (6).
The pump is fitted with an hours counter (11), which indicates the total time that the pump has run.
1.4 Gas ballast control
To pump high vapour loads, gas ballast can be delivered into the pump to prevent condensation of the vapour carried
by the pumped gases.
Air can be introduced to the low vacuum stages through the gas ballast control (2). Alternatively, an inert gas such
as nitrogen can be supplied through a suitable external valve and by using the appropriate adaptor, available as an
accessory, refer to Section 7.3.3.
The gas ballast control has three positions:
z Closed (position '0')
z Low flow (position 'I')
z High flow (position 'II')
1.5 Construction
The pump scrolls are made of anodised aluminium. The motor housing is aluminium. All surfaces of the pump which
are exposed to the pumped gases are free from copper, zinc and cadmium.
Other materials of construction include fluorocarbon elastomer, nitrile, chemically resistant polymers, nickel and
stainless steel.
The tip seal is a PTFE composite material.

A730-01-880 Issue E
Technical Data
2 Technical Data
2.1 Operating and storage conditions
Table 1 - Operating and storage conditions
Operating and storage conditions XDS35i

Ambient temperature range (operation) +10 °C to +40 °C
Maximum surface temperature of pump body +40 °C to +70 °C
(Depending on ambient temperature)
Maximum humidity (operation) 90% RH
Ambient temperature range (storage) –30 °C to +70 °C
2.2 Performance
2.2.1 General
Table 2 - General characteristics
General XDS35i
Suckback protection (no solenoid valve on inlet) By exhaust valve
Maximum initial pressure rise with no gas ballast flow (mbar l) 5
3/hr)
Maximum displacement (m 44
3/hr)
Maximum pumping speed (m 35
Maximum permitted inlet pressure and gas ballast inlet pressure (barg) 0.5
Maximum permitted outlet pressure (barg) 1
–1) <1 x 10–6
Leak tightness (mbar l s
2.2.2 Performance characteristics
The position of the gas ballast control defines the performance characteristics of the pump. These performance
characteristics are listed in Table 3.
Table 3 - Performance characteristics
Gas ballast Ultimate total Gas ballast

Pump
control position pressure (mbar) flow (l min –1)
XDS35i 0 <0.01 –
1 <0.02 3
2 <10.0 12

A730-01-880 Issue E
Technical Data
Figure 2 - Performance characteristics
1. Speed 2. Power
2.3 Mechanical data
2.3.1 General
Table 4 - General mechanical data
Parameter Units XDS35i

Overall dimensions (L x W x H) mm 476 x 333 x 396
Maximum tilt angle degree 10
Nominal rotational speed rpm 1750
Mass kg 48
Inlet connection NW40
Outlet connection NW25
Degree of protection (IEC60529) IP44
2.3.2 Vibration data
Table 5 - Vibration data
Parameter XDS35i
Sound pressure, measured at ultimate vacuum 1 metre from the end of the pump 57 dB (A)
to ISO 11201
Vibration: measured at the inlet port (ISO3744) Class 1C…< 4.5 mms–1 (rms)

A730-01-880 Issue E
Technical Data
2.3.3 CSA approval environmental conditions
CSA approval environmental conditions

Pollution Pollution degree 2
Installation Installation category II
Altitude restriction Max 2000 m
Area of use Indoor use
2.4 Electrical data
Table 6 - Electrical data
Power (W)
Pump Supply (V) Phase Frequency (Hz) Current (A)
at ultimate vacuum
200/230 Single 50/60 520 * 5
XDS35i
100/120 Single 50/60 520 * 8.5
* Refer to Figure 2.

A730-01-880 Issue E

A730-01-880 Issue E
Installation
3 Installation
3.1 Safety
WARNING
Obey the safety instructions given below and take note of appropriate precautions. If you do not,
you can cause injury to people and damage to equipment.
WARNING
The Edwards XDS35i pump is not recommended for pumping explosive gases or hazardous
substances.
You must ensure that the XDS35i pump is suitable for your application. If you have any doubt about the suitability of
the XDS35i pump for your application, refer to the Edwards guidelines on vacuum pump and vacuum system safety
(see associated publications at the end of the contents list at the front of this manual).
WARNING
Prevent any part of the human body coming into contact with the vacuum.
A suitably trained and supervised technician must perform the installation of the XDS35i pump. Obey the safety
instructions listed below when you install the XDS pump, especially when you connect the pump into an existing
system. Details of the specific safety precautions are given at the appropriate point in the instructions.
WARNING
Use suitable lifting equipment to move the XDS35i pump. The mass of the pump is approximately
48 kg.
z Mechanical lifting equipment should be attached to the lifting eye on the pump.
z Loose slings should not be used to lift the XDS35i.
WARNING
Take care when moving the pump into position. The pump's weight makes it difficult to slide and
movement should be attempted using two people.
z Wear the appropriate safety clothing when you come into contact with contaminated components. Dismantle
and clean contaminated components inside a fume cupboard.
z Vent and purge your vacuum system before you start installation work.
z Ensure that the installation technician is familiar with the safety procedures that relate to the products
handled by the pumping system.
z Disconnect the other components in the pumping system from the electrical supply so that they cannot be
operated accidentally.

A730-01-880 Issue E
Installation
3.2 System design considerations

Consider the following points when you design your pumping system:
Use a suitable valve to isolate the pump from your vacuum system if you need to allow the pump to warm up before
pumping condensable vapours or if you need to maintain vacuum when the pump is switched off.
Avoid high levels of heat input into the pump from the process gases, otherwise the pump may overheat, and cause
the thermal overload device to open.
If you use the pump in a high ambient temperature and have a high gas throughput, the temperature of the pump
body may approach 70 ºC and you must fit suitable guards to prevent contact with hot surfaces.
Make sure that the exhaust pipeline cannot become blocked. If you have an exhaust isolation valve, make sure that
you cannot operate the pump with the valve closed.
Provide for a purge of inert gas when you shut down the pumping system, to dilute dangerous gases to safe
concentrations.

A730-01-880 Issue E
Installation
Figure 3 - Installation drawing

A730-01-880 Issue E
Installation
3.3 Unpack and inspect
WARNING
Use suitable lifting equipment to move the XDS35i pump. The mass of the pump is approximately
48 kg.
Remove all packing materials, remove the pump from its packing box, remove the protective covers from the inlet
and outlet ports and inspect the pump. If the pump is damaged, notify your supplier and the carrier in writing; state
the item number of the pump together with your order number and your supplier's invoice number. Retain all the
packing materials for inspection. Do not use the pump if it is damaged. If the pump is not to be used immediately,
replace the protective covers. Store the pump in suitable conditions, as described in Section 6.1. Refer to Section 6.2
for disposal of materials.
3.4 Locate the pump
WARNING
If the pump is to be used on the floor of a work area, position the power lead and the exhaust and
inlet hoses with care. Ensure that personnel in the area are aware of any obstructions around the
pump.
Provide a firm, level platform for the pump. Locate the pump so that the gas ballast control and the on/off switch
are accessible.
If your pump will be located inside an enclosure, make sure that there is adequate ventilation at both ends of the
pump, so that the ambient temperature around the pump does not exceed 40 ºC. There must be a minimum space
of 25 mm between the pump and the enclosure walls.
3.4.1 Mechanical fixing
Note: If you wish to secure the pump you may do so using the four holes located on each corner of the pump base,
we recommend you use M8 bolts.
3.5 Electrical installation
3.5.1 Check and configure the pump
CAUTION
Before changing the voltage, unplug the power supply. Ensure that the pump is correctly configured for your
electrical supply otherwise you may cause damage.
Ensure that the voltage shown on the voltage indicator (refer to Figure 1, item 8) on the motor cover corresponds
with your electrical supply voltage. If it does not, you must change the configuration of the pump motor to match
your supply voltage; use the procedure below.
1. Undo the two screws and lift off the voltage indicator moulding.
2. Rotate the voltage indicator moulding so that the correct voltage is uppermost.
3. Replace the two screws.

A730-01-880 Issue E
Installation
3.5.2 Connect the pump to your electrical supply
WARNING
Ensure that the electrical installation of the XDS pump conforms with your local and national safety
requirements. It must be connected to a suitably fused and protected electrical supply with a
suitable earth point.
The following fuse ratings should be used (refer to Table 7).
Table 7 - Recommended fuses
Area Voltage Rating

UK 230 V 13 A
Europe 230 V 16 A
US 110 V 20 A
Japan 100 V 20 A
CAUTION
If using an overload circuit breaker it must be of a time lag type because of high start up current.
CAUTION
If using an earth leakage device e.g. an RCD, use at least a 30 mA rated unit to avoid trip during start up.
The pump will automatically restart after restoration of the power supply following power failure.
Make the electrical connections to the pump motor with an IEC60320 cable socket (C19) that satisfies your local
electrical standards.
3.6 Inlet and outlet connections
WARNING
If pumping dangerous gases or vapours, connect the exhaust to a suitable treatment plant to
prevent the discharge of dangerous gases and vapours to the surrounding atmosphere.
WARNING
If pumping for a prolonged period above 100 mbar inlet pressure, use an exhaust silencer (refer
to Section 7.3.2) or connect to an appropriate exhaust line.
Refer to Figure 1. Before you connect the pump to your vacuum system, remove the plastic cap from the inlet and
the exhaust, and ensure that the inlet strainer is fitted to the pump inlet port. Use appropriate NW40 vacuum fittings
for connection to your system.
Take note of the following information when you connect the pump to your vacuum system.
z To minimise noise and exhaust emissions, it is recommended that the pump is connected to an exhaust line
or a silencer (refer to Section 7.3.2).
z For optimum pumping speeds, ensure that the pipeline connected to the pump inlet is as short as possible
and has a suitable internal diameter.

A730-01-880 Issue E
Installation
z Support the vacuum pipeline to prevent loading of the coupling joints.
z If necessary, incorporate flexible bellows in your system pipelines to reduce the transmission of vibration and
to prevent loading of the coupling joints. If you use flexible bellows, you must ensure that you use bellows
that have a maximum pressure rating which is greater than the highest pressure that can be generated in
your system. We recommend that you use Edwards bellows.
z Incorporate an inlet isolation valve in the pipeline from the vacuum system to the pump, so that you can
isolate the vacuum system from the pump when it is switched off and prevent the suckback of process gases
and debris into the vacuum system.
z Ensure that the sealing surfaces are clean and scratch-free.
We recommend that you use an exhaust extraction system suitable for use with all of the process gases you will pump.
Ensure that the exhaust extraction system cannot become blocked or obstructed when the pump is operating.
A small amount of tip seal wear product may collect in the exhaust duct of the pump. The dust may be blown out
with the initial burst of air after the pump has been vented. This is quite common and the amount of dust seen will
reduce over time.
3.7 Leak test the system

After you have installed the XDS pump, leak test the system and seal any leaks found.

A730-01-880 Issue E
Operation
4 Operation
4.1 Use of gas ballast control
You can use the gas ballast control to optimise the performance of the scroll pump for your application. The
performance characteristics of the pump with the different ballast settings are shown in Section 2.2.2. You can
change the position of the gas ballast control when the pump is off or when the pump is operating.
4.1.1 Gas ballast control
Use the gas ballast control to change the amount of air introduced into the final stage of the pump. Use of gas ballast
will reduce the condensation of vapours in the pump; the condensates would contaminate the pump. You can turn
the gas ballast control to select one of the three positions, as follows:
To select no gas ballast, turn the control position to '0'. Use this setting:
z to achieve ultimate vacuum
z to pump dry gases.
To select low flow gas ballast, turn the control to position 'I'. Use this setting:
z to pump low concentrations of condensable vapours
z to decontaminate the pump.
To select high flow gas ballast, turn the control to position 'II'. Use this setting:
z to pump high concentrations of condensable vapours
z to clear excess vapours after processing.
4.2 Start up procedure
WARNING
Ensure that your system design does not allow the exhaust pipeline to become blocked.
CAUTION
A fine dust may be emitted from the exhaust of the scroll pump during start up, particularly when the pump is
new or if new tip seals are fitted. Refer to Section 5.6 for further information when fitting new tip seals.
Use the procedure below to start up the pump:
1. Ensure that any vacuum system isolation valve is closed (if fitted).
2. Connect a suitable lead from the power supply to the electrical socket at the side of the pump.
3. Switch on the electrical supply to the pump, using the on / off switch on the motor.
4. Always use the on / off switch to start / stop the pump.
5. Open the vacuum system isolation valve (if fitted).

A730-01-880 Issue E
Operation
4.3 To achieve ultimate vacuum

In order to achieve the best possible vacuum, the pump should be operated with the gas ballast control on position
'0'. However, if the pump, or elements of the vacuum system it is attached to, are new or have been newly fitted,
some atmospheric moisture may be present. If atmospheric moisture is present, run the pump with the gas ballast
control in position 'I' or 'II' for 20 minutes before switching to position '0'. If moisture is allowed to remain, the
performance of the pump will be impaired.
4.4 To pump condensable vapours

Select a suitable gas ballast setting (gas ballast control in position 'I' or 'II') when there is a high proportion of
condensable vapours in the process gases. This will assist the vapours to pass through the pump without condensing
and keep the pump performance from degrading.
4.5 Implication of ATEX directive
4.5.1 Introduction
This equipment is designed to meet the requirements of Group II Category 3 equipment in accordance with Directive
94/9/EC of the European Parliament and the Council of 23rd March 1994 on the approximation of the laws of the
Member States concerning equipment and protective systems intended for use in potentially explosive atmospheres.
(The ATEX Directive).
The ATEX Category 3 applies in respect of potential ignition sources internal to the equipment. An ATEX Category has
not been assigned in respect of potential ignition sources on the outside of the equipment as the equipment has not
been designed for use where there is an external potentially explosive atmosphere.
There is no potential source of ignition within the pump during normal operation but there may be potential sources
of ignition under conditions of foreseeable and rare malfunction as defined in the Directive. Accordingly, although
the pump is designed to pump flammable materials and mixtures, operating procedures should ensure that under all
normal and reasonably foreseeable conditions, these materials and mixtures are not within explosive limits. Category
3 is considered appropriate for the avoidance of ignition in the case of a rare malfunction which allows flammable
materials or mixtures to pass through the pump whilst within their explosive limits.
4.5.2 Flammable/pyrophoric materials
When flammable or pyrophoric materials are present within the equipment you must:
z Not allow air to enter the equipment.
z Ensure the system is leak tight.
z Dilute any flammable gases or vapours by using an inert purge (e.g. N2) to the pump inlet and/or gas purge
to reduce their concentration the pump and exhaust line to less than one quarter of their published lower
explosive limits (LEL).
z Prevent the condensation of flammable vapours within the pump mechanism and exhaust line by using an
inert gas purge to the pump gas ballast connection.
4.5.3 Gas purges
CAUTION
The following actions must be taken to ensure that the gas being pumped stays out of the flammable range.
The inert gas purge should be switched on to remove air from the pump and exhaust before the process starts. The
purge flow can be switched off at the end of the process only after any remaining flammable gases or vapours have
been purged from the pump and exhaust line.

A730-01-880 Issue E
Operation
If liquids that produce flammable vapours could be present in the pump foreline then the inert gas purge to the
XDS35i should be left on all the time this liquid is present. Flammable liquids could be present in the foreline as a
result of condensation or may be carried over from the process.
When calculating the flow rate of inert gas required for dilution, consider the maximum flow rate for the flammable
gases/vapours that could occur. For example, if a mass flow controller is being used to supply flammable gases to
the process, you should assume a flow rate for flammable gases that could arise if the mass flow controller is fully
open. The inert gas purge flow rate should be continually measured and if the flow rate falls below that required,
then the flow of flammable gases or vapours to the pump must be stopped.
WARNING
If you use the nitrogen purges to dilute dangerous gases to a safe level, ensure that the system
shuts down if the nitrogen supply to the XDS35i fails.
We recommend you obtain and read Vacuum Pump and Vacuum System Safety publication no P300-20-000
available from Edwards or your supplier.
4.6 Remote operation using 15 way D connector

It is possible to operate the pump remotely using the 15 way D type connector fitted on the panel at the side of the
pump. (Refer to Figure 1).
The 15 way D connector is insulated to ensure that it remains protected in the event of a single fault condition.
The controls available are as follows:
z On/Off
z Boost (Run pump at 116%)
z Idle (Run pump at 67%)
z Run (Runs pump at standard speed 100%)
z OK Signal
Figure 4 shows which connections to make to enable these functions.
The power On/Off switch (Figure 1, item 9) should be in the Off position for remote operation.
To completely remove electrical power from the pump, the plug should be removed from the electrical connector
(Figure 1, item 7).
4.7 Shut down

Use the procedure below to shut down the pump:
1. If shutting the pump down prior to a period of storage, remove any process gases by running on high flow gas-
ballast for at least one hour.
2. Close any vacuum system isolation valve to prevent suckback into the vacuum system (where fitted).
3. Switch off the pump. When the pump is switched off the fan will continue to run for 1 minute.
4. Vent the XDS35i by the gas ballast control or valve on the inlet.

A730-01-880 Issue E
Operation
Figure 4 - Logic interface schematic
1. Speed control pins 3, 4 and 5

Maximum current per pin = 7 mA when linked to pin 1 (24 V)
2. Pump healthy signal
Signal high = normal (maximum permissible current = 100 mA)
Table 8 - Pin status on the logic interface connector
Speed Pumping speed

Mode Pin 1 Pin 3 Pin 4 Pin 5
percentage (m3 h-1)
Normal 100% 35 24 V Link open open
Boost 116% 41 24 V Link Link Link
Idle 67% 23 24 V Link Link open
The tolerance of the power supply can be ±10%. Make sure all the unused pins are not connected.

A730-01-880 Issue E
Maintenance
5 Maintenance
5.1 Safety information
WARNING
Obey the safety instructions given below and take note of appropriate precautions. If you do not,
you can cause injury to people and damage to equipment.
WARNING
Wait one minute for capacitor discharge after disconnecting the power supply before working on
the pump.
The XDS35i pump is designed to require little user maintenance. Observe the following guidelines when carrying out
maintenance on your pump:
z Ensure that maintenance is done by a suitably trained and supervised technician. Obey your local and
national safety requirements.
z Ensure that the maintenance technician is familiar with the safety procedures which relate to the products
processed by the pumping system.
z Check that all the required parts are available and are of the correct type before you start work. Refer to
Section 7.3.5.
z Disconnect the pump and other components from the electrical supply so that they cannot be operated
accidentally.
z Allow the pump to cool before you start maintenance work.
z Do not re-use internal 'O' rings.
WARNING
The pump may be contaminated with the process chemicals that have been pumped during
operation. If so, ensure that the pump is decontaminated before maintenance and that you take
adequate precautions to protect people from the effects of dangerous substances if contamination
has occurred.
z Do not touch or inhale the thermal breakdown products of fluorinated materials which may be present in the
pump if the pump has been heated to 260 ºC and above. Fluorinated materials are safe in normal use but can
decompose into very dangerous substances (which may include hydrofluoric acid) if they are heated to 260 ºC
and above. The pump may have overheated if it was misused or if it was in a fire. Health and Safety Data
sheets for fluorinated materials used in the pump are available on request; contact your supplier or Edwards.
5.2 Maintenance plan
More frequent maintenance may be required if the pump is used to pump aggressive gases and vapours, such as
solvents, organic substances and acids, or if the pump is operated continuously at the higher end of its operating
temperature range.

A730-01-880 Issue E
Maintenance
Table 9 - Maintenance plan
Operation Frequency Refer to Section

Inspect and clean inlet strainer Annually 5.3
Inspect and clean the gas ballast control Annually 5.4
Clean the external fan cover Annually 5.5
Replace the tip seal and exhaust valve Annually or as required 5.6
Test the motor / drive condition 15000 hours 5.7
Replace the bearings 35000 hours Refer to Edwards
5.3 Inspect and clean the inlet strainer

Whenever you disconnect the pump from your vacuum system, we recommend that you:
z Remove any debris trapped by the inlet strainer (in the inlet port).
z Inspect the inlet strainer and if necessary, clean it with a cleaning solution suitable for the substances
pumped. Refit the inlet strainer before you reconnect the pump to your vacuum system.
1. Refer to Figure 5. Disconnect your vacuum system from the pump inlet-port (3) and remove the centring-ring
and strainer assembly (1) and the 'O' ring (2). Inspect the centring-ring and the 'O' ring. If they are clean,
continue at Step 5. If they are not clean, continue at Step 2.
2. Remove the 'O' ring (2) from the centring-ring and strainer assembly (1). Do not allow the 'O' ring to come into
contact with the cleaning solution.
3. Wash the centring-ring and strainer assembly in a suitable cleaning solution and allow it to dry.
4. If necessary, wipe the 'O' ring with a clean, dry, lint-free cloth.
5. Refit the centring-ring and strainer assembly and the 'O' ring to the inlet-port. Refit your vacuum system to the
pump inlet-port.
Figure 5 - Inlet strainer assembly
1. Centring ring and strainer

2. 'O' ring
3. Pump inlet-port

A730-01-880 Issue E
Maintenance
5.4 Inspect and clean the gas ballast control
Note: The gas ballast filter element (Figure 6, item 7) is retained in its seating with adhesive; do not try to
remove it.
1. Refer to Figure 6. Turn the gas ballast control to the high flow position (II).
2. Push the control down against the compression spring (6) as far as it will go, then turn the control anti-clockwise
slightly to release the bayonet lugs (5) and remove the control (1).
3. If necessary, wipe the control with a clean, dry, lint-free cloth and check that the air-hole (3) is not blocked. If
necessary, clean the foam with warm soapy water and allow to air dry.
4. Refit the control into the gas ballast inlet and ensure that the compression spring locates correctly between the
bayonet lugs.
5. Push the control down as far as it will go and then turn the control clockwise slightly until the bayonet lugs
engage correctly.
6. Reset the gas ballast control to the required position.
Figure 6 - Gas ballast control assembly
1. Gas ballast control 5. Bayonet-lugs

2. 'O' ring 6. Compression spring
3. Air-hole 7. Filter element
4. 'O' ring

A730-01-880 Issue E
Maintenance
5.5 Clean the external fan cover

If the fan cover is not kept clean, the air flow over the pump can be restricted and the pump may overheat.
1. Switch off the pump and disconnect it from the electrical supply.
2. Use a dry cloth and a soft brush to remove dirt and deposits from the fan cover.
5.6 Replace the tip seals

This instruction is applicable to the XDS35i replacement tip seal kit (contained in minor service kit, refer to
Section 7.3.5) that must be fitted.
5.7 Test the motor condition
CAUTION
Do not flash test the XDS35i or damage to the inverter may result.
Test the earth continuity and the insulation resistance of the pump motor, in accordance with local regulations for
the periodic testing of electrical equipment.
We recommend that the earth continuity is less than 0.1Ω and the insulation resistance is greater than 2MΩ.
(Reference EN61010-1).
If the pump fails these tests, you must contact Edwards.
5.8 Fault-finding
5.8.1 The pump has failed to start or has stopped
z The electrical supply fuse has blown.
z The electrical supply voltage does not match that for which the inverter input has been configured.
z The inverter drive has not reset after an over temperature event. Disconnect the mains supply and wait for
at least one minute and attempt to restart.
z The motor is faulty.
z Fan not working or not connected.
z The ambient temperature is too high.
z The cooling air supply is insufficient or is too hot.
z The process gas is too hot or the throughput is too high.
5.8.2 The pump has failed to achieve the required performance
z To close the gas ballast, turn the control to position’0’. Use this setting in order to achieve the best possible
vacuum. If the pump has been used to pump condensable vapours or is to pump a large chamber that has
been exposed to atmospheric air (water vapour), it may be necessary to run for at least an hour on high flow
gas ballast ’II’.
z If the electrical supply voltage is more than 10% below the lowest voltage specified on the voltage indicator,
the pump may operate yielding a degraded vacuum performance.

A730-01-880 Issue E
Maintenance
z There is a leak in your vacuum system.
z Your pressure measurement technique or gauge head is unsuitable or gives an incorrect indication of
pressure.
z Your vacuum fittings are dirty or damaged.
z The inlet strainer is blocked.
z There is a blockage or high pressure in the exhaust line.
z The pump contains traces of process vapours.
z The pump is outside the specified range of operating conditions.
z The gas ballast control is not properly closed.
z The tip seals need replacing.
z The inverter is current limiting the supply.
z The pump is in idle mode.
5.8.3 The pump is noisy
z The pump is contaminated with solid particles.
z The bearings are worn.
z Following tip seal replacement, the pump has not been vented and a build up of eroded tip seal dust is
reducing running clearances. Refer to Section 5.6 for further information.
5.8.4 The pump surface temperature is high
z The ambient temperature is too high.
z The cooling air supply is insufficient or is too hot.
z The process gas is too hot or the throughput is too high.
5.8.5 The pumping speed is poor or if pump down time is too long
z The connecting pipelines are too small in diameter.
z The connecting pipelines are too long.
z The inlet strainer is blocked.
z There is a leak in the system.
z The inverter is current limiting the supply.
z The pump is in idle mode.

A730-01-880 Issue E

A730-01-880 Issue E
Storage and Disposal

6 Storage and Disposal
6.1 Storage
Use the following procedure to store the pump:
1. Shut down the pump as described in Section 4.7.
2. Disconnect the pump from the electrical supply.
3. Place and secure protective covers over the inlet and outlet ports.
4. Store the pump in cool, dry conditions until required for use. When required, prepare and install the pump as
described in Section 3.
6.2 Disposal
Dispose of the pump and any components from it safely in accordance with all local and national safety and
environmental requirements.
If this pump is to be returned to Edwards Vacuum Technology for disposal/ investigation. Particular care must be
taken with components that have been contaminated with dangerous process substances.
WARNING
Do not incinerate fluoroelastomer seals, tip seal material and 'O' rings.

A730-01-880 Issue E

A730-01-880 Issue E
Service, Spares and Accessories

7 Service, Spares and Accessories
7.1 Introduction
Edwards products, spares and accessories are available from Edwards companies in Belgium, Brazil, Canada, France,
Germany, Hong Kong, Italy, Japan, Korea, Switzerland, UK, USA and a world-wide network of distributors. The
majority of these centres employ Service Engineers who have undergone comprehensive Edwards training courses.
Order spare parts and accessories from your nearest Edwards company or distributor. When you order, state for each
part required:
z Model and item number of your equipment.
z Serial number (if any).
z Item number and description of part.
7.2 Service
Edwards are supported by a worldwide network of Edwards Service Centres. Each Service Centre offers a wide range
of options including: equipment decontamination; service exchange; repair; rebuild and testing to factory
specifications. Equipment which has been serviced, repaired or rebuilt is returned with a full warranty.
Your local Service Centre can also provide Edwards engineers to support on-site maintenance, service or repair of
your equipment.
For more information about service options, contact your nearest Service Centre or other Edwards company.
7.3 Accessories
7.3.1 Electrical cables
Refer to Table 10. The following electrical cables are available as accessories and should be used to connect the
XDS35i to your electrical supply:
Table 10 - Electrical cables
Product description Ordering information

Lead Assembly, 13 A, C19, UK A505-05-003
Lead Assembly, 16 A, C19, Europe A505-06-003
Lead Assembly, 15 A, C19, USA A505-07-003
Lead Assembly, 20 A, C19, No Plug A505-08-003
7.3.2 Silencer
A silencer is available for the pump. The code number for the silencer is A505-97-001. Refer to Section 3.6 for
guidance on its use. A silencer spares kit, code number A505-97-801 is also available.
7.3.3 Gas ballast adaptor
Fit the gas-ballast adaptor in place of the gas-ballast control on the pump. The adaptor allows you to connect a
controlled supply of inert gas to the pump. Gas-ballast adaptor A505-02-000.

A730-01-880 Issue E
Service, Spares and Accessories
7.3.4 Solenoid operated pipeline valves
Fit the pipeline valve between your vacuum system and the pump inlet to provide additional system protection when
the pump is switched off. The following valves are available as accessories and are recommended. (Refer to
Table 11).
Table 11 - Solenoid operated pipeline valves
Product description Ordering information

PV40EK Valve, 220-240 V 50/60 Hz, Aluminium C414-01-000
PV40EK Valve, 220-240 V 50/60 Hz, Steel C414-02-000
PV40EK Valve, 110-127 V 50/60 Hz, Aluminium C414-03-000
PV40EK Valve, 110-127 V 50/60 Hz, Steel C414-04-000
7.3.5 Tip seal and exhaust valve service kit
This kit contains all the necessary components to replace the tip seal and exhaust valve. Tip seals should be replaced
as a pair, and only simple tools are required. The kit part number is A730-01-801.

A730-01-880 Issue E
Index
Index
A R
Accessories ............................................... 27 Remote operation using 15 way D connector ....... 17
ATEX directive implication ...............................2 Replace the tip seals .................................... 22
C S
Clean the external fan cover .......................... 22 Safety .......................................................9
Connect the pump to your electrical supply ........ 13 Scope and definitions .....................................1
Construction ................................................4 Service .................................................... 27
Shut down ................................................ 17
D Spares ..................................................... 27
Start up procedure ...................................... 15
Description ..................................................3 Storage .................................................... 25
Disposal ................................................... 25 System design considerations .......................... 10
E T
Electrical data .............................................7 Technical data ............................................. 5
Electrical installation ................................... 12 Test the motor condition ............................... 22
F U
Fault-finding .............................................. 22 Unpack and inspect ..................................... 12
Flammable/pyrophoric materials ..................... 16 Use of gas ballast control .............................. 15
G V
Gas ballast control ........................................4 Vibration data .............................................. 6
Gas purges ................................................ 16
General characteristics ...................................5
I
Implication of ATEX directive .......................... 16
Inlet and outlet connections ........................... 13
Inspect and clean the gas ballast control ............ 21
Inspect and clean the inlet strainer .................. 20
Installation ..................................................9
Introduction ................................................1
L
Leak test the system .................................... 14
Locate the pump ......................................... 12
M
Maintenance .............................................. 19
Maintenance plan ........................................ 19
Mechanical data ............................................6
O
Operating and storage conditions .......................5
Operation ................................................. 15
P
Performance characteristics .............................5

A730-01-880 Issue E


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A730-01-880

XDS Dry Pump

Description Electrical Supply Item Number

2 Technical Data .................................................................................... 5

5.6 Replace the tip seals ................................................................................................... 22

© Edwards Limited 2007. All rights reserved. Page i

5.7 Test the motor condition ..............................................................................................22

6 Storage and Disposal ........................................................................... 25

7 Service, Spares and Accessories .............................................................. 27

Page ii © Edwards Limited 2007. All rights reserved.

© Edwards Limited 2007. All rights reserved. Page iii

This page has been intentionally left blank.

Page iv © Edwards Limited 2007. All rights reserved.

Pressures are stated as absolute pressures throughout this manual.

The following IEC warning labels appear on the pump:

Warning – refer to accompanying documentation.

Warning – risk of electric shock.

Warning – hot surfaces.

© Edwards Limited 2007. All rights reserved. Page 1

1.2 ATEX directive implication

z Not allow air to enter the equipment.

z Ensure the system is leak tight.

Further details can be obtained by contacting Edwards UK on +44 1293 528844.

Page 2 © Edwards Limited 2007. All rights reserved.

1. NW40 inlet port 7. Electrical connector

© Edwards Limited 2007. All rights reserved. Page 3

The pump is mounted on rubber feet (6).

1.4 Gas ballast control

The gas ballast control has three positions:

z Closed (position '0')

z Low flow (position 'I')

z High flow (position 'II')

The tip seal is a PTFE composite material.

Page 4 © Edwards Limited 2007. All rights reserved.

Table 1 - Operating and storage conditions

Operating and storage conditions XDS35i

Table 2 - General characteristics

2.2.2 Performance characteristics

Table 3 - Performance characteristics

Gas ballast Ultimate total Gas ballast

© Edwards Limited 2007. All rights reserved. Page 5

Figure 2 - Performance characteristics

2.3 Mechanical data

Table 4 - General mechanical data

Parameter Units XDS35i

2.3.2 Vibration data

Table 5 - Vibration data

Page 6 © Edwards Limited 2007. All rights reserved.

CSA approval environmental conditions

2.4 Electrical data

Table 6 - Electrical data

© Edwards Limited 2007. All rights reserved. Page 7

This page has been intentionally left blank.

Page 8 © Edwards Limited 2007. All rights reserved.

z Loose slings should not be used to lift the XDS35i.

© Edwards Limited 2007. All rights reserved. Page 9

3.2 System design considerations

Page 10 © Edwards Limited 2007. All rights reserved.

© Edwards Limited 2007. All rights reserved. Page 11