Microscopes for Flat Planel Display and Large Scale Integration Inspection

Microscopes for Flat Planel Display

and Large Scale Integration Inspection
 For ø300 mm wafer/ For 17-inch FPD/ For ø200 mm wafer/ For ø200 mm wafer/
Episcopic optical contrast Episcopic and Diascopic optical contrast Episcopic optical contrast Episcopic and Diascopic optical contrast

Enhanced observation performance and operation Illumination

Epi-fluorescence observation widens inspection range—including 365 nm UV excitation Stronger safeguard against contamination LED
• Highly beneficial when inspecting semiconductor resist residues and organic electroluminescence displays. • Antistatic coatings applied to the body, stage, Compact LED illuminators
• Various observation methods such as brightfield, darkfield, simple polarizing, and DIC are possible on all models. eyepiece tube and other various controls are power saving and
• With the L300ND/L200ND, diascopic illumination capability adds the illumination through transparent substrates. • Prevents damage to samples and contributes to achieve long life.
*L300N/L300ND/L200ND only
higher yields

LV-LL LED Lamphouse

Observation at optimum eyepoint level
• Ultra-wide 25-mm field of view and eyepiece angle Intensilight
adjustment between 0 ° and 30 ° • Motorized mercury precentered fiber illuminator
• Operators can adjust for epi-fluorescence observation, with variable
eyepoint level to ensure light intensity and shutter control, provide excellent
a comfortable viewing flexibility. Lamp centering and focus adjustment are
Brightfield observation Darkfield observation DIC observation Epi-fluorescence observation of position not necessary.
of wafer pattern organic substance on wafer
*L300N/L300ND/L200ND only

Front operation with easy access Target for easier focusing

• Minimizes fatigue during lengthy observations, • Insert a focusing target in the optical path to easily
Fixed-position X-Y fine movement control Filter blocks
maintaining a safer operator distance from the sample focus on low-contrast samples, such as bare wafers.
• Allows for stage For epi-fluorescence observation
movements and • EPI-FL UV-2A
Coarse torque
focusing to be carried • EPI-FL V-2A
adjustment ring out with ease • EPI-FL BV-2A
Fine focus knob
Episcopic aperture
Coarse focus knob diaphragm control buttons
Coarse focus Episcopic/Diascopic illumination
stopper ring selection switch (L300ND/L200ND only)
The X-Y fine movement controls are *L300N/L300ND/L200ND only.
Brightness control dial Nosepiece rotation buttons
positioned close to the operator. Only one cube is attachable.

2 3
 Accessories
Nikon's CFI60 optical systems are highly evaluated for their unique concept of high NA combined with a
long working distance. These lenses have been developed further and evolved achieving the apex in long Microscope camera
working distance specifications, correct chromatic aberration, and an optimized lens weight.
Digital Sight 1000 DS-Fi3 Digital Sight 10
Objective lenses Equipped with a 2 megapixel CMOS image Three main features of the This high-resolution camera captures both
sensor, it can capture full HD microscope previous models, high-resolution, color and monochromatic images at up to
Standard objective lenses Long Semi-
apo Low-magnification objective lenses images. By connecting a microscope to this high sensitivity and low noise, 6,000 x 3,984 pixels. This enables the wide
WD

TU Plan Fluor Series Light Fly-eye T Plan EPI Semi- Wide

field of
camera and HDMI monitor, movies and images
can be captured and saved onto a pre-inserted
and high-speed live display are
offered in 1 camera.
range of images to be captured and then
many of them to be stitched together making
weight lens apo view
EPI/BD 5x/10x/20x/50x/100x EPI 1x/2.5x SD card in the camera. a single and large combined image.

Enable brightfield, darkfield, simple polarizing, sensitive Model Magnification NA Working Distance (mm)
2.0 5.9 23.9 Color/
polarizing, differential interference, and epi-fluorescence T Plan EPI 1× 0.03 3.8 Color Color Mono-
(brightfield type) megapixel megapixel megapixel chrome
observations with just one lens. Achieves superior 2.5× 0.075 6.5

chromatic aberration performance with long working Full High- High-

HD resolution resolution
distance for all magnifications to adapt to any application.
Apochromatic objective lenses
Frame Rate 30 fps (1920×1080) 30 fps (1440×1024) 66 fps (1920×1080)
TU Plan Apo Series Long Apo Light Max Recordable Pixels 1920×1080 2880×2048 6000×3984
WD weight
EPI/BD 50x/100x/150x
By using phase Fresnel lenses, these objective lenses
Imaging software NIS-Elements
achieve significantly longer Using a tablet PC
*Brightfield observation (EPI) objective lens Using a desktop PC
operating distances while
Model Magnification NA Working Distance (mm) maintaining the superior Simply installing NIS-Elements L
TU Plan Fluor EPI 5× 0.15 23.5 chromatic aberration on a tablet PC enables setting and
(brightfield type) 10× 0.30 17.5
performance of apochromatic control of Digital Sight 1000/DS-Fi3/Digital Sight 10 microscope
20× 0.45 4.5
lenses.
50× 0.80 1.0 cameras, live image display, and image acquisition. Image Stitching
100× 0.90 1.0
*Brightfield observation (EPI) objective lens Stitches together images acquired from multiple
A wide variety of tools
TU Plan Fluor BD 5× 0.15 18.0
(brightfield/ darkfield type) 10× 0.30 15.0 fields of view to create one image.
20× 0.45 4.5 Model Magnification NA Working Distance (mm)
NIS-Elements L enables the conducting of simple measurements
50× 0.80 1.0 TU Plan Apo EPI 50× 0.8 2.0
(brightfield type) 100× 0.9 2.0 on images, with input of lines and comments. These can also be
100× 0.90 1.0
150× 0.9 1.5 written onto and saved with the image, and measurement data
TU Plan Apo BD 50× 0.8 2.0 can be output.
Long working distance objective lenses (brightfield/ darkfield type) 100× 0.9 2.0
150× 0.9 1.5 Measurement function
TU Plan ELWD Series Long Semi- Light Line distance Circle distance
WD apo weight Area Pitch distance
EPI/BD 20x/50x/100x
Other lenses Circle Angle
With the phase Fresnel lenses, these objective lenses
Lenses with correction mechanism
enable long working distances
Annotate function
while offering higher level CFI L Plan EPI CR Series Line Marker
chromatic aberration correction
EPI 20x/50x/100x Arrow Polyline
EDF (Extended Depth of Focus)
than conventional objective
Create a single, all-in-focus image from images of
lenses. This improves Text
differing focus.
operability for samples with
different heights. *Brightfield observation (EPI) objective lens Scene Mode
Model Magnification NA Working Distance (mm) Ten camera setting patterns for optimal color reproduction and
TU Plan EPI ELWD 20× 0.4 19.0 Working Glass Thickness contrast for each microscope light source, observation method
(brightfield type) 50× 0.6 11.0 Model Magnification NA Distance (mm) Correction Range (mm)
and type of sample, as well as custom settings, can be selected.
100× 0.8 4.5 CFI L Plan EPI CR 20× 0.45 10.9-10.0 0-1.2
TU Plan BD ELWD 20× 0.4 19.0 CFI L Plan EPI CR 50× 0.7 3.9-3.0 0-1.2
(brightfield/ darkfield type) 50× 0.6 11.0 CFI L Plan EPI CRA 100× 0.85 1.2-0.85 0-0.7 • Wafer/IC • Metal, Ceramic/Plastic
100× 0.8 4.5 CFI L Plan EPI CRB 100× 0.85 1.3-0.95 0.6-1.3 • Circuit board • Flat Panel Display
* See the "Digital Camera Digital Sight Series for Microscopes" catalog for details on Digital Sight features.

4 5
 Wafer loader NWL200 System diagram
Combined with the NWL200 wafer loader, the TV Camera Adapters C-mount camera ��������

ECLIPSE L200N meets requirements for wafer

Digital Sight ��������
TV Camera Lenses
1000 Digital
�������� EPI-FL Filter Block *2
Sight 10
DS-Fi3

inspections.
�������� �������� �������� �������� UV-2A
C-DA C-mount C-0.7x C-mount �������� V-2A A
T-BPA
Photo Direct Adapter Adapter 0.7x �������� �������� �������� BV-2A ������������������� �������� ��������
DS-F2.5 DS10-IRCF Tilting Eyepiece Tube CFI 10x CFIUW 10x
Adapter
F-Mount Motorized �������� L2-TTA / L2-TT2A

Support for ultra-thin 100 μm wafers

Adapter 2.5x Adapter DS-F
F-mount
�������� Adapter
�������� C-mount
LV-TV Adapter
• NWL200 series provides levels of safety and reliability that TV Adapter 0.55x ��������

meet all requirements for inspection of the latest wafers. A

L2-RAN Rotatable Analyzer
��������
�������� ��������
�������� �������� �������� L2-PO L2-RPO L2-AN Analyzer
L2-NCB 25NCB L2-ND4 25ND4 L2-ND16 25ND16
Improved operability and high throughput
Polarizer Rotatable Polarizer ��������
L2-BG
�������� Breath Shield Plate
LV-HL50W
• Setting conditions, such as sampling and inspection patterns, and checking the operating status and content of 12V50W
Halogen Lamp ��������
errors can easily be done with the large LCD panel LV-LH50PC
Precentered Lamphouse
��������
45 NCB11
�������� ��������
LU Objective L-DIC DIC Slider
��������
• Comprehensive file management functions for carriers and samples are useful for automating inspections 45 ND A (ND2, ND4)
��������
Adapter
M32-25
��������
L-DIHC DIC Slider HC
45 ND B (ND8)
• Exceptionally fast elevator, and the loading and unloading of wafers with complete precision by the multi-arm ��������
LV-LL �������������� ��������������
�������� LED CFI EPI CFI BD
system all contribute to an efficient wafer transfer and exchange TI-PS100W/A Lamphouse Objective Lens Objective Lens
��������������
������������� ����������
��������
������� ���������� *1 L3-RPOD
��������
��������������
YM-EPI 3-pin Rotatable Polarizer D
����������

Dimensional diagram ������������

Extension Cord
��������
L3N-FIAD Fiber
(Unit: mm) �������� Guide Adapter
C-HGFIE-C
(1.5 m)
��������
C-LHGFI HG Lamp

��������
RS-232C
��������
������� C-HGFIE-C ��������
������� ��� HG Controller C-HGFIE HG Precentered �������� �������� ��������
��� Fiber Illuminator Intensilight L3-S12WH Wafer Holder 12 L3-SGP Glass Plate L3-S12 14×12 Stage
����
�������������������������

B B TV Camera Adapters C-mount camera ��������

�����

��������
TV Camera Lenses Digital Sight
���

A
Digital
1000 ��������
������������������� �������� Sight 10
Tilting Eyepiece Tube LV-TI3 Trinocular �������� �������� �������� DS-Fi3
���

L2-TTA / L2-TT2A Eyepiece Tube T-BPA C-DA C-mount C-0.7x C-mount

Photo Direct Adapter Adapter 0.7x �������� ��������
���

Adapter DS-F2.5 DS10-IRCF

A F-Mount Motorized
Adapter Adapter ��������
2.5x DS-F
�������� F-mount
��� ��� ��� �������� C-mount Adapter
LV-TV Adapter
��� ��� EPI-FL Filter Block *2
�������� �������� �������� TV Adapter 0.55x
������� ��� L2-NCB 25NCB L2-PO L2-RPO �������� UV-2A ��������
�������� �������� Polarizer Rotatable �������� V-2A
Polarizer L2-RAN Rotatable Analyzer
L2-ND4 25ND4 �������� BV-2A
�������� B �������� �������� ��������
L2-ND16 25ND16 L2-BG CFI 10x CFIUW 10x
�������� Breath Shield Plate
L2-AN Analyzer

������� �������� ��������

LV-HL50W L-DIC DIC Slider A
������� L Stage
��� ������� ��� 12V50W �������� and L Stage P
Halogen Lamp �������� L-DIHC DIC Slider HC for NWL200
LV-LH50PC Wafer Loader
Precentered Lamphouse ��������
���� LU Objective
Adapter
M32-25
�������������������������

��������
�������� LV-LL
TI-PS100W/A LED Lamphouse
�������������� ��������������
�����
���

�������������� CFI EPI CFI BD

�������������������� Objective Lens Objective Lens
��� �������������� ����������
���

��������
���������������������� YM-EPI 3-pin Extension Cord ���������� *1
���

��������
�������� L2-S8A
L3N-FIAD Fiber 8×8 Stage
�������� ��������
C-LHGFI HG Lamp Guide Adapter
C-HGFIE-C (1.5 m)
��� ��� ���
��� ��� ��������
��� ��� C-HGFIE-C
HG Controller ��������
�������� �������� RS-232C ��������
��� C-HGFIE HG Precentered L2-S8WH 8 inch
Fiber Illuminator Intensilight Wafer Holder

*1 Diascopic illumination available only for L300ND and L200ND

*2 Epi-fluorescence observation available only for L300ND/L300N/L200ND
6 7
Specifications
Illumination type Episcopic Episcopic/Diascopic
Main body Power sources for motorized control built in
Motorized control for nosepiece, Light intensity control, Aperture diaphragm control
Nosepiece Motorized universal sextuple nosepiece
Centering Function Yes — Yes —
EPI/DIA changeover — — Yes
Focusing mechanism Cross travel 29 mm
Coarse 12.7 mm per rotation (torque adjustable, refocusing mechanism provided)
Fine 0.1 mm per rotation (in 1 µm increments)
Episcopic illuminator 12V-50W halogen lamp light source built in, LV-LL LED Lamphouse
Motorized aperture diaphragm (centerable), Fixed field diaphragm (with focus target)
Pinhole slider (optional), Four ø25 mm filters (NCB11, ND16, ND4),
Polarizer and Analyzer can be mounted
Observation methods: Brightfield, Darkfield, Simple polarizing, DIC, Epi-fluorescence*
(*L300N/L300ND/L200ND only)
Diascopic illuminator 12V-50W halogen lamp light source built in, LV-LL LED Lamphouse
—
Aperture diaphragm built in LWD condenser built in
Interface USB x 1, RS232C (for Intensilight) x 1
Eyepiece tubes L2-TT2A Ultra-widefield erect-image tilting trinocular eyepiece tube (tilt angle: 0-30 °)
FOV: 22/25; Beam split ratio 100:0/20:80
L2-TTA Ultra-widefield erect-image tilting trinocular eyepiece tube (tilt angle: 0-30 °)
FOV: 22/25; Beam split ratio 100:0/0:100
LV-TI3 Trinocular eyepiece tube (erect image) FOV: 22/25; Beam split ratio 100:0/0:100
Eyepieces CFI eyepiece lens series
Objective lenses CFI 60 -2/CFI 60 system
Stages 14 x 12 stage L2-S8A 8 x 8 stage 14 x 12 stage L2-S8A 8 x 8 stage
Stroke 354 x 302 mm 205 x 205 mm 354 x 302 mm 205 x 205 mm
Diascopic observation range 354 x 268 mm 150 x 150 mm 354 x 268 mm 150 x 150 mm
Coarse/Fine-movement changeover possible Fixed-position X-Y fine-movement controls
Antistatic mechanism 1000-10 V, within 0.2 sec
Power consumption 1.2 A/90 W
Weight (approx.) Body only 40 kg 30 kg 40 kg 30 kg
With L2-S8A 8 x 8 stage
45 kg 45 kg 45 kg 45 kg
and L2-TTA eyepiece tube

Specifications and equipment are subject to change without any notice or obligation on the part of the manufacturer. September 2022 ©2010-2022 NIKON CORPORATION
N.B. Export of the products* in this brochure is controlled under the Japanese Foreign Exchange and Foreign Trade Law. Appropriate export procedures shall be required in case of export from Japan.
*Products: Hardware and its technical information (including software)

ISO 14001 Certified

for NIKON CORPORATION

NIKON CORPORATION ISO 9001 Certified

Shinagawa Intercity Tower C, 2-15-3, Konan, Minato-ku, Tokyo 108-6290, Japan for NIKON CORPORATION
phone: +81-3-6433-3701 fax: +81-3-6433-3784 Industrial Metrology Business Unit
https://www.nikon.com/products/industrial-metrology/

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Printed in Japan (2209-0.05) Am/M Code No. 2CE-ENJH-3