Tecnai 20 G2 Pre-Installation

Tecnai G2 20
Pre-installation
4822 870 10466

Modification date: January 9, 2017
The information and materials contained herein are confidential and proprietary to FEI Company.
They are provided for your organization’s internal use on a need to know basis. They cannot be
duplicated or disseminated for any third party without the express consent of FEI Company.
Limited Rights
Contractor Name: FEI Company
Contractor Address: 5350 NE Dawson Creek Drive, Hillsboro OR 97124
The Government's rights to use, modify, reproduce, release, perform, display, or disclose these
technical data are restricted to those rights specified in DFARS 252.227-7015(b)(2), FAR 52.227-
14(g)(2)(Alternate II) and FAR 12.211. Any reproduction of technical data or portions thereof
marked with this legend must also reproduce the markings. Any person, other than the
Government, who has been provided access to such data, must promptly notify the above named
Contractor
Order code: 4822 870 10466

Revision date:January 9, 2017
FEI Confidential
FEI Limited Rights Data
© 1/9/17 FEI Company

Printed in The Netherlands
1-ii 09-Jan-2017 4822 870 10466

Pre-Installation Manual; Tecnai G2 20 4822 870 10466
Revision history
This section outlines the revisions made to this book.
The information and materials contained herein are confidential and proprietary to FEI
Company. They are provided for your organization’s internal use on a need to know basis.
They cannot be duplicated or disseminated for any third party without the express consent
of FEI Company.
Limited Rights
Contractor Name: FEI Company
Contractor Address: 5350 NE Dawson Creek Drive, Hillsboro OR 97124
The Government's rights to use, modify, reproduce, release, perform, display, or disclose
these technical data are restricted to those rights specified in DFARS 252.227-7015(b)(2),
FAR 52.227-14(g)(2)(Alternate II) and FAR 12.211. Any reproduction of technical data or
portions thereof marked with this legend must also reproduce the markings. Any person,
other than the Government, who has been provided access to such data, must promptly
notify the above named Contractor.
Revision Description of revision Date

D SDR10402: Compressed air specification updated Jan-2017
C Updated minimum room height Mar. 2008
B New Nitrogen hose dimentions Jul. 2006
A New document
FEI Confidential; FEI Limited Rights Data Mod. date: January 9, 2017 R-1
Contents
Sect. Title Page
Revision history
1 Introduction
1.1 Delegation of responsibilities.................................................................................... 1-1
2 Safety and environmental specifications

2.1 High voltage and X-ray safety regulations................................................................ 2-1
2.2 SF6 Safety provisions .............................................................................................. 2-1
2.2.1 What to do in event of a gas leakage..................................................................... 2-1
2.2.2 SF6 detection......................................................................................................... 2-1
2.3 Liquid nitrogen (LN2)................................................................................................ 2-1
2.3.1 Liquid Nitrogen specific safety precautions............................................................ 2-2
3 Site Readiness
3.1 Pre-Installation Survey ............................................................................................. 3-1
3.1.1 FEI Approved Site Survey Gear............................................................................. 3-1
3.2 Ambient Conditions of the Site ................................................................................. 3-1
3.2.1 General Requirements of TEM site........................................................................ 3-1
3.2.2 Additional Considerations ...................................................................................... 3-2
3.3 Heat dissipation........................................................................................................ 3-2
3.4 Room temperature specifications............................................................................. 3-3
3.5 Magnetic fields ......................................................................................................... 3-3
3.5.1 Magnetic field specification .................................................................................... 3-3
3.5.2 Tecnai with monochromator and HRGIF................................................................ 3-4
3.5.3 Additional information concerning the STEM specs .............................................. 3-5
3.5.3.1 For the TF20 S-TWIN with STEM, resolution 0.2 nm ............................................ 3-5
3.5.3.2 For the TF20 UT with STEM with a resolution 0.14 nm the following extra information
3-5
3.5.3.3 Stray Fields ............................................................................................................ 3-5
3.5.4 Measure EMI near the GIF .................................................................................... 3-5
3.6 Acoustics and Floor vibration guidelines .................................................................. 3-6
3.6.1 VC Curves.............................................................................................................. 3-7
3.7 Acoustic Guidelines Graphs ..................................................................................... 3-8
3.7.1 TECNAI G2 T20 TWIN TEM INFO LIMIT 0.18 ...................................................... 3-8
3.7.2 TECNAI G2 T20 TWIN, STEM, RES 0.34 ............................................................. 3-8
3.7.3 TECNAI G2 T20 XT TEM LINE 0.144.................................................................... 3-9
3.7.4 TECNAI G2 T20-T30 TWIN, ST-UT (SPHERA) TEM LINE RES 0.144................. 3-9
3.7.5 TECNAI G2 TF20 XT STEM RES 0.18................................................................ 3-10
3.7.6 TECNAI G2 TF20 XT TEM INFO 0.14................................................................. 3-10
3.7.7 TECNAI G2 TF20-TF30 ST TEM INFO 0.14 ........................................................3-11
3.7.8 Tecnai G2 TF20-TF30 UT, TEM info 0.12 .............................................................3-11
3.7.9 Tecnai G2 TF20-TF30 UT; STEM res 0.14 .......................................................... 3-12
3.8 Room Cleanliness .................................................................................................. 3-12
3.9 High voltage and X-ray safety regulations.............................................................. 3-14
3.10 SF6 provisions........................................................................................................ 3-14
FEI Confidential; FEI Limited Rights Data Mod. date: January 9, 2017 (i)/(iii)
4822 870 10466 Pre-Installation Manual; Tecnai G2 20
Contents (cont’d)
Sect. Title Page
3.10.1 Provision to pump large amounts of SF6............................................................. 3-14
3.10.2 Provision to pump small amounts of SF6 ............................................................ 3-14
4 Services required
4.1 Electrical supply ....................................................................................................... 4-1
4.1.1 Connections ........................................................................................................... 4-1
4.1.2 Earthing.................................................................................................................. 4-2
4.1.3 Cable duct.............................................................................................................. 4-3
4.1.4 Room lighting ......................................................................................................... 4-3
4.1.5 Telephone line........................................................................................................ 4-4
4.2 RAPID Pre-Installation ............................................................................................. 4-4
4.3 Film materials ........................................................................................................... 4-7
4.4 Cooling water supply ................................................................................................ 4-7
4.4.1 Cooling water specifications .................................................................................. 4-9
4.4.2 Water filter assembly ........................................................................................... 4-10
4.4.3 Closed loop cooling units ..................................................................................... 4-10
4.4.4 Closed-loop (re-circulation) system ..................................................................... 4-12
4.4.5 Subsidiary Objective lens & Lorentz lens cooling unit ZEM 300SW and Haskris R050
4-13
4.5 Compressed air supply for pneumatics .................................................................. 4-15
4.6 Nitrogen, N2 ........................................................................................................... 4-16
4.6.1 Venting ................................................................................................................. 4-16
4.6.2 Liquid nitrogen (LN2, EDAX detectors or cold trap)............................................. 4-16
4.7 SF6 gas .................................................................................................................. 4-16
4.8 Pre-vacuum pump outlet (only when SF6 is used)................................................. 4-17
4.9 Gatan Image Filter installation coordination ........................................................... 4-17
4.9.1 Communication with supplier to arrange installation support............................... 4-18
4.9.2 Accepting filter ..................................................................................................... 4-18
5 Dimensions and weights

5.1 Dimensions and weights of the microscope ............................................................. 5-1
6 Space and floor loading requirements

6.1 Special requirements................................................................................................ 6-2
7 Installation materials and tools

7.1 Installation materials................................................................................................. 7-1
7.2 Installation tools........................................................................................................ 7-1
8 Pre-installation check-list
9 Illustrations
10 Abbreviations
FEI Confidential; FEI Limited Rights Data Mod. date: January 9, 2017 (ii)/(iii)
Contents (cont’d)
Sect. Title Page
11 Conversion tables
12 Material safety data sheets (MSDS)

12.1 Introduction............................................................................................................. 12-1
12.2 Greases.................................................................................................................. 12-1
12.3 Oils ......................................................................................................................... 12-1
12.4 Gases ..................................................................................................................... 12-1
12.5 Cleaning Chemicals ............................................................................................... 12-1
12.6 Fluorescent Powder ............................................................................................... 12-1
13 Working with SF6 gas

13.1 SF6 gas properties ................................................................................................. 13-1
13.2 SF6 gas guidelines................................................................................................. 13-1
13.3 What to do in event of a gas leakage ..................................................................... 13-1
13.4 What to do if SF6 decomposes (fluorine is given off)............................................. 13-1
13.5 Area ventilation measurements.............................................................................. 13-1
13.6 SF6 detection ......................................................................................................... 13-2
Performance Waiver due to Failure

of Pre-Installation Site Requirements
FEI Confidential; FEI Limited Rights Data Mod. date: January 9, 2017 (iii)/(iii)
List of Illustrations
Fig. Title Page
3-1 Cross Section of TEM Room - Air Circulation.............................................................. 3-1
3-2 Preferred scheme for room air circulation.................................................................... 3-2
3-1 Acoustics - TECNAI G2 T20 TWIN TEM ..................................................................... 3-8
3-2 Acoustic - TECNAI G2 T20 TWIN, STEM, RES 0.34 .................................................. 3-8
3-3 Acoustics - TECNAI G2 T20 XT TEM LINE 0.144....................................................... 3-9
3-4 Acoustics - TECNAI G2 T20-T30 TWIN, ST-UT (SPHERA) TEM LINE RES 0.144.... 3-9
3-5 Acoustics - TECNAI G2 TF20 XT STEM RES 0.18................................................... 3-10
3-6 Acoustics TECNAI G2 TF20 XT TEM INFO 0.14 ...................................................... 3-10
3-7 Acoustics TECNAI G2 TF20-TF30 ST TEM INFO 0.14............................................. 3-11
3-8 Acoustics Tecnai G2 TF20-TF30 UT, TEM info 0.12................................................. 3-11
3-9 Acoustics Tecnai G2 TF20-TF30 UT; STEM res 0.14 ............................................... 3-12
4-1 Protective conduit ........................................................................................................ 4-2
4-2 No protective conduit ................................................................................................... 4-2
4-3 Cable duct.................................................................................................................... 4-3
4-4 Room light switching.................................................................................................... 4-4
4-1 Location sketch of the S versions .............................................................................. 4-11
4-2 Dimensioned sketch of SW versions ......................................................................... 4-12
4-3 Compressor connection............................................................................................. 4-15
4-4 Nitrogen connection................................................................................................... 4-16
6-1 Lifting system............................................................................................................... 6-2
6-2 Positions that a hoist must be able to reach ................................................................ 6-3
6-1 Overhead Crane for Tecnai ......................................................................................... 6-3
6-2 Hinged lifting tackle for Tecnai..................................................................................... 6-4
6-3 Hoist with fixed beam for Tecnai.................................................................................. 6-4
6-4 Spider chain for lifting HT tank..................................................................................... 6-5
6-5 Hydrobull 2000............................................................................................................. 6-6
9-1 Tecnai 20 LaB6; room layout....................................................................................... 9-1
9-2 Tecnai 20 LaB6; room layout incl. accessories ........................................................... 9-2
9-3 Tecnai F20; room layout with min. dimensions............................................................ 9-3
9-4 Tecnai F20; room layout incl. accessories................................................................... 9-4
9-5 Tecnai 20 UT; room layout with min. dimensions ........................................................ 9-5
9-6 Tecnai 20 UT; room layout incl. accessories ............................................................... 9-6
9-7 Tecnai F20 UT; room layout with min. dimensions...................................................... 9-7
9-8 Tecnai F20 UT; room layout incl. accessories............................................................. 9-8
9-9 Tecnai 20; Microscope dimensions ............................................................................. 9-9
9-1 Tecnai 20 Monochromator; room layout including accessories and cable duct ........ 9-10
9-10 Tecnai Feet lay-out .................................................................................................... 9-11
9-11 Tecnai 20 standard, UT and FEG; min. height .......................................................... 9-12
9-12 Tecnai 20 Monochromator side view ceiling height requirements ............................. 9-13
9-13 Tecnai 20 LaB6 and Feg; Min height for lifting hoists................................................ 9-14
9-14 Tecnai 20 Monochromator; front view height requirement ........................................ 9-15
9-15 Example of room layout including light and air-conditioning...................................... 9-16
9-16 Cross Section of TEM Room - Air Circulation............................................................ 9-17
9-17 Example of air-conditioning inlets and outlets ........................................................... 9-17
9-18 Electrical connections ................................................................................................ 9-18
9-19 Water connections ..................................................................................................... 9-19
FEI Confidential; FEI Limited Rights Data Mod. date: January 9, 2017 (i)/(i)
2
Pre-Installation Manual; Tecnai G 20 4822 870 10466
1 Introduction
This manual gives physical details of the room, services to be present and ambient conditions
required to accommodate the Tecnai electron microscope family and to allow them to produce
the high performance they are designed to give.
It must be emphasized that the time and expense devoted to a proper survey for siting the
microscope is amply rewarded by the consequent trouble-free, consistent operation, and the
resulting reduction in down-time.
1.1 Delegation of responsibilities

The customer is responsible for the pre-installation. Pre-installation means all the work to be
done to prepare the room and make it suitable for installation and operation of the microscope
system*. In addition, preparation of the route within the customers premises for the transportation
of the crated microscope is the responsibility of the customer. The requirements are laid down in
this handbook. The Sales and Service Division (SSD) is responsible for the pre-installation site
survey. CS EOPD Eindhoven can advise on general suitable locations.
The pre-installation site survey must be a part of the negotiations before finalization of the order.
NOTE *The microscope does not include water, air or nitrogen hoses, or electrical mains supply
cable; these must be supplied by the customer or SSD.
A check list of the principal conditions is provided in 8 “Pre-installation check-list”.
This list should be completed during the site survey.
Measurements are given in metric units. Useful conversion are can be found in 11 “Conversion
tables”.
FEI Confidential; FEI Limited Rights Data Mod. date: January 9, 2017 1-1
2
2 Safety and environmental specifications

The Titan Cubed series of electron microscopes conform to the following standards and
normative documents:
73/023/EEC Low Voltage Directive
89/336/EEC Electromagnetic Compatibility Directive
96/29/EURATOM Ionizing Radiation Directive
97/23/EEC Pressure Equipment Directive
using the following standards and normative documents:
EN61326-1 Electrical equipment for measurement, control and laboratory
use - EMC requirements (industrial level)
EN61010-1 Safety measurements for electrical equipment for
measurement, control and laboratory use.
RToD Rules for Pressure Vessels (Dutch)
ASME VIII Div 1 Boiler Pressure Vessel Code
As the leakage current from mains to earth exceeds 3.5mA, according to IEC 1010-1 standards a
double permanently connected and separate safety earth must be fitted to the earth rail of the
power cabinet.
2.1 High voltage and X-ray safety regulations

Because of the use of a max. accelerating voltage of 300kV, local safety regulations concerning
equipment employing such voltages must be checked and observed at installation. Additionally,
local X-ray safety requirements must be fulfilled. The maximum radiation leaving the microscope
is under all circumstances < 1 S/hr at 10cm distance from any surface. In order to test this
specification a suitable X-ray meter must be present during installation (e.g. the Victoreen 190 +
190RP1).
2.2 SF6 Safety provisions

For a complete overview on SF6 topics see also 13 “Working with SF6 gas”
This section lists all the requirements that influence the safety aspects
• The gas causes suffocation at high concentration levels.
• The gas breaks down when overheated giving off highly toxic fluorine gas.
• The ventilation system with sufficient capacity must be switched to extract AT ALL TIMES.
• Smoking in SF6 sensitive areas is FORBIDDEN.
• The SF6 detector4 must ALWAYS be in operation.
• Gas masks (with filters of active charcoal and incorporated dust filter) and rubber gloves (2
pairs) MUST BE PRESENT.
2.2.1 What to do in event of a gas leakage
1. Switch off all the heat sources.
2. Ventilate the area by opening all windows BUT NOT THE DOOR.
3. Trace and stop the leakage.
2.2.2 SF6 detection
• For complete safety, an SF6 detector* should be present and operating CONTINUOUSLY.
• The detector must be a suitably calibrated instrument using the thermal conductivity or infra-
red process principle.
2.3 Liquid nitrogen (LN2)

Mounted in the objective stage of the microscope is the EDAX detecting unit or the cold trap. The
EDAX unit has a 10 liter dewar vessel, containing liquid nitrogen. Only authorized personnel
should carry out replenishment and the MSDS for liquid Nitrogen (refer to MSDS overview)
2
should be read and understood. The use of liquid Nitrogen, particular in combination with a liquid
Nitrogen auto-fill system, can give a risk of asphyxiation when opening the Titan Krios enclosure
or entering the Tecnai Osiris room. At certain locations in the Nitrogen system the pressure can
be 10 bar. Be careful when handling pressurized gas of any kind.The liquid Nitrogen cooling
system contains two vent hoses that carry the N2 vapor generated outside the enclosure. FEI
recommends these hoses to be connected to the house exhaust or to another mechanical
ventilation system, to remove any N2 vapor generated outside of the enclosure and out of the
room.
In addition, FEI provides a Dewar vent to remove N2 vapors from an overfill condition. If this
output vents the excess Nitrogen directly into the room, FEI advises to install a separate oxygen
detector in the room. The specifications are identical to the sensor inside the box.
Most cryogenic liquids are odorless, colorless, and tasteless when vaporized. When cryogenic
liquids are exposed to the atmosphere the cold boil-off gases condense the moisture in the air,
creating a highly visible fog.
2.3.1 Liquid Nitrogen specific safety precautions

• Wear safety goggles or a full faced mask and cryogenic gloves when handling Liquid
Nitrogen. Special clothing may be advisable. It is preferable to wear trousers outside of boots
or work shoes.
Cryogenic gloves are for indirect or splash protection only, they are not designed to protect
against immersion into cryogenic liquids!
• Always handle these liquids carefully to avoid skin burns and frostbite. Dewar’s must be
moved carefully. Sloshing liquid into warmer regions of the container can cause sharp
pressure rises.
Carry the vessel with both hands and as far away from your face as comfortably possible.
• Use a cryogenic glove and/or tongs to handle any object going into or out of the Liquid
Nirogen.
• Dewar flasks are under vacuum to provide insulation and can collapse from thermal shock or
slight mechanical shock.
• Before usage, the inside of the Dewar flask should be inspected for etched surfaces, cracks
or pinholes which could cause an explosion. When damage is observed the flask should
be replaced.
If there is a small leak in the flask e.g. developed when it is frozen and some liquid “enters”
the flask vacuum compartment it will expand when the flask is warmed up, (expansion ratio is
696:1) and cause an explosion.
• If cryogenic liquid or cold boil off contacts a worker's skin or eyes, frozen tissues should be
flooded or soaked with tepid water (105-115F, 41-46C). DO NOT USE HOT WATER.
Cryogenic burns which result in blistering or deeper tissue freezing should be seen promptly
by a physician.
2
3 Site Readiness
3.1 Pre-Installation Survey
A pre-installation site survey should be performed prior to tool placement to determine if the
ambient acoustics, floor vibration and EMI meet FEI specifications.
Refer to Site Survey CD, 1003220, for details on how to perform the site survey. The survey
should always be performed by an FEI FSE who has been trained for this task.
For a complete survey, refer to the checklist in 8 “Pre-installation check-list”. Additional site
surveys are required when any changes are made to the site. as changes may affect the
environment and system.
3.1.1 FEI Approved Site Survey Gear
1. Site surveys must be performed using only one of the two kits:
– Dactron - 4035 273 20971; or
– ACE II or Quattro - 4035 272 93601
2. Tecnai G2 20 is a system in SE Tool. Use SE Tool for Pass/Fail analysis.
NOTE The ACE I kit, 4035 272 28761, is obsolete and no longer supported.
3.2 Ambient Conditions of the Site

The ambient specifications that must be met are covered in this chapter. If in doubt about the use
of the proposed site contact your local FEI representative.
For site survey guidelines and specifications, See Section 3.7 “Acoustic Guidelines Graphs”
3.2.1 General Requirements of TEM site
• Avoid rooms subject to heavy vibrations and/or high acoustic noise levels. (Examples include
locations near or adjacent to elevators, trains, shipping vehicles, busy roads)
• Avoid rooms subject to high levels of stray magnetic fields. (Examples include locations near
or adjacent to large motors and transformers, electric railways and tramways)
• The TEM must be at least 3 meters (10 ft.) distance from any other electron microscopes or
FIB systems.
• The microscope column (Compustage) should not be located directly in the line of air flow.
NOTE For the UltraTwin, the design of the air-conditioning system must be such that the air flow
required to cool the microscope area is minimal. This can best be achieved by splitting
the air-conditioning system into two parts: one to cool the microscope area, and one to
cool the service area.
Figure 3-1 shows an example of TEM room air conditioning and circulation.
Ceiling
The holes in the ceiling

must not allow an air
Ante- velocity over 5 m.min. Service
chamber Room
Microscope Room
curtain curtain
Heat Source
Fig. 3-1: Cross Section of TEM Room - Air Circulation
2
Figure 3-2 shows an example of air conditioning and handling inlets and outlets.
Fig. 3-2: Preferred scheme for room air circulation

• Avoid the use of a common electrical ground to other equipment.
3.2.2 Additional Considerations
• If ambient conditions are liable to vary from those detailed in this chapter, a dust free, air-
conditioned room is strongly recommended for the installation.
• Every effort must be made to entirely eliminate natural lighting.
• If a main closed-circuit cooling unit is to be used in conjunction with the microscope, (See
4.4.3 “Closed loop cooling units”.), there must be provision for it to be located at least 3
meters (10 feet) from the microscope (preferably in a ventilated adjoining room).
• Heat dissipated into the air and into cooling water.
• Good ventilation.
• A low dust-class atmosphere and washable wall covering is beneficial. For a FEG a dust-
class of ISO Class 8 (see Table 3-1 for an explanation) is necessary.
• A floor covering, (no carpet), that is easily cleaned, resistant to oil and chemicals, non-
flammable and antistatic.
3.3 Heat dissipation

The nominal heat dissipation of the instrument depends on the setting and operating mode. The
numbers in Table 3-1 are estimated maximum values for heat dissipation of the different parts
intended for the design of the air- conditioning and cooling water supply
Heat dissipated Heat dissipated Heat dissipated
Dissipation
into air of into air of into cooling water
in Watts
microscope room service room
Column (TWIN and S- 500 2400
TWIN), incl diff pump &
elec console
Column (U-TWIN), incl 500 1800
diff pump Tot.=1800+1200
Power cabinet 1200
HT tank 200
2
Heat dissipated Heat dissipated Heat dissipated

Dissipation
into air of into air of into cooling water
in Watts
microscope room service room
HT tank 300kV Mono- 300
chromator
ZEM 300 (U-TWIN) 500 1200
Accessories (con- 2300 (T&ST)
nected to power cabi- 1700 (UT)
net)
It is strongly recommended that all microscope rooms have a curtain to separate the microscope
from the area typically referred to as the “service part”.
The value for heat transferred into the environment is given “per room” in order to optimally
calculate the air-conditioning system capacity.
The power supply units are equipped with ventilators, but do not have pipes to conduct the heat
outside the room.
NOTE The STEM unit will dissipate about 800 watts into ambient air, divided over microscope
and service room.
The dissipation of the outlets can contribute both to the microscope or service room, depending
on the position of the accessories. Because the ZEM300SW in case of a U-Twin is connected to
the outlets the dissipation is subtracted from the total value (2300W) of the outlets.
NOTE The primary cooling water of the ZEM300SW is connected and thus cooled by the outlet
of the ZEM1000.
3.4 Room temperature specifications

Recommended ambient temperature (for operator) 20OC
Maximum ambient temperature range for operation within 18OC to 23OC
specification. (This range does not mean that the temp in the room
can fluctuate between 18 to 23OC. This only indicates that the temp
in the room can be between 18 to 23OC but 20OC is recommended
as above). The allowable temp change specifications are given
below.
Maximum ambient temperature range without damage to the 5OC to 40OC
microscope
Relative humidity at 20OC <80%, dewpoint below 18OC
Around the Compustage:
Air flow, at the column away from the column <5m/min.
1 degC/24 hr.
Allowable temp changes 0.5 degC/hr.
0.1 degC/min.
Table 3-1 Temperature specifications
3.5 Magnetic fields

3.5.1 Magnetic field specification
It is important when placing the microscope to avoid locations subject to strong magnetic fields.
The microscope is most affected by stray fields in the horizontal plane. The magnetic field
specifications are shown in Table 3-2.
2
The maximum tolerable interfering stray field at which the guaranteed resolving power can be
achieved is:
Type Horizontal Vertical

Tecnai 20 TWIN and Super TWIN and X-TWIN 350 nT p-p 650 nTp-p
Tecnai 20 Ultra TWIN 220 nT p-p 410 nT p-p
Tecnai 20 FEG, TEM 125 nT p-p 125 nT p-p
Tecnai 20 FEG, FS-1 spectrometer 80 nT p-p 100 nT p-p
Tecnai 20 FEG, STEM TWIN,STWIN, X-TWIN 80 nT p-p 100 nT p-p
Tecnai 20 FEG STEM Ultra TWIN 50 nT p-p 75 nT p-p
Tecnai 20 FEG Monochromator 0.25 eV 50 nT p-p* 75 nT p-p
Tecnai 20 FEG Monochromator 0.15 eV 30 nT p-p* 50 nT p-p
Table 3-2 Magnetic field specification
*See LR specification in Table 3-3.
These specifications include slow varying magnetic fields and/or Near DC Fields (caused by
elevators, trams and trains). This specification must be met for the total room in which the
microscope is to be located, but is especially critical at the following locations:
• Position and height of the GIF (if present)
• Height of the gun
• Height of the goniometer
NOTE 100nT compares to 1 mG (Gauss)
3.5.2 Tecnai with monochromator and HRGIF

EMI specifications provided in Table 3-2 do not cover the entire specification range for
monochromated systems with an HRGIF. The HRGIF compensates for 50/60Hz Mains
frequencies but is unable to compensate for higher harmonics such as 100/120Hz. The ability of
the HRGIF to obtain high resolution is limited by the presence of the higher harmonics (and all
frequencies other than the mains frequency) resulting in the determination of additional
specifications for the direction perpendicular (Left - Right) to the GIF/Tridiem/Quantum/Enfinium
direction in the horizontal plane.
An additional procedure for measuring EMI fields near the GIF on HRGIF systems must be
performed; 3.5.4 “Measure EMI near the GIF”
GIF Type Front-Back Front-Back Left-Right Left-Right Vertical

MAINS Higher harmonics and MAINS Higher harmonics and (Z)
other frequencies other frequencies
GIF, Tridiem 863, Quantum 963, 80nT p-p 80nT p-p 80nT p-p 30nT p-p 100nT p-p
FS-1, Enfinium 976
HRGIF, Tridiem 865, Quantum 965, 50nT p-p 50nT p-p 50nT p-p 20nT p-p 75nT p-p
Enfinium 977
HRGIF, Tridiem 866, Quantum 966 30nT p-p 30nT p-p 30nT p-p 10nT p-p 50nT p-p
Table 3-3 Magnetic field specifications for available HRGIF configurations
2
3.5.3 Additional information concerning the STEM specs

3.5.3.1 For the TF20 S-TWIN with STEM, resolution 0.2 nm
• Maximum allowable field 80nT p-p: HRSTEM image will achieve the required resolution, but
with a noticeable distortion.
• Maximum allowable field 50nT p-p: HRSTEM image will achieve 0.2 nm resolution, but with a
minor distortion.
• Maximum allowable field 30nT p-p. HRSTEM image will achieve best possible 0.2 nm
resolution.
3.5.3.2 For the TF20 UT with STEM with a resolution 0.14 nm the following extra
information
• Maximum allowable field 80 nT p-p: HRSTEM image will achieve the required resolution, but
with a noticeable distortion.
• Maximum allowable field 50 nT p-p: HRSTEM image will achieve 0.14 nm resolution, but with
a minor distortion.
• Maximum allowable field 30 nT p-p. HRSTEM image will achieve best possible 0.14 nm
resolution.
3.5.3.3 Stray Fields
• Values provided are valid for a single frequency stray field; example (50Hz/60Hz). If stray
fields consist of a number of additional significant frequencies, their individual contributions
should be added linearly and the resultant sum may not exceed the given values.
• MAINS Matching Transformer: MAINS Matching Transformer: To minimize stray fields,
the MAINS matching transformer, and UPS if applicable, should be located as far away as
feasible from the system’s main column console. These devices generate high fields and as
a general thumb-rule should be located 33 meters (10 feet) from the system, preferably in
another room.
• Lorentz lens: Zephyr Units ZEM 300SW (other coolers available, contact the local SSD)
– Cooling units (fore example the ZEM 300SW) must be located in the service area,
adjacent to the power supply unit.
– If diffractograms must be recorded, the following factors must be taken into account:
• Location of the power cabinet is critical. To achieve optimum microscope
performance the power cabinet must be located as far away as feasibly possible.
• Location of the HT Tank with respect to the power supply unit is critical and must be
located as far away as feasibly possible.
• Location of the HT Tank with respect to the microscope is critical and must be
located as far away as feasibly possible.
For the UltraTWIN, the subsidiary Zephyr units ZEM 300SW must be located in the
service area and can best be placed next to the power supply unit.
3.5.4 Measure EMI near the GIF
These EMI specifications must be met at the GIF location.
NOTE Chapter 7 of the Site Survey CD, 1003220, describes the process for using the MEDA
EMI meter
1. Measure Front to Back, Left to Right, and Vertical axes at the GIF entrance position as
shown in Figure 3-3, which represents the floor layout of the microscope.
2. Repeat these measurements at Compustage height 1.5 meters (4.92 feet) and at the Gun
height 2.5 meters (8.2 feet).
2
Fig. 3-3: GIF entrance position
3.6 Acoustics and Floor vibration guidelines

As research and production focusses on smaller dimensions, disturbances due to vibrations and
acoustics play a significant role. Vibration levels can be limited by proper building design in
combination with vibration isolated platforms. The growing need for vibration control manifested
in the early 1980s in the vibration criterion (VC) curves, by Ungar and Gordon. These curves
define floor vibrations to meet the requirements of generic groups of equipment.
VC levels are defined as rms speed values, integrated over one third octave bands.
In 2005, the low frequency limit was lowered from 4 to 1 Hz and the VC-F and -G curves were
added. The latter two were used to accommodate the need for scientists and engineers to
characterize extremely vibrational quiet places.
The VC-curves are to be used as guidelines only, the final room behavior with regard to
vibrations will be determined during a site survey upon completion of the EM-room, performed by
trained FEI personnel using FEI’s Site Evaluation Tool.
Note Refer to SE Tool User Manual (4035 273 48061) when required. When a site fails and TSS input
is required, follow the process detailed in IMS 12.8. A link to IMS 12.8 is located on
FEI Scope-Site Survey Central
2
3.6.1 VC Curves
Figure 4: VC Curves
For Tecnai G2 20, guidelines provided by the VC-curves can be interpreted as described below.
In each table there are listed applicable VC-curves for certain direction and system.
System Vertical Left to right Front to back

Tecnai G2 TF20 Twin; TEM info limit 0.18nm E F F
Tecnai G2 T20 Twin; STEM res. 0.344nm E F F
Tecnai G2 T20-T30 Twin (Sphera) ST-UT; TEM E F F
line res. 0.144nm
Tecnai G2 T20 XT; TEM line res. 0.144nm E F F
Tecnai G2 TF20 ST; TEM info limit 0.14nm E F F
Tecnai G2 TF20 ST; STEM res. 0.204nm E F F
Tecnai G2 TF20 XT; TEM info limit 0.14nm E F F
Tecnai G2 TF20 XT; STEM res. 0.18nm E F F
Tecnai G2 TF20 UT; TEM info limit 0.12nm F G G
Tecnai G2 TF20 UT; STEM res. 0.144nm F G G
Table 1: VC-curves
2
3.7 Acoustic Guidelines Graphs

3.7.1 TECNAI G2 T20 TWIN TEM INFO LIMIT 0.18
Fig. 3-1: Acoustics - TECNAI G2 T20 TWIN TEM

3.7.2 TECNAI G2 T20 TWIN, STEM, RES 0.34
Fig. 3-2: Acoustic - TECNAI G2 T20 TWIN, STEM, RES 0.34
2
3.7.3 TECNAI G2 T20 XT TEM LINE 0.144
Fig. 3-3: Acoustics - TECNAI G2 T20 XT TEM LINE 0.144

3.7.4 TECNAI G2 T20-T30 TWIN, ST-UT (SPHERA) TEM LINE RES 0.144
Fig. 3-4: Acoustics - TECNAI G2 T20-T30 TWIN, ST-UT (SPHERA) TEM LINE RES 0.144
2
3.7.5 TECNAI G2 TF20 XT STEM RES 0.18
Fig. 3-5: Acoustics - TECNAI G2 TF20 XT STEM RES 0.18

3.7.6 TECNAI G2 TF20 XT TEM INFO 0.14
Fig. 3-6: Acoustics TECNAI G2 TF20 XT TEM INFO 0.14
2
3.7.7 TECNAI G2 TF20-TF30 ST TEM INFO 0.14
Fig. 3-7: Acoustics TECNAI G2 TF20-TF30 ST TEM INFO 0.14

3.7.8 Tecnai G2 TF20-TF30 UT, TEM info 0.12
Fig. 3-8: Acoustics Tecnai G2 TF20-TF30 UT, TEM info 0.12
2
3.7.9 Tecnai G2 TF20-TF30 UT; STEM res 0.14
Fig. 3-9: Acoustics Tecnai G2 TF20-TF30 UT; STEM res 0.14
3.8 Room Cleanliness

The proposed site must be clean of dust. The advised dust class is ISO 8.
The performance of a XFEG instrument, and other similar versions, is highly sensitive to the
concentration of dust particles in the emission chamber and filament region. A high dust
concentration in the emission chamber results in an unstable high tension and risks significant
damage the tip.
Dust class ISO 8 means that in the microscope room a certain maximum number of particles/
cubic foot is allowed. (Table 3-1)
Class maximum particles/m³ FED STD 209E

 0.1 µm  0.2 µm  0.3 µm  0.5 µm  1 µm  5 µm equivalent
ISO 1 10 2
ISO 2 100 24 10 4
ISO 3 1,000 237 102 35 8 Class 1
ISO 4 10,000 2,370 1,020 352 83 Class 10
ISO 5 100,000 23,700 10.200 3,520 830 29 Class 100
ISO 6 1,000,000 237,000 102,000 35,200 8,300 293 Class 1.000
ISO 7 352,000 83,000 2,930 Class 10.000
ISO 8 3,520,000 830,000 29,300 Class 100.000
ISO 9 35,200,000 8,300,000 293,000 Room air
Table 3-1 ISO 14644-1 cleanroom standards
2
Determining whether a room meets ISO 8 classification is possible but difficult and expensive.
For this reason, if an evaluation of the site’s cleanroom level is not feasible, ensure the room
fulfils the following requirements:
• A directed air flow with use of filters.
• Regular floor washing - (approximately three times per week).
• The ceiling must be hard, but not brittle.
• Painted walls (washable).
• If the room door(s) open into a very dusty room, an “air-lock” or comparable should be
installed
• Carpet installed in the room to reduce acoustics can reduce the cleanliness of the room. A
carpet with a short pile, that is easily cleaned, must be selected. A vacuum cleaner (with
micro filter) must be present in the room. The vacuum cleaner should be used only for the
microscope and not to clean the room. It is always best to “Avoid dust”.
2
3.9 High voltage and X-ray safety regulations

Because of the use of a max. accelerating voltage of 200kV, local safety regulations concerning
equipment employing such voltages must be checked and observed at installation.
Additionally, local X-ray safety requirements must be fulfilled. The maximum radiation leaving the
microscope is under all circumstances < 1 S/hr at 10 cm distance from any surface.
In order to test this specification a suitable X-ray meter must be present during installation (e.g.
the Victoreen 190 + 190RP1).
3.10 SF6 provisions

3.10.1 Provision to pump large amounts of SF6
SF6 gas is heavier than air, therefore it will sink and stay at floor level. There should therefore be
an extraction ventilator channel opening as low as possible above the floor but always < 5 cm.
This ventilation channel should open directly into the outside air and must UNDER NO
CIRCUMSTANCES BE CONNECTED TO THE CENTRAL VENTILATION SYSTEM OF THE
BUILDING. See also 13 “Working with SF6 gas”
3.10.2 Provision to pump small amounts of SF6
As the Pre-vacuum pump of the microscope is used to pump away a certain amount of SF6 gas
from time to time, the outlet of the P.V. pump must always be connected to the atmosphere
outside the building.
Pump hose pillar outside demension:15mm
Hose: 15mm (Internal diameter). See also 4.8 “Pre-vacuum pump outlet (only when SF6 is
used)”
2
4 Services required
4.1 Electrical supply
4.1.1 Connections
The microscope can be connected directly to the local mains supply single or two-phase system
or via a separate mains matching and isolating transformer. However, first contact your local
mains supplier for installation recommendations such as max. permissible load and fusing.
If the microscope is connected to any other mains supply than
230V +6% -10%, an accessory mains matching transformer FP6345/51 is necessary (8 kVA).
For connections see Figure 9-18.
NOTE The mains matching transformer must be installed at least 3 metres distant from the
microscope column to minimize stray fields. For the same reason the power supply unit
must also be installed at a distance of at least 3 metres from the microscope column.
If the S2-93 standard is to be met, an isolating mains matching transformer must
be used. The microscope should be connected to phase and ground via a special
plug. In front of the plug there should be a breaker switch of 10,000 AIC. This
connection must be hard wired to the building installation.
Mains supply required 230V, 50/60 Hz,

single-or two-phase
Power consumed by microscope, LaB6 & FEG Nom. 4.2 to 4.8kVA
including accessories and loaded Max.. 6,9 kVA U-Twin (including outlets, fully STEM sys-
tem)
Power consumption of main ESvision 500 VA, PEELS 500 VA
accessories Connect to socket on side of power supply unit. It is
strongly recommended to supply these units via an isola-
tion transformer, PW6349.
Power factor 0.85
UPS • UPS power input must be fused as mentioned in the
install manual of the UPS or according local require-
ments.
• UPS power output must be fused as mentioned in the
pre-install at External fusing requirements, or according
local requirements. If the maximum output of the UPS
is lower than the fuse rate mentioned at External fusing
of the pre install, no extra fuse at the output is needed.
Line voltage fluctuations +/-10%, (slow variations or short duration transients)
Frequency stability +3%, -3%
External fusing 40 A slow-blow at 230 V
Outlets fusing 10 A at 230 V
Connections 3-wire (10 mm2 conductors), 2 phases and earth
Outlets loading max. 2.3 kVA per four outlets 2 phases and earth.
Earthing A fixed, permanently installed earth conductor is required
(min. 10 mm2)
Table 4-1 Electrical supply specification
2
Earth resistance With 40Amp slow blown fuses installed European safety
(Check the local requirements) regulations require a maximum allowed resistance of the
earthing system of less than 0.56 Ohm.
If this low earth resistance cannot be achieved a RCD

(Residual Current Device) must be installed.
Earth loops Earth loops must be avoided:

- do not allow the console to touch external metal pipes or
conduit.
- Water connections must be terminated with at least 15
cm of rubber hose, fitted after the main shut-off valve.
Table 4-1 Electrical supply specification (Continued)
4.1.2 Earthing
As the leakage current allowed is > 3.5 mA, the microscope must be connected with a permanent
protective earth. Therefore before any other connection is made, the instrument shall be
connected permanently to this protective earth conductor in one of the following ways.
Procedure 1: with protective conduit
A three-wire cable (ph-ph-earth), or three separate cables can be used provided that they are fed
to the microscope via a fully protective and earthed metal conduit or ducting.
metal cover
or
EM6026A
Fig. 4-1: Protective conduit
Procedure 2: without protective conduit
In this case a two-wire (ph-ph) or three-wire cable (ph-ph-earth), both with a separate safety
earth must be used.
This separate safety earth must be permanent and fully protected against mechanical damage.
cable metal protection pipe
EM4598A
Fig. 4-2: No protective conduit
The mains plug shall preferable be inserted into a socket outlet that is provided with a protective
earth contact. However, the separate safety earth must remain permanently connected.
The safety provisions shall not be negated by the use of an extension cord without protective
conductor.
WARNING! Any interruption of the protective conductor inside or outside the instrument, or
disconnection of the protective earth terminal, is likely to make the to instrument
dangerous. The local safety earth connection should meet local safety
requirements. Have this checked during pre-installation survey.
2
4.1.3 Cable duct

The connection cable between microscope desk and power supply cabinet must be routed via a
metal cable duct, which must be connected to earth. This may be a duct either on or in the floor.
See Figure 4-3
CABLE DUCT
120 LINOLEUM
STEEL PLATE
70
80
115
CONCRETE
FLOOR
120
LINOLEUM
STEEL PLATE
L - SHAPE BAR
EM4302
Fig. 4-3: Cable duct

4.1.4 Room lighting
The room housing the microscope should be well lit to assist microscope maintenance. When the
lights are switched off it should be possible to put the room in total darkness by excluding natural
light.
A dim light is required for microscope operation. The level of light provided by the dim light
should be continuously adjustable by a thyristor unit or variable transformer. First check the
magnetic field radiation of the unit to be used (see 3.5.1 “Magnetic field specification”).
The microscope has a variable panel light that can be used by the operator, this light however is
not suitable to provide an overall dimmed light.
A separate power supply is required for the dim light in accordance with International Safety
Requirements.
A foot switch and impulse relay (not supplied as standard with the microscope) should be wired
in parallel with the dimmer see Figure 4-4.
An alternative to the foot switch for dim light control is a pull switch mounted in the ceiling.
2
DIFFERENT SUPPLY
THAN MICROSCOPE 230V ROOM-
LIGHT
RED TUBE
LIGHT LIGHTS
DIMMER
IMPULSE WALL
RELAY SWITCH
WALL FOOT
SWITCH SWITCH
EM4298B
Fig. 4-4: Room light switching
4.1.5 Telephone line
It is recommended to have a telephone line installed in the microscope room.
Specifications of the line: Direct international dialing.
4.2 RAPID Pre-Installation

It is required to discuss RAPID with customer during the pre‐installation phase. Customer’s decision
should be before the installation of the tool starts for effortless further cooperation.
FEI’s Remote Access Program for Interactive Diagnostics (RAPID) is a program to deliver remote support through
a secure desktop‐sharing session. Time‐to‐solution is greatly reduced with remote diagnosis and repair as there
is no need to wait for an engineer to arrive on site.
RAPID uses a secure VPN connection through a secure server, and every RAPID session requires simultaneous
consent of both the system owner and FEI. An extensive explanation of the features of RAPID is available from
your account manager or your field service manager.
RAPID is a progressive service program designed to enhance responsiveness and reduce system downtime. By
enrolling your FEI system in the RAPID program, you can benefit by allowing FEI’s global network of service
specialists to:
• Solve problems remotely, often without requiring a service visit
• Remotely diagnose system issues and order parts prior to an on‐site service visit
• Engage factory experts for instant 2nd and 3rd line support to your local field service engineer
• Enhance operator effectiveness through real‐time observation
RAPID employs multiple layers in its security infrastructure to proactive address IT security concerns. To
explore the RAPID Network Configuration, Security Infrastructure and IT Implementation, please consult the
RAPID IT White Paper. It is highly recommended that you provide this document to your IT department when
registering for the RAPID program. Your IT department may also forward any network configuration or
additional questions to rapidsupport@fei.com.
2
Figure 5: Rapid Network Configuration
Site Requirements
Caution! FEI is responsible for the network inside the microscope. Interface to the LAN is the responsibility of the
user or the local IT group. Virus protection is the responsibility of the user. See below for information
regarding FEI's anti‐virus protection policy.
• The customer's site should have a broadband internet connection (A minimum connection of 1 Mbps
upload speed is required, but 5 Mbps upload speed is recommended to support full capabilities of remote
diagnostics).
• Port 1194, inside the corporate firewall, should be opened outbound for TCP and/or UDP to at least one of
the following RAPID servers (Table 1):
Note For optimal performance, Port 1194 should be opened to all RAPID Servers.
RAPID VPN server (DNS name) RAPID VPN server (IP address) Location

rapidvpn‐nl.fei.com 192.87.67.16 Europe (Eindhoven, NL)
rapidvpn‐jp.fei.com 61.197.169.149 Asia (Tokyo, JP)
rapidvpn‐us.fei.com 66.192.179.36 USA (Hillsboro, USA)
Table 1: RAPID server overview
Test port 1194

Perform 'telnet' test to determine if corporate firewall Port 1194 is open to either one or all RAPID servers.
• Type "Telnet <RAPID VPN Server> 1194" in a Command Prompt. (Any of the above servers names or IP
addresses can be used)
• Examples:
• Telnet rapidvpn‐nl.fei.com 1194
• Telnet 66.192.179.36 1194
Results
1. Success (if Port 1194 is open):
If the test succeeds, the command prompt turns blank and the title bar of the window displays the text
"Telnet rapidvpn‐nl.fei.com " (Figure 6).
2
Figure 6: Blank screen with blinking cursor, port 1194 is opened
2. Failure (if port 1194 is not open):
If the test fails the message: "Could not open connection to the host, on port 1194: Connect failed"
displays in the command prompt: (Figure 7). The customer's IT department must check their network
firewall / proxy settings. (Details available in the RAPID IT White Paper).
Figure 7: Telnet session failed to connect, port 1194 is not opened
Support PC
As security is a key component of the RAPID infrastructure, it is recommended (mandatory for Helios
NanoLab and Verios systems) to have a Support PC installed that can provide added security with a firewall
and antivirus software. The precise configuration of these components falls under the responsibilities and
maintenance of the customer’s IT department, but following IT security policy is recommended (mandatory for
Helios NanoLab and Verios systems):
• The Support PC must fall under the customer IT policy. Rationale: Customer IT maintains responsibility
for patching and maintaining SPC.
• The SPC must have the option to run the virus scanner of choice. Rationale: Prevent viruses on SPC.
• The SPC must be able to run a firewall of choice. Rationale: Prevent unwanted access to the SPC (and
MPC).
• The SPC must be allowed to run the latest OS patches. Rationale: Keep OS updated and safe with latest
security patches.
2
• The MPC shall not connected directly to the LAN. Rationale: MPC is unsafe from a security perspective, no
virus scanner, firewall, and OS patches allowed.
A support PC is required for all Small DualbeamTM (SDB) and Scanning Electron Microscopes
(SEM) systems. For TEM systems a Support PC is not required and one can run RAPID directly from a System PC.
However, because FEI instruments require sophisticated software, one is limited to using McAfee and Norton
antivirus software on the System PC and OS patching is not allowed.
For RAPID (or generic) remote purposes, a customer can purchase a support PC from either FEI or directly from
any PC manufacturer which meets the following requirements:
• Processor 1 GHz
• RAM 512 MB
• Hard Drive 10 GB
• LAN Adapters 2
• Operating System Windows 2000, XP or Windows 7
Note There were reported some issues with Rapid 3.0 on Windows 2000, in case it’s not working, please install
the Rapid 2.6 version.
RAPID registration
For registration you will be asked to provide information about your FEI instrument (tool family, serial number).
This registration will allow you to sign up for RAPID.
1. To create your account click on the link ‐ Register Your Microscope. Fill in the form with your contact and
account information
2. Select the instrument registration family, instrument name and write down the system serial number
Note In case you do not know the serial number, ask for the serial number your field service engineer.
References
In case of any troubles, it is possible to get more information on these links:
• RAPID Support helpdesk: rapidsupport@fei.com
• RAPID Secure portal: https://rapid.fei.com
• RAPID Customer portal: http://www.fei.com/rapid
4.3 Film materials

Images on the Tecnai are recorded on either the plate camera or magnetic media. The following
film materials should be available, depending on the camera ordered.
• Plate film: size 3.25 x 4 inch or 6.5 x 9 cm
NOTE If a plate is delivered, dark room facilities will be required to develop and print the films
taken during acceptance and handover.
4.4 Cooling water supply

NOTE To prevent a water spill or leak hazards, the customer must provide a secondary
containment for the cooling water.
2
NOTE To prevent If a water cooling unit is electrically connected a water leak detector must be
present.
Water connections must be terminated with at least 15 cm of rubber hose, fitted after the main
shut-off valve.
2
4.4.1 Cooling water specifications

The microscope requires cooling-water which meets the following specifications Table 4-2:
Min. operating water pressure 3.0 x 105 Pa (3 Bar)

Max. tolerable water pressure 6.0 x 105 Pa (6 Bar)
Pressure stability (pulses) 0.1 x 105 Pa (0.1 Bar)
Input water temperature 20 °C ± 0.5 °C
None FEG Water temperature stability ± 0.1 °C/min,
derived stability 0.005 °C/sec (may also be read as
0.05°C/sec)
FEG Water temperature stability <0.1 °C/30min
Hardness < 6°D
Floating particles Particles > 120 um, such as dirt from supply pipes,
clay, sand and iron hydroxides, must be filtered out.
Iron content  0.2 mg/l
Oxygen content > 4 mg/kg
Chloride content < 100 mg/kg
Carbonic hardness < 10 °dH
Consumption of potassium permanga- < 10 mg/kg
nate
pH value 9
Aggressive carbon dioxide and ammo- Not detectable
nia
Water flow (main water cooler) std. obj. coil U-Twin obj coil
Standard 240 l/h 330 l/h
FEG 240 l/h 330 l/h
Monochromator 240 l/h 330 l/h
U-Twin .........................330 l/h
Max. temperature rise (max. load) 8.5°C for std, FEG & Monochromator at 230 l/h
8°C for UT an iso radial at 240 l/h
Connections to microscope via 2 hose pillars 10.5mm dia
Recommended hose (int) 10mm high pressure
Table 4-2 Cooling water specification
If the water supply available does not continuously meet all the listed requirements, the use of a
Zephyr closed- circuit cooling unit is strongly recommended.
CAUTION! According to the above specification, only a closed loop water cooling unit can be used
as water supply for the Tecnai.
2
4.4.2 Water filter assembly

see Figure 9-19.
Contents:
• Water filter
• Electromagnetic water cut-off valve with timer (15 minutes)
• Two manometers to check the water flow or, from the difference indicated, the cleanliness of
the filter.
NOTE The water filter assembly in Fig.15 water connections is given as an example.
POLARON-BIORAD in the U.K. can supply this type of assembly.
Description: Water filter with time switch-off system; code no. A/4920.
4.4.3 Closed loop cooling units
If a closed-circuit cooling unit is to be used in conjunction with the microscope it must preferably
be placed in an adjoining room which must be ventilated according to the power dissipated into
the room. See also 3.3 “Heat dissipation”.
Five different types of closed-loop cooling units can be ordered, depending on the cooling
possibilities, i.e. air or water Table 4-3:
ZEM 1000 S 9432 909 96301 - 50 Hz, 220 V air cooled max. 43°C
ZEM 1000 S 9432 909 96311 - 60 Hz, 220 V air cooled max. 43°C
ZEM 1000 S Spare part kit 9432 909 96321
ZEM 1000 SW 4022 401 48001 - 50 Hz, 220 V water cooled
ZEM 1000 SW 4022 401 48002 - 60 Hz, 220 V water cooled
ZEM 1000 SW Spare part kit TOO BE ISSUED LATER
Table 4-3 ZEM closed-loop cooling units
NOTE The ZEM 1000 SW units may only be used if a buffer of >50l is used in the outgoing line
to the microscope. Otherwise the specifications for drift can not be proved. (See
Figure 9-19, water connections).
2
200 800
Ø 10 mm hose
800
1/2” / 12 mm hose
Cable feed-through
Ø 15 mm copper pipe
Water in / out
V = 4m/s in out
ZEPHYR
V = 4m/s
300 200
V = 4m/s
t = -15C to 43 C
EM6707
Fig. 4-1: Location sketch of the S versions
Dimensions 744 x 1010 x 645mm (w x h x d)

Weight ±100 kg (unpacked)
Water connections 2 hose pillars 15 mm dia suitable for 10 mm high pressure hose
are supplied, also connectors with clamping couplings and olive
rings Ø 15 mm for copper pipes are provided.
Power 220 V - 1 phase - 50 Hz / 230 V - 1 phase - 60 Hz
Power consumption 1.9 kW 50 Hz / 2.3 kW 60 Hz
Cooling capacity 3kW at 20°C water output and 35°C air intake
Cooling water range +9 °C to 21°C
Air flow max. 2600 m3/h
Temperature stability < 0.1 °C/min at constant load
Temperature range -15 °C to 43 °C
Water flow 1560 l/h at 4.0 x 105 N/m2 (4 Bar)
Cooling medium R134a
Table 4-4 ZEM 1000S specifications
2
REAR VIEW
Main switch Drain
Safety fuse Water
out Water out
Control
connection in
Supply condenser Water in
1010
Grate for air
circulation
Holes for air

circulation
EM6709
Fig. 4-2: Dimensioned sketch of SW versions
Dimensions 744 x 1010 x 645mm (w x h x d) for CW

Weight ±100 kg (unpacked)
Water connections 2 hose pillars 10 or 15 mm dia suitable for 10 mm high pres-
sure hose are supplied, also connectors with clamping cou-
plings and olive rings Ø 15 mm for copper pipes are provided.
Power consumption 2.16 kW 50 Hz / 2.37 kW 60 Hz
Cooling capacity 3kW at 20°C water output and 35°C air intake
Water consumption 300l/h at inlet temp 10°C and water outlet 30°C
600l/h at inlet temp 20°C and water outlet 30°C
Temperature range 5 °C to 55 °C
Water flow 1080 l/h at 4.0 x 105 N/m2 (4 Bar)
Cooling medium R134a
Table 4-5 ZEM 1000 SW specification
4.4.4 Closed-loop (re-circulation) system
This system should be used if:
• the cooling water temperature is above 20.5 °C
• the water pressure fluctuations are above 1.0 x 105 Pa (0.1 Bar)
• the water hardness is above 25 °D.
• the water is very acidic (pH < 6 and/or chloride content > 200 ppm.).
• the water contains more than 0.2 mg iron per liter.
• the water contains floating particles.
• the water temperature is not stable.
Normal clean tap water can be used as a coolant.
To stop bacterial growth, Thermoclean (in a proportion of 1000 ppm) can be added to the water.
For ordering address of Thermoclean see 4.4.5 “Subsidiary Objective lens & Lorentz lens cooling
unit ZEM 300SW and Haskris R050”.
2
NOTE A cooling system that has become clogged by calcium or iron hydroxide deposits can be
cleaned by circulating an inorganic acid such as hydrochloric acid (4% HCL) or an
organic acid such as amino-sulphonic acid; sulphamine acid (HSO3NH2). Afterwards,
flushing with plenty of running tap water is necessary.
4.4.5 Subsidiary Objective lens & Lorentz lens cooling unit ZEM 300SW and
Haskris R050
CAUTION! It is advised to connect this cooling unit to a mains supply different from the microscope
mains supply. This to prevent interference.
NOTE A Lorentz lens must always be installed with a 50 m water filter.
This closed loop cooling unit is delivered as part of the Tecnai 20 UltraTwin or when ISO radial
coils are ordered. Its function is to cool the objective lens by means of a closed-loop water circuit
(see Figure 9-19, water connections). The chiller unit (ZEM 300SW or Haskris R050 should be
filled with cooling liquid Hexid A4 or clean tap water with Thermoclean additive (in a proportion of
1000 ppm) to prevent bacteria growth.
The chiller itself is cooled by water drawn in parallel line from the main cooling circuit of the
microscope: in this way very little extra heat is added to the air in the immediate vicinity of the
microscope (if no service room is present).
Addresses for ordering the cooling water inhibitors:
Thermoclean:
BioAnalytic GMBH
D7801 Umkirch / Freiburg
Germany
Tel: +49-76655951
Dimensions 500 x 800 x 400 mm (w x h x d)

Weight 65 kg (unpacked)
Water connections 10 mm hose couplings for in- and outlet.
Power consumption 600 W 50 Hz / 700 W 60 Hz
Cooling capacity 1.7 kW at 20°C water output and 45°C condensation temperature
Water consumption 36l/h at inlet temp 10°C and 1000W
83l/h at inlet temp 20°C and 1000W
Temperature range 5 °C to 55 °C
Water flow > 5 l at 4.0 x 105 Pa (4 Bar)
Water contents 7.1l watertank plus pipe work inside the unit
Cooling medium Klea R134A, charge 320gr
Table 4-6 ZEM 300SW specification
2
Dimensions 460 x 690 x 740 mm (w x d x h)

Weight 113 kg
Water connections 10 mm (DN10) hose
Power 180-244 V 1phase 50Hz
187-244 V 1phase 60Hz
Power consumption Circuit ampacity 9.62 A
Cooling capacity 0 to 1200 W @ 18°C 50Hz
0 to 1400 W @18°C 60Hz
Cooling water range 17-20°C
Temperature stability < 20 mK/min
< 100mKpp/30 min
Temperature range 12-32°C, 90% rh
Water contents 19 liters reservoir volume
Cooling medium R134a, 2 lb, 10 oz
Table 4-7 Haskris R050 specifications
2
4.5 Compressed air supply for pneumatics

A compressed air supply from a compressor unit or a cylinder must be connected to the
instrument with the following specifications and dimensions:
Min. air pressure 5.0 x 105 Pa (5 Bar)

Max. air pressure 7.0 x 105 Pa (7 Bar)
Pressure fluctuations 0.1 Bar per minute
Oil content must not exceed: 5 mg/m3
Solid particles Mass concentration 5 - 10 mg/m3
Water content Dew point < -20°C
Hose pillar outside dimension 8.5mm
Hose with high pressure walls 8.0mm (Internal diameter)
Table 4-8 Compressed air specification
If a separate compressor is used, it must be placed outside the microscope room in order to
prevent switching transients of the motor affecting the microscope electronics, the unit should be
connected to a mains supply different from the microscope mains supply. See Figure 4-3.
CAUTION! If nitrogen is also used for pneumatic pressure, never use the same nitrogen cylinder(s)
for both venting and pneumatic pressure.
COMPRESSOR PRESSURE BETWEEN

5 x 105 Pa and 7 x 105 Pa
DIFFERENT SUPPLY THAN MICROSCOPE
230 V
EM6114C
Fig. 4-3: Compressor connection
2
4.6 Nitrogen, N2
4.6.1 Venting
Part of microscope
To N2 inlet
emission chamber
Reduction
set to 50mb V11
Filter
0.3 m V12
Pressure
min. 1 x 105 Pa (1 bar)
To N2 inlet
max. 10 x 105 Pa (10 bar)
projection chamber
N2
EM11300
Fig. 4-4: Nitrogen connection

For all microscopes in the Tecnai series, nitrogen is used to vent the chamber and vacuum
system. A cylinder of dry compressed nitrogen, and a reduction valve set to a minimum pressure
of 1 x 105 Pa (1 Bar over-pressure) must be present during installation. The microscope will
reduce the pressure to 50 mBar using a standard delivered reduction. The connection pillar of
the air inlet of the microscope has a diameter of 8mm and the dust filter connection diameter is
6 mm.
• The water content must be less than 10 ppm.
• A dust filter (CS order number 5322 480 20066) with a filter grade AA (0.3 m) must be
installed in the N2 line.
4.6.2 Liquid nitrogen (LN2, EDAX detectors or cold trap)
Mounted in the objective stage of the microscope is the EDAX detecting unit or the cold trap. The
EDAX unit has a 10 liter dewar vessel, containing liquid nitrogen.
EDAX unit
Liquid nitrogen consumption: Between 1 and 1.5 liters/day
Filling schedule: Every 7 days
Anti-contamination device
Liquid nitrogen consumption: Between 1 and 1.5 liters/day
Filling schedule: twice daily
CAUTION! The detecting unit should not be used without liquid nitrogen and when not used, not left
without liquid nitrogen for longer than 30 days.
4.7 SF6 gas

SF6 gas is used as insulation gas in the HT tank and the emission chamber of the Tecnai 20. This
gas is in commonly use in both light and heavy industrial environments. It is non-toxic at
temperatures less than 250 C.
2
The HT tank and emission chamber of the Tecnai 20 are both sealed vessels and there will
normally be no leakage of gas from these items. Nevertheless, International regulations require
that certain safety procedures regarding SF6 gas must be known and implemented by the person
responsible for the installation.
In addition, any local regulations concerning SF6 gas must also be observed.
Further information on the properties of SF6 gas can be found in Appendix 13 “Working
with SF6 gas”.
On installation of the Tecnai 20 there must be at least 2 gas cylinders present with SF6 gas, each
containing a min. of 40 kg gas. One cylinder is required for filling the HT tank and emission
chamber and the other one is needed as a spare, back-up cylinder. The cylinder in use must be
provided with a suitable reduction valve [>6x105 Pa (6 Bar)].
NOTE This note only applies to countries of the European Union (EU): Next to two full cylinders
of SF6 also one empty cylinder for recycling SF6 must be always on site. The cylinder
must be equipped with a valve (DIN 477-part1: Type A,1” No.8)
The gas cylinders must be stored outside the room (or building) for safety reasons.
SF6 gas must meet the following specifications:
SF6 (IEC) “Esaflon”
SF6 min. contents weight% 99.9 99.94
Air weight% max 0.05 max 0.01
CF4 weight% max 0.05 max 0.05
Water weigh tppm max 15 max 2
Acidity calculated as HF weight ppm max 0.3 max 0.3
Hydrolyzable Fluoride calculated as weight ppm max 1 max 1
HF
Mineral oil weight ppm max 10 max 1
Table 4-9 SF6 Specifications
One of the manufactures of this gas is the “MONTEDISON” company.

WARNING! The bottle of SF6 should be stored (when not used) in a well ventilated area,
separate from the microscope working room. The bottle must NOT be kept in a
lockable cabinet! Refer also to local safety regulations!
4.8 Pre-vacuum pump outlet (only when SF6 is used)

As the pre-vacuum pump of the microscope is used to pump away a certain amount of SF6 gas
from time to time, the outlet of the P.V. pump must always be connected to the atmosphere
outside the building.
Pump hose pillar outside dimension:15mm
Hose: 15mm (Internal diameter).
4.9 Gatan Image Filter installation coordination

Gatan Image Filters (GIF’s) are shipped from FEI factory fully tested and aligned. After
connecting and a functional test by our FSE a Gatan engineer comes on-site and performs the
fine tuning, confirming the specifications and providing a training of the customer.
The expected time needed depends on the total number of HT settings on which this must be
done and can be found on the planning IPF.
2
4.9.1 Communication with supplier to arrange installation support

To arrange a proper timing of the installation date with our supplier the local Field Service
manager is responsible for submitting a request at the regional Gatan office.
For more details see Gatan web site: http://www.gatan.com/contact.It contains a list of offices
listed by country and the regional contacts with phone numbers.
In case of any problems:

• Send an email to service@gatan.com.
• Or call: +1 888 778 7933 or +1 925 463 0200. If no one answers, leave a message.
• If this is not successful, escalate to InstallCoordinatorTEM@fei.com.
4.9.2 Accepting filter
A hand-over of the system takes place 2 times during the filter installation.
1. Before a Gatan engineer starts installation (FSE to Gatan).

2. When installation is finished (Gatan to FSE).
A hand-over protocol must be signed by both the Gatan engineer and the local FSE at each
hand-over. The FSE will keep this document and send a digital copy to the Install coordinator.
The protocol is supplied by the FSE.
Note This hand-over protocol has no relation to the FEI System Acceptance. It has been created to
assure Gatan and FEI are in agreement of the work done.
Note Beware that between the hand-overs the FSE does not need to be on site. the FSE only needs to
be available in case of escalations.
2
5 Dimensions and weights
NOTE: Dimensions and weights are very much dependent on the configuration of the
microscope. The values given below are generally representative for most
microscopes at the time of printing this manual.
5.1 Dimensions and weights of the microscope
Crated Uncrated
Tecnai Series Weight Dimensions Weight Dimensions
(kg) (wxdxh; cm) (kg) (wxdxh; cm)
Tecnai Desk + column 1093 152x125x213 950

Tecnai Power supply 430 144x88x163 380 120x60x130
Tecnai Electr. rack 190 100x80x97 150
200kV FEG chamber 190 110x84x100 120 45x80x80
200kV Monochromator cham- 195 110x84x100 125 45x80x80
ber
200kV HT generator 410 128x101x182 310 88x88x162
200kV Monochromator HT 550 128x102x200 500 88x88x195
generator
Tecnai additional items I 190 122x102x122 150 -
Tecnai additional items II 190 122x102x122 150 -
STEM cabinet 150 110x85x100 110
Safety transformer 75 67x47x72 50 37x27x39
Party cabinet * 265 95x105x220
Table 5-1 Dimensions and weights of the microscope; (*) not always available as it
depends on configuration of the system.
2
6 Space and floor loading requirements

The principal physical data of the microscope are as follows:
Maximum depth of console (front to back) 117 cm (170 cm if electronics rack is swung
out)
Maximum width of console 167 cm
Minimum door width 100 cm without brackets.
In case of GIF 105 cm
Minimum door height 200 cm
Absolute minimum door height (packing pallet LaB6 185 cm; For FEG, 190 cm
removed)
Maximum height of console and column LaB6 254 cm; For FEG, 249 cm
Minimum ceiling height The FEI lifting mechanism 9432 909 96341 is
See also Figure 9-13 used during the installation, the min. height is
303 cm.
For a Monochromator with FEI lifting mecha-
nism: 314 cm
Minimum clearance at right side of console for 45 cm
service purposes
Minimum clearance at left side of console for LaB6 40 cm; FEG and Monochromator 50
service cm
Minimum clearance at rear of console for ser- LaB6, 80 cm; For FEG, Monochromator and
vice purposes UT, 100 cm
Minimum clearance at front of console for 60 cm
operator
Minimum overall floor space required for sit- Abs. min. Pref. min.
ting, operation and servicing (width x depth) LaB6 300 x 300 cm 300 x 350cm
For FEG 375 x 350 cm 375 x 400cm
Monochromator 450 x 500cm
UT 300 x 450 cm 300 x 500cm
Distance between micr. and HT generator > 100 cm
Monochromator >190 and <350cm
Distance between micr. and power cabinet LaB6: > 200 cm
UTWIN, FEG, Monochromator:> 300 cm
Weight distribution 700 kg/m2
Surface micr. console 1.27 m2 (excl. table top)
Three feet supporting main desk Square 40 mm
Surface area of microscope foot 48 cm2
Maximum point loading 20 kg/cm2
Centre of gravity Approx. 3 cm behind rear of column and
approx 112 cm above the floor (just below
valve V4.
Table 6-1 Space and floor loading requirements
2
For the UltraTWIN the power cabinet, HT generator and ZEM300 cooling unit must be placed in
a separate room. However, this is also preferable for all other types.
Special attention must be paid to the space requirements of the microscope in relation to other
equipment, especially equipment generating magnetic fields, or mechanical and acoustical
vibrations, but at the same time the location of the extension cabinet and accessories is limited
in distance due to cable length.
6.1 Special requirements

All emission chamber requires a lifting system to mount the emission chamber during installation
and afterwards for possible servicing. The handling capacity must be equal to or greater than
125 kg. Such a hoist can be ordered via FEI and has ordering code 9432 909 96341. See also
Figure 6-1 and Figure 6-2.
NOTE The FEI hoist can not be used to service the HT tank
EM6253A
Fig. 6-1: Lifting system

However, if another hoist is used, this must fulfil the following requirements:
• The theoretical absolute minimum lifting height required is 283 cm, for a Monochromator the
height required is 288 cm.
NOTE For the minimum ceiling height actually needed, the height of the lifting mechanism itself
must be added to this 283 cm, Monochromator 288cm.
• The hoist must be able to lift the emission chamber from the side of the microscope and be
able to reach points A and B indicated in Figure 6-2.
• The minimum weight that the hoist must be able to lift is 125 kg.
2
H.T. CABLE
28
B ELE
CTR
RAC ONIC
K
400
136
A
M ic
rosc
o
con pe
s o le
64
EM8120
Fig. 6-2: Positions that a hoist must be able to reach
NOTE To lift and dismantle the Monochromator HT generator a “spider chain” should be
available. This chain should be equipped with hooks suitable for eyes with an internal
diameter of 3 cm and should be able to lift 1000 kg. See Figure 6-4.
In Figure 6-1, Figure 6-2 and Figure 6-3, examples are given of such a lifting system. Of these
examples, the one mentioned in Figure 6-1 is the one recommended. If the lifting system is
capable of lifting 1000 kg it can be used to lift the microscope from the transport plate.
B
A
Electr
o
nic
C
rack
Micro
scope
conso HT
tor
le genera
300kV
A: are two steel  beams fixed to the side walls

B: is a steel  beam running with wheels in beam A
C: is a tackle running along B
EM8812
Fig. 6-1 Overhead Crane for Tecnai
2
HT
tor
genera
300kV
Hingeable lifting
tackle
Ele
ctro
nic
rack
Mic
rosc
o
c on pe
sole
EM8813
Fig. 6-2 Hinged lifting tackle for Tecnai
Ele
ctr
rac onic
k
M ic
ro
c o n sco p e
s o le
STEEL BEAM FIXED ON THE CEILING
EM8816
Fig. 6-3 Hoist with fixed beam for Tecnai
2
47
0
m
m
-2
0
90
Spider chain
Metal lifting eye
EM6017
Fig. 6-4 Spider chain for lifting HT tank
Another possibility could be a mobile lifting device such as the HYDROBULL 2000(*); see
Figure 6-5. The only restriction of this device is that the door width of the microscope room must
be at least 125 cm in order to remove the device from the microscope room after installation of
the microscope
(*)
HYDROBULL 2000 is manufactured by:
Siegfried Frenzen
4156 Willich-Schiefbahn
West Germany
In Europe it is sold via wholesale trade: Kaiser + Kraft
2
50
17 5
10
17 5
5
17 5
17 5
17 5
17
50 50 1 23 4 5 6 7
16 11
2000 kg
1600 kg
1200 kg
800 kg
600 kg
450 kg
400 kg
2 ton
0
50
1950
max. 4200
3300
ca. 800
1.5 + 2 ton 3 ton
ca. 1920 ca. 1980 230
1000
1200
Hydrobull 2000 EM6018A

Fig. 6-5 Hydrobull 2000
2
7 Installation materials and tools

7.1 Installation materials
Materials needed for the installation of the Electron Microscope, available locally or from the Help
Desk- Eindhoven (not supplied with the microscope):
NOTE: Santovac oil is not part of the kit delivered with system
(September 2013). In case oil will be needed, FSE needs to bring
his own.
Description Ordering number Remarks

Oil Santovac5 for HT cable and ODP 5322 390 80037 100cc
(19161 - USA)
Hose, dia. 6 mm inside  5322 530 20591 State req. length
Hose clamp, max. 14mm 4822 401 10257 1 Piece
Hose clamp, max. 13-20mm 4822 401 10492 1 Piece
Loctite 542, 50ml 5322 390 34007
Foot switch 5322 695 15172
Impulse relay 5322 280 40278 220V AC
Spotlight lamp 12V, 50W 5322 134 40822
2 core cable for room light 5322 323 30026 State req. length
4 core cable for Zephyr unit 5322 323 40027 State req. length
Dust filter N2 supply 5322 480 20066 Grade 0.3m
Table 7-1 installation materials
Items dependent on local mains and water supplies:
Description Ordering number Remarks

Mains autotransformer FP 6343/00 or 190 to 250 V AC
FP 6345/51
Mains stabilizer for ODP PE 1403 220 V AC
Water filter set Local 120 m filter
Water filter set Lorentz lens 50 m filter
Safety transformer FP 6349
7.2 Installation tools

To be able to install the microscope several tools must be present. Depending on the local
situation these things must be available at customers site or the service engineers must take
them with him. Make sure the customer knows which things he should provide.
2
• (Service engineer’s) tool case.

The set should contain a minimum of:
– Set of screwdrivers, 1-2-3-4-5
– Screwdriver pozidrive, 1-2-3-4
– Long-nosed pliers
– Side-cutting pliers
– Wire stripper
– Polygrip pliers
– Tweezers
– AMP clamp plier, 0.25 / 6.6 mm2
– Box and open-ended spanners, 5-5.5-6-7-8-10-13-14-17-19-24 mm
– Ratchet, 1/2" type
– Sockets, 17 and 30 mm
– Drill head adapter and socket, 8 mm
– Set of sockets with ratchet, etc, 4 to 13 mm
– Set of bits, pozidrive 1-2-3-4; hexagonal key, 6-8-10 mm. and adapter
– Set of hexagonal keys, 1.5-2-2.5-3-3.5-4-4.5-5-5.5-6-8-10 mm
– Ball-headed screwdriver, 2.5-3-4-6 mm
– Hacksaw with spare blades
– Hammer, 200 gm
– Nylon-headed hammer
– Crowbar, small 50 cm
– Spirit level, 0.5 mm/m
– Steel rule, 30 cm
– Flexible steel rule, 2 m
– Cable knife
– Small flashlight
– Nylon gloves
– Thermometer, 5 C to 50 C
– Solder set, iron 50W; solder sucker; copper braid; solder
• ESD field service kit
• Electrical hand drill: left/right rotation, with adj. speed
• Pallet truck; min. 1000 kg
• Multimeter / Oscilloscope
• Stable (clean) ladder 2m
• Stable (clean) table
• Cleaning materials
• High quality Ethanol or IsopropanolAluminum foil (without grease)
• Disposable handgloves (not powdered)
• Cleaning tissues (Dust free, eg Kimwipes)
• Clean plastic bags
• Wash bottle
• Hairdryer
• Light microscope with bright lenses (for positioning filaments)
• Vacuum cleaner ( Only to be used for cleaning the microscope)
• Power extension box incl. cable
• X-Ray Leak Check Instrument Victoreen 190/rp1;
orderable via FEI: ASM990.
2
8 Pre-installation check-list
The following pre-installation check list (3 pages including this page) details the minimum checks
to be carried out for a successful installation.
Microscope type:
Institute:
User(s) Title, Name:
Address:
Country:
Checked by:
FEI Organization:
Date:
Planned installation
starting date:
Checked and
Ite
Subject Sect. Min. / Max. value found ok Remarks
m
yes no
1 Transport route 6 min. 110 cm width
2 Door opening 6 min. 100 cm width

Height min. 201 cm
3 Ceiling height 6 LaB6: min. 303cm

See also Figure 9-13
FEG : min 303cm
Mono : min 314cm
4 Preferred Overall floor 6 300 x 350 cm LaB6

space icl acc. (wxd) 375 x 400 cm FEG
300 x 500 cm U-Twin
Absolute minimum floor 450 x 500 cm Monochroma-
space excl. acc. tor
300 x 300 cm LaB6
375 x 350 cm FEG
300 x 400 cm U-Twin
5 Room temperature 3.4 18 - 23 C 20 C recommended
2
Checked and
Ite
m
yes no
6A Room temp. variations 3.4 0.5 C/hour around the Com-

0.05 C/min pustage
6B Room Air flow, away from 3.2.1 <5m/min
the column around the Com-
pustage
7 Relative humidity 3.4 < 80% at 20 °C Dewpoint below

18 °C
8 Magnetic field 3.5 see section 3.5.1 Bartington meter
9 Mechanical vibrations 3.6 see section 3.6 HP3560A
10 Acoustical noise 3.7 see section 3.7 HP3560A
11 Compressed Air supply 4.5 min 5 x105 Pa Hose 8 mm ID

max 7 x105 Pa
12 Nitrogen supply pressure 4.6.1 min 1 x 105 Pa Hose 6 mm OD

Liquid Nitrogen 4.6.2 max 10 x 105 Pa
Water contents <10ppm
13 Water flow 4.4.1 240 l/hr Standard Obj. coil

330 l/hr U-Twin Obj. coil
14 Water pressure 4.4.1 nom. 3x105 Pa Hose

max. 6x105 Pa 10 mm ID
15 Water pressure stability 4.4.1 Pulses maximum

at input 0.1x105 Pa
16 Water temperature at 4.4.1 max. 20 C ± 0.5°C Rise is 7 °C at max

input load
17 None FEG 4.4.1 < 0.1 C/min

Water temp. stability and < 0.005°C/sec
FEG & Monochromator 4.4.1 < 0.1 C/30min

Water temp. stability
18 Heat dissipated 3.3
19 Mains supply 4.1 230V AC Cable, 3x10 mm2
20 Power consumption 4.1 min. 4.8 PF, 0.85

max. 6.5 kVA;
21 Mains frequency 4.1 50 or 60 Hz
22 Line voltage 4.1 -10% +6% Including transients

fluctuations **
23 Mains connection 4.1 See section 4.1 40A fused

Switch & fuse box
24 Earthing 4.1 < 0.56 According to local

regulations
25 Cable ducts 4.1.3
2
Checked and
Ite
m
yes no
26 Room lighting 4.1.4
27 Room darkening 4.1.4
28 Telephone line 4.1.5
29 Film availability 4.3
30 Darkroom 4.3 If plate film is used
31 SF6 gas: 4.7

2 full Cylinders min. 40kg of gas / cylinder
1 empty Cylinder empty Cylinder with a

valve (DIN 477-part1:
Type A,1” No.8)
32 Pre- vacuum pump outlet 4.8
33 Hoist 6.1
34 Installation materials 7.1
35 Tools and instruments 7.2
NOTE **In the case of voltages of -6% with a duration of more than 1 min., a mains stabilizer
PE1403 (850VA) must be used to feed the heating element of the ODP.
NOTE Any deviation from these installation and safety requirements may cause deterioration in
Instrument Specification.
If the site requirements fail or are not within the specifications laid down in this manual, the form
“Performance Waiver due to Failure of Pre-installation Site Requirements” must be filled out and
signed. See
Comments:
2
Local Service acceptance: User acceptance:
Place and Date:
2
9 Illustrations
0 1 2 3
0
Transformer
Mains
HT
generator Location of
200kv power unit
Location
area HT tank
Min. 1.5 meter

Power
r
ete
supply
rack
2m
1 m eter unit
Flow
n.
ce
Mi
n
ta
is
.d
ax
M
Electronic
rack
2
Microscope
console
EM8074
ABSOLUTE MINIMUM ROOM DIMENSIONS

Fig. 9-1: Tecnai 20 LaB6; room layout
2
0 1 2 3
0
Transformer
Mains
C
Location area
ZEM300SW/ mains supply
HT askris R050
generator
200kv Max. distance
SERVICE ROOM
Power
1
supply
unit
B D Location
area HT tank
Min. 1.5 meter Location area
te r
power supply
me
r
ete
.2 unit
Flow meter rack
3m
Min
Accessories cabinet
n. and Flow meter rack
2 Mi
A can also be placed in the
service room
Ele
ct
ron
ic
rack
3 Mic
rosc
o
con pe
sole Acc
Cab essori
inet es
ANTECHAMBER
5
EM14902
ABC = 5.75 m Cable duct PREFERRED MINIMUM ROOM DIMENSIONS
CBD = 4.00 m
70
115
Fig. 9-2: Tecnai 20 LaB6; room layout incl. accessories
2
0 1 2 3 3.75
0
Mains Transformer
Location
HT area mains
generator Power supply
200kv supply
Min. 2 meter unit
Location SERVICE ROOM

area HT tank
1 Min. 1.5 meter
er
et
m
k
.2
ra c
ter
in
me er
M
w et
Flo m Location area
.3 power supply unit
in
M
Electronic
rack
Flow meter rack can be

Microscope placed in the service room
console
3.5
EM19370
Fig. 9-3: Tecnai F20; room layout with min. dimensions
2
0 1 2 3 3.75
0
Location area
Transformer
mains supply
HT C
Mains
generator
200kv Power
Min. 2 meter supply
unit
SERVICE ROOM
Location
area HT tank
er
et
B D
1
m
Min. 1.5 meter
.2
in
M
Flow meter rack er
et
m
. 3
in Location area power unit
A M
2 Ele
ctro
n
rack ic
Accessories cabinet
and Flow meter rack
may be placed in the
Mic ervice room
rosc
con ope Acc
sole
Cab essori
inet es
ANTECHAMBER
4
EM14881
PREFERRED MINIMUM ROOM DIMENSIONS
ABC = 5.75 m Cable duct

CBD = 4.00 m
70
115
Fig. 9-4: Tecnai F20; room layout incl. accessories
2
0 1 2 3 3.75
0
Location area
Transformer
mains supply
HT C
Mains
generator
200kv Power
Min. 2 meter supply
unit
SERVICE ROOM
Location
area HT tank
er
et
B D
1
m
Min. 1.5 meter
.2
in
M
Flow meter rack er
et
m
. 3
in Location area power unit
A M
2 Ele
ctro
n
rack ic
Accessories cabinet
and Flow meter rack
may be placed in the
Mic service room
rosc
con ope Acc
sole
Cab essori
inet es
ANTECHAMBER
4
EM14882

CBD = 4.00 m
70
115
Fig. 9-5: Tecnai 20 UT; room layout with min. dimensions
2
0 1 2 3
0
Transformer
Mains
C
Location area
ZEM300SW/ mains supply
HT
Hasris R050
generator
200kv Max. distance
SERVICE ROOM
Power
1
supply
unit
B D Location
area HT tank
Min. 1.5 meter Location area
ter
power supply
me
r
ete
.2 unit
Flow meter rack
3m
Mi n
Accessories cabinet
n. and Flow meter rack
2 Mi
A can also be placed in the
service room
Ele
ctro
ni
rac c
k
3 Mic
rosc
o
con pe
sole Acc
Cab essori
inet es
ANTECHAMBER
5
EM14902
ABC = 5.75 m Cable duct PREFERRED MINIMUM ROOM DIMENSIONS
CBD = 4.00 m
70
115
Fig. 9-6: Tecnai 20 UT; room layout incl. accessories
2
0 1 2 3
0
Location area Mains
Transformer
mains supply
HT ZEM300SW/
Haskris 050
generator Power
200kv supply
Min. 2 meter unit
SERVICE ROOM
Location
area HT tank
r
ete
Min. 1.5 meter
r
Location area
e te
3m
Flow meter rack power supply
2m
n.
unit
Mi
in.
M
2
Accessories cabinet and
Flow meter rack may also be
placed in the service room
Ele
ct
ron
i
rack c
3
Mic
rosc
o
c on pe Ac
sole Cabcessori
inet es
ANTECHAMBER
.5
EM14892
Fig. 9-7: Tecnai F20 UT; room layout with min. dimensions
2
0 1 2 3
0
Mains
C Transformer
HT
generator Location area
ZEM300SW/ mains
200kv Haskris 050 supply
Min. 2 meter
SERVICE ROOM
1 Power
B D supply
unit
Location
area HT tank
er
ete
Min. 1.5 meter
et
Location area
m
3m
Flow meter rack power supply
2
in.
n.
unit
M
Mi
2 Flow meter rack may
A
also be placed in the
service room
Ele
ct
ron
ic
rack
3 Mic
rosc
o
con pe
sole
ANTECHAMBER
5
EM19340
CBD = 4.00 m
70
115
Fig. 9-8: Tecnai F20 UT; room layout incl. accessories
2
28
min. 25
10 min.10
HT ZEM 300/
40
Haskris R050
generator
6 200kv For UT only
88
85
55
50 Power
supply unit
120
88
55
45
Flow meter rack

60
20
78
60
196
152
58
77
24 16 Accessories
80
Support Ele Cabinet
ct
racrkonic
46 18
57.5
75
93.9 Mic
136
80 r
conoscope 46
sole
Each foot STE
M
is 4.0 x4.0 Cab
19.4 inet
64
21.1 95
62
211
Transport plate 98 x 127

measurements in cm
This drawing only shows the dimensions of the individual components

For room lay-out of characteristic system EM19361
Fig. 9-9: Tecnai 20; Microscope dimensions
2
0 1 2 3 4 4.5
0 Mains
Transformer
C
ZEM 500SW
15 cables
(dia between Power
HT 5 and 10mm) supply
r
generato unit
300kV
B
1 9 cables
(dia between
D 5 and 10mm)
Flow meter rack Accessories

Cabinet
2 Includes:
HT cable Automated
70 min: 1.90 m
max: 2.10 m Apertures
115 and or GIF
CABLE DUCT
Double curtain
A
3
Electronic Softwall or curtain
CABLE LENGTH rack
ABC = 5.75 m
CBD = 4.00 m
STEM
cabinet PC*
Microscope
4 console
* PC may also be mounted in the STEM rack

depending on size of PC
5
PREFERRED MINIMUM ROOM DIMENSIONS EM21480
Distance between microscope and generator 190  210 cm

Distance between microscope and power cabinet 300 cm
Distance between power cabinet and generator 200 cm
Free area around microscope 40 cm
Fig. 9-1 Tecnai 20 Monochromator; room layout including accessories and cable duct
2
1160
211 950
745
939
194
EM9698
= Feet on floor
Transport plate 980 x 1270
= Feet just above floor
Fig. 9-10: Tecnai Feet lay-out
2
min. 190 max. 210
52
For FEI lifting mechanism min. 303
190
60
255
184
130
ZEM 300 or 500

87 min.min.
20010
60
measurements in cm EM14731
Tecnai 20 standard and UT
min. 100 max. 250

52
60
249
191
162
ZEM 300/Haskris R050

min.200
min. 10
82
60
Tecnai 20 FEG
Fig. 9-11: Tecnai 20 standard, UT and FEG; min. height
2
min. 190 max. 350
52
190
60
259
249
191
130
ZEM 300 or 500 87 min.min.

20010
Haskris R050
60
Fig. 9-12: Tecnai 20 Monochromator side view ceiling height requirements
2
303
Min. Height when using the FEI lifting device
(9432 909 96341)
273 Min. Height for filament exchange
Max. Tecnai 20 height including

254
emission chamber and HT cable mounted
233 Tecnai 20 Height, including
emission chamber
181.5
LaB6 EM14870
Measurements in cm
Min height when using the FEI

303 lifting device (9432 909 96341)
249
191 (Em. - col. split)

181.5
FEG EM19290
Measurements in cm
Fig. 9-13: Tecnai 20 LaB6 and Feg; Min height for lifting hoists
2
Min height when using the FEI

314 lifting device (9432 909 96341)
262
191 (Em. - col. split)

181.5
FEG + MONO EMXXXXX

Measurements in cm
Fig. 9-14: Tecnai 20 Monochromator; front view height requirement
2
Service room
Power cabinet generator

HT
Tube light Tube light
Note: Within this area draughts should be

avoided as much as possible
Chim
ney
Tube light
Tube light
Ele
ctro
nic
r a ck
1meter
Mic
rosc
o
c on p e
sole
Tube light Tube light
Note: The size of the openings in the ceiling must be such

that the air velocity is less than 5 m/min.
The flow must always be directed away from the column.
Antechamber
Air into the room Air extracted from the room
EM14761
Fig. 9-15: Example of room layout including light and air-conditioning
2
Ceiling
The holes in the ceiling

must not allow an air
Ante- velocity over 5 m.min. Service
chamber Room
Microscope Room
curtain curtain
Heat Source
Fig. 9-16: Cross Section of TEM Room - Air Circulation

Preferably no air flow should be present in the micoscope room. To prevent this the cold air is
blown in via the so-called service room. The curtains will force the air to enter the microscope
room via the floor. As the main heat source is now the electronics cabinet, a chimney can be
made over the electronics cabinet to drain the local heat by convection (see Fig. above). As a
result the other drain openings can be made smaller.
Most preferred room air-conditoning
Ceiling for extraction of air

The chimney as shown in the figure
above can also be used here.
Service room
Antechamber
Microscope room curtain
curtain
Sub-floor for supply of air

EM6917B
Fig. 9-17: Example of air-conditioning inlets and outlets
Ideally the cold air is blown in from underneath the floor, see Fig. above, so that the air rises by
natural convection.
Air-conditioning The air-conditioning temperature must be adjustable between 19 °C and

25 °C.
The air-conditioning temperature regulation system must not be an on/off
(i.e. switched) system but must also be a proportional system.
2
Preferable the microscope is to be connected by a plug and switch.

This lockable blade type switch must be able to switch 10.000 AIC
(Ampere Inrush Current)
NOT ALLOWED BY S2-93

USE ISOLATION TRANSFORMER
MAINS MATCHING
TRANSFORMER
PW6345/51
1 440V
TECNAI P/A13
T2
1 SAFETY
P/A12
2 TRANS-
MAINS PANEL 3 FORMER X5
2 410V 4 (OPTIONAL) 8
3 380V 5 PW6349 9
WALL 6
SWITCH 4 350V P/A12 7
X6
MAIN MAIN 5 250V 32 / 40A 10A
SWITCH FUSES R X2
6 220V 5
6 X1-2 F6 X5
X1-1 F1 X7
7 190V
4 X6
8 +20V S1
230V 3
9 +10V X11-8 X8
32 / 40A 10A 2
10 0V 0 X11-9
10 1
11 -10V X1-1
X1-2 F2 F5
12 -20V
EARTH SCREW EARTH
16A 3 5 X11-18
F8 Z1 P/A18
P/A19 HT TANK
16A 1 FILTER 4 X11-21 PE1168/20
F7
K3
16A 1’
X11-5 1 0V
F9 2 200V 8
3 210V
16A
X11-1 4 220V
230V
F10 4’
6A
X9-22 X11-2 5 230V 9
P.V.P. 230V F11 6 240V

X9-19 7
K4 SAFETY
X11-6 TRANSFORMER T1
X11-7
F14 F12 F13 EM14770

TMP6A ODP4A IGP8A Safety transformer T1
K8 K5 K6 maybe NOT presant
X9-27 X9-24 X9-16 X9-11 X11-13 X11-14

TO TMP TO ODP TO IGP
SUPPLY HEATER SUPPLY
Fig. 9-18: Electrical connections
2
AIR OUTLET
* Buffer is necessary for ZEM 1000SW

TAP
BUFFER *
> 50l
ONLY FOR
ZEM 1000 SW
ZEM 1000 S
ZEM 1000 SW * MICROSCOPE
AIR INLET COOLING UNIT
max. OPEN **
40 cm DRAIN
** Flexible hose to prevent earthloops
EM8122A
4 CORE CABLE
valves
Optional ZEM 300 SW/Haskris R050
(Lorentz lens)
AIR OUTLET
By pass
Clean tap water 2,2 l/min.
0,17 l/min.
ZEM 1000
AIR INLET
COOLING UNIT
ZEM 300 SW/Haskris R050

1,2 l/min.
1,5 l/min.
4 CORE CABLE
Clean tap water

Obj. coils
MICROSCOPE
4,2 l
(6 BRANCHES)
max. OPEN **
40 cm DRAIN
**Flexible hose to prevent earthloops
EM14860
4 CORE CABLE
Fig. 9-19: Water connections
2
10 Abbreviations
Abbreviations used in the text
A
AIC Ampere Inrush Current
C
CE Conformite Europeenne
C.S. FEI Customer Service
D
Diffraction (camera length range)
E
EDAX FEI microanalyser
EDX Energy Dispersive X-ray
EEC (EC) European Community
(P)EELS Electron Energy Loss Spectrum
EMC ElectroMagnetic Compatibility
EN European Norm
F
FEG Schottky Field Emission Gun
FP Commercial order number, FP xxxx/xx, for FEI
H
HT High Tension
HM HIgh Magnification range
I
ID Inside Diameter
IEC International Electrotechnical Commission
IGP Ion Getter Pump
L
LaB6 Lanthanum Hexaboride crystal filament
LM Low Magnification
LAD Low Angle Diffraction
N
NW Nenn Weiten, Vacuum flange sizes
O
ODP Oil Diffusion Pump
P
PF Power Factor
PVP Pre-Vacuum Pump
S
STEM Scanning Transmission Electron Microscope
STWIN Super Twin Lens
2
T
TEM Transmission Electron Microscope
TMP Turbo Molecular Pump
TRIOD Triode Gun
TWIN Twin Lens
U
UT UltraTWIN
2
11 Conversion tables
Length
1 mm = 0.0393 in
1 cm = 0.3937 in
1m = 3.2808 ft
1m = 1.0936 yd
1 in = 0.0254 m
1in = 25.4 mm
1 in = 2.54 cm
1 ft = 0.3048 m
1 yd = 0.9144 m
Moment (Torque)
1 newton meter = 1 Nm
= 0.102 kgfm
1 Nm = 0.7375 lbft
1 lbft = 1.356 Nm
1 kgfm = 9.8 Nm
Mass
1g = 0.0353 oz
1 kg = 2.205 lb
1 oz = 28.35 g
1 lb = 0.4536 kg
Temperature
0 C = 32 F
C = 5/9.(F - 32)
F = 9/5.(C) + 32
Volume
1 cm3 = 0.061 in3
= 1ml
1 m3 = 1.308 yard3
1 litre = 0.035 ft
1 litre = 1.761 UK pints
1 litre = 0.22 UK gallon
1 litre = 2.113 US pints
1 litre = 1.057 US quarts
1 litre = 0.2642 US gallon
1in 3
= 16.387 cm3
1 yard 3
= 0.7646 m3
1 ft 3 = 28.32 litre
=1 UK fl/oz
= 28.41 cm3
1 UK pint = 0.57 litre
1 UK gallon = 4.5461 litre
1 US pint = 0.4732 litre
1 US quart = 0.9463 litre
1 US fl/oz = 29.57 cm3
1 US gallon = 3.785 litre
Energy
1 Joule = 1 J = 1 Wsec
= 0.2388 cal
1 kilo-Joule = 1 kJ
= 1000 J
2
= 0.9478 BTU
1 cal = 1 frigory
= 4.186 J
1 kcal = 4.1865 kJ
1 BTU = 1.055 kJ
Frequency
1 Hertz = 1 Hz
= 1 cycle/sec
= 60 cycles/min(cpm)
1000 cpm = 1000/60 Hz
= 16.67 Hz
Force
1 newton =1N
= 0.2248 lbf
1 dyne = 0.01 N
1 kgf = 9.806 N
1 lbf = 4.448 N
Flow
1 litre/min = 5.886 x 10-4 ft3/sec
1 litre/min = 4.403 x 10-3 US gall/sec
1 litre/min = 0.0037 x 10-3 UK gall/sec
1 ft3/min = 0.472 litre/sec
1 US gall/min = 0.0631 litre/sec
1 UK gall/min = 0.076 litre/sec
Power
1 watt = 1 W = 1 J/sec
= 0.2388 cal/sec
1 kilowatt = 1 kW
= 1000 W
= 860 kcal/h
= 1.36 pk
= 1.34 hp
1 cal/sec = 4.186 W
1 kcal/h = 1.163 W
1000 frig/h = 1.163 W
1 Brit ton of refr. = 3.89 kW
1 US ton of refr. = 200 BTU/min
= 3.51 kW
1 kWh = 3600000 J
= 3.6 MJ
1 pk = 0.735 kW
1 hp = 0.7457 kW
Pressure
1 Bar = 1000 mBar
= 105 Pa
= 1.02 kgf/cm2
= 0.988 atm
= 14.5 lb/in2
1 mBar = 0.1 kPa
1 kPa = 1 kN/m2
= 10 mBar
1 Pascal = 1 Pa
=1 N/m2
= 0.01 mBar
2
1 lbf/in2 = 0.07 kg/cm2

= 0.068 atm
= 6.894 kPa
= 68.94 mBar
= 0.069 Bar
1 kgf/cm2 = 1 atm
= 98.066 kPa
= 0.9806 Bar
1 atm = 101.325 kPa
=1.0132 Bar
1 mm Hg = 1 Torr
= 0.1333 kPa
= 1.333 mBar
1 mm H2O = 9.804 Pa
= 98.066 mBar
Magnetism
Magnetic field strength:
2.76  V p-p
H p-p = -------------------------- = Oersted
f
220  V p-p
H p-p = ------------------------- = A p-p  m
f
H = Am  H =  0.0125 Oersted 
Magnetic induction:
B = x H B = Tesla = 104 Gauss
 =0 x r
r = 1 in vacuum and air
0 = 4 x 10-7 Vsec/A.m
Oersted = 103/4 A/m = 79.6 A/m
Light
Color temperatures K
Candlelight = 1930
Tungsten lamp, home use = 2800
Quartz halogen lamp = 3200
Fluo. lamp, warm white = 3500
Fluo. lamp, white = 4500
Fluo. lamp, daylight = 6500
Clear sky = 10 000
Luminance Lux
Clear, mid-day sky =100 000
Cloudy, mid-day sky = 32 000
Office, under fluo. light = 500
Candle light, distance of 20 cm = 10
Vacuum
Pressure units:
1 atm = 760 Torr
1000 mBar = 750 Torr
= 105 Pa
1 Pa = 0.01 mBar
= 1.10-5 Bar
= 7.5x10-3 Torr
2
= 9.87x10-6 atm
= 1.45x10-4 lbf/in2
= 1.02x10-5 kgf/cm2
= 2.953x10-4 in Hg
= 7.5x10-4 mm Hg
= 4.015x10-3 in H2O
= 0.102 mm H2O
= 7.5 micron
= 99.99+ % vacuum
= 1 N/m2
1 atm = 1.013 105 Pa
= 101.325 kPa
1 Torr = 1.333 102 Pa
= 1 mm Hg
1 mm Hg = 1.333x102 Pa
1 micron = 1 m Hg
Pumping speed units:

1 l/s = 60 l/min
= 2.12 ft3/min
= 3.6 m3/h
1 ft 3/min
= 0.472 l/s
= 28.32 l/min
= 1.7 m3/h
1 m3/h = 0.278 l/s
= 16.67 l/min
= 0.589 ft3/min
Leak rate units:

1 Torr l/s = 1.333 mBarl/sec
= 1.316 atm cm3/sec
= 103 lusec
= 2.795x10-3 atm.ft3/min
= 2.083x105 grammes/year
(Freon 12)
= 5.7x10-3 kg/h (air)
2
12 Material safety data sheets (MSDS)

12.1 Introduction
CAUTION! The engineer/user must be aware that the information in an MSDS can vary depending
on the country they are in and on the supplier. The following MSDSs should be consulted
before installation.
12.2 Greases
• “Tradename : MOLYKOTE BR 2 PLUS, 01”
• “Tradename : SILICONE PASTE P 4”
• “Tradename : FOMBLIN RT 15”
• “Tradename : BRAYCOTE MICRONIC 1613”
12.3 Oils
• “Tradename : SHELL DIALA OIL B” (insulating oil)
• “Tradename : SANTOVAC 5, 65 ML” (vacuum pump oil)
• “Tradename : ULTRAGRADE 19” (lubricating oil)
12.4 Gases
• “Tradename : SULPHUR HEXAFLUORIDE” (SF6)
• “Tradename : NITROGEN 10, LIQUID, 01”
12.5 Cleaning Chemicals

• “Tradename : CYCLOHEXANE” (C6H12)
• “Chemical name : ETHANOL” (C2H5OH)
• “Chemical name : HYDROGEN PEROXIDE, SOLUTION, 20.0-60.0%” (H2O2, min. 27%)
• “Chemical name : ISOPROPYL ALCOHOL” (CH3CH0HCH3)
• “Chemical name : POTASSIUM HYDROXIDE” (KOH)
• “Chemical name : SODIUM HYDROXIDE” (NaOH)
• “Chemical name : ACETONE” (CH3COCH3)
12.6 Fluorescent Powder

• “Tradename : LUMILUX YELLOW-GREEN B 20-10 B (RIEDEL 54021)”
2
13 Working with SF6 gas

For purity of SF61 gas see 4.7 “SF6 gas”
(In accordance with IEC 60480)
13.1 SF6 gas properties

• SF6 gas is heavier than air.
• SF6 gas causes suffocation at high concentration levels.
• SF6 gas breaks down when overheated, giving off highly toxic fluorine gas (SF6 gas is
colorless, odorless, non-flammable and non-toxic if not heated above 250 °C).
13.2 SF6 gas guidelines

• The ventilation system (refer to 13.5 “Area ventilation measurements”) must be switched to
extract AT ALL TIMES.
• Smoking in SF6 sensitive areas is FORBIDDEN.
• The SF6 detector (refer to 13.6 “SF6 detection”) must ALWAYS be in operation.
• Two gas masks (with filters of active charcoal and incorporated dust filter) and two pairs of
rubber gloves MUST BE PRESENT.
• For transporting the gas, use the tools and equipment delivered.
• Refer to SF6 MSDS for additional SF6 safety information.
13.3 What to do in event of a gas leakage

1. Switch off all heat sources.
2. Ventilate the area by opening all windows, but NOT THE DOOR.
13.4 What to do if SF6 decomposes (fluorine is given off)

NOTE The presence of (very low) concentrations of fluorine can be detected by smell.
1. Put on a gas mask.
2. Ventilate the area by opening all windows, but NOT THE DOOR.
3. Switch off all heat sources.
All parts contaminated with solid decomposed products must be
– handled with rubber gloves
– contained
– disposed off as chemical waste
13.5 Area ventilation measurements

• SF6 gas is heavier than air, therefore it will go down and stay at floor level. There should
therefore be an extraction ventilator channel opening as low as possible (in any case lower
than 5cm) above the floor. This ventilation channel should open directly into the outside air
and must UNDER NO CIRCUMSTANCES BE CONNECTED TO THE CENTRAL
VENTILATION SYSTEM OF THE BUILDING. Minimum required ventilation capacity for
CM200, CM300, T20, T30 & Titan system is 60m3/h (?).
• Any holes in the floor giving access to lower stories in the building must be closed.
• When a FEG tip is replaced, SF6 gas must be pumped out with the microscope pre vacuum
pump. Because of this, the pre vacuum pump outlet must be connected to the atmosphere
outside the building and NEVER UNDER ANY CIRCUMSTANCES to the central ventilation
system of the building.
2
• The safety blow-off valve of the HT tank must also be connected to the SF6 ventilation
system in order to extract SF6 gas in the event of an overpressure failure.
13.6 SF6 detection

• For complete safety, an SF6 detector* must be present and operating CONTINUOUSLY.
• The detector must be a suitably calibrated instrument using the thermal conductivity or infra-
red process principle.
*A portable SF6 detector is the TIF 5000 manufactured by:
TIF INSTUMENTS INC. Uniechemie B.V.

3661 N.W. 74th STEET. Aruba 21
MIAMI FLORIDA 33147 Postbus 426
U.S.A. The Netherlands
Tel: +055 5334529
Fax: +055 5333729
Table 13-1 Portable SF6 detector manufacturers
FEI COMPANY
Performance Waiver due to Failure
of Pre-Installation Site Requirements
INSTRUMENT TYPE ...............................................................................................................................

COMPANY NAME ...............................................................................................................................
ADDRESS ...............................................................................................................................
...............................................................................................................................
...............................................................................................................................
...............................................................................................................................
LOCATION: Building .................................... Room ....................... Phone .............................
SITE SURVEY RESULTS: SITE SURVEY DATE: ................................................
PASS FAIL ADDITIONAL COMMENTS

Vibrations
...........................................................................
Acoustics
...........................................................................
EMI
...........................................................................
Other
...........................................................................
Signature below by the Customer certifies that:

1. The Customer acknowledges that the site referenced above does not meet the published environmental
requirements for the above mentioned FEI product.
2. The Customer agrees that FEI Company will not be held responsible for failure of the above referenced
equipment to perform at published ion and/or electron beam specifications due to inadequate
environmental site requirements.
3. The Customer agrees that all contractual payments based upon system performance will be released for
full payment immediately upon completion of the installation provided that FEI Company shows adequate
documentation proving that all FEI Acceptance Tests have been performed on a "best effort" basis.
..................................
FEI Representative name (please print) Customer Name (please print)
..................................
FEI Representative signature Customer Signature
..................................
Date signed Date signed

Tecnai 20 G2 Pre-Installation

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Tecnai G2 20

4822 870 10466

Order code: 4822 870 10466

© 1/9/17 FEI Company

1-ii 09-Jan-2017 4822 870 10466

Revision Description of revision Date

2 Safety and environmental specifications

5 Dimensions and weights

6 Space and floor loading requirements

7 Installation materials and tools

12 Material safety data sheets (MSDS)

13 Working with SF6 gas

Performance Waiver due to Failure

1.1 Delegation of responsibilities

2 Safety and environmental specifications

2.1 High voltage and X-ray safety regulations

2.2 SF6 Safety provisions

2.3 Liquid nitrogen (LN2)

2.3.1 Liquid Nitrogen specific safety precautions

3.2 Ambient Conditions of the Site

The holes in the ceiling

Fig. 3-1: Cross Section of TEM Room - Air Circulation

Fig. 3-2: Preferred scheme for room air circulation

3.3 Heat dissipation

Heat dissipated Heat dissipated Heat dissipated

3.4 Room temperature specifications

3.5 Magnetic fields

Type Horizontal Vertical

3.5.2 Tecnai with monochromator and HRGIF

GIF Type Front-Back Front-Back Left-Right Left-Right Vertical

Table 3-3 Magnetic field specifications for available HRGIF configurations

3.5.3 Additional information concerning the STEM specs

Fig. 3-3: GIF entrance position

3.6 Acoustics and Floor vibration guidelines

System Vertical Left to right Front to back

3.7 Acoustic Guidelines Graphs

Fig. 3-1: Acoustics - TECNAI G2 T20 TWIN TEM

Fig. 3-2: Acoustic - TECNAI G2 T20 TWIN, STEM, RES 0.34

3.7.3 TECNAI G2 T20 XT TEM LINE 0.144

Fig. 3-3: Acoustics - TECNAI G2 T20 XT TEM LINE 0.144

3.7.5 TECNAI G2 TF20 XT STEM RES 0.18

Fig. 3-5: Acoustics - TECNAI G2 TF20 XT STEM RES 0.18

Fig. 3-6: Acoustics TECNAI G2 TF20 XT TEM INFO 0.14

3.7.7 TECNAI G2 TF20-TF30 ST TEM INFO 0.14

Fig. 3-7: Acoustics TECNAI G2 TF20-TF30 ST TEM INFO 0.14

Fig. 3-8: Acoustics Tecnai G2 TF20-TF30 UT, TEM info 0.12

3.7.9 Tecnai G2 TF20-TF30 UT; STEM res 0.14

Fig. 3-9: Acoustics Tecnai G2 TF20-TF30 UT; STEM res 0.14

3.8 Room Cleanliness

Class maximum particles/m³ FED STD 209E

Table 3-1 ISO 14644-1 cleanroom standards

3.9 High voltage and X-ray safety regulations

3.10 SF6 provisions

Mains supply required 230V, 50/60 Hz,

If this low earth resistance cannot be achieved a RCD

Earth loops Earth loops must be avoided:

Procedure 1: with protective conduit

cable metal protection pipe