Monitoring The Concentration of Carbon Dioxide by Measuring The Change in The Resistance of Tio Nanowires Doped With Potassium
Monitoring The Concentration of Carbon Dioxide by Measuring The Change in The Resistance of Tio Nanowires Doped With Potassium
Monitoring The Concentration of Carbon Dioxide by Measuring The Change in The Resistance of Tio Nanowires Doped With Potassium
Abstracts
The usage of the gas sensor has been increasing very rapidly in industry and in daily life for
various potential applications. In recent years, metal oxide semiconductors have become the
primary choice for designing highly sensitive, stable, and low-cost real-life applications-
based gas sensors due to their inherent physical and chemical properties. In this study, the K-
doped TiO2 nanowires showed the possibility of use as a sensing material due to their
consistent response to the presence of CO 2 gas. The reproducibility of sensor assembly has
been proved by testing seven different sensors fabricated using the same procedure. In
addition, treatment with H2 plasma improved the sensitivity of the CO 2 gas sensor made of K-
doped TiO2 nanowires. The sensing mechanism was attributed to electron adsorption to the
TiO2 as a result of CO2 reduction on the surface of K-doped sites. It reduces the hole
K-doped TiO2 increases depending on the amount of CO2 adsorption. This development
suggests opportunities for the fabrication of simple, inexpensive CO 2 microsensors with low
power consumption.
1. Introduction
Gas sensors have been developed to monitor the presence of carbon dioxide (CO 2) in
the environment because of its significant role in global warming. Recently the partial
pressure of CO2 gas generally ranges from 410 to 420 ppm ((https://gml.noaa.gov/ccgg/,
the concentration of CO2 in the atmosphere in order to understand its impact on climatic
change. In addition to its effect on climate change, CO 2 gas also has a significant effect on the
corrosion rate of the industrial equipment used in chemical processing and the combustion
negative effects, small, inexpensive, reliable solid-state CO 2 gas sensors with low power
consumption have been in high demand for several years ((K. Sahner, A. Schulz, J. Kita, R.
Gao. Metal Oxide Gas Sensors: Sensitivity and Influencing Factors. Sensor. 10, 2088-2106.
(2010).)).
atoms that are covalently bonded to a single carbon atom. The central carbon atom is
connected to two oxygen atoms, and there are no lone pairs of electrons around the central
atom. Therefore, carbon dioxide has a linear geometry, so the angle of the O−C−O bond is
number of CO2 sensing materials exist due to the stable chemical properties of CO 2 gas ((J.
Sensors and Actuators B. 65, 199-203. (2000).)). Currently, the most common type of CO 2
sensor is a potentiometric device that consists of either an Na + or an Li+ electrolyte and alkali
metal carbonate sensing electrodes. The potentiometric CO 2 sensors are promising because
they show satisfactory EMF signals over a wide range of gas concentrations at high
temperatures ((J-S. Lee, J-H. Lee, S-H. Hong. NASICON-based amperometric CO2 sensor
using Na2CO3–BaCO3 auxiliary phase. Sensors and Actuators B. 96, 663–668. (2003).))’((I.
Lee, S.A. Akbar. Potentiometric carbon dioxide sensor based on thin Li 3PO4 electrolyte and
Li2CO3 sensing electrode. Ionics. 20, 563–569. (2014).)). Most existing CO2 sensors are large,
bulky devices that involve complicated fabrication processes. Because of its numerous
negative effects, small, inexpensive, reliable solid-state CO 2 gas sensors with low power
consumption have been in high demand for several years ((K. Sahner, A. Schulz, J. Kita, R.
Gao. Metal Oxide Gas Sensors: Sensitivity and Influencing Factors. Sensor. 10, 2088-2106.
(2010).)).
leads to a change in the electrical conductance (or resistance) of metal oxides as a result of
the charge-carrier transfer ((G.F. Fine, L.M. Cavanagh, A. Afonja, R. Binions. Metal oxide
The surface reaction of metal oxide sensors is driven by many factors, such as
semiconducting nature (n-type or p-type), target gas (reducing or oxidizing gas), size, and
morphology.
Thus, we report the possibility of using nanocrystalline TiO 2 doped with potassium as a
resistive CO2 sensing material, which we have demonstrated successfully for the detection of
CO2 gas. In this work, we investigated the feasibility of using K-doped TiO 2 nanowires for
the detection of CO2 gas, and the effect of the H2 plasma treatment of the nanowires on their
detection sensitivity.
2. Experimental methods
the presence of KOH. Thin films of Ti were prepared by using a DC magnetron sputtering
system. Before deposition, we used a turbo molecular pump to reduce the pressure in the
chamber down to less than 1 10-7 Torr. A water-cooled Ti target, which had a diameter of 3
inches and a purity of 99.99%, was mounted at a distance of 13 cm from the substrate holder.
A pure, thin film of Ti was deposited at a constant operational pressure, i.e., 5 mTorr, in Ar
(99.999%) flowing at 45 sccm by heating the substrate to 400 C. A constant DC power of
120 W was maintained. The deposition time of Ti metal thin film was 20 minutes, and the
For the fabrication of the TiO2 nanowires, one drop (2 mL, area of ~1 cm 2) of a 1 wt%
aqueous solution of KOH (Aldrich, 99+%) was placed at the center of the Ti deposited on the
substrate. Then, the substrate was inserted into a quartz tube and placed in a horizontal tube
furnace (Lindberg, TF55035A) for the heat treatment. First, the tube was purged with 5% H 2
balanced with Ar gas flowing at a rate of 1000 mL/min for 10 min, and then the tube was
heated to 150 °C at a ramping rate of 5 °C/min. After 30 min at 150 °C, the temperature of
the furnace was increased at the rate of 30 °C /min to 650 °C, at which it was maintained for
4 hours in the humid Ar gas that was flowing at the rate of 50 mL/min. The humid gas was
prepared by bubbling the Ar gas through DI water at room temperature. The humidity was
monitored by a humidity sensor (HMP234, Vaisala), and the relative humidity of the gas was
maintained at approximately 60%. After heat treatment, the sample was cooled to room
temperature rapidly by air quenching to minimize the oxidation of the sample while it was
cooling.
After the growth of the nanowires, the samples were washed with deionized water for
24 hr until the pH reached about 7 with stirring to remove any excess KOH. Then, the
samples were dried at 60 °C for 24 hr. X-ray diffraction (XRD) patterns of the products were
2θ, ranging from 20o to 60o. Field emission scanning electron microscopy (FESEM, Model
Sensing tests were performed by attaching Au electrodes and Au lead wires on top of
the TiO2 nanowires on the Al2O3 substrate, as shown in Figure 1. The Au electrodes were
cured at 500 C for 1 h. The sensor was held in a tube furnace and heated from 500 C at
different H2 levels from 2% to 10%, and then CO 2 gas was introduced into the furnace. The
response of the sensor was observed in the range of 500 to 2500 ppm of CO 2, and the change
To improve their sensitivity, the K-doped TiO 2 nanowires were treated with H 2
plasma at 350 °C. H2 Plasma treatments were performed with ICP source frequency 2 MHz
and power 30 W. The RF frequency applied to the chuck was 13.56 MHz, with the chuck
power 200W. H2 gas flow rate was 50 sccm. The source power controls the ion density in the
plasma, while the chuck power determines the energy of ions in plasma.
3. Results
interrupted after 5 min and then surface morphology was investigated as shown in Fig. 1(a).
Small islands were formed, and the separate islands grew into short nanowires. If the
potassium was not continuous on the surface of Ti thin film and consisted of particles smaller
than 5 nm, the K particle could have acted as a catalyst to adsorb oxygen. Therefore, the
adsorption of oxygen is more predominant on K particles than others. Due to the difference of
oxygen supply, the growth rate of TiO 2 on the K particles might be drastically faster than that
of the sides, thus causing them to survive and maintain their morphology. After 30 min heat
treatment, as seen in Fig. 1(b), the Ti thin film shows well-formed nanowires that their
lengths were up to 5 μm with 5nm or less in diameter. The density of the nanowires was so
high and uniform on the entire area of the substrate that many of the nanowires were made
into large bundles. It is interesting to recognize that Some nanowires exhibit a rectangular
cross-section while others consist of connected polyhedral, as shown in Fig. 1(c) based on
There was no growth of the nanowires unless the KOH was used, and most of the Ti
film was oxidized easily after the heat treatment. Therefore, the amount of oxygen or the
oxidation sites on the thin film of Ti should be limited. KOH played an important role in the
formation of the TiO2 nanowires ((T. Zaremba, D. Witkowska. Effect of potassium titanate
For the growth of TiO2 nanowires in a limited oxygen atmosphere, Ti always has to
be available at the droplets by the diffusion of Ti. In order to check this assumption, the
diffusion length of a Ti cation can be used. The chemical diffusivity (D) of Ti cation
interstitials in a single crystal rutile TiO2 in the temperature ranges of 900 ~ 1400 K was
reported by Radecka et al. ((M Radecka, P Sobaś, M Rekas. Ambipolar Diffusion in TiO2.
Solid State Ionics. 119(1–4), 55-60. (1999).)), and they presented the equation of the
From equation (1), the diffusion length of titanium interstitials at 800 °C for 30 min is
In related previous work, potassium iodide was used as a catalyst for the growth of
tungsten oxide nanoribbons, and it was proposed that the nanoribbons grew by a vapor–
liquid–solid (VLS) mechanism from a liquid K-W-O alloy ((K. Q. Hong, W. C. Yiu, H. S.
Wu, J. Gao M. H. Xie. A simple method for growing high quantity tungsten-oxide
nanoribbons under moist condition. Nanotechnology. 16, 1608-1611. (2005).)). The results of
this earlier work may indicate that the likely mechanism for the growth of the K-doped TiO 2
nanowires from the K-Ti-O alloy droplets was similar to that of the tungsten oxide
nanoribbons from a K-W-O alloy. In general, the VLS mechanism has a eutectic reaction for
the liquid phase at the temperature of the heat treatment. However, there were no caps of the
catalyst at the end of the nanowires, which is a well-known characteristic of the VLS
on Aspects of their Growth and their Electrical Properties. Advanced Materials. 21, 2681–
2702. (2009).))’((V.G. Dubrovskii, G.E. Cirlin, N.V. Sibirev, F. Jabeen, J.C. Harmand, P.
Werner. New Mode of Vapor−Liquid−Solid Nanowire Growth. Nano Letters. 11(3), 1247–
1253. (2011).)). Thus, there also is the possibility of growth by the VSS (vapor-solid-solid)
mechanism. On the surface of thin film of Ti, potassium can adsorb oxygen easily at the
limited oxygen atmosphere, so the oxidation of the thin film of Ti is more pronounced on
potassium. One-dimensional TiO2 can grow because of the role of the potassium ((H. Kim, H.
Na, J. Yang, D. Kim. Growth, structural, Raman, and photoluminescence properties of rutile
TiO2 nanowires synthesized by the simple thermal treatment. Journal of Alloys and
The XRD pattern indicated that the rutile phase was stable (JCPDS card: No 21-
1276). The dominant peaks at 26.9°, 53.7°, and 55.8° can be assigned to rutile-TiO 2 (110),
NiOx doped TiO2 thin films. Thin Solid Films. 517, 2775–2780. (2009).)), as shown in Fig.
2(a). A strong (110) peak indicates preferential growth along c-axis parallel to the plane. The
XRD pattern also shows narrow and sharp peaks indicating good crystalline characteristics of
the samples. Fig. 2(b) shows the data of Energy Dispersive X-ray spectroscopy (EDX) was
performed in the SEM mode, and an EDX examination of the nanowires indicated that they
Fig. 3 shows the resistance changes to the CO 2 concentration from 500 ppm to 2500
ppm at 500 °C on as-grown, K-doped TiO2 nanowires. The sensing test temperature was 500
C, and the level of the H 2 background gas varied from 2% to 10%. Since the as-grown K-
doped TiO2 nanowires were p-type semiconductors and CO2 was categorized as a reducing
species, the resistance of the nanowires increases when they are exposed to CO 2 ((C.S.
Huang, B.R. Huang, C.H. Hsiao, C.Y. Yeh, C.C. Huang, Y.H. Jang. Effects of the catalyst
pretreatment on CO2 sensors made by carbon nanotubes. Diamond & Related Materials. 17,
624–627. (2008).)). The baseline of the sensors drifted slightly in air, and this observation is
being investigated further. Sensitivity (S) was defined as the ratio of [(R CO2−Ra) / Ra]×100,
where RCO2 is the resistance of the nanowires when they are exposed to specific
Fig. 4(a) shows the sensitivity changes of the K-TiO 2 nanowire sensor at sensing
temperatures for different levels of H2 background gas. The sensitivity is defined as the
resistance of the sensor at a given concentration of the target gas (saturated R values in Figure
3) normalized by the resistance in the absence of the target gas (R0). Although the sensitivity
at a CO2 concentration of 500 ppm did not depend significantly on the levels of background
H2 gas, the sensitivity was improved by increasing the level of H 2 background gas at high
concentrations of CO2. According to this result, hydrogen on the surface of TiO 2 nanowires
Fig. 4(b) shows the sensitivity at post H 2 plasma treatment with different times. The
sensitivity of the as-grown nanowires was 6.6% at a CO 2 concentration of 500 ppm. After
treatment with the H2 plasma for 5 min, the sensitivity increased from 6.6% to 9.5% at the
CO2 concentration of 500 ppm. The improvement of the sensitivity was not dependent on the
time of the plasma treatment. After the H 2 plasma treatments for times ranging from 5 to 20
min, the improvements were similar. This improvement might be due to physical and
chemical effects from ion bombardment, surface charges, and etching by the H 2 plasma ((A.
Prim, E. Pellicer, E. Rossinyol, F. Peiró, A. Cornet, J.R. Morante. A novel mesoporous CaO-
loaded In2O3 material for CO2 sensing. Advanced Functional Materials. 17, 2957–2963.
(2007).)). Hydrogen ion bombardment might modify the surfaces of the nanowires and create
dangling bonds that can react easily with CO 2 and produce hydrocarbonates on the nanowires
((Qiang Wang, Zhanhu Guo, Jong Shik Chung. Formation and structural characterization of
potassium titanates and the potassium ion exchange property. Materials Research Bulletin.
44(10), 1973-1977. (2009).)). The H2 plasma treatment on TiO2 is related to the number of
oxygen vacancies and Ti3+. The H2 plasma treatment might create electron-hole separation in
TiO2 and then enhances the surface-active states of TiO 2 by changing its electronic structure
from TiO2 (Ti4+) to Ti2O3 (Ti3+). This behavior makes a positive contribution to absorbing O 2
ions on TiO2 exposed to air, the sensitivity of the sensor can be enhanced by increasing the
hole accumulation layer on the surface of TiO 2. ((Shang-Chou Chang, Tsung-Han Li, Huang-
Oxide Films Applied in Low Emissivity Glass. Int. J. Electrochem. Sci., 16 1-8. (2021).))
((R. Wimmer-
Teubenbacher, F.
Sosada-Ludwikowska,
B.Z. Travieso, S.
Electron-
Defregger, O.
beam
Tokmak, J.S. Niehaus,
Au- lithograp
CO2/20 M. Deluca, A. Köck.
functionali hy, 300 365% 258 s/264 s 14 days/NA
00 ppm A. CuO thin films
zed CuO thermal
functionalized with
evaporati
gold nanoparticles for
on
conductometric carbon
dioxide gas
sensing. Chemosensor
s, 6, 56. (2018).))
((A. Chapelle, I. El
Younsi, S. Vitale, Y.
Thimont, T. Nelis, L.
Presmanes, A.
Barnabé, P. Tailhades.
RF Improved
CuO/ CO2/50
sputterin 250 40 3300 s/480 s NA/NA semiconducting
CuFe2O4 00 ppm
g CuO/CuFe2O4 nanostr
uctured thin films for
CO2 gas sensing. Sens.
Actuators B
Chem. 204, 407–413.
(2014).))
The sensing results reported on p-type metal oxides towards CO 2 are summarized in
Table 1. Compared with other research about CO2 sensors, the K-doped TiO2 nanowire-based
sensor exhibited reasonable performance about both of response/recovery time and sensitivity
because of the increased surface area and the H 2 plasma treatment. In the case of the K-doped
TiO2 nanowire sensor, the 80% response time for the CO 2 gas was about 1~2 min, and the
fabricated using the same procedure. Fig. 5 plots the sensitivity values of the sensor with H 2
treatment 20min towards 500ppm CO2 concentration. The maximum sensitivity was 10.1 and
the minimum was 9.1, with a standard deviation of 0.32. To check long-term stability,
sensing behaviors were investigated for 30 days, with measurements taken every 2-3 days.
Fig. 5 shows that the sensitivity values at 500 ppm CO 2 were stable during this test period.
The worst sensor shows about 10% variation, however there is no continuous degradation of
the sensor during the trials. Therefore, we can attribute this to natural variation and assume
4. Discussion
surface of TiO2 results in the transfer of carrier charges between the gas and the TiO2, which
permits tuning of the electrical resistance. As TiO 2 is exposed to air, oxygen usually can be
adsorbed in three forms: molecular O2−, atomic O− and O2− species ((H.J. Kim, J.H. Lee.
Highly sensitive and selective gas sensors using p-type oxide semiconductors:
Overview. Sens. Actuators B Chem. 192, 607–627. (2014).)). Once oxygen ions are
chemisorbed, the concentration of free charge carriers (holes) increases in p-type materials.
Chemisorbed oxygen species can form a hole-accumulating layer near the TiO 2 surface.
When a targeting gas is introduced after chemisorption of O 2, it reacts with adsorbed oxygen
and may chemisorb by transferring electrons to the TiO 2. Accordingly, the recombination of
electron holes increases, narrowing the accumulation layer. Hence, the resistance of
chemical sensors because of their large surface areas. In addition, the sensitivity improvement
also was contributed by the incorporation of the hydroxyl group (OH) on the surface of the
base metal oxide sensor ((Qiang Wang, Zhanhu Guo, Jong Shik Chung. Formation and
structural characterization of potassium titanates and the potassium ion exchange property.
Materials Research Bulletin. 44(10), 1973-1977. (2009).)). Two possible mechanisms could
be explained for the sensitivity improvement by the KOH droplets. First, a local depletion
area around the KOH droplets could have formed on the surface of the nanowire as a result of
a charge transfer between the KOH droplets and the TiO2 nanowire ((M.M. Arafat, B. Dinan,
S.A. Akbar, A.S.M.A.Hseeb. Gas Sensors Based on One Dimensional Nanostructured Metal-
Oxides: A Review. Sensors. 12, 7207 (2012).)). Atomic oxygen species dissociated on the
KOH droplets with strong catalytic abilities could make hydroxyl ions (OH -) as reaction sites
to absorb CO2 onto the surface of the nanowire. The other mechanism could be explained by
the TiO2 surface reaction. The surface of TiO2 can react immediately with hydrogen or humid
air and form hydroxyl groups. When the surface of the TiO 2 is fully hydroxylated, the oxide
ions in the oxide and hydrogen or humid air absorbed on the surface would form hydroxyl
groups ((Chung-Yi Wu, Kuan-Ju Tu, Jin-Pei Deng, Yu-Shiu Lo, and Chien-Hou Wu.
Markedly Enhanced Surface Hydroxyl Groups of TiO2 Nanoparticles with Superior Water-
Dispersibility for Photocatalysis. Materials. 10(5), 566. (2017).)). Surface bridging hydroxyls
could modulate the surface property of TiO 2 significantly, thereby improving its reactivity
with CO2.
Introducing noble metals such as Au, Ag, Pt, and Pd is one of the most effective and
widely used methods for improving the gas sensing response in the case of metal oxide
sensing materials. Firstly, adsorption activation energy is decreased, which can improve the
sensing response ((R. Zhou, X. Lin, D. Xue, et al. Enhanced H 2 gas sensing properties by Pd-
(2018).)). Another effect of doping with another metal is that it changes the size, porosity and
surface area of the metal oxide. As a result, gas molecules adsorption sites and diffusion
paths are modified ((H. Ji, W. Zeng, Y. Li. Gas sensing mechanisms of metal oxide
doping with another metal causes the reduction in grain size. When the size of the grain is
less than twice of the length of the Debye then the entire grain size is occupied by the
electron depletion layer. Therefore, the gas sensing property of metal oxide is improved ((H.
Chen, J. Hu, G-D. Li, Q. Gao, C. Wei, X. Zou. Porous Ga–In bimetallic oxide nanofibers
with controllable structures for ultrasensitive and selective detection of formaldehyde. ACS
can be integrated easily into a sensor array to detect various gases and to provide signals for
automatic control systems. To the best of our knowledge, this is the first time it has been
demonstrated that K-doped TiO2 nanowire sensing material can respond to various
concentrations of CO2 gas in a significant and consistent way. This development creates
opportunities for the fabrication of simple, inexpensive CO 2 microsensors with low power
There are still some questions which cannot be explained by using the existing gas
sensing mechanism. Therefore, it is necessary to do more research in this topic for a better
understanding of the topic. In this area, more experiments are required using modern
techniques such as situ analysis to know about the effect of different types of gas sensing
mechanism on the performance of gas sensors. Further exploration will include expanding the
detection range of CO2 concentration, reducing the operational temperature, and improving
5. Conclusion
Traditionally, transition metal oxides, such as TiO2 and SnO2, have been used
extensively in gas sensor applications for reactive gases such as CO and H2 because of the
changes in their electrical conductivities in the presence of a target gas. However, to date,
limited research about a CO2 sensor that uses transition metal oxide has been reported. K-
doped TiO2 nanowires are promising as potential CO2 gas sensors. After treatment with H2
plasma, the sensor showed greater sensitivity to CO 2 gas. Nevertheless, due to the inherent
nanowires are not straightforward tasks and require further research and development.
Although additional research is needed to detect the variable range of CO 2 concentration, and
to stabilize the baseline by investigating the interference with other gases including humidity,
the results of this study indicate that the K-doped TiO 2 nanowires provide a promising
opportunity for the development and use of simple, inexpensive CO2 microsensors.
performances. Nanowires have been the subject of considerable attention in the last few
years. Several characteristics of p-type metal oxide nanowires, such as high surface-area-to-
volume ratios and high carrier-charge transport, make them a promising choice for the
fabrication of chemical sensors. Indeed, a few problems remain, such as a lack of selectivity
and high working temperatures, which require surface or bulk modification order to be
resolved.
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