Edwards_GX_Dry_Pumps_Product_Brochure

A547-00-880
Issue D Original
Instruction Manual
GX Dry Pumping System
Item Item
Description Description
Number Number
GX100L 200 V-230 V 50/60 Hz A547-10-958 GX100N 380 V-460 V 50/60 Hz A547-11-959
GX100L 380 V-460 V 50/60 Hz A547-10-959 GX100NT 200 V-230 V 50/60 Hz A547-41-958
GX100LT 200 V-230 V 50/60 Hz A547-40-958 GX100NT 380 V-460 V 50/60 Hz A547-41-959
GX100LT 380 V-460 V 50/60 Hz A547-40-959 GX300N 200 V-230 V 50/60 Hz A547-21-958
GX100Ti 200 V-230 V 50/60 Hz A547-46-958 GX300N 380 V-460 V 50/60 Hz A547-21-959
GX600L 380 V-460 V 50/60 Hz A547-30-959 GX1000N 400 V 50/60 Hz A547-81-959
GX100N 200 V-230 V 50/60 Hz A547-11-958
Declaration of Conformity
We, Edwards,
Manor Royal,
Crawley,
West Sussex, RH10 9LW, UK
declare under our sole responsibility, as manufacturer and person within the EU authorised
to assemble the technical file, that the product(s)
GX100L 200-230V 50/60Hz A547-10-958 GX100N 200-230V 50/60Hz A547-11-958

GX100L 380-460V 50/60Hz A547-10-959 GX100N 380-460V 50/60Hz A547-11-959
GX100TI 200V-230V 50/60Hz A547-46-958 GX600N 200-230V 50/60Hz A547-31-958
GX600L 200-230V 50/60Hz A547-30-958 GX600N 380-460V 50/60Hz A547-31-959
GX600L 380-460V 50/60Hz A547-30-959 GX1000N 200-230V 50/60Hz A547-81-958
GX1000N 400V 50/60Hz A547-81-959
to which this declaration relates is in conformity with the following standard(s) or other
normative document(s)
EN1012-2:1996, A1: 2009 Compressors and Vacuum Pumps. Safety Requirements.

Vacuum Pumps
EN61010-1: 2001 Safety Requirements for Electrical Equipment for Measurement,
Control and Laboratory Use. General Requirements
EN 61326-1: 2006 Electrical equipment for measurement, control and laboratory
Use. EMC requirements. General requirements.
UL61010A: 2002 Safety requirements for electrical equipment for measurement,
Control and laboratory use – Part 1: General requirements
SEMI S2-0703 Environmental Health and Safety Guideline for semiconductor
Manufacturing Equipment.
and fulfils all the relevant provisions of
2006/42/EC Machinery Directive

2006/95/EC Low Voltage Directive
2004/108/EC Electromagnetic Compatibility (EMC) Directive
Note: This declaration covers all product serial numbers from the date this Declaration was
signed onwards.
9 December 2009
P200-01-980 Issue B
Sia Abbaszadeh, Chief Technical Officer Date and Place
This product has been manufactured under a quality system registered to ISO9001
P601-00-700
Issue D
Product Information for China
Equipment types:
iH Vacuum Pump Range GX Vacuum Pump Range DiHxK Vacuum Pump Range
iF Vacuum Pump Range iHxK Vacuum Pump Range DiFxK Vacuum Pump Range
iGX Vacuum Pump Range iFxK Vacuum Pump Range EPX Vacuum Pump Range
iPX Vacuum Pump Range iQ/QDP/QMB Vacuum Pump Ranges iL Vacuum Pump Range
Product Label Overshipper Label Pallet Marking
20
NW
CB
Indicates toxic or hazardous substance contained Recyclable Cardboard Recyclable Natural Wood
in at least one of the homogeneous materials used
for this part is above the limit requirement in
SJ/T11363-2006.
Environmental Protection Use Period is 20 years.
Materials Content Declaration & Environmental Protection Use Period
The Chinese regulatory requirement on the Control of Pollution Caused by Electronic Information Products No. 39
(also known as ‘China RoHS’) mandates that manufacturers of certain categories of electronic products sold in
China after 1st March 2007 –
 Mark the product and packaging
 Define the Product’s Environment Protection Use Period (EPUP)
 Provide a Materials Content Declaration.
Environmental Protection Use Period (EPUP)
This is the period in years during which the toxic or hazardous substances or elements contained in this product
will not leak or mutate under normal operating conditions so that the use of such electronic information products
will not result in any severe environmental pollution, any bodily injury or damage to any assets.
The Environmental Protection Use Period is 20 years for this product.
For the purposes of EPUP, normal operating conditions are considered to be use in accordance with the product’s
instruction manual.
Materials Content Declaration
Toxic or Hazardous Substances and Elements

Part name Hexavalent Polybrominated
Lead Mercury Cadmium Polybrominated
Chromium diphenyl ethers
(Pb) (Hg) (Cd) biphenyls (PBB)
(Cr VI) (PBDE)
Cartridge O O X X O O
Enclosure O O X X O O
Electronics and
X O X X O O
Controls
Cooling system O O X X O O
Purge system O O X X O O
O: Indicates that this toxic or hazardous substance contained in all of the homogeneous materials for this
part is below the limit requirement in SJ/T11363-2006.
X: Indicates that this toxic or hazardous substance contained in at least one of the homogeneous materials
used for this part is above the limit requirement in SJ/T11363-2006.
Note 1. Table applies to all product types listed above.

This page has been intentionally left blank.
A547-00-880 Issue D
Contents
Contents
Section Page
1 Introduction ....................................................................................... 1
1.1 Scope and definitions ................................................................................................... 1
1.2 Applications ............................................................................................................... 2
1.3 The GXL system .......................................................................................................... 3
1.4 Priority of control ........................................................................................................ 5
1.5 Active utility control .................................................................................................... 5
2 GX Dry pumping system .......................................................................... 7

2.1 Technical data ........................................................................................................... 7
2.2 Electrical data ............................................................................................................ 8
2.3 Loading .................................................................................................................... 8
2.4 Connections ............................................................................................................... 9
2.5 General data ............................................................................................................. 10
3 Installation ....................................................................................... 11
3.1 Locate the GX system ..................................................................................................12
3.2 Lubrication ............................................................................................................... 13
3.3 Connect the GX system to your vacuum/exhaust system and interstage connection (if fitted) ...........13
3.4 Connect to your factory extraction system (optional) ............................................................14
3.5 Connect the nitrogen supply (if provided) .......................................................................... 14
3.5.1 Flammable/pyrophoric materials .................................................................................... 14
3.5.2 Gas Purge ................................................................................................................ 15
3.6 Leak-test the GX system ...............................................................................................15
3.7 Connect the electrical supply to the dry pumping system .......................................................15
3.8 Connect an additional RF earth (ground) (optional) ..............................................................18
3.9 Connect to your emergency stop circuit ............................................................................ 18
3.10 Connect the cooling-water hoses ..................................................................................... 19
3.11 Accessories ............................................................................................................... 20
3.12 Commission the GX system ............................................................................................20
3.13 Install additional safety equipment .................................................................................. 24
4 Operation ........................................................................................ 25
4.1 Start-up .................................................................................................................. 25
4.2 Status indicators ........................................................................................................26
4.3 Manual shut-down ......................................................................................................26
4.4 Automatic shut-down ..................................................................................................27
4.5 Unplanned shutdown and alarms ..................................................................................... 27
4.6 Emergency stop .........................................................................................................27
4.7 Restart the pump after an emergency stop or automatic shut-down .......................................... 28
4.8 Single equipment monitor (SEM) ..................................................................................... 28
5 Maintenance ..................................................................................... 29
5.1 Safety and maintenance frequency .................................................................................. 29
5.2 Relocate the system for maintenance ............................................................................... 30
5.3 Draining the cool water ................................................................................................31
5.4 Cleaning the pump ......................................................................................................32
6 Transportation, storage and disposal ........................................................ 33

dcs/8073/07/08
6.1 Transportation ..........................................................................................................33

6.2 Storage ................................................................................................................... 33
© Edwards Limited 2012. All rights reserved. Page i

Edwards and the Edwards logo are trademarks of Edwards Limited.
A547-00-880 Issue D
Contents
6.3 Disposal ................................................................................................................... 33
7 Service, spares and accessories .............................................................. 35

7.1 Introduction ............................................................................................................. 35
7.2 Service .................................................................................................................... 35
7.3 Ordering accessories ...................................................................................................36
For return of equipment, complete the HS Forms at the end of this manual.
Illustrations
Figure Page
1 GX applications chart ................................................................................................... 2
2 The controls/connectors ................................................................................................ 3
3 The rear status panel LED indicators ................................................................................. 4
4 The front panel controls ................................................................................................ 4
5 Priority of control ........................................................................................................ 5
6 Centre of gravity and levelling foot loads ........................................................................... 8
7 System arrangement to reduce effective footprint (if required) ............................................... 12
8 High and low volt coding pin arrangement ......................................................................... 17
9 Method for connecting phase wires .................................................................................. 18
10 Connections to emergency stop circuit (systemable) .............................................................19
11 Installing 3/8 inch quick connect fittings (provided) .............................................................21
12 Gas module access panel ..............................................................................................22
13 Flow tube (14 slm) ......................................................................................................23
14 Flow tube (4 slm) .......................................................................................................23
Tables
Table Page
1 Technical data ........................................................................................................... 7
2 Technical data ........................................................................................................... 7
3 Electrical data ............................................................................................................ 8
4 Centre of gravity and levelling foot loads (Refer to Figure 6) .................................................... 8
5 GX connector types ...................................................................................................... 9
6 Technical data ..........................................................................................................10
7 Safety sensors ...........................................................................................................27
8 Accessories ............................................................................................................... 36
Page ii © Edwards Limited 2012. All rights reserved.

A547-00-880 Issue D
Introduction
1 Introduction
1.1 Scope and definitions
This manual provides installation, operation and maintenance instructions for the Edwards GX dry pumping systems.
You must use your pumping system as specified in this manual.
Read this manual before you install and operate your pump. Important safety information is highlighted as WARNING
and CAUTION instructions; you must obey these instructions. The use of WARNINGS and CAUTIONS is defined below.
WARNING
Warnings are given where failure to observe the instruction could result in injury or death to
people.
CAUTION
Cautions are given where failure to observe the instruction could result in damage to the equipment, associated
equipment and/or process.
The units throughout this manual conform to the SI international system of units of measurement.
In accordance with the recommendations of IEC1010, the following warning labels are on the pump:
Warning - refer to accompanying documentation.
Warning - risk of electric shock.
Warning - hot surfaces.
Warning - moving parts present.
Warning - heavy object.
RF earth (ground).
© Edwards Limited 2012. All rights reserved. Page 1

A547-00-880 Issue D
Introduction
Protective earth (ground).
Warning - use protective equipment.
Warning - pressurised.
Warning - Risk of explosion.
Material Safety Data Sheets for chemicals supplied by Edwards can be obtained by contacting Edwards.
1.2 Applications
If you use the GX system on an application for which it is not suitable (refer to Figure 1), you may invalidate your
warranties. If in doubt, contact Edwards who will advise you as to the suitability of the GX system for any particular
application.
Figure 1 - GX applications chart
Page 2 © Edwards Limited 2012. All rights reserved.

A547-00-880 Issue D
Introduction
Note: This product is not ATEX compliant, a range of ATEX compliant pumping systems are available, contact
Edwards for details.
1.3 The GXL system

Pumping a chemical that will attack the materials in contact with these process materials may, over time, result in
the internal contents of the pump becoming exposed to the external environment, which may constitute a safety
hazard. If in doubt, contact Edwards who will advise you as to the suitability of this pump for any particular
application.
It is also a feature of this pump design that process gases are contained within the gearbox. This pump is not suitable
for use with flammable, hazardous, toxic or corrosive gases or material.
Figure 2 - The controls/connectors
Item Control/connector identification Item Control/connector identification

1 Protective earth (ground) M5 15 Lifting eyebolt
2 Electrical supply connection 16 Pumped gas inlet connection
3 Rear status panel 17 RF earth (ground) cable
4 Comms 4 - MicroTIM connection (if fitted) 18 Interstage connection (if fitted)
5 Ethernet active LED 19 Seismic bracket (if fitted, 4 off)
6 Ethernet installed LED 20 Gas Module access panel
7 Comms 3 Ethernet connection 21 Nitrogen purge port
8 Comms 2 - LON module connection 22 Cooling-water supply connection
9 Comms 1 - System control/PDT 2 connection 23 Castors (3 off)
10 Gate valve interface (EMO on T variant) 24 Levelling feet (4 off)
11 EMS* 25 Cooling-water return connection
12 Accessory module interface* (Not used) 26 RF earth (ground) stud M6
13 GRC interface* 27 Exhaust gas outlet connection
14 Extraction port 28 Leak-test port
* Not on T variants

A547-00-880 Issue D
Introduction
Figure 3 - The rear status panel LED indicators
Item Indication
1 Power OK (green)
2 Running (green)
3 Warning (Amber)
4 Alarm (Red)
5 Tool control (Green)
Figure 4 - The front panel controls
Item Control/connector identification

1 EMS button*
2 Start button
3 Stop button
4 AUC LED (green)
5 Local control button/LED (green)
6 Alarm LED (red)
7 Warning LED (amber)
8 Running LED (green)
9 Power OK LED (green)
10 Comms 5 pump display terminal (PDT1) connection
* Not on T variants

A547-00-880 Issue D
Introduction
1.4 Priority of control
The GX system can be controlled by a number of modules: the Pump Display Terminal (PDT), from the tool through
the MicroTIM, or from the front panel local control membrane (refer to Figure 4). Only one of these can have control
of the GX system at any one time. That is, once one of these has control of the GX system, control requests from the
other are denied.
The PDT indicates who is in control. LEDs are also provided on the rear panel, front panel or PDT, which illuminate
to indicate 'in control'. Please refer to Figure 5.
1.5 Active utility control

Active Utility Control (AUC) is available on the GX system. This function reduces the power of the GX system while
on stand-by. The power reduction is achieved by reducing the rotational speed of the GX pump.
The AUC functionality is controlled by the on/off process signal from the Tool Interface Module (TIM).
Figure 5 - Priority of control
1. PDT 1
2. PDT 2
3. System controller
4. LON
5. Front panel
6. None in control
Take
Release

A547-00-880 Issue D

A547-00-880 Issue D
GX Dry pumping system

2 GX Dry pumping system
2.1 Technical data
Table 1 - Technical data
Type Characteristics 100 300 600 1000 Units

General Dimensions (L x W x H)* 693 x 280 693 x 280 693 x 280 693 x 280 mm
x 394 x 694 x 694 x 694
Mass (excluding packaging) 120 200 220 230 kg
†
Noise level (at ultimate) < 60 < 55 < 55 < 55 dB(A)
Vibration level at inlet < 1.5 < 1.5 < 1.5 < 1.5 mm s-1
Vibration to the floor (when docked) < 0.05 < 0.05 < 0.05 < 0.05 mm s-1
Initial force to push the pump 0.06 0.09 0.10 0.11 kN
Sustained force to push the pump 0.04 0.06 0.07 0.07 kN
Warm up time to nominal pumping 15 15 15 15 minutes
performance
Minimum warm up time to process 2 2 2 2 hours
gas pumping
Performance Typical peak pumping speed (no gas 100 300 600 800 m3h-1
purge/cold pump)
Ultimate (shaft seal purge only) 0.005 0.0007 0.0007 0.0007 mbar
Water-cooling Minimum flow rate required 1 2 2 2 l min-1
system
Typical heat removed from the 1 1.6 1.6 1.7 kW
system
Connections Pump inlet flange (bolted) ISO63 ISO63 ISO100 ISO100
Exhaust gas outlet NW25 NW25 NW25 NW25
Extraction port 50 50 50 50 mm dia
*
Refer to Web for installation drawings.
†
Check valve accessory fitted.
Type Characteristics L N TI Units

Gas system Nitrogen supply pressure range 2.5 to 6.9 2.5 to 6.9 bar gauge
Stability of supply ± 1.4 ± 1.4 bar gauge
Nitrogen supply quality <0.01 <0.01 µm
Nitrogen flow rate 14 14 slm
Gas module pressure 2 2 bar gauge
Interstage (I) Peak pumping speed, interstage 2.5 m3h-1
Ultimate, interstage 0.1 mbar
Pump interstage flange NW16

A547-00-880 Issue D
2.2 Electrical data
Table 3 - Electrical data
200/230 50/60 Hz 380/460 50/60 Hz

Supply voltage and frequency
100 300 600 1000 100 300 600 1000
Full load (A) 12 22 22 22 8 14 14 14
Booster motor rating (kW) 1.9 1.9 1.9 1.9 1.9 1.9
Pump motor rating (kW) 1.9 1.9 1.9 1.9 1.9 1.9 1.9 1.9
2.3 Loading
Table 4 - Centre of gravity and levelling foot loads (Refer to Figure 6)
100 300 600 1000

A 510 510 510 510
B 246 266 243 243
Centre of gravity C 103 107 108 108
D 216 216 216 216
E 167 287 311 310
1 26 45 56 56
2 35 58 55 55
Levelling foot loads
3 28 43 61 61
4 31 54 48 48
Figure 6 - Centre of gravity and levelling foot loads

A547-00-880 Issue D

2.4 Connections
Table 5 - GX connector types
Mating connector description/ external

Description Internal supply rating
supply rating
PDT1 XLR type 5-way plug 24 V d.c. 0.75 A
Mains connection Weidmuller HDC 16D free socket, PG21, 6
mm2 stranded wire, 13-18 mm cable OD
Ethernet connection Standard RJ45 type or Neutrik Ethercon IEE802.3 10BaseT
RJ45 Ethernet
LON module connection XLR type 4-way plug 24 V d.c. 0.75 A
PDT2 XLR type 5-way plug 24 V d.c. 0.75 A
*
Gate valve interface CPC 9-way plug, standard gender, socket 24 V d.c. (48 V peak),
contacts 100 mA
EMO (on T variant only) CPC 7-way plug, standard gender, socket
contacts 30 V d.c. 0.5 A
6 - common and 7 - normally closed
EMS* XLR type 6-way plug
External emergency stop switch 24 V d.c. 100 mA
1 - supply, 2 - return
Internal emergency stop switch 30 V a.c. 1 A
3 - common, 4 - normally open 60 V d.c. 0.55 A
Comms supply 24 V d.c. 0.5 A
5 - supply, 6 - return
GRC interface* DIN type 6-way plug
1 - Normally open and 3 - common 30 V a.c. 1 A
2 - Normally open and 4 - normally closed 30 V d.c. 1 A
5 - Normally open and 6 - common 60 V d.c. 0.5 A
*
Not on T variant.

A547-00-880 Issue D
2.5 General data
Item Description Rating Units

Electrical Supply voltage 3-phase 200/230 V, 50/60 Hz a.c. 380/460 V, 50/60 Hz V
a.c.
Recommended fuse/isolator Full load current rating, refer to Table 3. Class
rating CC fuse rated to 600 V.
Voltage tolerance range + 10% V
Installation category II (IEC 664)
Earth leakage ≤6 mA
Harmonic voltage distortion 5%
factor
Water-cooling system Maximum supply pressure 100 psig
Minimum supply pressure 36 psig
Minimum flow rate required Refer to Table 1 l min-1
Cooling-water supply 10 - 30 °C
temperature range
Maximum particle size 0.03 mm2
Acidity 6.5 to 8.0 pH
Hardness < 100 ppm
Resistivity >1 kΩ
Solids (turbidity) < 100 ppm
Materials in contact with Stainless steel, PTFE, copper, brass and
cooling-water fluoroelastomer.
Connections Cooling-water ¼ inch BSPT male
Nitrogen ¼ inch tube fitting
Materials in contact Pump, shafts and rotors Cast SG iron, steel, aluminium
with process gas Seals PTFE and fluoroelastomer
Operating conditions Intended Use: Indoor use
Ambient temperature range:
Operating +5 to +40 °C
Storage -45 to +55 °C
Relative humidity 10 to 90 %
Maximum operating altitude 2000 m
Pollution degree 2 (IEC 61010)

A547-00-880 Issue D
Installation
3 Installation
WARNING
Obey the safety instructions given below and take the appropriate precautions. If you do not, you
can cause injury to people and damage to equipment.
WARNING
The system should not be operated with the Edwards panels removed.
Potential hazards on the dry pumping system include electricity, hot surfaces, process chemicals, Fomblin oil,
nitrogen and water under pressure.
Detailed safety information is given in Section 4 and Edwards Publication Number P300-20-000 'Vacuum Pump and
Vacuum System Safety'.
z Only Edwards engineers may install the dry pumping system. Users can be trained by Edwards to conduct the
tasks described in this manual, contact your local service centre or Edwards for more information.
z Do not remove the temporary cover or blanking plate from the dry pumping system inlet and exhaust until
you are ready to connect the dry pumping system to your vacuum or exhaust-extraction system. Do not
operate the dry pumping system unless the inlet and exhaust are connected to your vacuum and exhaust-
extraction system.
z Vent and purge the process system (if the dry pumping system is to replace an existing pumping system) with
nitrogen for 15 minutes before you start installation work. Refer to Section 5.
z Disconnect the other components in the process system from the electrical supply so that they cannot be
operated accidentally.
z Electrical, nitrogen and water supplies are all potentially hazardous energy sources. Before carrying out any
maintenance the supply of these sources should be locked and tagged out.
z Route and secure cables, hoses and pipework during installation to avoid possible trip hazards.
z The pump system includes provision for ventilation extraction and secondary containment of oil and water
leaks. Any unintended overflows or spills must be removed immediately to avoid risk of slips.
z Obey all national and local rules and safety regulations when you install the dry pumping system. Consult
Edwards Publication Number P300-20-000 (Vacuum Pump and Vacuum System Safety) before you pump
hazardous materials. This publication is available on request: contact your supplier or Edwards.

A547-00-880 Issue D
Installation
3.1 Locate the GX system
WARNING
You must use suitable lifting equipment to move the system. It is too heavy to lift by hand.
WARNING
Do not exceed the topple angle of 10 ° when moving the pump. Wheel the system on its castors to
move it into its operating position. The system should only be wheeled short distances over flat
surfaces. If the floor surface is uneven or has obstacles the system should be lifted with suitable
lifting equipment.
Use the following procedure to locate the GX system in its operating position. The GX system must be located on a
firm, level surface, to ensure that the system is not damaged.
1. Use suitable lifting equipment (refer to Figure 2) attached to the lifting eyebolt (15) to move the GX system
close to its final operating position.
2. Adjust the levelling feet (24) to make sure that the GX system is level and is not supported by the castors. The
lifting eyebolt must be retained for future use with this system.
3. If required, the GX system can be secured to the floor by fitting suitable bolts or studs (not supplied) through the
M10 docking points on the chassis. If vibration transmission to the floor is a concern, suitable vibration isolators
(not supplied) should be fitted between the docking points and the bolt or stud, if doing this the levelling feet
will need to be removed.
4. If preferred, the lifting eyebolt can be removed and replaced with the lifting eyebolt hole plug supplied with the
systems.
5. Ensure that access is possible to the emergency stop button (refer to Figure 4, item 1), if not use an iGX
Disconnect Box (refer to Section 7.3).
Figure 7 - System arrangement to reduce effective footprint (if required)
If you want to secure the GX in place to prevent inadvertent movement (for example, during an earthquake), take
note of the following:

A547-00-880 Issue D
Installation
z The GX system seismic brackets (Figure 2, item 19) are designed to withstand a level 4 earthquake in a
ground floor installation.
z The GX system can be secured to the floor by fitting suitable bolts or studs (not supplied) through the
17.5 mm hole in the seismic brackets.
z If vibration transmission to the floor is a concern, suitable vibration isolators (not supplied) should be fitted
between the seismic brackets and the bolt or stud.
z Although the GX system is supplied with four seismic brackets, two brackets are capable of protecting the
system during an earthquake. The system can therefore be secured as shown in Figure 7 for example, to
reduce the effective system footprint if required.
z If all four seismic brackets are to be used, ensure that the bolt spacing is adequate for the floor strength and
loads anticipated.
3.2 Lubrication
The GX system is given a charge of oil before it leaves the factory. There is no requirement to check and adjust the
oil level.
3.3 Connect the GX system to your vacuum/exhaust system and

interstage connection (if fitted)
WARNING
Pipe the exhaust to a suitable treatment plant to prevent the discharge of dangerous gases or
vapours to the surrounding atmosphere.
WARNING
Do not operate the system with the exhaust pipeline blocked. If the exhaust pipeline is blocked,
the system can generate exhaust pipeline pressures of up to 7 bar (7 x 105 Pa).
Do not reuse any O-ring or O-ring assembly and do not allow debris to get into the GX system during installation.
When you connect your GX system to your vacuum system, take note of the following:
z To get the best pumping speed, ensure that the pipeline which connects the vacuum system to the GX system
is the minimum length possible and has an internal diameter not less than the GX system inlet-port.
z Ensure that all components in the vacuum pipeline have a maximum pressure rating which is greater than the
highest pressure that can be generated in your system.
z Incorporate flexible pipelines in the vacuum pipeline to reduce the transmission of vibration and to prevent
loading of coupling-joints. We recommend that you use Edwards braided flexible pipelines. The pipelines
should be suitable for 110 °C.
z Adequately support vacuum/exhaust pipelines to prevent the transmission of stress to pipeline

coupling-joints.
z Incorporate a pressure gauge in the inlet pipeline, so that you determine that the GX system operates
correctly.

A547-00-880 Issue D
Installation
z You must be able to isolate the GX system inlet from the atmosphere and from your vacuum system if you
have pumped or produced corrosive chemicals.
z The outlet of the exhaust pipe can have a check-valve (optional accessory) fitted which prevents the suck-
back of exhaust vapours after the GX system is shutdown. The check-valve also provides additional
attenuation of the pulses in exhaust pressure.
Refer to Figure 2, items 16, 18 and 27. Use the following procedure to connect the inlet and exhaust of the GX system
to your vacuum inlet and exhaust pipeline:
1. Remove the temporary cover or blanking plate from the inlet of the GX system. Retain the nuts, bolts, washers
and blanking plate for future use. Retain the temporary cover for future use on non-contaminated pumps only.
2. Use the O-ring supplied and suitable nuts, bolts and washers (not supplied) to connect the inlet-flange (Figure 2,
item 16) of the GX system to your vacuum system.
3. Use the NW25 trapped O-ring and clamp supplied to connect the exhaust outlet (Figure 2, item 27) on the
exhaust pipe, to your exhaust extraction system.
4. Use the NW16 trapped O-ring and clamp supplied to connect the interstage connection (Figure 2, item 18) if
fitted.
3.4 Connect to your factory extraction system (optional)

Refer to Figure 2, item 27.
3.5 Connect the nitrogen supply (if provided)
CAUTION
Ensure that your nitrogen supply conforms to the requirements given in the Technical Data Section. If it doesn’t
flow, the gas pipelines may become blocked or the GX system may be damaged.
Note: For optimum nitrogen, ensure that your nitrogen supply complies with the Technical Data in Section 2, refer
to Table 2.
3.5.1 Flammable/pyrophoric materials
WARNING
You must obey the instructions and take note of any precautions given below to ensure that
pumped gases do not enter their flammable ranges.
When flammable or pyrophoric materials are present within the equipment you must:
z Not allow air to enter the equipment
z Ensure that the system is leak tight
z Ensure that pumped gases do not enter their flammable range. This can be achieved by diluting flammable
gases/vapours or oxidisers in the pump by supplying sufficient inert gas purge, for example dilution with
nitrogen to below one quarter LEL (lower explosive limit) or, if that is not practical, to below 60% LOC
(limiting oxidant concentration).
z For further information please refer to Semiconductor Pumping Application Guide (Publication no.
P411-00-090) or contact Edwards: refer to the address page at the rear of this manual for details of your
nearest Edwards company.

A547-00-880 Issue D
Installation
3.5.2 Gas Purge
WARNING
If you use inert gas purges to dilute dangerous gases to a safe level, ensure that the pump is shut
down if an inert gas supply fails.
Switch on the inert gas purge to remove air from the pump and the exhaust pipeline before the process starts. Switch
off the purge flow at the end of the process only after the remaining flammable gases or vapours have been purged
from the exhaust pipeline.
If liquids that produce flammable vapours could be present in the pump foreline, then the inert gas purge to the dry
pumping system should be left on all the time this liquid is present. Flammable liquids could be present in the foreline
as a result of condensation or may be carried over from the process.
When calculating the flow rate of inert gas required for dilution, consider the maximum flow rate for the flammable
gases/vapours that could occur. For example, if a mass flow controller is being used to supply flammable gases to
the process, you should assume a flow rate for flammable gases that could arise if the mass flow controller is fully
open.
Continually measure the inert gas flow rate: if the flow rate falls below that required, then the flow of flammable
gases or vapours to the pump must be stopped.
3.6 Leak-test the GX system
WARNING
Leak test the system after installation and seal any leaks found to prevent leakage of dangerous
substances out of the system and leakage of air into the system.
Note: If you need further information on leak-testing, look it up on the Web using the URL at the start of manual,
or contact your supplier or Edwards for advice.
3.7 Connect the electrical supply to the dry pumping system
WARNING
This equipment is suitable for Installation Category II as defined in IEC 60664-3. Connect the
system to the electrical supply through a suitably rated isolator/connector for your dry pumping
system.
WARNING
Ensure that the system and your electrical supply cable are suitably protected against earth
(ground) faults and that the earth (ground) conductor of the electrical supply cable is longer than
the phase conductors in the connector. You must fit a second protective earth (ground) conductor
(with a cross-sectional area at least equal to phase conductor size) to the protective earth (ground)
stud.
WARNING
All connections to the interface control must be double insulated or have equivalent protection.
Do not connect voltages greater than 30 V a.c. or 60 V d.c. to the control/interface connections.
If you do, the interface control will not provide protection against electric shock.

A547-00-880 Issue D
Installation
WARNING
There is no overload protection provided on the Systemable (T variant) system.
CAUTION
This is an industrial (Class A) product as defined by EN61326. To ensure compliance with European
Electromagnetic Compatibility (EMC) requirements for EMC emissions, please note that it is not intended for use
in domestic buildings, or in properties directly connected to an electrical supply network which also supplies
domestic buildings.
CAUTION
Do not connect voltages greater than specified in Table 5 of Section 2 control/interface connections. If you do,
the interface control may be damaged.
Notes: 1. Edwards recommend that the electrical supply be connected to a suitable isolator, which is easily
accessible for maintenance and clearly identified.
2. If you need further information on connecting the electrical supply, look it up on the Web using the URL
at the start of manual, or contact your supplier or Edwards for advice.
Use the following procedure to connect the electrical supply to the GX system. When you make the electrical supply
cable, ensure that the earth (ground) conductor is longer than the phase conductors. This will ensure that if the cable
is accidentally dragged and the strain relief bush on the electrical supply connector mating-half fails, the earth
(ground) conductor will be the last conductor to be pulled from the connector.
You must fit a secondary protective earth (ground) conductor (with a cross-sectional area at least equal to phase
conductor size) to the protective earth (ground) stud.
Remote:
1. Attach the strain relief bush to the cover. Then pass a suitable cable through the strain relief bush and cover.
The cross-sectional area of the cable wires should be 6 mm2. Phase wires must be bare ended without ferrules to
ensure correct clamping in the connector block.
2. Fit the coding pins to the connector block according to the voltage variant as shown in Figure 8 ’High and low
volt coding pin arrangement’.
3. Connect the cable phase wires to the following connections on the connector block. Refer to Figure 9.
z R/L1 to a1
z S/L2 to a2
z T/L3 to b1
a Prepare the end of the 6 mm2 wire as shown in Figure 9. Do not twist the wire further.
b Insert the wire into the appropriate contact chamber.
c Tighten the connection using a 2 mm allen key as shown in Figure 9 to a torque of 1 Nm. During tightening
firmly hold the wire in position.

A547-00-880 Issue D
Installation
4. Connect the earth (ground) wire of the cable to one of the two earth (ground) connections on the connector
block using the following procedure:
a Prepare the end of the 6 mm2 wire to a strip length of 10 mm. Twist strands or fit a ferrule.
b Insert the wire into the earth terminal block.
c Tighten the connection using a flat blade screwdriver.
5. Refit the cover to the connector block, then tighten the strain relief bush.
6. Connect the mating half to the electrical supply connector of the GX system (Figure 2, item 2).
7. Connect the other end of the electrical supply cable to your electrical supply through a suitable isolator.
Figure 8 - High and low volt coding pin arrangement
High volt pin configuration Low volt pin configuration
1. Keyed connector 11. Mounting screw

2. PE 12. b1
3. Coding pin 13. a1
4. a1 14. Mounting screw
5. b1 15. Coding pin
6. Coding pin 16. b2
7. Mounting screw 17. a2
8. b2 18. Coding pin
9. a2 19. PE
10. Mounting screw

A547-00-880 Issue D
Installation
Figure 9 - Method for connecting phase wires
Systemable (T variants):
Connect the end of the supplied electrical supply cable to your electrical supply through a suitable isolator with
overload protection in accordance with local regulations - refer to the Technical Data section for pump system rating.
3.8 Connect an additional RF earth (ground) (optional)

If you will operate the GX system in an area subject to high RF (radio frequency) emissions, in accordance with good
RF installation practice, we recommend that you:
z Use a star washer to connect the end of the earth (ground) cable (Figure 2, item 17) connected to the GX
inlet to one of the bolts that you use to secure the inlet-flange.
z Connect an additional earth (ground) cable to the RF earth (ground) stud (Figure 2, item 26). You must use a
suitable low-impedance cable (for example, use braided cable).
3.9 Connect to your emergency stop circuit

Systemable (T variants):
The pump electrical supply (Figure 2, Item 2) must be connected to an emergency stop facility. The operation of the
emergency stop function must immediately disconnect power from the pump when the emergency stop control is
operated. Returning the emergency stop control to its normal position must not result in power being re-applied to
the pump; a separate start or reset control must be used for this.
The EMO connector (Figure 2, item 10) must also be connected to an emergency stop facility to stop the pump
immediately, in the same way as the emergency stop function. Refer to Figure 10 and Table 5 of Section 2 for
connection details.

A547-00-880 Issue D
Installation
Figure 10 - Connections to emergency stop circuit (systemable)
A. Customer Emergency stop facility 3. EMO (Figure 2, item 10)

B. GX system 4. Emergency stop
1. Reset/Start 5. Electrical supply
2. Electrical supply to the GX system (Figure 2, item 2)
Remote (optional):
Note: If you do not connect to your own control equipment, you must fit the external EMS shorting plug supplied
to the EMS connector (Figure 2, item 11) on the rear of the GX system. If you do not, you will not be able
to operate the GX system.
If required, you can connect your own control equipment to the GX system to shut it down in an emergency using the
EMS connection (Figure 2, item 11 and Table 5 of Section 2). The emergency stop control must be compliant with IEC
60947-5-1 (This should be a red self latching mushroom push button on a yellow background).
3.10 Connect the cooling-water hoses
WARNING
Do not leave the cooling-water supply turned on until after you complete the electrical installation
of the pump. If you do, condensation may form inside the enclosure and there may be a risk of
electric shock.
Note: For optimum water-cooling, ensure that your cooling-water supply complies with Table 1 of Section 2 and
that they are connected in parallel. Refer to Figure 11. Edwards recommend that quick connectors
(provided) be used to reduce the risk of water spillage during connection/disconnection.
Refer to Figure 11. Connect the cooling-water supply as follows:
1. Remove the dust-caps from the cooling-water inlet and outlet.
2. Apply Loctite 577 (not supplied) to all male threads prior to installation.
3. Connect the reducing bushing (3) to the threaded end of the coupler (2).

A547-00-880 Issue D
Installation
4. Connect this sub-assembly to the water return port on the pumping system (4).
5. Connect the threaded end of the nipple (1) to the customer water return line.
6. Connect the reducing bushing (3) to the threaded end of the nipple (1).
7. Connect this sub-assembly to the water supply port on the pumping system (5).
8. Connect the threaded end of the coupler (2) to the customer water supply line.
9. Connect the customer supply and return hoses to the pump.
10. Turn on the cooling-water supply.
11. Inspect the water hoses, pipelines and connections and check that there are no leaks.
Turn off the water supply while you complete the remainder of the installation procedures.
3.11 Accessories
Refer to the individual accessories manuals for installation information, refer to Section 7.3.
The disconnect box when fitted, is used to energize and isolate the power supply to the system. It also allows the
isolation of the electrical supply during an emergency, and for maintenance and trouble shooting the system, thereby
satisfying SEMI S2 requirements. The photohelic switch/gauge when fitted, allows monitoring for loss of extraction
from the enclosure, thereby satisfying SEMI S2 requirements.
3.12 Commission the GX system
WARNING
It is possible that pumping system noise exceeds regional noise exposure limits (for example OSHA
1910.95 Occupational Noise Exposure Limits and the EU Noise Directive 2003/10/EC) during
evacuation cycles on some high-flow applications, depending on the process, duty cycle,
installation and environment in which the pumping system is being operated.~
In such noisy applications, a sound level survey must be conducted after installation. If necessary,
controls should be implemented to ensure that the relevant limits are not exceeded or that
adequate precautions are taken to prevent personnel being exposed to high noise levels during
operation.
1. Switch on the external electrical supply and check that the power OK LED (Figure 4, item 9) goes on. If the LED
does not go on, Contact Edwards or refer to the Edwards website.
2. Switch on the cooling-water and nitrogen supplies.
3. Ensure that the exhaust-extraction system is not blocked (for example, that valves in the exhaust-extraction
system are open).
4. Ensure that all openings to atmospheric pressure in the foreline vacuum system are closed.
5. Press local control button (Figure 4, item 5). The green LED will illuminate. Then press the Start button
(Figure 4, item 2).
6. If the GX system starts and continues to operate, continue at Step 7. If a warning or alarm condition is indicated:
z Shut-down the GX system: refer to Section 4.3.
z Contact Edwards or refer to the Edwards website.

A547-00-880 Issue D
Installation
Figure 11 - Installing 3/8 inch quick connect fittings (provided)
1. Nipple 3/8 inch BSPP

2. Coupler 3/8 inch BSPP
3. Reducing bush 1/4 inch BSPT to 3/8 inch BSPT
4. Cooling-water return connection
5. Cooling-water supply connection
7. If your GX system is an L variant, continue at Step 8.
For N or Ti variants, the nitrogen purge flow should be checked as follows;
i. Open the gas module access panel by removing the securing screw. Refer to Figure 12 for the GX100, (same
location for GX600).
ii. Confirm the flow is 14 slm (factory default setting). The centre of the ball should be aligned to the 14 slm
marking on the flow tube (refer to Figure 13).
If not, then proceed at step (iii);
iii. Close (clockwise) the 4/5 variable restrictor (marked 4/5) and confirm the flow rate is 4 slm. If not, then
adjust the shaft seals variable restrictor (marked SS) until the flow tube indicates a flow rate of 4 slm (refer
to Figure 14).
iv. Open (anti-clockwise) the 4/5 variable restrictor until the flow tube indicates a total flow of 14 slm (refer to
Figure 13).
v. Replace the gas module access panel.
If a different nitrogen flow rate is required please contact Edwards for further advice.

A547-00-880 Issue D
Installation
8. After you have commissioned the GX system:
z If you want to continue to operate the GX system, refer to Section 4.1, Step 4.
z Otherwise, shut-down the system: refer to Section 4.3.
Figure 12 - Gas module access panel
1. Securing screw
2. Access panel

A547-00-880 Issue D
Installation
Figure 13 - Flow tube (14 slm)
Figure 14 - Flow tube (4 slm)

A547-00-880 Issue D
Installation
3.13 Install additional safety equipment
WARNING
If your Process Tool/control system needs to know the total flow rate of nitrogen to the system for
safety reasons, install suitable measurement equipment in the nitrogen supply pipeline.
WARNING
If you use the nitrogen purges to dilute dangerous gases to a safe level, ensure that the system
shuts down if the nitrogen supply to the system fails.
The GX system does not measure or output nitrogen flowrate. If you need to know the total flow rate of nitrogen to
the dry pump for safety reasons, you should fit suitable measurement equipment in the nitrogen supply pipeline. If
you fit a rotameter, ensure that it is suitable for use with Nitrogen and that it is correctly calibrated.
Ensure that your installation is configured so that it remains safe if there is a failure of the nitrogen supply to the GX
system.
If an alarm condition is detected (and the GX system is not configured to 'run til crash' refer to Section 4.4) the GX
system will shutdown automatically. You must ensure that your installation remains safe if the GX system shuts down
automatically.

A547-00-880 Issue D
Operation
4 Operation
WARNING
Do not operate the system with any enclosure panels removed or damaged and do not touch any
parts of the pump(s) when the system is on. Surfaces of the pump(s) are very hot and can cause
injury to people.
WARNING
Do not operate the system with any enclosures removed or damaged. If you do there may be a risk
of an electric shock.
4.1 Start-up
WARNING
Ensure that it is safe to start the system. If you do not (and, for example, maintenance is being
performed on components downstream of the system), you could cause injury to people.
WARNING
After the power is applied, the contactors will pull in automatically and all mains circuits will be
energised.
CAUTION
The system is designed to ride through short term power interruption and to automatically restart once the
power is restored.
CAUTION
Do not operate the pump if the pipeline is restricted or blocked as the pump will not operate correctly and may
be damaged.
Refer to Section 1.1.
1. Switch on the cooling-water supply and nitrogen supply (N and TI variants).
2. Switch on the electrical supply.
3. Check that the exhaust-extraction system is not restricted, and that any valves in the exhaust-extraction system
are open.
The pump can be started using either the MicroTIM, the PDT or the front panel local control membrane.
Front panel local control membrane operation:
4. To operate the system using the front panel local control membrane (refer to Figure 4);
z Press and hold the 'Local Control' button (Figure 4, item 5). The Green LED will illuminate when control is
taken. The message 'Keys in Control' will be displayed on the PDT if connected.
z Press and hold the Start button (Figure 4, item 2) until pumps starts and the Running LED (Figure 4, item 8) is
illuminated.

A547-00-880 Issue D
Operation
MicroTIM operation:
5. Use your control equipment to set the pump start/stop signal to the interface connector and check that the
Running LED is illuminated.
z Control must be taken with the MicroTIM. The message 'MicroTIM IN CONTROL' will be displayed on the PDT if
connected.
PDT operation:
6. If the system is to be operated using the PDT;
z Connect the PDT to the required PDT connection, front (Figure 4, item 10) rear (Figure 2, item 9)
z Control must be taken with the PDT - press 'Control' button. The message 'PDT1 IN CONTROL' will be
displayed if the front connection is used and the message 'PDT2 IN CONTROL' will be displayed if the rear
connection is used.
z Press Start button.
z Press ENTER.
z The system will start and the Running LEDs will be illuminated.
4.2 Status indicators

Refer to Figure 4.
4.3 Manual shut-down
WARNING
If you shut the system down and don’t isolate it from the electrical supply, do not disconnect the
Pump Display Terminal or release control from the Pump Display Terminal or front panel. If you do
the system could be started by another Module.
WARNING
Do not remove the inlet connections until the pump has been allowed to stop rotating and the
power has been isolated. The pump can take up to three minutes to completely stop.
The pump can be shutdown using either the MicroTIM, the PDT or the front panel local control membrane. Note that
only the item in control can stop the pump (refer to Section 1.4).
Front panel local control membrane operation:
Press and hold the Stop button (Figure 4, item 3) until the running LED (Figure 4, item 8) flashes. The Running LED
will then turn off when the pump has shutdown.
MicroTIM operation:
Use your control equipment to reset the pump start/stop signal to the interface connector. The Running LED
(Figure 4, item 8) will then go off, and the pump running status output signal will open.
PDT operation:
Selecting either ’normal’ or ’fast’ shutdown will shut the pump down immediately.
If the pump is not going to be required for some time, switch off the electrical supply and the cooling-water supply.

A547-00-880 Issue D
Operation
4.4 Automatic shut-down
CAUTION
If you select ’Run 'til crash’, the pump(s) can be damaged and you may invalidate any warranties on the GX
system equipment.
Normally, if an alarm condition exists, the GX control system will shutdown the GX system. If required you can
request 'run 'til crash' operation. In this mode of operation, most alarm conditions will be ignored and the pump(s)
will continue to operate. For safety reasons the following alarms will shut-down the GX system even if you have
selected 'run til crash':
Note: 'Run 'til crash' is automatically reset to 'off ' when the electrical supply is removed.
z POWERLOSS z EMS
z DP ACTUAL SPEED z DP THERMISTOR HIGH
z DP STATUS z MB ACTUAL SPEED
z MB STATUS z MB THERMISTOR HIGH
Table 7 - Safety sensors
Safety sensor Shut-down condition

Dry pump motor thermal snap switch (PTO) Power is shut-off to the motor if the motor winding temperature
exceeds 150 °C.
Inverter thermistor Power is shut-off to the motor if the temperature exceeds 110 °C.
*
Dry pump body temperature sensor Power is shut-off to the motor if the pump body temperature
exceeds 160 °C (Warning at 150 °C).
Water circuit temperature sensor Power is shut-off to the motor if the temperature exceeds 70 °C
(Warning at 60 °C).
* N variants only.
4.5 Unplanned shutdown and alarms

The GX system is fitted with a number of pump protection sensors (refer to Table 7) that will give warnings and
alarms. The decision on whether or not to shutdown the pump is left with the tool.
If the GX system has an unplanned shutdown, ensure that the cause of the shutdown is identified and rectified before
restarting. If you are in any doubt, please call a Edwards Service Engineer.
4.6 Emergency stop

Note: The emergency stop switch is not an electrical isolator.
To shut down the GX system in an emergency, press the emergency stop switch (Figure 4, item 1). Alternatively, you
can operate the emergency stop controls in your own control system if you have connected your emergency stop
circuit to the GX system as described in Section 3.9.
When emergency stop is selected:
z The pump (and the booster pump) is switched off.
z The solenoid-valve in the Gas Module closes, to switch off the supply of nitrogen to the pump.
z The solenoid-valve(s) in the temperature control manifold(s) de-energise with loss of temperature control.

A547-00-880 Issue D
Operation
z The Pump Display Terminal will display 'STOP ACTIVATED' (If connected).
z The Running LED will go off.
z The Alarm LED illuminates.
4.7 Restart the pump after an emergency stop or automatic shut-

down
Note: If the GX system has automatically shut down because of high pump power, check that the pump is free to
rotate before you restart the GX system. Contact Edwards or refer to the Edwards website.
If you have used the emergency stop switch on the front panel to shut down the GX system, you must reset the
emergency stop switch before you can restart the GX system. Turn the emergency stop switch to reset it, then restart
the GX system as described in Section 4.1.
If the GX system has been automatically shut down because of an alarm condition, the alarm condition must be
rectified before you can restart the GX system. Restart the GX system as described in Section 4.1.
4.8 Single equipment monitor (SEM)
CAUTION
Ensure that you use the correct configuration setpoints for your application. If you do not, the GX system may
be damaged during operation.
If there is an SEM connected to your GX system, you are able to download configuration sets, which contain preset
configuration values, for example setpoints. Contact Edwards or refer to the Edwards website for more details.

A547-00-880 Issue D
Maintenance
5 Maintenance
WARNING
Only personnel specially trained to perform electrical maintenance should attempt
troubleshooting inside electrical enclosures. These enclosures contain hazardous voltages and are
not operator areas.
WARNING
Leak test the system after maintenance and seal any leaks found to prevent leakage of dangerous
substances out of the system and leakage of air into the system.
5.1 Safety and maintenance frequency
WARNING
Electrical, nitrogen and water supplies are all potentially hazardous energy sources. Before
carrying out any maintenance the supply of these sources should be locked and tagged out.
WARNING
Personal protection equipment should be checked and used as specified by its supplier. Hazardous
chemicals that have been pumped are located within the pumps and piping. Use of suitable
protective gloves and clothing along with a respirator is recommended if contact with substances
is anticipated.
Particular caution should be exercised when working with Fomblin oil which may have been
exposed to temperatures greater than 260 °C. Refer to Edwards Material Safety Data Sheets for
detailed information.
z Ensure that the maintenance technician is familiar with the safety procedures which relate to the products
pumped.
z Allow the pumps to cool to a safe temperature before you fit lifting bolts or start maintenance work.
z Vent and purge the dry pumping system with nitrogen before you start any maintenance work.
z Isolate the dry pumping system and other components in the process system from the electrical supply so
that they cannot be operated accidentally. Note that the emergency stop switch on the dry pumping system
is not an electrical isolator, unless a disconnect box accessory is installed.
z Wait for at least four minutes after you have switched off the electrical supply before you touch any
electrical component on the dry pumping system.
z Route and secure cables, hoses and pipelines during maintenance to avoid possible risk of trips or
entrapment.
z Ensure that any oil or water collected in the secondary containment drip tray is removed before moving the
system.
z The enclosure panels should only be removed with the use of a special tool, when the system has been
switched off and allowed to cool sufficiently (as an indication the system should be left for one hour with
cooling water still connected at the flow rate specified in Table 7).

A547-00-880 Issue D
Maintenance
z Wear the appropriate safety-clothing when you come into contact with contaminated components. Dismantle
and clean contaminated components inside a fume-cupboard.
z Take care to protect the sealing-faces from damage.
z Do not touch or inhale the thermal breakdown products of fluorinated materials which may be present if the
GX system has been overheated to 260 °C and above. These breakdown products are very dangerous.
Fluorinated materials in the GX system may include oils, greases and seals. The GX system may have
overheated if it was misused, if it malfunctioned or if it was in a fire. Edwards Material Safety Data Sheets
for fluorinated materials used in the pump are available on request: contact your supplier or Edwards (refer
to the address page at the rear of this manual for contact details).
The GX system requires little user maintenance. Safety sensors fitted to the GX system do not require routine
maintenance. The maintenance operations you can carry out are described in the following sections, any other
maintenance must be carried out by Edwards service centres (refer to Section 6). The frequency of maintenance
operations depends on your process. Adjust the frequency of maintenance operations according to your experience.
When you maintain the GX system, use Edwards maintenance and service kits. These contain all of the necessary
seals and other components necessary to complete maintenance operations successfully. Ensure that your nitrogen
and cooling-water supplies comply with the technical data in Section 2 and that they are connected in parallel.
Contact Edwards or refer to the Edwards website.
5.2 Relocate the system for maintenance
WARNING
The substances that accumulate in the exhaust-pipe, elbow and check-valve (supplied separately)
can be dangerous. Do not allow these substances to come into contact with your skin or eyes. Do
not inhale vapours from these substances. Fit blanking caps to the inlet and outlet flanges when
you move the exhaust-pipe, elbow or check-valve around your workplace.
The majority of synthetic oils/grease can cause inflammation of the skin (dermatitis). Safety
precautions must be taken to prevent prolonged skin contact with these substances. Use of
suitable protective gloves and clothing along with a respirator is recommended if contact with the
substance is anticipated.
System process gases and residue can be highly toxic. Take all necessary precautions when
handling components that have, or could have, come into contact with them, including O-rings,
lubricants and all exhaust accessories.
WARNING
You must use suitable lifting equipment to move the system. It is too heavy to lift by hand
WARNING
Do not exceed the topple angle of 10 ° when moving the pump. Wheel the system on its castors to
move it into its operating position. The system should only be wheeled short distances over flat
surfaces. If the floor surface is uneven or has obstacles the system should be lifted with suitable
lifting equipment.
CAUTION
Drain the cooling-water from the GX system as stated in Section 5.3, if you will transport or store it in conditions
where the cooling-water could freeze. If you do not, cooling-water may freeze in the GX system and damage the
pump(s) and/or the cooling-water pipelines.

A547-00-880 Issue D
Maintenance
If you want to remove the GX system from its operating location and move it to another location where you will do
maintenance, use the following procedure:
1. Purge the GX system and shut down the GX system as described in Section 4 and allow the GX system to cool
down.
2. Isolate the power by disconnecting the mating-half from the electrical supply connector, then isolate the water
and the gas purge supply.
3. Switch off your nitrogen and cooling-water supplies. Disconnect the nitrogen supply, taking care as any trapped
gas under pressure is released. Disconnect the cooling-water supply followed by the cooling-water return.
4. Disconnect the inlet and outlet from the vacuum and exhaust systems and fit blanking caps.
5. If necessary, disconnect the GX air-extraction port from your factory extraction system.
6. If necessary disconnect any accessories from the GX system.
7. Adjust the levelling feet so that the GX system rests on the castors.
8. Move the GX system to the location where you will do maintenance.
After maintenance is complete, re-install the GX system as described in Section 3.
5.3 Draining the cool water
WARNING
Personal protection equipment should be checked and used as specified by its supplier. Use of
suitable protective gloves and eye protection is recommended when carrying out this procedure.
1. Relocate the system for maintenance as stated in Section 5.2.
2. Connect a regulated clean dry air supply (20 psig) to the cooling-water supply connection (Figure 2, item 22). Do
not turn on the air supply yet.
3. Connect a drain hose to the cooling-water return connection (Figure 2, item 25). Position the open end of the
drain hose in a suitable collection container.
4. Turn on the clean dry air supply.
5. Monitor the drain hose outlet until no further cooling-water is purged. If the system is a load-lock (L) the
procedure is complete. If the system is an N or a TI variant continue at Step 6.
6. Connect the GX system to a suitable mains electrical supply. The GX control system will now energise each
temperature control valve in sequence for a period of ten seconds, purging the cooling-water from all flow
paths. After a period of one minute from connection of the electrical supply, ensure no further cooling-water is
being purged. If there is, repeat the entire procedure.
7. The cooling-water drain procedure is now complete. Disconnect the air supply, electrical supply and the drain
hoses. Dispose of the drained cooling-water accordingly.

A547-00-880 Issue D
Maintenance
5.4 Cleaning the pump
CAUTION
Do not use cleaning materials based on strong alkalis, aggressive or chlorinated solvents. Do not use cleaning
materials containing abrasives.
Inspect the pump monthly and, if necessary, wipe the outside clean with a soft lint free cloth and a proprietry
cleaning material based on demineralised water or isopropanol.

A547-00-880 Issue D
Transportation, storage and disposal

6 Transportation, storage and disposal
6.1 Transportation
WARNING
Do not drain the oil from the pump(s) whether dangerous substances have been pumped or not.
You must fit blanking plates to seal all vacuum inlet and outlet ports (to prevent possible oil
leakage). You must ensure that the system is correctly labelled, if in doubt contact Edwards.
Follow the procedure laid out in Section 6.2 and then read form HS1 and fill out form HS2, which can be found at the
back of this manual.
6.2 Storage
CAUTION
Drain the cooling-water from the GX system, if you will transport or store it in conditions where the cooling-
water could freeze. If you do not, the cooling-water may freeze in the GX system and damage the pump(s) and/
or the cooling-water pipelines.
Store the GX system as follows:
1. Follow the procedure set out in Section 5.2.
2. Store the GX system in clean dry conditions until required.
3. When required for use, prepare and install the GX system as described in Section 3 of this manual.
6.3 Disposal
WARNING
Dispose of the system and any components safely and in accordance with all local and national
safety and environmental requirements.
Edwards products are supported by a world-wide network of Edwards Service Centres. Each Service Centre offers a
wide range of options including disposal. Refer to Section 7.2 for more information.
Pump system materials suitable for recycling include cast iron, steel, SG iron, PTFE, stainless steel, brass, copper,
aluminium, zinc alloy, nickel, mild steel, ABS.
Take particular care with the following:
z Fluoroelastomers which may have decomposed as the result of being subjected to high temperatures
z Components which have been contaminated with dangerous process substances.

A547-00-880 Issue D

A547-00-880 Issue D
Service, spares and accessories

7 Service, spares and accessories
7.1 Introduction
WARNING
Whenever you return the dry pumping system to a Edwards Service Centre or other Edwards
company, you must comply with the requirements of the Return of Edwards Equipment Procedure
(refer to forms HS1 and HS2 at the rear of this manual).
Notes: 1. Whenever you return the GX system to a Edwards Service Centre or other Edwards company, you must
comply with the requirements of Section 7 and with the requirements of the Return of Edwards
Equipment Procedure (refer to forms HS1 and HS2 at the end of of this manual).
2. You must not drain the oil from the GX pump. You must clearly state the pump is full of oil when you
complete form HS2.
Edwards products, spares and accessories are available from Edwards companies in Belgium, Brazil, Canada, China,
France, Germany, Israel, Italy, Japan, Korea, Singapore, Switzerland, United Kingdom, U.S.A and a world-wide
network of distributors. The majority of these centres employ Service Engineers who have undergone comprehensive
Edwards training courses.
Order spare parts and accessories from your nearest Edwards company or distributor. When you order, please state
for each part required:
z Model and Item Number of your equipment
z Serial number (if any)
z Item Number and description of the part.
7.2 Service
Edwards products are supported by a world-wide network of Edwards Service Centres. Each Service Centre offers a
wide range of options including: equipment decontamination; service exchange; repair; rebuild and testing to factory
specifications.
Equipment that has been serviced, repaired or rebuilt is returned with a full warranty. Your local Service Centre can
also provide Edwards engineers to support on-site maintenance, service or repair of your equipment.
For more information about service options, contact your nearest Service Centre or other Edwards company.

A547-00-880 Issue D
7.3 Ordering accessories
Table 8 - Accessories
Accessory Item number

iGX photohelic switch/gauge kit A507-27-000
iGX disconnect box 200/230 V, 50/60 Hz a.c. A507-28-000
EMS module*
SPI D373-70-310
MCM D373-70-320
LAM Alliance D373-70-350
C3 D373-70-360
MicroTim
SPI D373-60-310
MCM D373-60-320
TEL D373-60-330
E73 D373-60-340
LAM Alliance D373-60-350
C3 D373-60-360
Hitachi D373-60-370
LON D373-70-390
Gate valve connection lead* A532-08-403
Pump Display Terminal (PDT) 5 way XLR D372-80-700
PDT holster D372-09-800
PDT adaptor 5 way XLR to RJ12 D373-70-526
Extension cables
5 way XLR, 3 m D373-70-591
5 way XLR, 5 m D373-70-592
5 way XLR, 10 m D373-70-595
5 way XLR, 15 m D373-70-596
5 way XLR, 25 m D373-70-597
Stainless steel water quick disconnects
1/4 inch BSPP straight Snap-tite A507-17-000
1/4 inch BSPP straight Parker A507-18-000
1/4 inch BSPP 90° Snap-tite A507-19-000
1/4 inch BSPP 90° Parker A507-20-000
3/8 inch BSPP straight Snap-tite A507-21-000
3/8 inch BSPP straight Parker A507-22-000
3/8 inch BSPP 90° Parker A507-24-000
Brass water quick disconnects

A547-00-880 Issue D

Table 8 - Accessories (continued)
Accessory Item number

Flow control valve
1 lpm (100 only) A507-38-000
2 lpm (3/100, 6/100 and 10/100 only) A507-39-000
Exhaust enclosure kits
iGX check valve loadlock (L) A507-43-000
iGX check valve process (N) A507-44-000
iGX check valve with enclosure loadlock (L) A507-45-000
iGX check valve with enclosure process (N) A507-46-000
Web server activation CD D373-75-400
*
Not on T variant.

A547-00-880 Issue D


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A547-00-880

GX Dry Pumping System

GX100L 200-230V 50/60Hz A547-10-958 GX100N 200-230V 50/60Hz A547-11-958

EN1012-2:1996, A1: 2009 Compressors and Vacuum Pumps. Safety Requirements.

and fulfils all the relevant provisions of

2006/42/EC Machinery Directive

Sia Abbaszadeh, Chief Technical Officer Date and Place

Product Information for China

Product Label Overshipper Label Pallet Marking

Materials Content Declaration & Environmental Protection Use Period

Environmental Protection Use Period (EPUP)

The Environmental Protection Use Period is 20 years for this product.

Materials Content Declaration

Toxic or Hazardous Substances and Elements

Note 1. Table applies to all product types listed above.

2 GX Dry pumping system .......................................................................... 7

6 Transportation, storage and disposal ........................................................ 33

6.1 Transportation ..........................................................................................................33

© Edwards Limited 2012. All rights reserved. Page i

6.3 Disposal ................................................................................................................... 33

7 Service, spares and accessories .............................................................. 35

Page ii © Edwards Limited 2012. All rights reserved.

Warning - refer to accompanying documentation.

Warning - risk of electric shock.

Warning - hot surfaces.

Warning - moving parts present.

Warning - heavy object.

© Edwards Limited 2012. All rights reserved. Page 1

Protective earth (ground).

Warning - use protective equipment.

Warning - Risk of explosion.

Figure 1 - GX applications chart

Page 2 © Edwards Limited 2012. All rights reserved.

1.3 The GXL system

Item Control/connector identification Item Control/connector identification

© Edwards Limited 2012. All rights reserved. Page 3

Figure 3 - The rear status panel LED indicators

Figure 4 - The front panel controls

Item Control/connector identification

Page 4 © Edwards Limited 2012. All rights reserved.

1.5 Active utility control

Figure 5 - Priority of control

© Edwards Limited 2012. All rights reserved. Page 5

This page has been intentionally left blank.

Page 6 © Edwards Limited 2012. All rights reserved.

GX Dry pumping system

Table 1 - Technical data

Type Characteristics 100 300 600 1000 Units

Table 2 - Technical data

Type Characteristics L N TI Units

© Edwards Limited 2012. All rights reserved. Page 7

2.2 Electrical data

Table 3 - Electrical data

200/230 50/60 Hz 380/460 50/60 Hz

Table 4 - Centre of gravity and levelling foot loads (Refer to Figure 6)

100 300 600 1000

Figure 6 - Centre of gravity and levelling foot loads

Page 8 © Edwards Limited 2012. All rights reserved.

GX Dry pumping system

Table 5 - GX connector types