Lecture 1
OUTLINE
• Electrons and holes
• Energy-band model
• Band gap energy
• Density of states
• Doping
Read: Neamen’s Chapters 1-3
Texts
• Textbook: “Modern Semiconductor Device for Integrated
Circuits“, Chenming Hu, Prentice Hall.
• Recommended Reference: “Semiconductor Physics and
Devices: Basic Principles”, D.A. Neamen, Mcgraw-Hill.
Goals and Prerequisite
On completion students should understand
• Fundamentals of basic semiconductor devices: the pn-
junction diode, the metal-oxide-semiconductor capacitor, and
the field-effect transistor.
• principles of device operation, and how their electrical
characteristics depend on their physical parameters and
operating conditions
Prerequisite
1. Semiconductor Device (I)
2. Semiconductor processes
3. Microelectronics
Grading & Office hours
Grading Policy:
1. 6 Homeworks (50%)
2. Midterm 20%
3. Final Exam 30%
Office hours:
@教師硏究室右邊最後一間
@Thur 1:00-3:00 PM and Wed 10:00-12:00 AM
Crystallographic Notation
Miller Indices: Notation Interpretation
(hkl) crystal plane
{hkl} equivalent planes
[hkl] crystal direction
<hkl> equivalent directions
h: inverse x-intercept of plane
k: inverse y-intercept of plane
l: inverse z-intercept of plane
(Intercept values are in multiples of the lattice constant;
h, k and l are reduced to 3 integers having the same ratio.)
Crystallographic Planes and Si Wafers
Silicon wafers are usually cut
along a {100} plane with a flat
or notch to orient the wafer
during IC fabrication:
Effects of Crystal Orientation and Stress
TSMC 2nm MBCFET Technology
Crystallographic Planes in Si
Unit cell:
View in <111> direction
View in <100> direction View in <110> direction
[Link]
Formation of Energy Bands
Si: From Atom to Crystal
Energy states in Si atom → energy bands in Si crystal
• The highest nearly-filled band is the valence band
• The lowest nearly-empty band is the conduction band
Energy Band Diagram
Ec
electron energy
Ev
distance
Simplified version of energy band model, indicating
• bottom edge of the conduction band (Ec)
• top edge of the valence band (Ev)
➢ Ec and Ev are separated by the band gap energy EG
Density of States
E
gc(E)
DE
Ec Ec
Ev Ev
gv(E)
g(E)dE = number of states per cm3 in the energy range between E and E+dE
Near the band edges:
mn* 2mn* (E − Ec )
gc ( E ) = E Ec
2h 3
m*p 2m*p (Ev − E )
gv ( E ) = E Ev
2h 3
The Fermi-Dirac Probability Function
Charge carriers in semiconductors