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    Report On Turbo Molecular Pump

    Uploaded by

    Rommel Paulo Viloan
    Turbo molecular pumps use a series of rotating disks with blades to pump gas molecules from high to low pressure regions. They were invented in 1957 and overcome limitations of older molecular drag pumps by providing higher pumping speeds. The blades are designed so that transmission probability is higher from low to high pressure, pumping gases out of the system. Backing pumps are needed to help the turbo pump at higher pressures where blade spacing limits performance. Proper blade geometry and balancing of the rotor are important for effective pumping and reducing vibrations.

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    Attribution Non-Commercial (BY-NC)
    Download as PPTX, PDF, TXT or read online from Scribd

    Report On Turbo Molecular Pump

    Uploaded by

    Rommel Paulo Viloan
    48 views16 pages
    Turbo molecular pumps use a series of rotating disks with blades to pump gas molecules from high to low pressure regions. They were invented in 1957 and overcome limitations of older molecular drag pumps by providing higher pumping speeds. The blades are designed so that transmission probability is higher from low to high pressure, pumping gases out of the system. Backing pumps are needed to help the turbo pump at higher pressures where blade spacing limits performance. Proper blade geometry and balancing of the rotor are important for effective pumping and reducing vibrations.

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    Report on Turbo Molecular Pump

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    Turbo molecular pumps use a series of rotating disks with blades to pump gas molecules from high to low pressure regions. They were invented in 1957 and overcome limitations of older molecular drag pumps by providing higher pumping speeds. The blades are designed so that transmission probability is higher from low to high pressure, pumping gases out of the system. Backing pumps are needed to help the turbo pump at higher pressures where blade spacing limits performance. Proper blade geometry and balancing of the rotor are important for effective pumping and reducing vibrations.

    Copyright:

    Attribution Non-Commercial (BY-NC)
    Download as PPTX, PDF, TXT or read online from Scribd
    Download as pptx, pdf, or txt
    48 views16 pages

    Report On Turbo Molecular Pump

    Uploaded by

    Rommel Paulo Viloan
    Turbo molecular pumps use a series of rotating disks with blades to pump gas molecules from high to low pressure regions. They were invented in 1957 and overcome limitations of older molecular drag pumps by providing higher pumping speeds. The blades are designed so that transmission probability is higher from low to high pressure, pumping gases out of the system. Backing pumps are needed to help the turbo pump at higher pressures where blade spacing limits performance. Proper blade geometry and balancing of the rotor are important for effective pumping and reducing vibrations.

    Copyright:

    Attribution Non-Commercial (BY-NC)
    Download as PPTX, PDF, TXT or read online from Scribd
    Download as pptx, pdf, or txt
    You are on page 1of 16

    TURBOMOLECULAR

    PUMP
    Rommel Paulo B. Viloan
    MSE 214
    Outline

     History

     Operating Principle and Blade


    Design/Geometry

     Important Considerations
    History

     Invented in 1957 by Becker at Pfeiffer and


    became commercially available in 1958.

     Developed using the basic ideas of molecular


    drag pump design by Gaede (disk) and
    Holweck (drum).
    History

     Limitation of molecular drag pumps


    o Low pumping speed
    o Questionable reliability

    Turbo disk
    (for volume speed enhancement)

    Threaded Drag pump stator


    History

     Becker avoided the disadvantages and


    instead used series of disk with a row of
    blades (alternately fixed and moving).
    Rotor 20-50 blades
    (Rotating) (each channel
    acts like molecular
    pump)
    Stator
    (Fixed)
    TMP + Roughing pump
    Can reach upto 10-10 Torr
    Operating Principle and blade design

    Low transmission probability


     Pumping process from HP to LP!
    Low pressure(LP)

    High pressure(HP)
    High transmission probability
    from LP to HP!
    Operating Principle and blade design

     Pumping process

    Transmission probability
    is proportional to the angle!

    c3>c1 – LP (1) to HP (2)

    d3<d1 – HP (2) to LP (1)


    Operating Principle and blade design

     Calculating performance of a single disk


     Maximum Compression ratio
    Kmax ≈exp(M1/2vg)
    M-molecular weight
    v-blade speed
    g-pump specific factor(rotor stator geometry)

     Maximum Pumping speed


    Smax ≈vG
    G-pump specific factor
    Operating Principle and blade design

     Real Pumping speed

    K – compression ratio
    S – real pumping speed
    Sv – pumping speed of backing pump

    Computation of the TMP real pumping speed


    Operating Principle and blade design

     Real Pumping Speed of TMP


    o dependent on Sv and K
    Operating Principle and blade design

     Why does a TMP need a backing pump?

    o Decrease in pumping speed and compression ratio


    happen at pressures of magnitudes 10-3 Torr or higher.

    o Mean free path of molecules becomes smaller than the


    distance of one blade to another limiting the performance
    of the rotor (corresponds to laminar flow of 10-2 and
    10-1Torr).
    Operating Principle and blade design

    Examples of compression and pumping speed for TMPs


    Operating Principle and blade design

     Blade Design/Geometry

    Low compression is used at the bottom to


    minimize backflow of heavy molecules
    particularly oil molecules.
    Operating Principle and blade design

     Blade Design/Geometry

    Since backflow of heavy molecules are


    restricted by the high compression
    disks, light molecules have the larger
    probability of backflow.
    Important Considerations

     Rotor Material
    o Mostly composed of Al alloy which is light and can withstand baking
    temperatures.
    o Use of Si3N4 has been reported for applications with strong magnetic
    fields.

     Pumping Corrosive gasses (e.g. Cl-based)


    o Anti-corrosive material maybe used as a rotor material or special coating
    maybe used in the rotor (e.g Ni-plated).
    Important Considerations

     Balancing and vibration


    o Vibrations are due to unbalanced rotors (due to material inhomogeneity,
    geometrical imperfections, etc.)
    o Balancing the rotor is of great importance to lengthen the mechanical
    bearing lifetime. Done by adding or removing material

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