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    By Samik Dutta, Somnath Chatterjee, Ranjan Sen CMERI Durgapur

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    Samik Dutta
    The document summarizes a study that evaluated: 1) The accuracy and precision of movements of a long-travel, high-resolution hybrid-drive translational stage using a laser interferometer. 2) Both the linear and angular errors of the stage were examined as it was moved between 0-100mm in increments of 5mm. 3) Results showed maximum linear errors of -3um but generally less than -1um, and maximum angular errors of around 20 arcseconds for pitch and -6 arcseconds for yaw.

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    By Samik Dutta, Somnath Chatterjee, Ranjan Sen CMERI Durgapur

    Uploaded by

    Samik Dutta
    107 views15 pages
    The document summarizes a study that evaluated: 1) The accuracy and precision of movements of a long-travel, high-resolution hybrid-drive translational stage using a laser interferometer. 2) Both the linear and angular errors of the stage were examined as it was moved between 0-100mm in increments of 5mm. 3) Results showed maximum linear errors of -3um but generally less than -1um, and maximum angular errors of around 20 arcseconds for pitch and -6 arcseconds for yaw.

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    The document summarizes a study that evaluated: 1) The accuracy and precision of movements of a long-travel, high-resolution hybrid-drive translational stage using a laser interferometer. 2) Both the linear and angular errors of the stage were examined as it was moved between 0-100mm in increments of 5mm. 3) Results showed maximum linear errors of -3um but generally less than -1um, and maximum angular errors of around 20 arcseconds for pitch and -6 arcseconds for yaw.

    Copyright:

    Attribution Non-Commercial (BY-NC)
    Download as PPTX, PDF, TXT or read online from Scribd
    Download as pptx, pdf, or txt
    107 views15 pages

    By Samik Dutta, Somnath Chatterjee, Ranjan Sen CMERI Durgapur

    Uploaded by

    Samik Dutta
    The document summarizes a study that evaluated: 1) The accuracy and precision of movements of a long-travel, high-resolution hybrid-drive translational stage using a laser interferometer. 2) Both the linear and angular errors of the stage were examined as it was moved between 0-100mm in increments of 5mm. 3) Results showed maximum linear errors of -3um but generally less than -1um, and maximum angular errors of around 20 arcseconds for pitch and -6 arcseconds for yaw.

    Copyright:

    Attribution Non-Commercial (BY-NC)
    Download as PPTX, PDF, TXT or read online from Scribd
    Download as pptx, pdf, or txt
    of 15

    Study of Accuracy of a Long-Travel-Range, Ultra-High-

    Resolution, Hybrid-Drive Translational Stage using Laser


    Interferometer

    By
    Samik Dutta, Somnath Chatterjee, Ranjan Sen
    CMERI Durgapur

    1
    Objective
    1. Performance evaluation of individual stage
    movements of meso-micro-nano machine tools
    in the micro and nano scale range.
    2. Linear and angular errors of state-of-the-art
    hybrid drive translational stage has been
    examined by laser interferometer.
    3. To exploit full potentials of scanning probe
    microscope to take nano scale measurement of
    3D surface topography, high precision nano
    positioning stage are essential for testing.
    Experimental Set-up
    1. Smart table (vibration isolation table) UT2 with ST-200
    controller of Newport corporation with IQ damping
    technology.
    • Working Surface: 400 Series ferromagnetic stainless steel
    3/16 in. (4.8 mm) thick with integrated damping layer
    • Surface Flatness : ±0.1 mm over 600 mm2
    • Core Design : Trussed honeycomb, vertically bonded
    closed cell construction.
    • Maximum dynamic deflection coefficient: 0.4 × 10-3
    • Maximum relative motion value : <7.6 × 10-8mm
    • Deflection under load : <1.3 × 10-3mm
    Experimental Set-up contd…
    2. Translational stage, M511.HD, PI made:
    • C-702 controller
    • Hybrid drive consisting of a motor and piezo
    actuator with a servo control mechanism
    • Guiding mechanism: ball screw
    • Linear optical encoder resolution: 2nm
    • Minimum incremental motion : 4nm
    • Accuracy < 0.05 µm
    • Hysteresis : 0.01 µm
    • Pitch, Yaw: ± 25 (5.15) µrad (arcsec)
    Experimental Set-up contd…
    3. Reference scale: LASER interferometer
    • LASER source: He-Ne laser (λ=632nm)
    • Accuracy : 1 part in 107 which is 10 nm in 100 mm
    • Working principle: Michelson laser interferometer
    Temperature of experiment: 20±0.5°C
    Measurement of Length
    Michelson Interferometer

    Output  sinusoidal
    4p L
    with a phase q=
    l
    L
    For λ = 632.8 nm and for a length L = 1m

    No. of oscillations = 1580278.13

    Using modern detectors it is possible to


    measure 1 to 1000 parts of one oscillation

    Intensity
    Resolution in this case is 0.3164 nm

    L 6
    Experimental Set-up contd…

    Reading M-511.HD Laser source


    Temperature C-702
    Mirror & beamsplitter
    sensor
    Experimental Set-up contd…

    Laser Mirror & Reading


    Translational
    source beamsplitter
    Stage
    Angular Measurements
    Result
    True True
    Com
    position position Error Hyste
    position (forward) Error (backward) (b) resis
    (mm) (mm) (f) (µm) (mm) (µm) (µm)
    0 0 0 0 0 0
    5 5.0001 -0.1 5.0006 -0.6 0.5
    10 10.0003 -0.3 10.0006 -0.6 0.3
    15 15.0005 -0.5 15.0004 -0.4 0.1
    20 20.0005 -0.5 20.0005 -0.5 0
    25 25.0005 -0.5 25.0008 -0.8 0.3
    30 30.0006 -0.6 30.0007 -0.7 0.1
    35 35.0005 -0.5 35.0005 -0.5 0
    40 40.0011 -1.1 40.0005 -0.5 0.6
    45 45.0015 -1.5 45.0006 -0.6 0.9
    50 50.0016 -1.6 50.0011 -1.1 0.5
    55 55.0019 -1.9 55.0012 -1.2 0.7
    60 60.0021 -2.1 60.002 -2 0.1
    65 65.003 -3 65.0023 -2.3 0.7
    70 70.0029 -2.9 70.0021 -2.1 0.8
    75 75.0027 -2.7 75.0022 -2.2 0.5
    80 80.0026 -2.6 80.0024 -2.4 0.2
    85 85.003 -3 85.0018 -1.8 1.2
    90 90.0023 -2.3 90.0019 -1.9 0.4
    95 95.0016 -1.6 95.0014 -1.4 0.2
    100 100.0011 -1.1 100.0011 -1.1 0
    Result contd…
    1.5

    1.0

    0.5
    Parameters(micron)

    0.0

    -0.5

    -1.0

    -1.5

    -2.0 ErrorF
    ErrorB
    -2.5 Hysteresis
    -3.0

    -10 0 10 20 30 40 50 60 70 80 90 100 110

    Commanded Position(mm)
    Result contd…
    Command Yaw (F) Yaw (B) Pitch (F) Pitch (B)
    Position (arcsec) (arcsec) (arcsec) (arcsec)
    (mm)

    0 0 0 0 0
    10 2.94 1.42 3.5 2.55
    20 2.2 0.57 6.24 5.15
    30 2.49 1.54 7.63 7.15
    40 2.22 1.07 9.55 9.88
    50 3.05 1.93 11.81 12.6
    60 2.31 2.66 15.28 14.72
    70 2.39 1.46 17.26 16.35
    80 0.08 -0.45 19.26 17.6
    90 -3.34 -3.91 19.28 19.1
    100 -5.58 -5.58 19.53 19.53
    Result contd…
    22 4

    20 PitchF 3
    PitchB
    Pitch error(arcsecond)

    18 2

    Yaw error(arcsecond)
    16 1
    14
    0
    12
    -1
    10
    8 -2

    6 -3 YawF
    4 -4
    YawB
    2 -5
    0
    -6
    -2
    -7
    -10 0 10 20 30 40 50 60 70 80 90 100 110
    -10 0 10 20 30 40 50 60 70 80 90 100 110
    Commanded Position(mm) Commanded Position(mm)
    Conclusions
    • To get the best performance, there is a definite ratio
    between incremental step and velocity.
    • Future work can be done to get the best ratio using
    design of experiment.
    • There is some problem of linear positioning between
    65mm to 85mm. It may be due to errors in guide
    mechanism.
    Thank You

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