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About: MEMS sensor generations

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MEMS sensor generations represent the progress made in micro sensor technology and can be categorized as follows: 1st GenerationMEMS sensor element mostly based on a silicon structure, sometimes combined with analog amplification on a micro chip.2nd GenerationMEMS sensor element combined with analog amplification and analog-to-digital converter on one micro chip.3rd GenerationFusion of the sensor element with analog amplification, analog-to-digital converter and digital intelligence for linearization and temperature compensation on the same micro chip.4th GenerationMemory cells for calibration- and temperature compensation data are added to the elements of the 3rd MEMS sensor generation.

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  • MEMS sensor generations represent the progress made in micro sensor technology and can be categorized as follows: 1st GenerationMEMS sensor element mostly based on a silicon structure, sometimes combined with analog amplification on a micro chip.2nd GenerationMEMS sensor element combined with analog amplification and analog-to-digital converter on one micro chip.3rd GenerationFusion of the sensor element with analog amplification, analog-to-digital converter and digital intelligence for linearization and temperature compensation on the same micro chip.4th GenerationMemory cells for calibration- and temperature compensation data are added to the elements of the 3rd MEMS sensor generation. (en)
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  • MEMS sensor generations represent the progress made in micro sensor technology and can be categorized as follows: 1st GenerationMEMS sensor element mostly based on a silicon structure, sometimes combined with analog amplification on a micro chip.2nd GenerationMEMS sensor element combined with analog amplification and analog-to-digital converter on one micro chip.3rd GenerationFusion of the sensor element with analog amplification, analog-to-digital converter and digital intelligence for linearization and temperature compensation on the same micro chip.4th GenerationMemory cells for calibration- and temperature compensation data are added to the elements of the 3rd MEMS sensor generation. (en)
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  • MEMS sensor generations (en)
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