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Astrophysics > Instrumentation and Methods for Astrophysics

arXiv:1102.2244 (astro-ph)
[Submitted on 10 Feb 2011]

Title:Silicon Detector Arrays with Absolute Quantum Efficiency over 50% in the Far Ultraviolet for Single Photon Counting Applications

Authors:Shouleh Nikzad (a), Michael E. Hoenk (a), Frank Greer (a), Todd Jones (a), Blake Jacquot (a), Steve Monacos (a), J. Blacksberg (a)Erika Hamden (b), David Schiminovich (b), Chris Martin (c), Patrick Morrissey (c)
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Abstract:We have used Molecular Beam Epitaxy (MBE)-based delta doping technology to demonstrate near 100% internal quantum efficiency (QE) on silicon electron-multiplied Charge Coupled Devices (EMCCDs) for single photon counting detection applications. Furthermore, we have used precision techniques for depositing antireflection (AR) coatings by employing Atomic Layer Deposition (ALD) and demonstrated over 50% external QE in the far and near-ultraviolet in megapixel arrays. We have demonstrated that other device parameters such as dark current are unchanged after these processes. In this paper, we report on these results and briefly discuss the techniques and processes employed.
Comments: This article has been submitted to Applied Physics Letters (APL). After it is published, it will be found at (URL/link to the entry page of the journal this http URL
Subjects: Instrumentation and Methods for Astrophysics (astro-ph.IM); Instrumentation and Detectors (physics.ins-det)
Cite as: arXiv:1102.2244 [astro-ph.IM]
  (or arXiv:1102.2244v1 [astro-ph.IM] for this version)
  https://doi.org/10.48550/arXiv.1102.2244
Related DOI: https://doi.org/10.1364/AO.51.000365

Submission history

From: Shouleh Nikzad [view email]
[v1] Thu, 10 Feb 2011 21:45:07 UTC (449 KB)
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