Condensed Matter > Mesoscale and Nanoscale Physics
[Submitted on 25 Oct 2011]
Title:Joule-assisted silicidation for short-channel silicon nanowire devices
View PDFAbstract:We report on a technique enabling electrical control of the contact silicidation process in silicon nanowire devices. Undoped silicon nanowires were contacted by pairs of nickel electrodes and each contact was selectively silicided by means of the Joule effect. By a realtime monitoring of the nanowire electrical resistance during the contact silicidation process we were able to fabricate nickel-silicide/silicon/nickel- silicide devices with controlled silicon channel length down to 8 nm.
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