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Physics > Applied Physics

arXiv:2407.02741 (physics)
[Submitted on 3 Jul 2024 (v1), last revised 7 Sep 2024 (this version, v2)]

Title:18 GHz Solidly Mounted Resonator in Scandium Aluminum Nitride on SiO2/Ta2O5 Bragg Reflector

Authors:Omar Barrera, Nishanth Ravi, Kapil Saha, Supratik Dasgupta, Joshua Campbell, Jack Kramer, Eugene Kwon, Tzu-Hsuan Hsu, Sinwoo Cho, Ian Anderson, Pietro Simeoni, Jue Hou, Matteo Rinaldi, Mark S. Goorsky, Ruochen Lu
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Abstract:This work reports an acoustic solidly mounted resonator (SMR) at 18.64 GHz, among the highest operating frequencies reported. The device is built in scandium aluminum nitride (ScAlN) on top of silicon dioxide (SiO2) and tantalum pentoxide (Ta2O5) Bragg reflectors on silicon (Si) wafer. The stack is analyzed with X-ray reflectivity (XRR) and high-resolution X-ray diffraction (HRXRD). The resonator shows a coupling coefficient (k2) of 2.0%, high series quality factor (Qs) of 156, shunt quality factor (Qp) of 142, and maximum Bode quality factor (Qmax) of 210. The third-order harmonics at 59.64 GHz is also observed with k2 around 0.6% and Q around 40. Upon further development, the reported acoustic resonator platform can enable various front-end signal-processing functions, e.g., filters and oscillators, at future frequency range 3 (FR3) bands.
Comments: 5 pages, 9 figures, 5 tables
Subjects: Applied Physics (physics.app-ph)
Cite as: arXiv:2407.02741 [physics.app-ph]
  (or arXiv:2407.02741v2 [physics.app-ph] for this version)
  https://doi.org/10.48550/arXiv.2407.02741
Journal reference: Journal of Microelectromechanical Systems, 2024
Related DOI: https://doi.org/10.1109/JMEMS.2024.3472615

Submission history

From: Ruochen Lu [view email]
[v1] Wed, 3 Jul 2024 01:26:54 UTC (995 KB)
[v2] Sat, 7 Sep 2024 16:41:53 UTC (925 KB)
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