Showing 1–2 of 2 results for author: Malekmohammad, M
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Design and Fabrication of a Differential MOEMS Accelerometer Based on Fabry Perot micro-cavities
Authors:
Mojtaba Rahimi,
Mohammad Malekmohammad,
Majid Taghavi,
Mohammad Noori and,
Gholam Mohammad Parsanasab
Abstract:
In this paper, a differential MOEMS accelerometer based on the Fabry-Perot (FP) micro-cavities is presented. The optical system of the device consists of two FP cavities and the mechanical system is composed of a proof mass that is suspended by four springs. The applied acceleration tends to move the PM from its resting position. This mechanical displacement can be measured by the FP interferomete…
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In this paper, a differential MOEMS accelerometer based on the Fabry-Perot (FP) micro-cavities is presented. The optical system of the device consists of two FP cavities and the mechanical system is composed of a proof mass that is suspended by four springs. The applied acceleration tends to move the PM from its resting position. This mechanical displacement can be measured by the FP interferometer formed between the proof mass cross-section and the optical fiber end face. The proposed sensor is fabricated on a silicon on insulator (SOI) wafer using the bulk micromachining method. The results of the sensor characterization show that the accelerometer has a linear response in the range of 1g. Also, the optical sensitivity and resolution of the sensor in the static characterization are 6.52 nm/g and 153ug. The sensor sensitivity in the power measurement is 49.6 mV/g and its resonant is at 1372 Hz. Using the differential measurement method increases the sensitivity of the accelerometer. Based on experimental data, the sensor sensitivity is two times as high as that of a similar MOEMS accelerometer with one FP cavity.
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Submitted 12 October, 2022; v1 submitted 1 March, 2022;
originally announced March 2022.
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The Design and Simulation of a Coarse-to-Fine Optical MEMS Accelerometer
Authors:
Mojtaba Rahimi,
Majid Taghavi,
Mohammad Malekmohammad
Abstract:
In this paper, a novel coarse-to-fine optical MEMS accelerometer based on the Fabry Perot (FP) interferometer is proposed. The mechanical structure consists of a proof mass that is suspended by four L-shaped springs. The deflection of the proof mass due to the applied acceleration is detected using two FP cavities which comprise the optical system of the device. Using coarse-to-fine measurement an…
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In this paper, a novel coarse-to-fine optical MEMS accelerometer based on the Fabry Perot (FP) interferometer is proposed. The mechanical structure consists of a proof mass that is suspended by four L-shaped springs. The deflection of the proof mass due to the applied acceleration is detected using two FP cavities which comprise the optical system of the device. Using coarse-to-fine measurement and the dual-wavelength method increases the sensitivity of the accelerometer as well as the linear measurement range simultaneously. The optical simulation shows that the sensitivity of the proposed device is 10 times as high as that of a similar optical MEMS accelerometer with one FP cavity. In addition, the proposed optical system is insensitive to the displacements of the proof mass in orthogonal directions as a result of which cross-axis sensitivity is considerably reduced. The minimum feature size of the structure is 15 um and the optical signal is conducted completely through the optical fibers, facilitating the fabrication of the device. The simulation results are as follows: mechanical sensitivity of 190 nm/g, optical sensitivity of 8 nm/g, linear measurement of 5 g, and first resonance frequency of 1141 Hz.
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Submitted 1 February, 2023; v1 submitted 29 August, 2021;
originally announced September 2021.
