Imaging 3D Chemistry at 1 nm Resolution with Fused Multi-Modal Electron Tomography
Authors:
Jonathan Schwartz,
Zichao Wendy Di,
Yi Jiang,
Jason Manassa,
Jacob Pietryga,
Yiwen Qian,
Min Gee Cho,
Jonathan L. Rowell,
Huihuo Zheng,
Richard D. Robinson,
Junsi Gu,
Alexey Kirilin,
Steve Rozeveld,
Peter Ercius,
Jeffrey A. Fessler,
Ting Xu,
Mary Scott,
Robert Hovden
Abstract:
Measuring the three-dimensional (3D) distribution of chemistry in nanoscale matter is a longstanding challenge for metrological science. The inelastic scattering events required for 3D chemical imaging are too rare, requiring high beam exposure that destroys the specimen before an experiment completes. Even larger doses are required to achieve high resolution. Thus, chemical mapping in 3D has been…
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Measuring the three-dimensional (3D) distribution of chemistry in nanoscale matter is a longstanding challenge for metrological science. The inelastic scattering events required for 3D chemical imaging are too rare, requiring high beam exposure that destroys the specimen before an experiment completes. Even larger doses are required to achieve high resolution. Thus, chemical mapping in 3D has been unachievable except at lower resolution with the most radiation-hard materials. Here, high-resolution 3D chemical imaging is achieved near or below one nanometer resolution in a Au-Fe$_3$O$_4$ metamaterial, Co$_3$O$_4$ - Mn$_3$O$_4$ core-shell nanocrystals, and ZnS-Cu$_{0.64}$S$_{0.36}$ nanomaterial using fused multi-modal electron tomography. Multi-modal data fusion enables high-resolution chemical tomography often with 99\% less dose by linking information encoded within both elastic (HAADF) and inelastic (EDX / EELS) signals. Now sub-nanometer 3D resolution of chemistry is measurable for a broad class of geometrically and compositionally complex materials.
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Submitted 18 June, 2024; v1 submitted 24 April, 2023;
originally announced April 2023.
Imaging Atomic-Scale Chemistry from Fused Multi-Modal Electron Microscopy
Authors:
Jonathan Schwartz,
Zichao Wendy Di,
Yi Jiang,
Alyssa J. Fielitz,
Don-Hyung Ha,
Sanjaya D. Perera,
Ismail El Baggari,
Richard D. Robinson,
Jeffrey A. Fessler,
Colin Ophus,
Steve Rozeveld,
Robert Hovden
Abstract:
Efforts to map atomic-scale chemistry at low doses with minimal noise using electron microscopes are fundamentally limited by inelastic interactions. Here, fused multi-modal electron microscopy offers high signal-to-noise ratio (SNR) recovery of material chemistry at nano- and atomic- resolution by coupling correlated information encoded within both elastic scattering (high-angle annular dark fiel…
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Efforts to map atomic-scale chemistry at low doses with minimal noise using electron microscopes are fundamentally limited by inelastic interactions. Here, fused multi-modal electron microscopy offers high signal-to-noise ratio (SNR) recovery of material chemistry at nano- and atomic- resolution by coupling correlated information encoded within both elastic scattering (high-angle annular dark field (HAADF)) and inelastic spectroscopic signals (electron energy loss (EELS) or energy-dispersive x-ray (EDX)). By linking these simultaneously acquired signals, or modalities, the chemical distribution within nanomaterials can be imaged at significantly lower doses with existing detector hardware. In many cases, the dose requirements can be reduced by over one order of magnitude. This high SNR recovery of chemistry is tested against simulated and experimental atomic resolution data of heterogeneous nanomaterials.
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Submitted 5 November, 2023; v1 submitted 3 March, 2022;
originally announced March 2022.
