Showing 1–1 of 1 results for author: Hollermann, H

Stoichiometry determination of chalcogenide superlattices by means of X-ray diffraction and its limits

Authors: Henning Hollermann, Felix Rolf Lutz Lange, Stefan Jakobs, Peter Kerres, Matthias Wuttig

Abstract: In this paper we explore the potential of stoichiometry determination for chalcogenide superlattices, promising candidates for next-generation phase-change memory, via X-ray diffraction. To this end, a set of epitaxial GeTe/Sb2Te3 superlattice samples with varying layer thicknesses is sputter-deposited. Kinematical scattering theory is employed to link the average composition with the diffraction… ▽ More In this paper we explore the potential of stoichiometry determination for chalcogenide superlattices, promising candidates for next-generation phase-change memory, via X-ray diffraction. To this end, a set of epitaxial GeTe/Sb2Te3 superlattice samples with varying layer thicknesses is sputter-deposited. Kinematical scattering theory is employed to link the average composition with the diffraction features. The observed lattice constants of the superlattice reference unit cell follow Vegard's law, enabling a straight-forward and non-destructive stoichiometry determination. △ Less

Submitted 27 February, 2019; v1 submitted 8 July, 2018; originally announced July 2018.

Comments: physica status solidi (RRL) - Rapid Research Letters (2019)