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Direct-bonded diamond membranes for heterogeneous quantum and electronic technologies
Authors:
Xinghan Guo,
Mouzhe Xie,
Anchita Addhya,
Avery Linder,
Uri Zvi,
Stella Wang,
Xiaofei Yu,
Tanvi D. Deshmukh,
Yuzi Liu,
Ian N. Hammock,
Zixi Li,
Clayton T. DeVault,
Amy Butcher,
Aaron P. Esser-Kahn,
David D. Awschalom,
Nazar Delegan,
Peter C. Maurer,
F. Joseph Heremans,
Alexander A. High
Abstract:
Diamond has superlative material properties for a broad range of quantum and electronic technologies. However, heteroepitaxial growth of single crystal diamond remains limited, impeding integration and evolution of diamond-based technologies. Here, we directly bond single-crystal diamond membranes to a wide variety of materials including silicon, fused silica, sapphire, thermal oxide, and lithium…
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Diamond has superlative material properties for a broad range of quantum and electronic technologies. However, heteroepitaxial growth of single crystal diamond remains limited, impeding integration and evolution of diamond-based technologies. Here, we directly bond single-crystal diamond membranes to a wide variety of materials including silicon, fused silica, sapphire, thermal oxide, and lithium niobate. Our bonding process combines customized membrane synthesis, transfer, and dry surface functionalization, allowing for minimal contamination while providing pathways for near unity yield and scalability. We generate bonded crystalline membranes with thickness as low as 10 nm, sub-nm interfacial regions, and nanometer-scale thickness variability over 200 by 200 $μm^2$ areas. We measure spin coherence times $T_2$ for nitrogen-vacancy centers in bonded membranes of up to 623(21) $μ$s, suitable for advanced quantum applications. We demonstrate multiple methods for integrating high quality factor nanophotonic cavities with the diamond heterostructures, highlighting the platform versatility in quantum photonic applications. Furthermore, we show that our ultra-thin diamond membranes are compatible with total internal reflection fluorescence (TIRF) microscopy, which enables interfacing coherent diamond quantum sensors with living cells while rejecting unwanted background luminescence. The processes demonstrated herein provide a full toolkit to synthesize heterogeneous diamond-based hybrid systems for quantum and electronic technologies.
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Submitted 20 June, 2024; v1 submitted 7 June, 2023;
originally announced June 2023.
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The maximum refractive index of an atomic crystal $\unicode{x2013}$ from quantum optics to quantum chemistry
Authors:
Francesco Andreoli,
Bennet Windt,
Stefano Grava,
Gian Marcello Andolina,
Michael J. Gullans,
Alexander A. High,
Darrick E. Chang
Abstract:
All known optical materials have an index of refraction of order unity. Despite the tremendous implications that an ultrahigh index could have for optical technologies, little research has been done on why the refractive index of materials is universally small, and whether this observation is fundamental. Here, we investigate the index of an ordered arrangement of atoms, as a function of atomic de…
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All known optical materials have an index of refraction of order unity. Despite the tremendous implications that an ultrahigh index could have for optical technologies, little research has been done on why the refractive index of materials is universally small, and whether this observation is fundamental. Here, we investigate the index of an ordered arrangement of atoms, as a function of atomic density. At dilute densities, this problem falls into the realm of quantum optics, where atoms do not interact with one another except via the scattering of light. On the other hand, when the lattice constant becomes comparable to the Bohr radius, the electronic orbitals begin to overlap, giving rise to quantum chemistry. We present a minimal model that allows for a unifying theory of index spanning these two regimes. A key aspect is the treatment of multiple light scattering, which can be highly non-perturbative over a large density range, and which is the reason that conventional theories of the index break down. In the quantum optics regime, we show that ideal light-matter interactions can have a single-mode nature, allowing for a purely real refractive index that grows with density as $(N/V)^{1/3}$. At the onset of quantum chemistry, we show how two physical mechanisms (excited electron tunneling dynamics and the buildup of electronic density-density correlations) can open up inelastic or spatial multi-mode light scattering processes, which ultimately reduce the index back to order unity while introducing absorption. Around the onset of chemistry, our theory predicts that ultrahigh index ($n\sim 30$), low-loss materials could in principle be allowed by the laws of nature.
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Submitted 20 March, 2023;
originally announced March 2023.
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Tunable and Transferable Diamond Membranes for Integrated Quantum Technologies
Authors:
Xinghan Guo,
Nazar Delegan,
Jonathan C. Karsch,
Zixi Li,
Tianle Liu,
Robert Shreiner,
Amy Butcher,
David D. Awschalom,
F. Joseph Heremans,
Alexander A. High
Abstract:
Color centers in diamond are widely explored as qubits in quantum technologies. However, challenges remain in the effective and efficient integration of these diamond-hosted qubits in device heterostructures. Here, nanoscale-thick uniform diamond membranes are synthesized via "smart-cut" and isotopically (12C) purified overgrowth. These membranes have tunable thicknesses (demonstrated 50 nm to 250…
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Color centers in diamond are widely explored as qubits in quantum technologies. However, challenges remain in the effective and efficient integration of these diamond-hosted qubits in device heterostructures. Here, nanoscale-thick uniform diamond membranes are synthesized via "smart-cut" and isotopically (12C) purified overgrowth. These membranes have tunable thicknesses (demonstrated 50 nm to 250 nm), are deterministically transferable, have bilaterally atomically flat surfaces (Rq <= 0.3 nm), and bulk-diamond-like crystallinity. Color centers are synthesized via both implantation and in-situ overgrowth incorporation. Within 110 nm thick membranes, individual germanium-vacancy (GeV-) centers exhibit stable photoluminescence at 5.4 K and average optical transition linewidths as low as 125 MHz. The room temperature spin coherence of individual nitrogen-vacancy (NV-) centers shows Ramsey spin dephasing times (T2*) and Hahn echo times (T2) as long as 150 us and 400 us, respectively. This platform enables the straightforward integration of diamond membranes that host coherent color centers into quantum technologies.
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Submitted 23 September, 2021;
originally announced September 2021.
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High-Q Nanophotonic Resonators on Diamond Membranes using Templated Atomic Layer Deposition of TiO2
Authors:
Amy Butcher,
Xinghan Guo,
Robert Shreiner,
Nazar Delegan,
Kai Hao,
Peter J. Duda III,
David D. Awschalom,
F. Joseph Heremans,
Alexander A. High
Abstract:
Integrating solid-state quantum emitters with nanophotonic resonators is essential for efficient spin-photon interfacing and optical networking applications. While diamond color centers have proven to be excellent candidates for emerging quantum technologies, their integration with optical resonators remains challenging. Conventional approaches based on etching resonators into diamond often negati…
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Integrating solid-state quantum emitters with nanophotonic resonators is essential for efficient spin-photon interfacing and optical networking applications. While diamond color centers have proven to be excellent candidates for emerging quantum technologies, their integration with optical resonators remains challenging. Conventional approaches based on etching resonators into diamond often negatively impact color center performance and offer low device yield. Here, we developed an integrated photonics platform based on templated atomic layer deposition of TiO2 on diamond membranes. Our fabrication method yields high-performance nanophotonic devices while avoiding etching wavelength-scale features into diamond. Moreover, this technique generates highly reproducible optical resonances and can be iterated on individual diamond samples, a unique processing advantage. Our approach is suitable for a broad range of both wavelengths and substrates and can enable high-cooperativity interfacing between cavity photons and coherent defects in diamond or silicon carbide, rare earth ions, or other material systems.
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Submitted 30 May, 2020; v1 submitted 7 April, 2020;
originally announced April 2020.
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Atomically thin mirrors made of monolayer semiconductors
Authors:
Giovanni Scuri,
You Zhou,
Alexander A. High,
Dominik S. Wild,
Chi Shu,
Kristiaan De Greve,
Luis A. Jauregui,
Takashi Taniguchi,
Kenji Watanabe,
Philip Kim,
Mikhail D. Lukin,
Hongkun Park
Abstract:
Transition metal dichalcogenide monolayers are promising candidates for exploring new electronic and optical phenomena and for realizing atomically thin optoelectronic devices. They host tightly bound electron-hole pairs (excitons) that can be efficiently excited by resonant light fields. Here, we demonstrate that a single monolayer of molybdenum diselenide (MoSe2) can dramatically modify light tr…
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Transition metal dichalcogenide monolayers are promising candidates for exploring new electronic and optical phenomena and for realizing atomically thin optoelectronic devices. They host tightly bound electron-hole pairs (excitons) that can be efficiently excited by resonant light fields. Here, we demonstrate that a single monolayer of molybdenum diselenide (MoSe2) can dramatically modify light transmission near the excitonic resonance, acting as an electrically switchable mirror that reflects up to 85% of incident light at cryogenic temperatures. This high reflectance is a direct consequence of the excellent coherence properties of excitons in this atomically thin semiconductor, encapsulated by hexagonal boron nitride. Furthermore, we show that the MoSe2 monolayer exhibits power- and wavelength-dependent nonlinearities that stem from exciton-based lattice heating in the case of continuous-wave excitation and exciton-exciton interactions when fast, pulsed laser excitation is used. These observations open up new possibilities for studying quantum nonlinear optical phenomena and topological photonics, and for miniaturizing optical devices.
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Submitted 19 May, 2017;
originally announced May 2017.