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Stress-Dependent Optical Extinction in LPCVD Silicon Nitride Measured by Nanomechanical Photothermal Sensing
Authors:
Kostas Kanellopulos,
Robert G. West,
Stefan Emminger,
Paolo Martini,
Markus Sauer,
Annette Foelske,
Silvan Schmid
Abstract:
Understanding optical absorption in silicon nitride is crucial for cutting-edge technologies like photonic integrated circuits, nanomechanical photothermal infrared sensing and spectroscopy, and cavity optomechanics. Yet, the origin of its strong dependence on film deposition and fabrication process is not fully understood. This Letter leverages nanomechanical photothermal sensing to investigate o…
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Understanding optical absorption in silicon nitride is crucial for cutting-edge technologies like photonic integrated circuits, nanomechanical photothermal infrared sensing and spectroscopy, and cavity optomechanics. Yet, the origin of its strong dependence on film deposition and fabrication process is not fully understood. This Letter leverages nanomechanical photothermal sensing to investigate optical extinction $κ_{\mathrm{ext}}$ at 632.8 nm wavelength in LPCVD SiN strings across a wide range of deposition-related tensile stresses ($200-850$ MPa). Measurements reveal a reduction in $κ_{\mathrm{ext}}$ from 10$^3$ to 10$^1$ ppm with increasing stress, correlated to variations in Si/N content ratio. Within the band-fluctuations framework, this trend indicates an increase of the energy bandgap with the stress, ultimately reducing absorption. Overall, this study showcases the power and simplicity of nanomechanical photothermal sensing for low absorption measurements, offering a sensitive, scattering-free platform for material analysis in nanophotonics and nanomechanics.
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Submitted 20 June, 2024;
originally announced June 2024.
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Comparative Analysis of Nanomechanical Resonators: Sensitivity, Response Time, and Practical Considerations in Photothermal Sensing
Authors:
Kostas Kanellopulos,
Friedrich Ladinig,
Stefan Emminger,
Paolo Martini,
Robert G. West,
Silvan Schmid
Abstract:
Nanomechanical photothermal sensing has significantly advanced single-molecule/particle microscopy and spectroscopy, and infrared detection through the use of nanomechanical resonators that detect shifts in resonant frequency due to photothermal heating. However, the relationship between resonator design, photothermal sensitivity, and response time remains unclear. This paper compares three resona…
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Nanomechanical photothermal sensing has significantly advanced single-molecule/particle microscopy and spectroscopy, and infrared detection through the use of nanomechanical resonators that detect shifts in resonant frequency due to photothermal heating. However, the relationship between resonator design, photothermal sensitivity, and response time remains unclear. This paper compares three resonator types - strings, drumheads, and trampolines - to explore this relationship. Through theoretical modeling, experimental validation, and finite element method simulations, we find that strings offer the highest sensitivity (with a noise equivalent power of 280 fW/Hz$^{1/2}$ for strings made of silicon nitride), while drumheads exhibit the fastest thermal response. The study reveals that photothermal sensitivity correlates with the average temperature rise and not the peak temperature. Finally, the impact of photothermal back-action is discussed, which can be a major source of frequency instability. This work clarifies the performance differences and limits among resonator designs and guides the development of advanced nanomechanical photothermal sensors, benefiting a wide range of applications.
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Submitted 18 June, 2024; v1 submitted 5 June, 2024;
originally announced June 2024.
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Photothermal Microscopy & Spectroscopy with Nanomechanical Resonators
Authors:
Robert G. West,
Kostas Kanellopulos,
Silvan Schmid
Abstract:
In nanomechanical photothermal absorption spectroscopy and microscopy, the measured substance becomes a part of the detection system itself, inducing a nanomechanical resonance frequency shift upon thermal relaxation. Suspended, nanometer-thin ceramic or 2D material resonators are innately highly-sensitive thermal detectors of localized heat exchanges from substances on their surface or integrated…
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In nanomechanical photothermal absorption spectroscopy and microscopy, the measured substance becomes a part of the detection system itself, inducing a nanomechanical resonance frequency shift upon thermal relaxation. Suspended, nanometer-thin ceramic or 2D material resonators are innately highly-sensitive thermal detectors of localized heat exchanges from substances on their surface or integrated into the resonator itself. Consequently, the combined nanoresonator-analyte system is a self-measuring spectrometer and microscope: responding to a substances transfer of heat over the entire spectrum for which it absorbs, according to the intensity it experiences. Limited by their own thermostatistical fluctuation phenomena, nanoresonators have demonstrated sufficient sensitivity for measuring trace analyte as well as single particles and molecules with incoherent light or focused and unfocused coherent light. They are versatile in their design, support various sampling methods and hyphenation with other spectroscopic methods, and are capable in a wide range of applications including fingerprinting, separation science, and surface sciences.
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Submitted 29 June, 2023; v1 submitted 28 June, 2023;
originally announced June 2023.
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Nanomechanical Photothermal Near Infrared Spectromicroscopy of Individual Nanorods
Authors:
Kostas Kanellopulos,
Robert G. West,
Silvan Schmid
Abstract:
Understanding light-matter interaction at the nanoscale requires probing the optical properties of matter at the individual nano-absorber level. To this end, we have developed a nanomechanical photothermal sensing platform that can be used as a full spectromicroscopy tool for single molecule and single particle analysis. As a demonstration, the absorption cross-section of individual gold nanorods…
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Understanding light-matter interaction at the nanoscale requires probing the optical properties of matter at the individual nano-absorber level. To this end, we have developed a nanomechanical photothermal sensing platform that can be used as a full spectromicroscopy tool for single molecule and single particle analysis. As a demonstration, the absorption cross-section of individual gold nanorods is resolved from the spectroscopic and polarization standpoint. By exploiting the capabilities of nanomechanical photothermal spectromicroscopy, the longitudinal localized surface plasmon resonance (LSPR) in the NIR range is unravelled and quantitatively characterized. The polarization features of the transversal surface plasmon resonance (TSPR) in the VIS range are also analyzed. The measurements are compared with the finite element method (FEM), elucidating the role played by electron-surface and bulk scattering in these plasmonic nanostructures, as well as the interaction between the nano-absorber and the nanoresonator, ultimately resulting in absorption strength modulation. Finally, a comprehensive comparison is conducted, evaluating the signal-to-noise ratio of nanomechanical photothermal spectromicroscopy against other cutting-edge single molecule and particle spectroscopy techniques. This analysis highlights the remarkable potential of nanomechanical photothermal spectromicroscopy due to its exceptional sensitivity.
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Submitted 5 July, 2023; v1 submitted 9 May, 2023;
originally announced May 2023.
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Transduction of single nanomechanical pillar resonators by scattering of surface acoustic waves
Authors:
Hendrik Kähler,
Holger Arthaber,
Robert Winkler,
Robert G. West,
Ioan Ignat,
Harald Plank,
Silvan Schmid
Abstract:
One of the challenges of nanoelectromechanical systems (NEMS) is the effective transduction of the tiny resonators. Vertical structures, such as nanomechanical pillar resonators, which are exploited in a wide range of fields, such as optomechanics, acoustic metamaterials, and nanomechanical sensing, are particularly challenging to transduce. Existing electromechanical transduction methods are ill-…
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One of the challenges of nanoelectromechanical systems (NEMS) is the effective transduction of the tiny resonators. Vertical structures, such as nanomechanical pillar resonators, which are exploited in a wide range of fields, such as optomechanics, acoustic metamaterials, and nanomechanical sensing, are particularly challenging to transduce. Existing electromechanical transduction methods are ill-suited as they complicate the pillars' fabrication process, put constraints on the pillars' material, and do not enable a transduction of freestanding pillars. Here, we present an electromechanical transduction method for single nanomechanical pillar resonators based on surface acoustic waves (SAWs). We demonstrate the transduction of freestanding nanomechanical platinum-carbon pillars in the first-order bending and compression mode. Since the principle of the transduction method is based on resonant scattering of a SAW by a nanomechanical resonator, our transduction method is independent of the pillar's material and not limited to pillar-shaped geometries. It represents a general method to transduce vertical mechanical resonators with nanoscale lateral dimensions.
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Submitted 27 February, 2023; v1 submitted 17 October, 2022;
originally announced October 2022.
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Thermal radiation dominated heat transfer in nanomechanical silicon nitride drum resonators
Authors:
Markus Piller,
Pedram Sadeghi,
Robert G. West,
Niklas Luhmann,
Paolo Martini,
Ole Hansen,
Silvan Schmid
Abstract:
Nanomechanical silicon nitride (SiN) drum resonators are currently employed in various fields of applications that arise from their unprecedented frequency response to physical quantities. In the present study, we investigate the thermal transport in nanomechanical SiN drum resonators by analytical modelling, computational simulations, and experiments for a better understanding of the underlying h…
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Nanomechanical silicon nitride (SiN) drum resonators are currently employed in various fields of applications that arise from their unprecedented frequency response to physical quantities. In the present study, we investigate the thermal transport in nanomechanical SiN drum resonators by analytical modelling, computational simulations, and experiments for a better understanding of the underlying heat transfer mechanism causing the thermal frequency response. Our analysis indicates that radiative heat loss is a non-negligible heat transfer mechanism in nanomechanical SiN resonators limiting their thermal responsivity and response time. This finding is important for optimal resonator designs for thermal sensing applications as well as cavity optomechanics.
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Submitted 20 May, 2020;
originally announced May 2020.
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Ultrathin 2 nm gold as ideal impedance-matched absorber for infrared light
Authors:
Niklas Luhmann,
Dennis Høj,
Markus Piller,
Hendrik Kähler,
Miao-Hsuan Chien,
Robert G. West,
Ulrik Lund Andersen,
Silvan Schmid
Abstract:
Thermal detectors are a cornerstone of infrared (IR) and terahertz (THz) technology due to their broad spectral range. These detectors call for suitable broad spectral absorbers with minimalthermal mass. Often this is realized by plasmonic absorbers, which ensure a high absorptivity butonly for a narrow spectral band. Alternativly, a common approach is based on impedance-matching the sheet resista…
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Thermal detectors are a cornerstone of infrared (IR) and terahertz (THz) technology due to their broad spectral range. These detectors call for suitable broad spectral absorbers with minimalthermal mass. Often this is realized by plasmonic absorbers, which ensure a high absorptivity butonly for a narrow spectral band. Alternativly, a common approach is based on impedance-matching the sheet resistance of a thin metallic film to half the free-space impedance. Thereby, it is possible to achieve a wavelength-independent absorptivity of up to 50 %, depending on the dielectric properties of the underlying substrate. However, existing absorber films typicallyrequire a thickness of the order of tens of nanometers, such as titanium nitride (14 nm), whichcan significantly deteriorate the response of a thermal transducers. Here, we present the application of ultrathin gold (2 nm) on top of a 1.2 nm copper oxide seed layer as an effective IR absorber. An almost wavelength-independent and long-time stable absorptivity of 47(3) %, ranging from 2 $μ$m to 20 $μ$m, could be obtained and is further discussed. The presented gold thin-film represents analmost ideal impedance-matched IR absorber that allows a significant improvement of state-of-the-art thermal detector technology.
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Submitted 29 November, 2019;
originally announced November 2019.
