"Towards a Complete Direct Hybrid Bonding D2W Integration Flow: ..."

Emilie Bourjot et al. (2019)

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DOI: 10.1109/3DIC48104.2019.9058783

access: closed

type: Conference or Workshop Paper

metadata version: 2023-08-19

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Emilie Bourjot, Paul Stewart, Christophe Dubarry, E. Lagoutte, E. Rolland, Nicolas Bresson, G. Romano, D. Scevola, Viorel Balan, Jérôme Dechamp, Marc Zussy, Gaëlle Mauguen, Clément Castan, Loïc Sanchez, Amadine Jouve, Frank Fournel, Séverine Cheramy:
Towards a Complete Direct Hybrid Bonding D2W Integration Flow: Known-Good-Dies and Die Planarization Modules Development. 3DIC 2019: 1-5

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