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"Real-time estimation and control of photoresist properties in ..."

Xiaodong Wu et al. (2007)

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DOI: 10.1109/CCA.2007.4389313

access: closed

type: Conference or Workshop Paper

metadata version: 2020-10-25

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Xiaodong Wu, Arthur Tay, Weng Khuen Ho, Kok Kiong Tan:
Real-time estimation and control of photoresist properties in microlithography. CCA 2007: 694-699

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