"Design and control of 6-DOF high-precision scan stage with gravity canceller."

Wataru Ohnishi et al. (2014)

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DOI: 10.1109/ACC.2014.6859023

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-23

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Wataru Ohnishi, Hiroshi Fujimoto, Koichi Sakata, Kazuhiro Suzuki, Kazuaki Saiki:
Design and control of 6-DOF high-precision scan stage with gravity canceller. ACC 2014: 997-1002

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