"In-situ process control for semiconductor manufacturing."

James H. Taylor, Thomas K. Whidden, Xiaozhong Zhao (2002)

> Home

Details and statistics

DOI: 10.1109/ACC.2002.1023960

access: closed

type: Conference or Workshop Paper

metadata version: 2022-07-26

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/amcc/TaylorWZ02
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/amcc/TaylorWZ02
James H. Taylor, Thomas K. Whidden, Xiaozhong Zhao:
In-situ process control for semiconductor manufacturing. ACC 2002: 2180-2185

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.