"Model Reference Zero Vibration control of ultrahigh precision ..."

Lan Yu, Timothy N. Chang (2010)

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DOI: 10.1109/ACC.2010.5530509

access: closed

type: Conference or Workshop Paper

metadata version: 2022-06-23

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Lan Yu, Timothy N. Chang:
Model Reference Zero Vibration control of ultrahigh precision piezoelectric nanopositioner. ACC 2010: 5856-5861

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