"High-throughput electron beam direct writing of VIA layers by character ..."

Rimon Ikeno et al. (2013)

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DOI: 10.1109/ASPDAC.2013.6509605

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-26

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Rimon Ikeno, Takashi Maruyama, Tetsuya Iizuka, Satoshi Komatsu, Makoto Ikeda, Kunihiro Asada:
High-throughput electron beam direct writing of VIA layers by character projection using character sets based on one-dimensional VIA arrays with area-efficient stencil design. ASP-DAC 2013: 255-260

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