"A Novel XY-Plane Positioning Based on Point Approximation for Wafer Stage ..."

Seongjin Oh et al. (2023)

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DOI: 10.1109/BCD57833.2023.10466356

access: closed

type: Conference or Workshop Paper

metadata version: 2024-04-02

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Seongjin Oh, Tae-Yong Kim, Jongpil Jeong, Chae-Gyu Lee, Yongju Na, Se-Hyeon Ryu:
A Novel XY-Plane Positioning Based on Point Approximation for Wafer Stage Control. BCD 2023: 108-113

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