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"Modeling and Control of Macro-micro Dual-Drive High Acceleration and High ..."

Yanjie Liu, Teng Li, Lining Sun (2008)

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DOI: 10.1007/978-3-540-88518-4_30

access: closed

type: Conference or Workshop Paper

metadata version: 2017-09-16

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Yanjie Liu, Teng Li, Lining Sun:
Modeling and Control of Macro-micro Dual-Drive High Acceleration and High Precision Positioning Stage Using for IC Packaging. ICIRA (2) 2008: 269-278

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