"Micro Fluid device Using Thick Layer Piezo Actuator Prepared on Si ..."

Sukhan Lee et al. (2001)

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DOI: 10.1109/ROBOT.2001.932618

access: closed

type: Conference or Workshop Paper

metadata version: 2019-05-29

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Sukhan Lee, Jaewoo Chung, Seungmo Lim, Changseung Lee:
Micro Fluid device Using Thick Layer Piezo Actuator Prepared on Si Micro-machined Structure. ICRA 2001: 616-619

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