"MEMS comb-drive electret energy harvester charged after packaging."

Seonwoo Kim, Yuji Suzuki (2016)

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DOI: 10.1109/ICSENS.2016.7808819

access: closed

type: Conference or Workshop Paper

metadata version: 2022-12-28

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Seonwoo Kim, Yuji Suzuki:
MEMS comb-drive electret energy harvester charged after packaging. IEEE SENSORS 2016: 1-3

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