"Integration scheme for 3D NAND with nonreplacement word line and its cell ..."

Liu Jiang et al. (2021)

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DOI: 10.1109/IMW51353.2021.9439599

access: closed

type: Conference or Workshop Paper

metadata version: 2023-06-19

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  - conf/imw2/JiangKPBKFACBKK21
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Liu Jiang, Chang Seok Kang, Ashish Pal, El Mehdi Bazizi, Tomohiko Kitajima, Nancy Fung, Gabriela Alva, Amy Child, Bhaskar Bhuyan, Takehito Koshizawa, Sung-Kwan Kang, Gill Lee, David Hwang, Blessy Alexander, Buvna Ayyagari:
Integration scheme for 3D NAND with nonreplacement word line and its cell characteristics investigation. IMW 2021: 1-4

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