"Machine-Learning-Based Identification of Defect Patterns in Semiconductor ..."

Fatima Adly et al. (2014)

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DOI: 10.1109/IPDPSW.2014.54

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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Fatima Adly, Paul D. Yoo, Sami Muhaidat, Yousof Al-Hammadi:
Machine-Learning-Based Identification of Defect Patterns in Semiconductor Wafer Maps: An Overview and Proposal. IPDPS Workshops 2014: 420-429

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