"On-chip fabrication and assembly of rotational microstructures."

Masaki Ito et al. (2009)

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DOI: 10.1109/IROS.2009.5354506

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-22

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Masaki Ito, Masahiro Nakajima, Hisataka Maruyama, Toshio Fukuda:
On-chip fabrication and assembly of rotational microstructures. IROS 2009: 1849-1854

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