"On-chip integration of ultra-thin glass cantilever for physical property ..."

Tao Tang et al. (2020)

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DOI: 10.1109/IROS45743.2020.9341336

access: closed

type: Conference or Workshop Paper

metadata version: 2023-06-26

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Tao Tang, Yansheng Hao, Yigang Shen, Yo Tanaka, Ming Huang, Yoichiroh Hosokawa, Ming Li, Yaxiaer Yalikun:
On-chip integration of ultra-thin glass cantilever for physical property measurement activated by femtosecond laser impulse. IROS 2020: 2780-2785

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