"Optical Measurement of the Dynamic Response of an Electrothermal ..."

Hao Chen et al. (2021)

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DOI: 10.1109/NEMS51815.2021.9451369

access: closed

type: Conference or Workshop Paper

metadata version: 2021-06-28

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Hao Chen, Xinjie Wang, Zhanwen Xi, Jiong Wang, Weirong Nie:
Optical Measurement of the Dynamic Response of an Electrothermal Microactuator. NEMS 2021: 1358-1361

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