"Advances of CMOS-MEMS technology for resonator applications."

Sheng-Shian Li (2013)

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DOI: 10.1109/NEMS.2013.6559783

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-21

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Sheng-Shian Li:
Advances of CMOS-MEMS technology for resonator applications. NEMS 2013: 520-523

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